JP5288357B2 - ヘテロ接合バイポーラフォトトランジスタ - Google Patents
ヘテロ接合バイポーラフォトトランジスタ Download PDFInfo
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- JP5288357B2 JP5288357B2 JP2010550573A JP2010550573A JP5288357B2 JP 5288357 B2 JP5288357 B2 JP 5288357B2 JP 2010550573 A JP2010550573 A JP 2010550573A JP 2010550573 A JP2010550573 A JP 2010550573A JP 5288357 B2 JP5288357 B2 JP 5288357B2
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- 230000031700 light absorption Effects 0.000 claims description 91
- 230000004888 barrier function Effects 0.000 claims description 77
- 239000004065 semiconductor Substances 0.000 claims description 60
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 claims description 10
- 229910000673 Indium arsenide Inorganic materials 0.000 claims description 10
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 claims description 10
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000010030 laminating Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 description 32
- 230000035945 sensitivity Effects 0.000 description 14
- 150000001875 compounds Chemical class 0.000 description 10
- 238000003199 nucleic acid amplification method Methods 0.000 description 10
- 230000003321 amplification Effects 0.000 description 9
- 239000000758 substrate Substances 0.000 description 9
- 230000015556 catabolic process Effects 0.000 description 8
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- 238000013461 design Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
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- 238000005036 potential barrier Methods 0.000 description 7
- 230000002829 reductive effect Effects 0.000 description 7
- 239000000969 carrier Substances 0.000 description 6
- 238000001514 detection method Methods 0.000 description 6
- 230000006798 recombination Effects 0.000 description 6
- 238000005215 recombination Methods 0.000 description 6
- 238000004364 calculation method Methods 0.000 description 5
- 239000013078 crystal Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 5
- 125000005842 heteroatom Chemical group 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 238000004088 simulation Methods 0.000 description 4
- 229910005542 GaSb Inorganic materials 0.000 description 3
- 229910052787 antimony Inorganic materials 0.000 description 3
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 230000002441 reversible effect Effects 0.000 description 3
- 230000001629 suppression Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 2
- 150000001463 antimony compounds Chemical class 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000001443 photoexcitation Effects 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 229910017115 AlSb Inorganic materials 0.000 description 1
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 229910000661 Mercury cadmium telluride Inorganic materials 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 239000000567 combustion gas Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 235000012489 doughnuts Nutrition 0.000 description 1
- 238000005421 electrostatic potential Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001272 nitrous oxide Substances 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000004347 surface barrier Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/0304—Inorganic materials including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L31/03046—Inorganic materials including, apart from doping materials or other impurities, only AIIIBV compounds including ternary or quaternary compounds, e.g. GaAlAs, InGaAs, InGaAsP
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/11—Devices sensitive to infrared, visible or ultraviolet radiation characterised by two potential barriers, e.g. bipolar phototransistors
- H01L31/1105—Devices sensitive to infrared, visible or ultraviolet radiation characterised by two potential barriers, e.g. bipolar phototransistors the device being a bipolar phototransistor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/544—Solar cells from Group III-V materials
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Light Receiving Elements (AREA)
Description
また、光吸収層とコレクタ界面における正孔の輸送を円滑に行う必要がある。
第一導電型の半導体層により構成された光吸収層と、該光吸収層の上にコレクタ兼バリア層、ベース層、エミッタ層が順に積層されることで構成されたトランジスタ部とを有するフォトトランジスタにおいて;
上記コレクタ兼バリア層は、伝導帯におけるエネルギ準位が該光吸収層のそれより高く、価電子帯におけるエネルギ準位が該光吸収層のそれにほぼ一致するか高い、相対的に該光吸収層よりワイドギャップな半導体層から成り;
上記コレクタ兼バリア層の上に形成された上記ベース層は、該コレクタ兼バリア層に比して相対的にナローギャップで、その伝導帯におけるエネルギ準位は該コレクタ兼バリア層との界面において該コレクタ兼バリア層のそれに一致するか高く;
上記ベース層の上に形成された上記エミッタ層は、該ベース層に比して相対的にワイドギャップで、価電子帯におけるエネルギ準位は該ベース層のそれよりは低い上記第一導電型の半導体層から成ること;
を特徴とするヘテロ接合バイポーラフォトトランジスタを提案する。
ベース層4およびコレクタ兼バリア層5に用いたIn0.45Ga0.55As0.47P0.31Sb0.21のバンドギャップは室温にて0.95eVで、その伝導帯はInPエミッタ層3のそれに、その価電子帯はIn0.47Ga0.53As光吸収層6のそれに、それぞれ整合されている。
下記の表1は、近中赤外帯および中赤外感度波長帯におけるバリアフリー(BF)型HPTのエピタキシャル層構成の設計例を示す。
Claims (6)
- 第一導電型の半導体層により構成された光吸収層と、該光吸収層の上にコレクタ兼バリア層、ベース層、エミッタ層が順に積層されることで構成されたトランジスタ部とを有するフォトトランジスタにおいて;
上記コレクタ兼バリア層は、伝導帯におけるエネルギ準位が該光吸収層のそれより高く、価電子帯におけるエネルギ準位が該光吸収層のそれにほぼ一致するか高い、相対的に該光吸収層よりワイドギャップな半導体層から成り;
上記コレクタ兼バリア層の上に形成された上記ベース層は、該コレクタ兼バリア層に比して相対的にナローギャップで、その伝導帯におけるエネルギ準位は該コレクタ兼バリア層との界面において該コレクタ兼バリア層のそれに一致するか高く;
上記ベース層の上に形成された上記エミッタ層は、該ベース層に比して相対的にワイドギャップで、価電子帯におけるエネルギ準位は該ベース層のそれよりは低い上記第一導電型の半導体層から成ること;
を特徴とするヘテロ接合バイポーラフォトトランジスタ。 - 上記ベース層は、上記第一導電型とは逆極性の第二導電型の半導体層から成ること;
を特徴とする請求項1記載のヘテロ接合バイポーラフォトトランジスタ。 - 上記ベース層は、その中央部分は上記第一導電型の半導体層から成るが、周辺部は該中央部分とは逆極性の第二導電型となっていること;
を特徴とする請求項1記載のヘテロ接合バイポーラフォトトランジスタ。 - 上記光吸収層と上記コレクタ兼バリア層がメサ構造として構成され、該メサ構造の露呈側面部分が上記第一導電型あるいは該第一導電型とは逆極性の第二導電型に統一され、該光吸収層と該コレクタ兼バリア層により構成されるpn接合部分が側面において露出しないこと;
を特徴とする請求項1記載のヘテロ接合バイポーラフォトトランジスタ。 - 上記光吸収層をInGaAs、上記コレクタ兼バリア層をInGaAsPSb、上記ベース層をInGaAsPSb、上記エミッタ層をInP半導体で構成したこと;
を特徴とする請求項1記載のヘテロ接合バイポーラフォトトランジスタ。 - 上記光吸収層をInAsあるいはInAsSb、上記コレクタ兼バリア層をInAlAsSb、上記ベース層をInGaSbあるいはInGaAsSb半導体、そして上記エミッタ層をInAlAsSb半導体で構成したこと;
を特徴とする請求項1記載のヘテロ接合バイポーラフォトトランジスタ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2010550573A JP5288357B2 (ja) | 2009-02-13 | 2010-02-12 | ヘテロ接合バイポーラフォトトランジスタ |
Applications Claiming Priority (6)
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JP2009031236 | 2009-02-13 | ||
JP2009031236 | 2009-02-13 | ||
JP2009031235 | 2009-02-13 | ||
JP2009031235 | 2009-02-13 | ||
JP2010550573A JP5288357B2 (ja) | 2009-02-13 | 2010-02-12 | ヘテロ接合バイポーラフォトトランジスタ |
PCT/JP2010/052485 WO2010093058A1 (ja) | 2009-02-13 | 2010-02-12 | ヘテロ接合バイポーラフォトトランジスタ |
Publications (2)
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JPWO2010093058A1 JPWO2010093058A1 (ja) | 2012-08-16 |
JP5288357B2 true JP5288357B2 (ja) | 2013-09-11 |
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JP2010550573A Expired - Fee Related JP5288357B2 (ja) | 2009-02-13 | 2010-02-12 | ヘテロ接合バイポーラフォトトランジスタ |
Country Status (3)
Country | Link |
---|---|
US (1) | US9076906B2 (ja) |
JP (1) | JP5288357B2 (ja) |
WO (1) | WO2010093058A1 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
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KR101897257B1 (ko) * | 2012-05-14 | 2018-09-11 | 한국전자통신연구원 | 광 검출기 및 그를 구비한 광학 소자 |
IL220675B (en) * | 2012-06-28 | 2019-10-31 | Elta Systems Ltd | phototransistor |
IL225872A (en) | 2013-04-22 | 2015-03-31 | Semi Conductor Devices An Elbit Systems Rafael Partnership | Photo detector semi-conductor with barrier |
US9515210B2 (en) | 2013-05-07 | 2016-12-06 | L-3 Communications Cincinnati Electronics Corporation | Diode barrier infrared detector devices and superlattice barrier structures |
EP2975652B1 (en) * | 2014-07-15 | 2019-07-17 | Fundació Institut de Ciències Fotòniques | Optoelectronic apparatus and fabrication method of the same |
US10032950B2 (en) * | 2016-02-22 | 2018-07-24 | University Of Virginia Patent Foundation | AllnAsSb avalanche photodiode and related method thereof |
US9818896B1 (en) * | 2016-12-08 | 2017-11-14 | The Boeing Company | Graded infrared photodetector and method |
US10453984B2 (en) | 2017-03-23 | 2019-10-22 | Wavefront Holdings, Llc | Conductive isolation between phototransistors |
US11309412B1 (en) * | 2017-05-17 | 2022-04-19 | Northrop Grumman Systems Corporation | Shifting the pinch-off voltage of an InP high electron mobility transistor with a metal ring |
US10002979B1 (en) * | 2017-05-30 | 2018-06-19 | Wavefront Holdings, Llc | Unipolar doping in photodiode and phototransistor |
US11641003B2 (en) * | 2019-12-03 | 2023-05-02 | Northwestern University | Methods of fabricating planar infrared photodetectors |
CN113436963B (zh) * | 2021-06-28 | 2022-05-20 | 吉林大学 | 一种二维半导体调制掺杂的覆盖层筛选方法及所得异质结 |
TWI822144B (zh) * | 2022-06-28 | 2023-11-11 | 國立清華大學 | 太赫茲元件的製造方法 |
Citations (1)
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JP2008227328A (ja) * | 2007-03-15 | 2008-09-25 | Nippon Telegr & Teleph Corp <Ntt> | 光検出器 |
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US6049099A (en) * | 1998-05-11 | 2000-04-11 | The United States Of America As Represented By The Secretary Of The Air Force | Cadmium sulfide layers for indium phosphide-based heterojunction bipolar transistors |
JP4134715B2 (ja) * | 2002-12-19 | 2008-08-20 | 住友電気工業株式会社 | バイポーラトランジスタ |
US7635879B2 (en) | 2004-09-30 | 2009-12-22 | The United States Of America As Represented By The Secretary Of The Navy | InAlAsSb/InGaSb and InAlPSb/InGaSb heterojunction bipolar transistors |
CN101356653B (zh) * | 2006-02-14 | 2012-01-25 | 独立行政法人产业技术综合研究所 | 光控场效应晶体管和使用它的集成光电检测器 |
TW200832725A (en) * | 2007-01-18 | 2008-08-01 | Univ Nat Central | Method of improving current distribution by non-uniform conductive layer |
JP5004107B2 (ja) * | 2008-02-25 | 2012-08-22 | 独立行政法人産業技術総合研究所 | 光電界効果トランジスタ,及びその製造方法 |
-
2010
- 2010-02-12 WO PCT/JP2010/052485 patent/WO2010093058A1/ja active Application Filing
- 2010-02-12 JP JP2010550573A patent/JP5288357B2/ja not_active Expired - Fee Related
- 2010-02-12 US US13/138,410 patent/US9076906B2/en not_active Expired - Fee Related
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JP2008227328A (ja) * | 2007-03-15 | 2008-09-25 | Nippon Telegr & Teleph Corp <Ntt> | 光検出器 |
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Publication number | Publication date |
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US9076906B2 (en) | 2015-07-07 |
JPWO2010093058A1 (ja) | 2012-08-16 |
US20110291158A1 (en) | 2011-12-01 |
WO2010093058A1 (ja) | 2010-08-19 |
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