JP5377839B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP5377839B2 JP5377839B2 JP2007194010A JP2007194010A JP5377839B2 JP 5377839 B2 JP5377839 B2 JP 5377839B2 JP 2007194010 A JP2007194010 A JP 2007194010A JP 2007194010 A JP2007194010 A JP 2007194010A JP 5377839 B2 JP5377839 B2 JP 5377839B2
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- Prior art keywords
- layer
- conductive layer
- memory element
- semiconductor
- metal oxide
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- 239000000463 material Substances 0.000 claims description 27
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| JP2008053701A JP2008053701A (ja) | 2008-03-06 |
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