JP5289026B2 - 測定方法及び測定装置 - Google Patents

測定方法及び測定装置 Download PDF

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Publication number
JP5289026B2
JP5289026B2 JP2008321477A JP2008321477A JP5289026B2 JP 5289026 B2 JP5289026 B2 JP 5289026B2 JP 2008321477 A JP2008321477 A JP 2008321477A JP 2008321477 A JP2008321477 A JP 2008321477A JP 5289026 B2 JP5289026 B2 JP 5289026B2
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Japan
Prior art keywords
test surface
light beam
positions
test
aspherical
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JP2008321477A
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Japanese (ja)
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JP2010145185A5 (enrdf_load_stackoverflow
JP2010145185A (ja
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章博 中内
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Canon Inc
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Canon Inc
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Priority to JP2008321477A priority Critical patent/JP5289026B2/ja
Priority to US12/633,107 priority patent/US8345263B2/en
Publication of JP2010145185A publication Critical patent/JP2010145185A/ja
Publication of JP2010145185A5 publication Critical patent/JP2010145185A5/ja
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Publication of JP5289026B2 publication Critical patent/JP5289026B2/ja
Expired - Fee Related legal-status Critical Current
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  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP2008321477A 2008-12-17 2008-12-17 測定方法及び測定装置 Expired - Fee Related JP5289026B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008321477A JP5289026B2 (ja) 2008-12-17 2008-12-17 測定方法及び測定装置
US12/633,107 US8345263B2 (en) 2008-12-17 2009-12-08 Measurement method and measurement apparatus that measure a surface figure of an aspheric surface based on an interference pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008321477A JP5289026B2 (ja) 2008-12-17 2008-12-17 測定方法及び測定装置

Publications (3)

Publication Number Publication Date
JP2010145185A JP2010145185A (ja) 2010-07-01
JP2010145185A5 JP2010145185A5 (enrdf_load_stackoverflow) 2012-02-02
JP5289026B2 true JP5289026B2 (ja) 2013-09-11

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JP2008321477A Expired - Fee Related JP5289026B2 (ja) 2008-12-17 2008-12-17 測定方法及び測定装置

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JP (1) JP5289026B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5618727B2 (ja) * 2010-09-21 2014-11-05 キヤノン株式会社 形状測定法及び形状計測装置
CN117760336B (zh) * 2023-12-22 2024-06-14 霖鼎光学(上海)有限公司 一种五轴干涉测量系统的标定方法、介质及电子设备

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03156305A (ja) * 1989-11-14 1991-07-04 Matsushita Electric Works Ltd 非球面形状測定装置
JPH0448201A (ja) * 1990-06-15 1992-02-18 Olympus Optical Co Ltd 干渉測定装置
JPH0587542A (ja) * 1991-09-30 1993-04-06 Ricoh Co Ltd 曲面の測定方法及び装置
JP3199487B2 (ja) * 1992-09-02 2001-08-20 オリンパス光学工業株式会社 干渉測定方法
JP2000088546A (ja) * 1998-09-14 2000-03-31 Nikon Corp 形状測定装置および測定方法
JP2000088547A (ja) * 1998-09-14 2000-03-31 Nikon Corp 形状測定装置
US6781700B2 (en) * 2001-06-20 2004-08-24 Kuechel Michael Scanning interferometer for aspheric surfaces and wavefronts
US7218403B2 (en) * 2002-06-26 2007-05-15 Zygo Corporation Scanning interferometer for aspheric surfaces and wavefronts
JP2004045168A (ja) * 2002-07-11 2004-02-12 Nikon Corp 非球面形状計測方法
US7495773B2 (en) * 2006-02-24 2009-02-24 Zygo Corporation In situ determination of pixel mapping in interferometry

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JP2010145185A (ja) 2010-07-01

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