JP5321831B2 - 液体噴射ヘッド及びその製造方法 - Google Patents
液体噴射ヘッド及びその製造方法 Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1635—Manufacturing processes dividing the wafer into individual chips
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
- B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14419—Manifold
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14491—Electrical connection
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
インク滴を吐出するインクジェット式記録ヘッド及びその製造方法に関する。
さらに本発明は、このような構成の液体噴射ヘッドの前記第1の液体流路内に液体を充填した状態で、前記第1の電極層の端子部と前記第2の電極層の端子部との間で導通状態を検出する検査工程を具備することを特徴とする液体噴射ヘッドの製造方法にある。
かかる本発明では、第1の液体流路内に導電性を有する液体を充填した状態で、第1の電極の端子部と第2の電極の端子部との間で導通状態を検出することで、振動板の有無を比較的容易且つ正確に判定することができる。特に、第1及び第2の電極層の端子部が、第1及び第2の流路形成基板の接合部の外側に設けられていることで、検査工程において第1及び第2の電極層間の導通状態を容易に検出することができる。これにより振動板の割れの無い良品のみが出荷されるため、初期不良の発生が大幅に抑制される。
図1は、本発明の一実施形態に係るインクジェット式記録ヘッドの概略を示す分解斜視図であり、図2は、図1の平面図及びA−A′断面図であり、図3は、振動板上に形成されている電極構造を示す平面図である。
Claims (6)
- 圧力発生手段により圧力発生室に圧力変動を生じさせて当該圧力発生室内に充填された液体をノズルから噴射する液体噴射ヘッドであって、
前記圧力発生室を含む液体流路が形成された第1の流路形成基板と、
該第1の流路形成基板上に設けられて前記液体流路の一方の面を構成する振動板と、
前記第1の流路形成基板の前記振動板側の面に接合される第2の流路形成基板と、
を具備し、
前記振動板上には、
前記液体流路内に充填されている液体と電気的に接続される第1の電極層と、
該第1の電極層及び前記液体とは電気的に独立する第2の電極層と、
が設けられ、
且つこれら第1及び第2の電極層が、前記第1の流路形成基板と前記第2の流路形成基板とが接合されている接合部の外側まで引き出された端子部を有することを特徴とする液体噴射ヘッド。 - 前記第1の電極層は、前記液体流路内に露出する露出部を有し該露出部によって前記液体流路内に充填されている液体と電気的に接続されていることを特徴とする請求項1に記載の液体噴射ヘッド。
- 前記露出部が、前記第2の流路形成基板を前記第1の流路形成基板側に接合する接着剤層に前記第1の電極層が埋もれた部分であることを特徴とする請求項2に記載の液体噴射ヘッド。
- 前記第2の流路形成基板と前記振動板との間には、前記圧力発生手段が収容される密封空間である保持部が設けられており、前記第2の電極層が、前記振動板上の前記保持部に対応する部分に設けられていることを特徴とする請求項1〜3の何れか一項に記載の液体噴射ヘッド。
- 前記第2の電極層が、前記保持部の周縁部に対向する部分に設けられていることを特徴とする請求項4に記載の液体噴射ヘッド。
- 請求項1〜5の何れか1項に記載の液体噴射ヘッドの前記第1の液体流路内に導電性液体を充填した状態で、前記第1の電極層の端子部と前記第2の電極層の端子部との間で導通状態を検出する検査工程を具備することを特徴とする液体噴射ヘッドの製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009181951A JP5321831B2 (ja) | 2009-08-04 | 2009-08-04 | 液体噴射ヘッド及びその製造方法 |
US12/844,127 US8393717B2 (en) | 2009-08-04 | 2010-07-27 | Liquid ejecting head and method of inspecting liquid ejecting head |
Applications Claiming Priority (1)
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---|---|---|---|
JP2009181951A JP5321831B2 (ja) | 2009-08-04 | 2009-08-04 | 液体噴射ヘッド及びその製造方法 |
Publications (3)
Publication Number | Publication Date |
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JP2011031559A JP2011031559A (ja) | 2011-02-17 |
JP2011031559A5 JP2011031559A5 (ja) | 2012-09-20 |
JP5321831B2 true JP5321831B2 (ja) | 2013-10-23 |
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JP2009181951A Active JP5321831B2 (ja) | 2009-08-04 | 2009-08-04 | 液体噴射ヘッド及びその製造方法 |
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US (1) | US8393717B2 (ja) |
JP (1) | JP5321831B2 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012205184A (ja) * | 2011-03-28 | 2012-10-22 | Azbil Corp | 超音波センサ、超音波センサの異常診断方法および超音波センサの異常回復方法 |
JP5953760B2 (ja) * | 2012-01-18 | 2016-07-20 | セイコーエプソン株式会社 | 液体噴射ヘッド、液体噴射装置 |
JP6528480B2 (ja) * | 2015-03-16 | 2019-06-12 | ブラザー工業株式会社 | 液体吐出装置 |
JP2017132044A (ja) | 2016-01-25 | 2017-08-03 | セイコーエプソン株式会社 | 圧電デバイス、圧電デバイスの検査方法及び液体噴射ヘッド |
JP2019014183A (ja) * | 2017-07-10 | 2019-01-31 | セイコーエプソン株式会社 | 圧電デバイス、液体噴射ヘッド及び液体噴射装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0957973A (ja) | 1995-08-30 | 1997-03-04 | Canon Inc | インクジェット記録ヘッド用基板 |
JP3359216B2 (ja) | 1996-01-12 | 2002-12-24 | キヤノン株式会社 | インクジェット記録ヘッド及びその検査方法 |
JP3900284B2 (ja) * | 2003-03-24 | 2007-04-04 | セイコーエプソン株式会社 | 液体噴射ヘッドの検査方法 |
JP4678502B2 (ja) * | 2005-07-14 | 2011-04-27 | ブラザー工業株式会社 | インクジェットヘッド及びその検査方法 |
JP5070886B2 (ja) * | 2007-01-16 | 2012-11-14 | ブラザー工業株式会社 | 液体吐出装置およびその検査方法 |
JP2008221652A (ja) | 2007-03-13 | 2008-09-25 | Seiko Epson Corp | 液体噴射ヘッドの検査方法 |
JP4582104B2 (ja) * | 2007-03-14 | 2010-11-17 | ブラザー工業株式会社 | 液体吐出ヘッドの検査方法及び製造方法 |
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- 2009-08-04 JP JP2009181951A patent/JP5321831B2/ja active Active
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JP2011031559A (ja) | 2011-02-17 |
US8393717B2 (en) | 2013-03-12 |
US20110032310A1 (en) | 2011-02-10 |
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