JP5366616B2 - 撮像素子及びその製造方法 - Google Patents
撮像素子及びその製造方法 Download PDFInfo
- Publication number
- JP5366616B2 JP5366616B2 JP2009090485A JP2009090485A JP5366616B2 JP 5366616 B2 JP5366616 B2 JP 5366616B2 JP 2009090485 A JP2009090485 A JP 2009090485A JP 2009090485 A JP2009090485 A JP 2009090485A JP 5366616 B2 JP5366616 B2 JP 5366616B2
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- pixel
- optical waveguide
- photoelectric conversion
- light
- insulating film
- Prior art date
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- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 230000003287 optical effect Effects 0.000 claims description 54
- 239000010410 layer Substances 0.000 claims description 52
- 238000006243 chemical reaction Methods 0.000 claims description 30
- 239000000463 material Substances 0.000 claims description 29
- 239000011229 interlayer Substances 0.000 claims description 25
- 238000003384 imaging method Methods 0.000 claims description 15
- 238000000034 method Methods 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000003071 parasitic effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000005380 borophosphosilicate glass Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14685—Process for coatings or optical elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14623—Optical shielding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
- H01L27/14629—Reflectors
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Description
Claims (2)
- 第1の光電変換素子と、該第1の光電変換素子の上に位置する第1の配線層と、前記第1の配線層の間に形成された第1の層間絶縁膜と、該第1の層間絶縁膜に第1の材料で形成された第1の光導波路とを有する光電変換画素と、
第2の光電変換素子と、該第2の光電変換素子の上に位置する第2の配線層と、前記第2の配線層の間に形成された第2の層間絶縁膜と、該第2の層間絶縁膜に前記第1の材料の誘電率よりも誘電率が低い第2の材料で形成された第2の光導波路と、該第2の光導波路の上に形成され、前記第2の光電変換素子および前記第2の光導波路を遮光する遮光層とを有する遮光画素と、
を備えることを特徴とする撮像素子。 - 光電変換素子と、複数の配線層と、前記複数の配線層の間にある層間絶縁膜に形成した光導波路と、前記複数の配線層の上に形成された遮光層とを有し、前記遮光層により前記光電変換素子が遮光される遮光画素と、前記遮光層により前記光電変換素子が遮光されない光電変換画素を備えた撮像素子を製造する方法であって、
前記複数の配線層の間に前記層間絶縁膜を形成する第1の工程と、
前記第1の工程の後に、前記遮光画素の前記層間絶縁膜に前記光導波路を形成する第2の工程と、
前記第2の工程の後に、前記光電変換画素の前記層間絶縁膜に前記光導波路を形成する第3の工程と、
前記第3の工程の後に、前記遮光画素および前記光電変換画素に前記遮光層を形成する第4の工程とを有し、
前記光電変換画素の光導波路は第1の材料で形成され、前記遮光画素の光導波路は前記第1の材料の誘電率よりも誘電率が低い第2の材料で形成されることを特徴とする撮像素子の製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009090485A JP5366616B2 (ja) | 2009-04-02 | 2009-04-02 | 撮像素子及びその製造方法 |
PCT/JP2010/054468 WO2010113634A1 (en) | 2009-04-02 | 2010-03-10 | Image sensor and manufacturing method thereof |
US13/145,032 US8921966B2 (en) | 2009-04-02 | 2010-03-10 | Image sensor and manufacturing method thereof |
CN201080015737.0A CN102388456B (zh) | 2009-04-02 | 2010-03-10 | 图像传感器及其制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009090485A JP5366616B2 (ja) | 2009-04-02 | 2009-04-02 | 撮像素子及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010245198A JP2010245198A (ja) | 2010-10-28 |
JP5366616B2 true JP5366616B2 (ja) | 2013-12-11 |
Family
ID=42827934
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009090485A Expired - Fee Related JP5366616B2 (ja) | 2009-04-02 | 2009-04-02 | 撮像素子及びその製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8921966B2 (ja) |
JP (1) | JP5366616B2 (ja) |
CN (1) | CN102388456B (ja) |
WO (1) | WO2010113634A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5783741B2 (ja) * | 2011-02-09 | 2015-09-24 | キヤノン株式会社 | 固体撮像装置、及び固体撮像装置の製造方法 |
JP5814626B2 (ja) * | 2011-05-27 | 2015-11-17 | キヤノン株式会社 | 光電変換装置及び光電変換装置の製造方法 |
JP6308717B2 (ja) * | 2012-10-16 | 2018-04-11 | キヤノン株式会社 | 固体撮像装置、固体撮像装置の製造方法、および撮像システム |
US9252183B2 (en) | 2013-01-16 | 2016-02-02 | Canon Kabushiki Kaisha | Solid state image pickup apparatus and method for manufacturing the same |
WO2014205538A1 (en) * | 2013-06-28 | 2014-12-31 | Teledyne Dalsa, Inc. | Method and system for assembly of radiological imaging sensor |
FR3075463B1 (fr) | 2017-12-19 | 2019-12-20 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Capteur d'image, permettant d'obtenir une information relative a la phase d'une onde lumineuse. |
TWI672806B (zh) * | 2018-06-22 | 2019-09-21 | 晶相光電股份有限公司 | 全域快門互補式金屬氧化物半導體影像感測器及其形成方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0670508B2 (ja) | 1990-07-13 | 1994-09-07 | 千代田化工建設株式会社 | 氷蓄熱槽 |
EP1107316A3 (en) | 1999-12-02 | 2004-05-19 | Nikon Corporation | Solid-state image sensor, production method of the same and digital camera |
JP2005175930A (ja) | 2003-12-11 | 2005-06-30 | Canon Inc | 撮像装置及びその信号処理方法と撮像システム |
JP2006128383A (ja) * | 2004-10-28 | 2006-05-18 | Canon Inc | 固体撮像素子及びその製造方法 |
JP2007141873A (ja) * | 2005-11-14 | 2007-06-07 | Sony Corp | 固体撮像素子、撮像装置、及び固体撮像素子の製造方法 |
JP4725614B2 (ja) * | 2008-01-24 | 2011-07-13 | ソニー株式会社 | 固体撮像装置 |
JP5298617B2 (ja) * | 2008-04-24 | 2013-09-25 | ソニー株式会社 | 固体撮像装置とその製造方法、及び電子機器 |
-
2009
- 2009-04-02 JP JP2009090485A patent/JP5366616B2/ja not_active Expired - Fee Related
-
2010
- 2010-03-10 US US13/145,032 patent/US8921966B2/en not_active Expired - Fee Related
- 2010-03-10 WO PCT/JP2010/054468 patent/WO2010113634A1/en active Application Filing
- 2010-03-10 CN CN201080015737.0A patent/CN102388456B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN102388456B (zh) | 2014-04-23 |
JP2010245198A (ja) | 2010-10-28 |
US8921966B2 (en) | 2014-12-30 |
CN102388456A (zh) | 2012-03-21 |
WO2010113634A1 (en) | 2010-10-07 |
US20120012964A1 (en) | 2012-01-19 |
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