JP5351140B2 - 磁気トンネル接合デバイスの製造方法 - Google Patents
磁気トンネル接合デバイスの製造方法 Download PDFInfo
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- 230000005291 magnetic effect Effects 0.000 title claims description 30
- 238000004519 manufacturing process Methods 0.000 title claims description 21
- 230000003647 oxidation Effects 0.000 claims description 92
- 238000007254 oxidation reaction Methods 0.000 claims description 92
- 230000004888 barrier function Effects 0.000 claims description 87
- 229910052751 metal Inorganic materials 0.000 claims description 76
- 239000002184 metal Substances 0.000 claims description 76
- 229910052760 oxygen Inorganic materials 0.000 claims description 71
- 239000001301 oxygen Substances 0.000 claims description 71
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 68
- 230000005294 ferromagnetic effect Effects 0.000 claims description 47
- 238000000034 method Methods 0.000 claims description 45
- 238000000151 deposition Methods 0.000 claims description 41
- 239000004094 surface-active agent Substances 0.000 claims description 35
- 238000000137 annealing Methods 0.000 claims description 14
- 238000004544 sputter deposition Methods 0.000 claims description 12
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 8
- 239000007789 gas Substances 0.000 claims description 6
- 230000001590 oxidative effect Effects 0.000 claims description 3
- 229910044991 metal oxide Inorganic materials 0.000 claims 3
- 150000004706 metal oxides Chemical class 0.000 claims 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims 1
- 239000000395 magnesium oxide Substances 0.000 claims 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims 1
- 239000010410 layer Substances 0.000 description 174
- 230000008021 deposition Effects 0.000 description 23
- 229910019236 CoFeB Inorganic materials 0.000 description 17
- 230000008569 process Effects 0.000 description 13
- 239000000758 substrate Substances 0.000 description 13
- 239000013078 crystal Substances 0.000 description 12
- 230000005684 electric field Effects 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 11
- 239000000463 material Substances 0.000 description 9
- 239000002245 particle Substances 0.000 description 9
- 238000012545 processing Methods 0.000 description 8
- 238000001552 radio frequency sputter deposition Methods 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 238000010301 surface-oxidation reaction Methods 0.000 description 6
- 238000012546 transfer Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 229910021645 metal ion Inorganic materials 0.000 description 5
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000002425 crystallisation Methods 0.000 description 4
- 230000008025 crystallization Effects 0.000 description 4
- 229910001882 dioxygen Inorganic materials 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 229910003321 CoFe Inorganic materials 0.000 description 3
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000005415 magnetization Effects 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 230000005641 tunneling Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000005290 antiferromagnetic effect Effects 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 229910052735 hafnium Inorganic materials 0.000 description 2
- 238000002173 high-resolution transmission electron microscopy Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical group [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 239000002885 antiferromagnetic material Substances 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000005300 metallic glass Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- -1 oxygen ion Chemical class 0.000 description 1
- 102000045222 parkin Human genes 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000012916 structural analysis Methods 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
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- H01L21/0223—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate
- H01L21/02244—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of a metallic layer
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- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
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- H01F41/30—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE]
- H01F41/302—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE] for applying spin-exchange-coupled multilayers, e.g. nanostructured superlattices
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- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
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- H01L21/02175—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal
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- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
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- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
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- H01L21/02356—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment to change the morphology of the insulating layer, e.g. transformation of an amorphous layer into a crystalline layer
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- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/314—Inorganic layers
- H01L21/316—Inorganic layers composed of oxides or glassy oxides or oxide based glass
- H01L21/3165—Inorganic layers composed of oxides or glassy oxides or oxide based glass formed by oxidation
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- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3268—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn
- H01F10/3272—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn by use of anti-parallel coupled [APC] ferromagnetic layers, e.g. artificial ferrimagnets [AFI], artificial [AAF] or synthetic [SAF] anti-ferromagnets
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Description
当初、高TMR値は、高いスピン分極の強磁性電極層と共に、アモルファスのAlOXトンネルバリアによって実現された。この構成で実現した、室温での最も高いTMR値は約70%である。その後、理論計算によって、NaCl構造の単結晶MgOのトンネルバリアによるスピンフィルター効果が提案され(Butlerら,Phys. Rev.,B63,(2001),p054416)、室温で6000%にもなる高いTMR値が実現できると予測された。
図1に、トンネル抵抗(TMR)センサ又は記憶素子の典型的な堆積構造を示す。多くのMTJは、強磁性のピニング層110、合成反強磁性ピンド層120、トンネルバリア130、及び、強磁性フリー層140を含んで構成される。図1に示す堆積構造では、合成反強磁性ピンド層120は、強磁性ピンド層121、非磁性スペーサ122及び強磁性リファレンス層123を含んで形成される。
第2実施形態では、極薄金属Mg層の挿入、酸素サーフェクタント層の形成、低RF電力でのラジカル酸化、及び、金属Mgキャップ層の堆積によりトンネルバリアを形成する、MTJのトンネルバリアの形成方法である。
Claims (9)
- 第1金属層を堆積するステップと、
酸素を元素として含むガスの非プラズマ雰囲気であって、3.9×10−3Pa・sec以上2.6×10−2Pa・sec以下の前記ガス雰囲気中に、前記第1金属層を置くことで、前記第1金属層の一部に酸素が吸着した酸素サーフェクタント層を形成する酸素サーフェクタント層形成ステップと、
前記酸素サーフェクタント層上に第2金属層を堆積するステップと、
前記第1及び第2金属層を酸化することで、金属酸化物層を形成する酸化ステップと、
を有するバリア層形成ステップにより、トンネルバリア層を形成することを特徴とする磁気トンネル接合デバイスの製造方法。 - 前記バリア層形成ステップは、さらに、前記金属酸化物層より上側にキャップ金属層を堆積するステップを有することを特徴とする請求項1に記載の磁気トンネル接合デバイスの製造方法。
- 前記キャップ金属層は、2オングストローム以上5オングストローム以下の平均厚さに形成されることを特徴とする請求項2に記載の磁気トンネル接合デバイスの製造方法。
- 前記第1金属層は、平均厚さが1原子層以上3原子層以下の厚さに形成されることを特徴とする請求項1に記載の磁気トンネル接合デバイスの製造方法。
- 前記第2金属層は、5オングストローム以上15オングストローム以下の平均厚さに形成されることを特徴とする請求項1に記載の磁気トンネル接合デバイスの製造方法。
- 前記酸化ステップは、ラジカル酸化、プラズマ酸化、オゾン酸化及び自然酸化による処理を含むことを特徴とする請求項1に記載の磁気トンネル接合デバイスの製造方法。
- 前記金属酸化物層は、酸化マグネシウムを含む層であることを特徴とする請求項1に記載の磁気トンネル接合デバイスの製造方法。
- 前記第1又は第2金属層は、金属ターゲットを用いたDC−スパッタリングにより形成することを特徴とする請求項1に記載の磁気トンネル接合デバイスの製造方法。
- 前記バリア層形成ステップは、アモルファスに形成した強磁性層上に、前記トンネルバリア層を形成し、
前記トンネルバリア層を結晶化する第1アニーリングステップと、前記第1アニーリングステップよりも高い温度で、前記強磁性層を結晶化する第2アニーリングステップと、を有することを特徴とする請求項1に記載の磁気トンネル接合デバイスの製造方法。
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PCT/JP2009/053966 WO2009110469A1 (ja) | 2008-03-03 | 2009-03-03 | 磁気トンネル接合デバイスの製造方法及び磁気トンネル接合デバイスの製造装置 |
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US9281168B2 (en) * | 2014-06-06 | 2016-03-08 | Everspin Technologies, Inc. | Reducing switching variation in magnetoresistive devices |
US9559296B2 (en) | 2014-07-03 | 2017-01-31 | Samsung Electronics Co., Ltd. | Method for providing a perpendicular magnetic anisotropy magnetic junction usable in spin transfer torque magnetic devices using a sacrificial insertion layer |
US9799382B2 (en) | 2014-09-21 | 2017-10-24 | Samsung Electronics Co., Ltd. | Method for providing a magnetic junction on a substrate and usable in a magnetic device |
CN106129245B (zh) * | 2016-07-11 | 2019-06-28 | 北京航空航天大学 | 基于铁磁绝缘体的磁隧道结 |
US10347824B2 (en) * | 2017-06-02 | 2019-07-09 | Sandisk Technologies Llc | Composite free layer for magnetoresistive random access memory |
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