JP5347546B2 - 振動片、振動片の製造方法および振動子 - Google Patents
振動片、振動片の製造方法および振動子 Download PDFInfo
- Publication number
- JP5347546B2 JP5347546B2 JP2009029885A JP2009029885A JP5347546B2 JP 5347546 B2 JP5347546 B2 JP 5347546B2 JP 2009029885 A JP2009029885 A JP 2009029885A JP 2009029885 A JP2009029885 A JP 2009029885A JP 5347546 B2 JP5347546 B2 JP 5347546B2
- Authority
- JP
- Japan
- Prior art keywords
- vibrating
- resonator element
- film
- piezoelectric
- vibrating arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 37
- 238000005530 etching Methods 0.000 claims description 11
- 239000010408 film Substances 0.000 description 143
- 230000015572 biosynthetic process Effects 0.000 description 23
- 238000000034 method Methods 0.000 description 18
- 239000000758 substrate Substances 0.000 description 18
- 239000000919 ceramic Substances 0.000 description 13
- 239000010409 thin film Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 230000007797 corrosion Effects 0.000 description 5
- 238000005260 corrosion Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000000059 patterning Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- 239000003566 sealing material Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009029885A JP5347546B2 (ja) | 2009-02-12 | 2009-02-12 | 振動片、振動片の製造方法および振動子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009029885A JP5347546B2 (ja) | 2009-02-12 | 2009-02-12 | 振動片、振動片の製造方法および振動子 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010187196A JP2010187196A (ja) | 2010-08-26 |
| JP2010187196A5 JP2010187196A5 (enrdf_load_stackoverflow) | 2012-03-08 |
| JP5347546B2 true JP5347546B2 (ja) | 2013-11-20 |
Family
ID=42767578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009029885A Expired - Fee Related JP5347546B2 (ja) | 2009-02-12 | 2009-02-12 | 振動片、振動片の製造方法および振動子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5347546B2 (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5369741B2 (ja) * | 2009-02-12 | 2013-12-18 | セイコーエプソン株式会社 | 振動片および振動子 |
| US8581669B2 (en) | 2011-02-02 | 2013-11-12 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, and electronic apparatus |
| JP5685962B2 (ja) | 2011-02-02 | 2015-03-18 | セイコーエプソン株式会社 | 振動片、振動子、発振器及び電子機器 |
| JP6482169B2 (ja) | 2013-07-19 | 2019-03-13 | セイコーエプソン株式会社 | 振動片、振動子、発振器、電子機器及び移動体 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08178672A (ja) * | 1994-12-27 | 1996-07-12 | Canon Inc | 振動ジャイロ |
| JPH09166442A (ja) * | 1995-12-15 | 1997-06-24 | Japan Aviation Electron Ind Ltd | 振動ジャイロ |
| JPH10213440A (ja) * | 1997-01-29 | 1998-08-11 | Japan Aviation Electron Ind Ltd | 振動ジャイロの製造方法及びその方法により製造された振動ジャイロ |
| JP2000055668A (ja) * | 1998-08-06 | 2000-02-25 | Hitachi Ltd | 角速度検出センサ |
| JP5023734B2 (ja) * | 2007-02-21 | 2012-09-12 | セイコーエプソン株式会社 | 圧電振動片の製造方法及び圧電振動素子 |
| JP5067033B2 (ja) * | 2007-06-20 | 2012-11-07 | セイコーエプソン株式会社 | 音叉型振動子、発振器 |
-
2009
- 2009-02-12 JP JP2009029885A patent/JP5347546B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2010187196A (ja) | 2010-08-26 |
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