JP5322384B2 - Electrical multilayer components and layer stacks - Google Patents

Electrical multilayer components and layer stacks Download PDF

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JP5322384B2
JP5322384B2 JP2006501507A JP2006501507A JP5322384B2 JP 5322384 B2 JP5322384 B2 JP 5322384B2 JP 2006501507 A JP2006501507 A JP 2006501507A JP 2006501507 A JP2006501507 A JP 2006501507A JP 5322384 B2 JP5322384 B2 JP 5322384B2
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JP2006518934A (en
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ラゴスニッヒ ハインツ
ラゴスニッヒ ジグリット
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TDK Electronics AG
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/508—Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers

Abstract

A multilayer electrical component includes a plurality of ceramic layers disposed along an axis, a plurality of electrode layers disposed between the plurality of ceramic layers and in electrical contact with the ceramic layers, and a ceramic breach layer disposed between a first and a second ceramic layer of the plurality of ceramic layers along the axis. The ceramic breach layer has a lower breach stability than the plurality of ceramic layers with regard to tensile stresses in the direction of the axis.

Description

本発明は、電気的な多層構成部材であって、互いに重ねられた複数のセラミック層及び、該セラミック層間に位置する電極層を備えている形式のものに関する。さらに本発明は層スタックに関する。   The present invention relates to an electrical multi-layer component having a plurality of ceramic layers stacked on each other and an electrode layer positioned between the ceramic layers. The invention further relates to a layer stack.

公知の圧電アクチュエータにおいては、１つのスタック内に、互いに重ねられた圧電セラミック性の層を配置してある。セラミック性の層間には内側電極を配置してある。重ねられた各２つの電極層への電圧の印加で発生する電界によってセラミック性の層は、圧電効果に基づき微小なひずみを生ぜしめる。互いに重ねられたセラミック性の層のひずみは、スタックの長手方向で合計される。   In known piezoelectric actuators, piezoelectric ceramic layers stacked on top of each other are arranged in one stack. Inner electrodes are arranged between the ceramic layers. Due to the electric field generated by the application of voltage to each of the two electrode layers stacked, the ceramic layer causes minute strains based on the piezoelectric effect. The strains of the ceramic layers stacked on top of each other are summed in the longitudinal direction of the stack.

圧電アクチュエータにおいて内側電極の外側接触を簡単な手段で行うために、通常は圧電アクチュエータの縁部でいわゆる不活性の１つの領域には、同じ電極に属する内側電極のみを重ねてある。別の電極に所属する内側電極は、前記領域でアクチュエータの縁部までは延びておらず、即ちアクチュエータの内部の区分内に限定されている。活性の領域、即ち両方の電極の電極層を互いに重ねてある中央の領域とは異なって、不活性領域では圧電性の層は電圧の印加に際してほとんどひずみを生ぜしめず、その結果、アクチュエータの縁部の不活性領域は、活性領域のひずみに起因する引っ張り応力にさらされることになる。重ねられた圧電性の層の数並びに印加される電圧の大きさに応じて、不活性領域の縁に発生する引っ張り応力も大きくなる。   In order to make the outer contact of the inner electrode with a simple means in the piezoelectric actuator, usually only the inner electrode belonging to the same electrode is superimposed on one so-called inactive region at the edge of the piezoelectric actuator. The inner electrode belonging to another electrode does not extend to the edge of the actuator in the region, i.e. is limited to a section inside the actuator. Unlike the active region, i.e., the central region where the electrode layers of both electrodes overlap each other, in the inactive region, the piezoelectric layer causes little distortion upon application of voltage, resulting in an actuator edge. The inactive region of the part is exposed to tensile stress due to the strain of the active region. Depending on the number of piezoelectric layers superimposed and the magnitude of the applied voltage, the tensile stress generated at the edge of the inactive region also increases.

このような引っ張り応力は、圧電アクチュエータの作動に際し若しくは圧電性層内の分極に際して圧電アクチュエータの縁部領域に亀裂を生ぜしめてしまうことになる。亀裂は圧電アクチュエータの運転時間の経過に伴って圧電アクチュエータの内部へ進行して、活性領域で内側電極を裂断してしまう。このような裂断は構成部材内で電流遮断、若しくは焼損、或いは内部短絡を生ぜしめてしまう。内側電極内での亀裂を避けることは試みられている。   Such tensile stress will cause cracks in the edge region of the piezoelectric actuator during operation of the piezoelectric actuator or during polarization in the piezoelectric layer. The crack progresses to the inside of the piezoelectric actuator as the operation time of the piezoelectric actuator elapses, and tears the inner electrode in the active region. Such breakage may cause current interruption, burnout, or internal short circuit within the component. Attempts have been made to avoid cracks in the inner electrode.

亀裂の回避のためにドイツ連邦共和国特許出願公開第１９９２８１７８Ａ１号明細書に記載の手段では、圧電アクチュエータを複数の部分アクチュエータに区分けしてあり、この場合に部分アクチュエータは該部分アクチュエータの製造の後に互いに積み重ねられて、接着によって互いに結合されるようになっている。不活性領域の内側の境界に生じる引っ張り応力は、もはやアクチュエータの全高さにわたって合計されることはなくなっている。各個別の部分アクチュエータ内でのみ作用する引っ張り応力は、部分アクチュエータの重ねられた層の数が少ないので小さい。   In order to avoid cracks, the means described in DE 199 28 178 A1 divides the piezoelectric actuator into a plurality of partial actuators, in which case the partial actuators are mutually connected after the production of the partial actuators. They are stacked and joined together by bonding. The tensile stresses occurring at the inner boundary of the inactive region are no longer summed over the entire height of the actuator. The tensile stress acting only within each individual partial actuator is small due to the small number of layered layers of partial actuators.

前記特許出願公開明細書に記載の手段においては欠点として、複数の部分アクチュエータを互いに積み重ねた状態での寸法精度が極めて低い。さらに、複数の部分アクチュエータの相互の積み重ねは追加的な製造工程を必要とし、その結果、追加的な費用が生じる。   In the means described in the patent application publication specification, as a drawback, the dimensional accuracy in a state in which a plurality of partial actuators are stacked on each other is extremely low. Furthermore, the mutual stacking of multiple partial actuators requires additional manufacturing steps, resulting in additional costs.

圧電アクチュエータの内側電極内の亀裂を避けるために、さらにドイツ連邦共和国特許出願公開第１９８０２３０２号明細書に記載の手段では、不活性領域を互いに９０°ずらした積み重ねによって圧電アクチュエータの全周にわたって分配するようになっている。このような構成においては欠点として、外側接続が煩雑であり、即ち圧電アクチュエータは４つのすべての側面で接続されなければならない。   In order to avoid cracks in the inner electrode of the piezoelectric actuator, the means described in DE 198 02 302 further distribute the inert areas over the entire circumference of the piezoelectric actuator by stacking 90 ° apart from each other. It is like that. In such a configuration, the disadvantage is that the outer connection is cumbersome, ie the piezoelectric actuator must be connected on all four sides.

さらにドイツ連邦共和国特許出願公開第１００１６４２８Ａ１号明細書に記載の手段においては、不活性領域の箇所における内側電極層の厚さを不活性領域内に付加的に設けられた絶縁性補償層によって補償するようになっている。このような手段は、圧電アクチュエータの製造過程を煩雑にして不都合である。   Further, in the means described in German Patent Application No. 10016428A1, the thickness of the inner electrode layer at the position of the inactive region is compensated by an insulating compensation layer additionally provided in the inactive region. It is like that. Such means is disadvantageous because it complicates the manufacturing process of the piezoelectric actuator.

従って本発明の課題は、電気的な多層構成部材を改善して、内側電極における亀裂発生のおそれを簡単に避けることができるようにすることである。   Accordingly, it is an object of the present invention to improve the electrical multilayer component so that the risk of cracking in the inner electrode can be easily avoided.

前記課題は、請求項１に記載の電気的な多層構成部材によって解決される。多層構成部材の有利な実施態様が従属請求項に記載してある。層スタックを別の請求項に記載してある。   The object is solved by an electrical multilayer component according to claim 1. Advantageous embodiments of the multilayer component are described in the dependent claims. The layer stack is described in another claim.

本発明に基づく電気的な多層構成部材は、重ねられた複数のセラミック性の層（セラミック層）を有している。セラミック層は構成部材の縦軸線に沿って配置されている。セラミック層間に電極層を配置してある。さらに縦軸線の少なくとも１つの箇所でセラミック層間にセラミック質の１つの目標破断層（目標裂断層）を設けてあり、該目標破断層は縦軸線方向の引っ張り応力に対して、セラミック層に比べて低い安定性若しくは低い強度を有している。   The electrical multilayer component according to the present invention has a plurality of ceramic layers (ceramic layers) stacked. The ceramic layer is disposed along the longitudinal axis of the component. An electrode layer is disposed between the ceramic layers. Furthermore, one target fracture layer (target fracture layer) made of ceramic is provided between the ceramic layers at at least one point on the vertical axis, and the target fracture layer is more resistant to tensile stress in the vertical axis direction than the ceramic layer. It has low stability or low strength.

前記構造の多層構成部材においては利点として、構成部材内で縦軸線に対して垂直に発生する亀裂は目標破断層に生ぜしめられ、それというのは目標破断層の、引っ張り応力に対する安定性は最小になっているからである。亀裂の広がり若しくは進行は目標破断層に沿ってのみ行われ、その結果、電極層の亀裂を確実に避けている。   As an advantage in a multilayer component of the above structure, a crack that occurs perpendicular to the longitudinal axis in the component is generated in the target fracture layer because the target fracture layer has minimal stability against tensile stress. Because it is. Crack propagation or progression occurs only along the target fracture layer, thus ensuring that the electrode layer is not cracked.

電気的な構成部材の実施態様では、目標破断層の低い安定性は、目標破断層がセラミック層に比べて高い多孔性を有していることによって達成される。   In the electrical component embodiment, the low stability of the target break layer is achieved by having a high porosity in the target break layer compared to the ceramic layer.

有利には構成部材は、互いに重ねられたセラミック性のグリーンシート及び該グリーンシート間に配置された電極層から成るスタックの焼結によって製造される。このようなスタックから成るモノリシック（一体式）の構成部材は、簡単かつ安価に製造可能でありかつ後続の処理過程にとって十分な機械的な安定性を有している。   The component is preferably produced by sintering a stack consisting of ceramic green sheets stacked on top of each other and electrode layers arranged between the green sheets. A monolithic component comprising such a stack can be manufactured easily and inexpensively and has sufficient mechanical stability for subsequent processing steps.

構成部材の、縦軸線の方向に作用する引っ張り応力に起因する最大負荷をさらに減少させるために、縦軸線の複数の箇所に目標破断層を設けてある。これによって構成部材は目標破断層を介して複数の部分・構成部材に区分けされ、この場合に各部分・構成部材は引っ張り応力による負荷に関して互いに分離されたもの若しくは独立したものと見なされる。即ち、構成部材の全長にわたって引っ張り応力が合計されることはなく、従って構成部材内に不都合な亀裂を生ぜしめることにならない。   In order to further reduce the maximum load caused by the tensile stress acting in the direction of the vertical axis of the component member, target fracture layers are provided at a plurality of locations on the vertical axis. As a result, the constituent member is divided into a plurality of parts / components via the target fracture layer, and in this case, the parts / components are regarded as being separated from each other or independent from each other with respect to the load caused by the tensile stress. That is, the tensile stresses are not summed over the entire length of the component and therefore do not cause inconvenient cracks in the component.

セラミック性の多層構成部材の多孔性の層は、特に外部から構成部材の微小孔内に侵入する液体及びガスに関連して電位的に弱い箇所を成すものである。従って有利には、目標破断層を構成部材の作動時の電場から遠ざけて、不都合なマイグレーション効果(migration effect)を避けるようになっている。このことを達成するために、目標破断層に最も近く隣接する両方の電極層は構成部材の同一の電極に所属して配置されている。これによって、電場は目標破断層上にはほとんど生ぜしめられない。   The porous layer of the ceramic multi-layer structural member forms a weak point in terms of potential particularly in relation to the liquid and gas that enter the micropores of the structural member from the outside. Thus, advantageously, the target rupture layer is kept away from the electric field during operation of the component so as to avoid inconvenient migration effects. In order to achieve this, both electrode layers closest to and adjacent to the target fracture layer are arranged to belong to the same electrode of the component. As a result, an electric field is hardly generated on the target fracture layer.

構成部材の実施態様では、目標破断層の多孔性はセラミック層の多孔性に比べて１．２乃至３倍高くなっている。多孔性のこのような比若しくは増大値は次のような方法によって得られる。即ち、構成部材は縦方向研磨面で考察される。セラミック層内にも目標破断層内にも現れる微小孔は、微小孔の周囲のセラミック材料の色若しくは明暗・コントラストによって異なっている。各種の層にとって、即ちセラミック層及び目標破断層にとって単位面積当たりの微小孔の面積割合を求める。微小孔の両方の面積割合の商値(quotient)は、多孔性の増大値若しくは割増量を表している。   In the embodiment of the component, the porosity of the target fracture layer is 1.2 to 3 times higher than the porosity of the ceramic layer. Such a ratio or increase in porosity is obtained by the following method. That is, the component is considered on the longitudinally polished surface. The micropores appearing in the ceramic layer and in the target fracture layer differ depending on the color or brightness / darkness / contrast of the ceramic material around the micropores. For various layers, that is, for the ceramic layer and the target fracture layer, the area ratio of the micropores per unit area is obtained. The quotient of the area ratio of both of the micropores represents an increased value or an increased amount of porosity.

多孔性は理論的に可能な密度の比で表されてもよい。この場合にはセラミック層は理論的な密度のほぼ９７〜９８％の密度を有しており、目標破断層は理論的な密度の９０〜９５％の密度を有している。   The porosity may be expressed as a theoretically possible density ratio. In this case, the ceramic layer has a density of approximately 97-98% of the theoretical density, and the target fracture layer has a density of 90-95% of the theoretical density.

さらに有利には、目標破断層はセラミック層と同一の材料で形成されている。これによって構成部材の材料の種類を少なくでき、その結果、構成部材の製造のための後続の過程、例えば結合剤除去並びに焼結を簡単に実施できて有利である。   More preferably, the target break layer is made of the same material as the ceramic layer. This makes it possible to reduce the type of material of the component, and as a result, the subsequent processes for the production of the component, such as binder removal and sintering, can be easily carried out.

本発明に基づく電気的な多層構成部材は圧電アクチュエータとして有利に用いられる。圧電アクチュエータは作動に際して活性領域と不活性領域との間の境界面に引っ張り応力を発生させるものの、該引っ張り応力は目標破断層によって補償され、その結果、セラミック層内の内側電極の亀裂若しくは裂断を避けることができる。   The electrical multilayer component according to the invention is advantageously used as a piezoelectric actuator. Piezoelectric actuators generate a tensile stress at the interface between the active and inactive regions in operation, but the tensile stress is compensated by the target fracture layer, resulting in cracking or breaking of the inner electrode in the ceramic layer. Can be avoided.

さらに、本発明に基づく前述の多層構成部材の製造のために適した層スタックを提供する。このような層スタックは、互いに積み重ねられたセラミック性のグリーンシートを有しており、該グリーンシートはセラミック粉末及び有機質の結合剤を含んでいる。該グリーンシートのうちの少なくとも１つは、残りのグリーンシートに比べて結合材の高められた体積含有率を有している。   Furthermore, a layer stack suitable for the production of the aforementioned multilayer component according to the invention is provided. Such layer stacks have ceramic green sheets stacked on top of each other, the green sheets including ceramic powder and organic binder. At least one of the green sheets has an increased volume content of binder compared to the remaining green sheets.

前記層スタックにおいては利点として、層スタックの１つ若しくは複数のグリーンシート内の結合剤の割合を高めることによって、多孔性の高いセラミック質の層の成形が可能である。結合剤は焼結の前に脱炭過程によって除去され、層内の高い割合の結合剤の存在する箇所に微小孔が形成される。   As an advantage in the layer stack, it is possible to form a highly porous ceramic layer by increasing the proportion of binder in one or more green sheets of the layer stack. The binder is removed by a decarburization process prior to sintering, and micropores are formed where high proportions of binder are present in the layer.

結合材の体積含有率は１．５乃至３倍高められていると有利である。これにより、セラミック層内にセラミック粉末の少なすぎる箇所が存在するというおそれは避けられ、その結果、焼結の後には１つのモノリシックの構成部材ではなく、すでに作動前に若しくは使用前に個別の部分・構成部材に区分けされた１つの構成部材が得られる。   It is advantageous if the volume content of the binder is increased by 1.5 to 3 times. This avoids the risk that there are too few locations of the ceramic powder in the ceramic layer, so that after sintering it is not a single monolithic component, but already separate parts before operation or before use. -One component member divided into the component members is obtained.

次に本発明を図示の実施例に基づき詳細に説明する。図面において、図１は本発明に基づく多層構成部材の実施例の斜視図であり、図２は図１の構成部材の部分縦断面図である。   Next, the present invention will be described in detail based on the illustrated embodiment. In the drawings, FIG. 1 is a perspective view of an embodiment of a multilayer component according to the present invention, and FIG. 2 is a partial longitudinal sectional view of the component of FIG.

図１及び図２には圧電式のアクチュエータを示してあり、アクチュエータは複数のセラミック層１を仮想の１つの縦軸線３に沿って互いに上下に積層することによって形成されている。セラミック層１のためのセラミック材料としては特に、例えばPb 0．96 Ｃｕ 0．02 Ｎｄ 0．02 (Ｚｒ 0．54 Ｔｉ 0．46 )O 3 の組成のPZTセラミックを用いるとよい。 1 and 2 show a piezoelectric actuator, which is formed by stacking a plurality of ceramic layers 1 on each other along a virtual longitudinal axis 3. Particularly the ceramic material for the ceramic layer 1, for example, Pb 0.96 Cu 0.02 Nd 0.02 (Zr 0.54 Ti 0.46) may be used to PZ T ceramic composition of O 3.

さらに電極層２ａ，２ｂを設けてあり、電極層はそれぞれ隣接の２つのセラミック層１間に配置されている。この場合に電極層２ａは、電気的な構成部材の一方の電極に対応して配置されており、電極層２ｂは電気的な構成部材の他方の電極に対応して配置されている。電気的な構成部材の右側の縁部まで達している電極層２ｂは、外側接点部材５１によって互いに導電接続されており、かつ外側接点部材５１は電圧源の１つの電極の印加を可能にしている。   Furthermore, electrode layers 2a and 2b are provided, and each electrode layer is disposed between two adjacent ceramic layers 1. In this case, the electrode layer 2a is disposed corresponding to one electrode of the electrical component, and the electrode layer 2b is disposed corresponding to the other electrode of the electrical component. The electrode layers 2b reaching the right edge of the electrical component are conductively connected to each other by an outer contact member 51, and the outer contact member 51 enables the application of one electrode of a voltage source. .

電気的な構成部材の左側の縁部まで達している電極層２aは、該構成部材の左側に配置されているものの図１では見えない外側接点部材５２によって互いに導電接続されている。外側接点部材５２に、電圧源の別の電極を接続するようになっている。   The electrode layers 2a reaching the left edge of the electrical component are conductively connected to each other by an outer contact member 52 that is arranged on the left side of the component but not visible in FIG. Another electrode of the voltage source is connected to the outer contact member 52.

不活性領域７の範囲では、電極層２ａ，２ｂは互いにオーバーラップされておらず、即ち１つの極の電極層、例えば電極層２ａ（図２、参照）のみが、不活性領域７に存在している。不活性領域７の内側の縁に生じる引っ張り応力（矢印８で示す）が圧電アクチュエータの内部へ不都合に伝播するのを防止するために、圧電アクチュエータの縦軸線３に沿って分配された目標破断層４を設けてあり、該目標破断層（目標裂断層）においては多孔性をセラミック層１に比べて増してある。従って亀裂６は、目標破断層４内に存在する微小孔を伝って広がりやすくなっており、このことは亀裂６を目標破断層４に沿って切り開く、即ち進行させ若しくは導くことにつながる。その結果、亀裂６が上方へ若しくは下方へそれて電極層２ａ又は２ｂを破断して損傷させてしまうというようなおそれは避けられる。   In the region of the inactive region 7, the electrode layers 2 a and 2 b do not overlap each other, that is, only one electrode layer, for example, the electrode layer 2 a (see FIG. 2) exists in the inactive region 7. ing. The target fracture layer distributed along the longitudinal axis 3 of the piezoelectric actuator in order to prevent the tensile stress (indicated by arrow 8) generated at the inner edge of the inactive region 7 from undesirably propagating into the interior of the piezoelectric actuator. 4 is provided, and in the target fracture layer (target fracture fault), the porosity is increased as compared with the ceramic layer 1. Therefore, the crack 6 tends to spread through the micropores existing in the target fracture layer 4, which leads to the crack 6 being cut along the target fracture layer 4. As a result, the risk that the crack 6 is deflected upward or downward to break and damage the electrode layer 2a or 2b is avoided.

目標破断層４を圧電アクチュエータの作動時にもできるだけ電場なしに保つために、図２に示してあるように、目標破断層４に隣接の電極層２ａは圧電アクチュエータの同じ電極に対応して配置されている。   In order to keep the target breaking layer 4 as free of an electric field as possible even when the piezoelectric actuator is operated, as shown in FIG. 2, the electrode layer 2a adjacent to the target breaking layer 4 is disposed corresponding to the same electrode of the piezoelectric actuator. ing.

縦軸線３に沿った目標破断層４の分配は次のように行われており、即ち、目標破断層によって区分けされて成る各部分アクチュエータ９は、通常の作動時に若しくは圧電アクチュエータの分極の際に発生する引っ張り応力がアクチュエータ内に亀裂を生ぜしめ得ないような低い高さで形成されている。   The distribution of the target fracture layer 4 along the longitudinal axis 3 is performed as follows: each partial actuator 9 divided by the target fracture layer is in normal operation or during polarization of the piezoelectric actuator. It is formed at a low height such that the generated tensile stress cannot cause cracks in the actuator.

例えば３０ｍｍの高さの圧電アクチュエータにおいては、該圧電アクチュエータを９つの目標破断層４によって１０個の部分アクチュエータ９に区分けしてあり、各部分アクチュエータは３ｍｍの高さを有している。３ｍｍの高さは、本発明の実施例ではセラミック層１の３７枚の数に相当する。   For example, in a piezoelectric actuator having a height of 30 mm, the piezoelectric actuator is divided into ten partial actuators 9 by nine target breaking layers 4, and each partial actuator has a height of 3 mm. The height of 3 mm corresponds to the number of 37 ceramic layers 1 in the embodiment of the present invention.

電極層２ａ，２ｂの材料としては、例えば銀及びパラジウムから成る混合物が考えられ、これは圧電活性作用のセラミック層と一緒の焼結に適している。さらに、銅を含む若しくは完全に銅から成る電極層２ａ，２ｂも使用可能である。   As a material of the electrode layers 2a and 2b, for example, a mixture of silver and palladium is conceivable, which is suitable for sintering together with a piezoelectric layer having a piezoelectric activity. Furthermore, electrode layers 2a and 2b containing copper or made entirely of copper can also be used.

図１及び図２に示す圧電アクチュエータの製造は、層スタック(layer stack)を用いて行われ、層スタックの外観は図１及び図２に示す構成部材とほぼ同じであり、層スタックには外側接点部材５１，５２も亀裂６も存在していない。セラミック層、電極層及び目標破断層から成る構造は、１つの層スタックの構造に相当しており、セラミック層は前段階ではセラミック粉末及び有機質の結合剤を含むグリーンシートとして形成されている。電極層は金属粉末含有のペーストとして形成されている。目標破断層は、セラミック層と同様にグリーンシートとして形成されており、後に目標破断層として処理されるべき層の有機質の結合剤の割合は、残りのセラミック性の層に比べて高くなっている。例として、セラミック性の層のために用いられるグリーンシートは、有機質の結合剤の３０％の体積含有率を有している。層スタックの特定の層の体積含有率を高めるために、特定の層の体積含有率は５０乃至６０％に高められてよい。有機質の結合剤のこのような体積含有率においては、シート成形に際してセラミック粉末が集塊するというような問題は生じない。   The piezoelectric actuator shown in FIGS. 1 and 2 is manufactured using a layer stack, and the appearance of the layer stack is almost the same as the components shown in FIGS. 1 and 2, and the layer stack has an outer side. Neither the contact members 51, 52 nor the crack 6 exists. The structure composed of the ceramic layer, the electrode layer, and the target fracture layer corresponds to the structure of one layer stack, and the ceramic layer is formed as a green sheet containing ceramic powder and an organic binder in the previous stage. The electrode layer is formed as a paste containing metal powder. The target rupture layer is formed as a green sheet in the same manner as the ceramic layer, and the proportion of the organic binder in the layer to be treated as the target rupture layer later is higher than that of the remaining ceramic layers. . As an example, the green sheet used for the ceramic layer has a volume content of 30% of the organic binder. In order to increase the volume content of a particular layer of the layer stack, the volume content of a particular layer may be increased to 50-60%. Such a volume content of the organic binder does not cause a problem that the ceramic powder is agglomerated during sheet forming.

構成部材は、層スタック内に存在する複数の層を一緒に焼結することによって成形される。焼結成形は唯一の製造工程で行われる。   The component is formed by sintering together multiple layers present in the layer stack. Sintering is performed in a single manufacturing process.

前述の電気的な多層構成部材は、前記セラミック材料に限定されるものではない。圧電効果を有するあらゆるセラミック材料を用いることが可能である。さらに構成部材は圧電アクチュエータに限定されるものではない。電気的な機能を生ぜしめるあらゆるセラミック材料と用いることも可能である。該構成部材は特に、縦方向若しくは長手方向の引っ張り負荷にさらされる箇所に用いられ得るものである。   The aforementioned electrical multilayer component is not limited to the ceramic material. Any ceramic material having a piezoelectric effect can be used. Further, the constituent member is not limited to the piezoelectric actuator. It can also be used with any ceramic material that produces an electrical function. The component can be used in particular where it is exposed to a longitudinal or longitudinal tensile load.

本発明に基づく構成部材の斜視図The perspective view of the component based on this invention 図１の構成部材の部分縦断面図Partial longitudinal sectional view of the component shown in FIG.

符号の説明Explanation of symbols

１ セラミック層、 ２ａ，２ｂ 電極層、 ３ 縦軸線、 ４ 目標破断層、 ９ 部分構成部材、 ５１，５２ 外側接点部材   DESCRIPTION OF SYMBOLS 1 Ceramic layer, 2a, 2b Electrode layer, 3 Vertical axis, 4 Target fracture | rupture layer, 9 Partial component member, 51,52 Outer contact member

Claims (11)

電気的な多層構成部材であって、
該多層構成部材は、圧電式のアクチュエータとして形成されていて、１つの縦軸線（３）に沿って配置して互いに重ねられた複数のセラミック層（１）及び、前記セラミック層間に位置する電極層（２ａ，２ｂ）を備えており、
前記縦軸線（３）の少なくとも１つの箇所で２つのセラミック層（１）間で、各セラミック層（１）に直接接触するセラミック性の目標破断層（４）を設けてあり、該目標破断層は縦軸線方向の引っ張り応力（８）に対して、前記セラミック層（１）に比べて低い安定性を有しており、このような構成により、前記多層構成部材の運転時若しくは前記セラミック層（１）の分極時に発生する亀裂は、前記目標破断層（４）に沿ってのみ進行するようになっており、
構成部材は２つの外側接点部材（５１，５２）を有しており、各１つの目標破断層（４）に隣接の電極層（２ａ，２ｂ）は、電圧源の１つの電極に接続される一方の外側接点部材（５１又は５２）に導電接続されており、電極層（２ａ，２ｂ）は、構成部材の同じ極に所属して配置されていることを特徴とする多層構成部材。 An electrical multilayer component,
The multilayer component is formed as a piezoelectric actuator, and is arranged along one longitudinal axis (3) and stacked on top of each other, and an electrode layer positioned between the ceramic layers (2a, 2b)
A ceramic target fracture layer (4) in direct contact with each ceramic layer (1 ) is provided between two ceramic layers (1) at at least one location on the longitudinal axis (3), and the target fracture layer Has a lower stability than the ceramic layer (1) with respect to the tensile stress (8) in the direction of the vertical axis. With such a configuration, the multilayered component can be operated or the ceramic layer ( Cracks generated during the polarization of 1) advance only along the target fracture layer (4) ,
The component has two outer contact members (51, 52), and the electrode layers (2a, 2b) adjacent to each one target break layer (4) are connected to one electrode of the voltage source. A multi-layer structural member characterized in that it is electrically connected to one outer contact member (51 or 52), and the electrode layers (2a, 2b) belong to the same pole of the structural member. 目標破断層（４）はセラミック層（１）よりも高い多孔性を有している請求項１に記載の構成部材。   The component according to claim 1, wherein the target fracture layer (4) has a higher porosity than the ceramic layer (1). 焼結によって製造可能なモノリシックの構成部材として形成してある請求項１又は２に記載の構成部材。   3. The component according to claim 1, wherein the component is formed as a monolithic component that can be manufactured by sintering. 多層構成部材の縦軸線（３）の複数の箇所に目標破断層（４）を設けてある請求項１から３のいずれか１項に記載の構成部材。   The constituent member according to any one of claims 1 to 3, wherein the target fracture layer (4) is provided at a plurality of locations on the longitudinal axis (3) of the multilayer constituent member. 目標破断層（４）の多孔性は、セラミック層（１）に比べて１．２乃至３倍高くなっている請求項１から４のいずれか１項に記載の構成部材。 The component according to any one of claims 1 to 4 , wherein the porosity of the target fracture layer (4) is 1.2 to 3 times higher than that of the ceramic layer (1). 目標破断層（４）はセラミック層（１）と同じセラミック材料から成形されている請求項１から５のいずれか１項に記載の構成部材。 Predetermined breaking layer (4) is component according to any one of claims 1-5, which is molded from the same ceramic material as the ceramic layer (1). 構成部材は目標破断層（４）を介して複数の部分・構成部材に区分けされている請求項１から６のいずれか１項に記載の構成部材。 The constituent member according to any one of claims 1 to 6 , wherein the constituent member is divided into a plurality of parts / constituent members via a target fracture layer (4). 圧電式のアクチュエータは目標破断層（４）を介して複数の部分・アクチュエータに区分けされている請求項１から７のいずれか１項に記載の構成部材。 The component according to any one of claims 1 to 7 , wherein the piezoelectric actuator is divided into a plurality of parts / actuators via a target fracture layer (4). 請求項１から８のいずれか１項に記載の構成部材の製造のための層スタックであって、互いに積み重ねられたセラミック性のグリーンシートを有しており、グリーンシートはセラミック粉末及び有機質の結合剤を含んでおり、グリーンシートのうちの少なくとも１つは、残りのグリーンシートに比べて結合剤の割合の高められた体積含有率を有していることを特徴とする層スタック。 A layer stack for manufacturing a component according to any one of claims 1 to 8 , comprising ceramic green sheets stacked on top of each other, wherein the green sheets are a combination of ceramic powder and organic matter. A layer stack comprising an agent, wherein at least one of the green sheets has an increased volume content of binder relative to the remaining green sheets. 結合剤の体積含有率は１．５乃至３倍高められている請求項９に記載の層スタック。 The layer stack according to claim 9 , wherein the volume content of the binder is increased by 1.5 to 3 times. 層スタックは、結合剤の割合の高められた体積含有率を有するグリーンシートを介して複数の部分・層スタックに区分けされている請求項１０に記載の層スタック。 11. A layer stack according to claim 10 , wherein the layer stack is divided into a plurality of partial / layer stacks via green sheets having an increased volume content of binder.
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WO2004077583A1 (en) 2004-09-10
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US7358655B2 (en) 2008-04-15
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