JP5346421B2 - 試料分析システムの光学装置及び試料位置の検出方法 - Google Patents

試料分析システムの光学装置及び試料位置の検出方法 Download PDF

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JP5346421B2
JP5346421B2 JP2000592621A JP2000592621A JP5346421B2 JP 5346421 B2 JP5346421 B2 JP 5346421B2 JP 2000592621 A JP2000592621 A JP 2000592621A JP 2000592621 A JP2000592621 A JP 2000592621A JP 5346421 B2 JP5346421 B2 JP 5346421B2
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sample
mirror
scintillator
video microscope
centering element
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Japanese (ja)
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JP2002534675A (ja
JP2002534675A5 (enExample
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シプリアニ，フローレント
カスターニャ，ジーン，チャールズ
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Europaisches Laboratorium fuer Molekularbiologie EMBL
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Europaisches Laboratorium fuer Molekularbiologie EMBL
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
    • G01N23/20016—Goniometers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Plasma & Fusion (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2000592621A 1999-01-07 2000-01-07 試料分析システムの光学装置及び試料位置の検出方法 Expired - Lifetime JP5346421B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19900346A DE19900346A1 (de) 1999-01-07 1999-01-07 Präzisions-Probendrehvorrichtung
DE19900346.7 1999-01-07
PCT/EP2000/000088 WO2000040952A2 (de) 1999-01-07 2000-01-07 Präzisions-probendrehvorrichtung

Publications (3)

Publication Number Publication Date
JP2002534675A JP2002534675A (ja) 2002-10-15
JP2002534675A5 JP2002534675A5 (enExample) 2007-03-15
JP5346421B2 true JP5346421B2 (ja) 2013-11-20

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JP2000592621A Expired - Lifetime JP5346421B2 (ja) 1999-01-07 2000-01-07 試料分析システムの光学装置及び試料位置の検出方法

Country Status (10)

Country Link
US (2) US6621085B1 (enExample)
EP (2) EP1464950A3 (enExample)
JP (1) JP5346421B2 (enExample)
AT (1) ATE279721T1 (enExample)
AU (1) AU2106500A (enExample)
DE (2) DE19900346A1 (enExample)
DK (1) DK1144988T3 (enExample)
ES (1) ES2225079T3 (enExample)
PT (1) PT1144988E (enExample)
WO (1) WO2000040952A2 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19900346A1 (de) * 1999-01-07 2000-07-13 Europ Lab Molekularbiolog Präzisions-Probendrehvorrichtung
US6404849B1 (en) * 1999-08-11 2002-06-11 Abbott Laboratories Automated sample handling for X-ray crystallography
GB0222334D0 (en) * 2001-10-04 2002-10-30 X Ray Res Gmbh Automatic adjusting method for a goniometer and associated device
WO2003050598A2 (en) * 2001-12-12 2003-06-19 The Regents Of The University Of California Integrated crystal mounting and alignment system for high-throughput biological crystallography
DE10336110B4 (de) * 2003-08-06 2008-01-03 Proteros Biostructures Gmbh Vorrichtung und Verfahren zum Behandeln eines Proteinkristalls
JP5096747B2 (ja) * 2006-03-02 2012-12-12 株式会社神戸製鋼所 ビーム検出部材およびそれを用いたビーム検出器
DE102009018570B4 (de) * 2009-04-24 2018-12-20 Carl Zeiss Industrielle Messtechnik Gmbh Computertomograph mit einer Werkstückauflage zur Lagerung eines Werkstückes
JP6108674B2 (ja) * 2012-03-16 2017-04-05 株式会社日立ハイテクサイエンス 荷電粒子ビーム装置及び試料搬送装置
US9613728B2 (en) * 2013-03-15 2017-04-04 Proto Manufacturing Ltd. X-ray diffraction apparatus and method
DE102015118017B4 (de) * 2015-10-22 2017-06-08 Gsi Helmholtzzentrum Für Schwerionenforschung Gmbh Drehmodul für eine Beschleunigeranlage
NL2026054B1 (en) * 2020-07-13 2022-03-15 Delmic Ip B V Method and apparatus for micromachining a sample using a Focused Ion Beam
DE102020122517B4 (de) * 2020-08-28 2022-06-09 Helmholtz-Zentrum Berlin für Materialien und Energie Gesellschaft mit beschränkter Haftung Vorrichtung zur Rotation einer Probe um zwei orthogonale Achsen
JP7559621B2 (ja) * 2021-03-03 2024-10-02 株式会社島津製作所 Ｘ線分析装置およびｘ線分析方法
CN113877699B (zh) * 2021-09-28 2024-01-23 上海金自天正信息技术有限公司 自动破碎装置

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH595945A5 (enExample) * 1975-06-06 1978-02-28 Robert Habib
CA1257714A (en) * 1985-11-12 1989-07-18 Michael Goldowsky Goniometer
DE3546095A1 (de) * 1985-12-24 1987-06-25 Zeiss Carl Fa Goniometertisch
US4821303A (en) * 1986-12-05 1989-04-11 The Dow Chemical Company Combined thermal analyzer and x-ray diffractometer
JP2533169B2 (ja) * 1988-07-14 1996-09-11 株式会社東芝 Ｘ線回折装置
JPH0235343A (ja) * 1988-07-26 1990-02-05 Rigaku Corp 微小領域ｘ線回折装置及びその試料セッティング方法
JP2857406B2 (ja) * 1989-03-10 1999-02-17 住友重機械工業株式会社 荷電粒子ビームモニタ
JPH02248899A (ja) * 1989-03-22 1990-10-04 Nippon Steel Corp Ｘ線の拡大・単色化装置及びこの装置を利用したｘ線ｃｔ装置
JPH06100677B2 (ja) * 1989-05-26 1994-12-12 株式会社島津製作所 Ｘ線回折装置
JPH0390845A (ja) * 1989-09-01 1991-04-16 Hitachi Ltd 表面分析方法およびその装置
JPH03216537A (ja) * 1990-01-22 1991-09-24 Rigaku Corp 中性子回折装置のダイレクトビームストッパ位置調節装置
US5434901A (en) * 1992-12-07 1995-07-18 Olympus Optical Co., Ltd. Soft X-ray microscope
JPH0738989U (ja) * 1993-12-22 1995-07-14 アロカ株式会社 放射線ビーム位置決め装置
US6091796A (en) * 1994-11-23 2000-07-18 Thermotrex Corporation Scintillator based microscope
JP3468623B2 (ja) * 1995-08-08 2003-11-17 理学電機株式会社 Ｘ線回折装置の光学系切換装置
US5786600A (en) * 1995-12-19 1998-07-28 Eastman Kodak Company (Barium hafnate:Ti, Ce, Pb) phosphors phosphor screens and phosphor preparation methods
JP3263920B2 (ja) * 1996-02-01 2002-03-11 日本電子株式会社 電子顕微鏡用試料作成装置および方法
US5912939A (en) * 1997-02-07 1999-06-15 Hirsch; Gregory Soft x-ray microfluoroscope
DE19726884C1 (de) * 1997-06-24 1998-10-15 Fraunhofer Ges Forschung Fiberoptische Röntgenkamera
US5898179A (en) * 1997-09-10 1999-04-27 Orion Equipment, Inc. Method and apparatus for controlling a workpiece in a vacuum chamber
JPH11248651A (ja) * 1998-03-04 1999-09-17 Canon Inc 微小領域ｘ線回折装置
US6269144B1 (en) * 1998-03-04 2001-07-31 William P. Dube Method and apparatus for diffraction measurement using a scanning x-ray source
DE19900346A1 (de) * 1999-01-07 2000-07-13 Europ Lab Molekularbiolog Präzisions-Probendrehvorrichtung
US6567497B2 (en) * 2001-04-20 2003-05-20 Lockheed Martin Corporation Method and apparatus for inspecting a structure using X-rays

Also Published As

Publication number Publication date
US6927399B2 (en) 2005-08-09
EP1144988B1 (de) 2004-10-13
DE19900346A1 (de) 2000-07-13
EP1144988A3 (de) 2002-09-11
WO2000040952A2 (de) 2000-07-13
EP1464950A3 (de) 2006-10-18
ES2225079T3 (es) 2005-03-16
DK1144988T3 (da) 2005-01-24
JP2002534675A (ja) 2002-10-15
WO2000040952A3 (de) 2001-10-18
AU2106500A (en) 2000-07-24
EP1144988A2 (de) 2001-10-17
PT1144988E (pt) 2005-02-28
DE50008227D1 (de) 2004-11-18
US6621085B1 (en) 2003-09-16
EP1464950A2 (de) 2004-10-06
US20050098737A1 (en) 2005-05-12
ATE279721T1 (de) 2004-10-15

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