JP5364957B2 - 微量水分発生装置および標準ガス生成装置 - Google Patents
微量水分発生装置および標準ガス生成装置 Download PDFInfo
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- JP5364957B2 JP5364957B2 JP2009192285A JP2009192285A JP5364957B2 JP 5364957 B2 JP5364957 B2 JP 5364957B2 JP 2009192285 A JP2009192285 A JP 2009192285A JP 2009192285 A JP2009192285 A JP 2009192285A JP 5364957 B2 JP5364957 B2 JP 5364957B2
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- 238000011144 upstream manufacturing Methods 0.000 claims abstract description 30
- 238000009792 diffusion process Methods 0.000 claims abstract description 24
- 230000008859 change Effects 0.000 claims description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 17
- 238000007865 diluting Methods 0.000 claims description 11
- 230000004043 responsiveness Effects 0.000 abstract description 6
- 230000000087 stabilizing effect Effects 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 85
- 238000000034 method Methods 0.000 description 14
- 238000010790 dilution Methods 0.000 description 6
- 239000012895 dilution Substances 0.000 description 6
- 238000001035 drying Methods 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 208000031481 Pathologic Constriction Diseases 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 208000037804 stenosis Diseases 0.000 description 3
- 230000036262 stenosis Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000000180 cavity ring-down spectroscopy Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 238000004847 absorption spectroscopy Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010902 straw Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
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Description
31 微量水分発生装置
32 希釈装置としての多段式希釈装置
41 微量水分発生槽
42 内部空間としてのチャンバ
43 拡散管セル
44 制御手段としての圧力制御器
47 狭窄素子
Claims (2)
- 水分を除去された乾燥ガスの供給を受ける温度制御された内部空間を有するとともにこの内部空間内に収納されて微量水分を発生させる拡散管セルを有する微量水分発生槽と、
上記微量水分発生槽の入口側に接続されて微量水分発生槽の内部空間の圧力を制御する制御手段と、
上記微量水分発生槽の出口側に接続されて下流圧/上流圧の比を0.53以下にする狭窄素子とを具備し、
上記狭窄素子は、下流圧/上流圧の比を0.53以下にするように、上記制御手段により上記微量水分発生槽の内部空間の圧力を一定に制御することで、上記微量水分発生槽の内部空間の圧力と流速を一定に制御し、この狭窄素子より下流側の圧力変化または流量変化がこの狭窄素子より上流側の微量水分発生槽の内部空間には伝わらないようにする機能を備えた
ことを特徴とする微量水分発生装置。 - 請求項1記載の微量水分発生装置と、
この微量水分発生装置で得られた微量水分を所定流量の乾燥ガスで希釈する操作を繰返して標準ガスを生成する希釈装置と
を具備したことを特徴とする標準ガス生成装置。
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JP2009192285A JP5364957B2 (ja) | 2009-08-21 | 2009-08-21 | 微量水分発生装置および標準ガス生成装置 |
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JP2009192285A JP5364957B2 (ja) | 2009-08-21 | 2009-08-21 | 微量水分発生装置および標準ガス生成装置 |
Publications (2)
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JP2011043435A JP2011043435A (ja) | 2011-03-03 |
JP5364957B2 true JP5364957B2 (ja) | 2013-12-11 |
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JP2009192285A Active JP5364957B2 (ja) | 2009-08-21 | 2009-08-21 | 微量水分発生装置および標準ガス生成装置 |
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JP (1) | JP5364957B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9091206B2 (en) * | 2011-09-14 | 2015-07-28 | General Electric Company | Systems and methods for inlet fogging control |
CN107607676B (zh) * | 2017-09-07 | 2020-05-12 | 中国计量科学研究院 | 气体中痕量水分标准发生系统 |
CN114184446B (zh) * | 2021-12-21 | 2022-11-08 | 中国计量科学研究院 | 一种可在线称量的挥发性有机气体标准物质制备系统 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AT300423B (de) * | 1970-05-22 | 1972-07-25 | List Hans | Gasmischeinrichtung |
JPS60143738A (ja) * | 1983-12-29 | 1985-07-30 | Shimadzu Corp | 標準水分含有ガス発生装置 |
JPH0481650A (ja) * | 1990-07-25 | 1992-03-16 | Hitachi Ltd | 標準ガス調製装置 |
FR2667397B1 (fr) * | 1990-10-02 | 1992-10-30 | Air Liquide | Procede et dispositif de fourniture de gaz a un analyseur a tres haute sensibilite. |
CA2062059A1 (en) * | 1991-03-01 | 1992-09-02 | James J. F. Mcandrew | Critical orifice dilution apparatus and method |
JPH06117972A (ja) * | 1992-10-08 | 1994-04-28 | Hitachi Ltd | 標準ガス調製方法および装置 |
JPH06249765A (ja) * | 1993-02-24 | 1994-09-09 | Hitachi Ltd | 標準ガス発生器 |
US6200819B1 (en) * | 1995-09-29 | 2001-03-13 | Horiba Instruments, Inc. | Method and apparatus for providing diluent gas to exhaust emission analyzer |
JP3670375B2 (ja) * | 1995-12-19 | 2005-07-13 | 株式会社日本エイピーアイ | 標準ガス希釈装置及び低濃度標準ガス発生装置 |
US5846831A (en) * | 1997-04-01 | 1998-12-08 | Horiba Instuments, Inc. | Methods and systems for controlling flow of a diluted sample and determining pollutants based on water content in engine exhaust emissions |
JP2003035635A (ja) * | 2001-07-19 | 2003-02-07 | Fujitsu Ltd | ガス調製管及びガス調製装置 |
JP4452801B2 (ja) * | 2004-11-18 | 2010-04-21 | 独立行政法人産業技術総合研究所 | ガスサンプリング方法及び装置 |
GB2446409B (en) * | 2007-02-06 | 2011-05-04 | Secretary Trade Ind Brit | Fluid mixtures |
FR2938916B1 (fr) * | 2008-11-24 | 2012-10-19 | Ap2E | Dispositif d'echantillonnage de gaz. |
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- 2009-08-21 JP JP2009192285A patent/JP5364957B2/ja active Active
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