JP5296894B2 - パッケージキャリアおよびその製造方法 - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims description 38
- 239000010410 layer Substances 0.000 claims description 308
- 239000002184 metal Substances 0.000 claims description 151
- 229910052751 metal Inorganic materials 0.000 claims description 151
- 239000000758 substrate Substances 0.000 claims description 133
- 239000011810 insulating material Substances 0.000 claims description 37
- 239000011241 protective layer Substances 0.000 claims description 25
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 22
- 239000011889 copper foil Substances 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 20
- 229910000679 solder Inorganic materials 0.000 claims description 20
- 230000000149 penetrating effect Effects 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 claims description 4
- 229910003460 diamond Inorganic materials 0.000 claims description 4
- 239000010432 diamond Substances 0.000 claims description 4
- 238000009713 electroplating Methods 0.000 claims description 4
- 238000010030 laminating Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 230000003647 oxidation Effects 0.000 claims description 4
- 238000007254 oxidation reaction Methods 0.000 claims description 4
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 4
- 238000009413 insulation Methods 0.000 claims description 3
- 239000007769 metal material Substances 0.000 claims 2
- 230000020169 heat generation Effects 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 230000001681 protective effect Effects 0.000 description 4
- 230000035882 stress Effects 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- MSNOMDLPLDYDME-UHFFFAOYSA-N gold nickel Chemical compound [Ni].[Au] MSNOMDLPLDYDME-UHFFFAOYSA-N 0.000 description 2
- 230000001965 increasing effect Effects 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
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Description
図1A〜図1Hは、この発明の実施形態にかかるパッケージキャリアを製造する方法を示す概略的な断面図である。図1Aにおいて、この実施形態中のパッケージキャリアを製造する方法に基づき、基板110aが提供される。基板110aが上表面111aと上表面111aに背向する下表面113aとを有する。この実施形態中、基板110aは、例えば、第1銅箔(copper foil)層112aと、第2銅箔層114aと、第1銅箔層112aおよび第2銅箔層114a間に配置されたコア誘電層116aとを有する。即ち、この実施形態の基板110aは、両面基板である。
110a,110b 基板
112a 第1銅箔層
112b 金属板
113a,113b 下表面
114a 第2銅箔層
114b 絶縁ブロック
115b スルーホール
116a コア誘電層
120 熱伝導素子
121 頂表面
122 第1導電層
123 底表面
124 第2導電層
126 絶縁材料層
130 絶縁材料
142 第1絶縁層
144 第2絶縁層
152 第1金属層
154 第2金属層
160 第3金属層
170 ソルダーマスク
180 表面保護層
190 シード層
200 熱発生素子
210 モールド化合物
220 ボンディングワイヤー
S1 第1開口
S2 第2開口
S3 第3開口
V スルービア
Claims (15)
- 基板を提供し、前記基板が上表面、および前記上表面に背向する下表面を有することと、
前記基板の前記上表面ならびに前記下表面に連通する第1開口を形成することと、
前記基板の前記第1開口中に熱伝導素子を配置し、そのうち、前記熱伝導素子が絶縁材料を介して前記第1開口中に固定され、かつ前記熱伝導素子が頂表面、および前記頂表面に背向する底表面を有することと、
前記基板の前記上表面上に、第1絶縁層および前記第1絶縁層上に位置する第1金属層をラミネートするとともに、第2絶縁層および前記第2絶縁層上に位置する第2金属層を前記基板の前記下表面上にラミネートし、そのうち、前記第1絶縁層が前記基板および前記第1金属層間に位置し、前記熱伝導素子の前記頂表面ならびに前記絶縁材料の一部を被覆するとともに、第2絶縁層が前記基板ならびに前記第2金属層間に位置し、前記熱伝導素子の前記底表面ならびに前記絶縁材料の一部を被覆することと、
第2開口および第3開口を形成し、前記第2開口が前記第1金属層および前記第1絶縁層を貫通するとともに、前記頂表面の一部を露出させ、前記第3開口が前記第2金属層ならびに前記第2絶縁層を貫通するとともに、前記底表面の一部を露出させることと、
第1金属層、第1絶縁層、前記基板、前記第2絶縁層および前記第2金属層を貫通する少なくとも1つのスルービアを形成することと、
第3金属層を形成して、前記第1金属層、第2開口によって露出された第1絶縁層の一部、第2開口によって露出された前記頂表面の一部、前記第2金属層、前記第3開口によって露出された前記第2絶縁層の一部、前記第3開口によって露出された前記底表面ならびに前記少なくとも1つのスルービアの内壁を被覆することと、
前記第3金属層上にソルダーマスクを形成することと、
表面保護層を形成して、前記表面保護層が前記ソルダーマスクにより露出された前記第3金属層および前記少なくとも1つのスルービアの内壁に位置する前記第3金属層を被覆することと、を備え、
前記表面保護層が、前記第1金属層および前記第2金属層の酸化速度を低減できる金属材料から成る、パッケージキャリアを製造する方法。 - 前記基板が、第1銅箔層、第2銅箔層ならびに前記第1銅箔層および前記第2銅箔層間に配置されたコア誘電層を備える請求項1記載のパッケージキャリアを製造する方法。
- さらに、前記基板の前記第1開口中に前記前記熱伝導素子を配置する前に、前記第1銅箔層、前記第2銅箔層および前記第1開口の内壁上にシード層を形成する請求項2記載のパッケージキャリアを製造する方法。
- 前記基板が、金属板ならびに少なくとも1つの絶縁ブロックを備えるとともに、前記金属板が前記第1開口を有する請求項1記載のパッケージキャリアを製造する方法。
- さらに、前記第1絶縁層および前記第1金属層を前記基板の前記上表面にラミネートするとともに、前記第2絶縁層および前記第2金属層を前記基板の前記下表面にラミネートする前に、前記金属板を貫通するとともに、前記基板の前記上表面および前記下表面を連通する少なくとも1つのスルーホールを形成することと、
前記少なくとも1つのスルーホールを形成した後に、前記基板の前記少なくとも1つのスルーホール中に少なくとも1つの絶縁ブロックを形成することと、を含む請求項4記載のパッケージキャリアを製造する方法。 - 前記熱伝導素子が、第1導電層と、第2導電層と、前記第1導電層および前記第2導電層間に位置する絶縁材料層とを含む請求項1記載のパッケージキャリアを製造する方法。
- 前記熱伝導素子の材料が、セラミックス、シリコン、シリコンカーバイド、ダイヤモンドまたは金属を含む請求項1記載のパッケージキャリアを製造する方法。
- 前記熱伝導素子の熱膨張係数が、前記基板の熱膨張係数よりも小さいとともに、前記熱伝導素子の熱伝導係数が、前記基板の熱伝導係数よりも大きいものである請求項1記載のパッケージキャリアを製造する方法。
- 前記第3金属層を形成する方法が、電気メッキを含むものである請求項1記載のパッケージキャリアを製造する方法。
- 熱発生素子を搭載することに適したパッケージキャリアであり、前記パッケージキャリアが、
上表面、前記上表面に背向する下表面、および前記上表面ならびに前記下表面に連通する第1開口を有する基板と、
前記基板の前記第1開口中に配置されるとともに、頂表面および前記頂表面に背向する底表面を有する熱伝導素子と、
前記基板の前記第1開口を充填して前記熱伝導素子を前記基板の前記第1開口中に固定する絶縁材料と、
前記基板の前記上表面に配置されるとともに、前記上表面および前記絶縁材料の一部を被覆するとともに、前記熱伝導素子の前記頂表面の一部を露出する第2開口を有する、第1絶縁層と、
前記基板の前記下表面に配置されるとともに、前記下表面および前記絶縁材料の一部を被覆するとともに、前記熱伝導素子の前記底表面の一部を露出する第3開口を有する、第2絶縁層と、
前記第1絶縁層上に配置される第1金属層と、
前記第2絶縁層上に配置される第2金属層と、
前記第1金属層、前記第1絶縁層、前記基板、前記第2絶縁層ならびに前記第2金属層を貫通する少なくとも1つのスルービアと、
前記第1金属層、前記第2開口によって露出された前記第1絶縁層、前記第2開口によって露出された前記熱伝導素子の前記頂表面の一部、前記第2金属層、前記第3開口によって露出された前記第2絶縁層、前記第3開口によって露出された前記熱伝導素子の前記底表面の一部、および前記少なくとも1つのスルービアの内壁を被覆する第3金属層と、
前記第3金属層上に配置されたソルダーマスクと、
前記ソルダーマスクによって露出された前記第3金属層ならびに前記少なくとも1つのスルービアの内壁に位置する前記第3金属層を被覆する表面保護層と、を含み、
前記熱発生素子が前記第2開口により露出された前記熱伝導素子の前記頂表面の一部の上方に対応するように位置する前記表面保護層上に配置され、
前記表面保護層が、前記第1金属層および前記第2金属層の酸化速度を低減できる金属材料から成る、パッケージキャリア。 - 前記基板が、第1銅箔層、第2銅箔層、および前記第1銅箔層ならびに前記第2銅箔層間に配置される絶縁層を含む請求項10項記載のパッケージキャリア。
- 前記基板が、金属板、少なくとも1つの絶縁ブロックを含み、かつ前記金属板が前記第1開口および少なくとも1つのスルーホールを有するとともに、前記絶縁ブロックが前記少なくとも1つのスルーホール中に配置される請求項10項記載のパッケージキャリア。
- 前記熱伝導素子が、第1導電層と、第2導電層と、前記第1導電層および前記第2導電層間に位置する絶縁材料層を含む請求項10項記載のパッケージキャリア。
- 前記熱伝導素子の材料が、セラミックス、シリコン、シリコンカーバイド、ダイヤモンドまたは金属を含む請求項10記載のパッケージキャリア。
- 前記熱伝導素子の熱膨張係数が、前記基板の熱膨張係数よりも小さいとともに、前記熱伝導素子の熱伝導係数が、前記基板の熱伝導係数よりも大きいものである請求項10記載のパッケージキャリア。
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