JP5276979B2 - 平坦基板を製造する方法 - Google Patents
平坦基板を製造する方法 Download PDFInfo
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- JP5276979B2 JP5276979B2 JP2008518843A JP2008518843A JP5276979B2 JP 5276979 B2 JP5276979 B2 JP 5276979B2 JP 2008518843 A JP2008518843 A JP 2008518843A JP 2008518843 A JP2008518843 A JP 2008518843A JP 5276979 B2 JP5276979 B2 JP 5276979B2
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- Thin Film Transistor (AREA)
Description
本発明は、少なくとも2500cm2の広さを有し、真空反応装置内でPECVDプロセスによって蒸着されたケイ素層を有する平坦基板の製造に関する。それにより、基板を製造し、ここで、ケイ素層は、一般的には、薄膜トランジスタ・ディスプレイ(TFT)用、液晶ディスプレイ(LCD)用、太陽電池用、または有機発光ディスプレイ(OLED)用の平坦基板の製造などの場合、半導体素子の一部になる。
ラジカルは、特に、ステップe)においてμc−Si層を成長させるために使用されるプラズマからもたらされる。基板の外周に向けてのエッチング速度の増加は、基板のより中心近くでのエッチング・ラジカルの割合と比較して、基板の端近くでのこれらのエッチング・ラジカルのより高い割合によって引き起こされると考えられる。これは、フッ素に対してアルミニウム合金の化学的中性性が良好であることを知ることにより理解でき、その合金は、半導体組立真空反応装置の壁に慣習的に使用されている。そのような化学的中性性−消耗の減少−は、反応装置の内壁のアルミニウム合金の表面に沿ってエッチング・ラジカルの割合を増加させ、したがって、基板の周囲でエッチング速度を増加させる。真空反応装置の設置面積は、そこで製造される基板の寸法の観点から、慣習的にできるだけ小さい寸法とされることを指摘しなくてはならない。したがって、反応装置の金属壁と製造される基板の端または外周との間の間隔は、そのような壁の言及された作用を無視することができるほど大きくは調整されない。
安定性が向上されることが確かめられる。
さらに、本発明による方法のさらなる実施形態では、ステップe)において、ケイ素含有ガス、ハロゲン含有ガスおよび水素を含むガス混合物をプラズマ活性化する。
言及したすべての実施形態での本発明による方法は、薄膜トランジスタ・ディスプレイ基板または液晶ディスプレイ基板または太陽電池基板または有機発光ディスプレイ・パネルの製造に非常に適している。それにより、そのような基板で、言及されたμc−Si層は、半導体素子の固有Si層になり、それは、当業者に完全に明らかであるように、好ましくは同じ反応装置内で真空遮断することなく、さらなる層を蒸着することによって、ステップe)に従って実現される。したがって、言及されたステップe)と言及されたステップf)との間で、平坦基板の製造が終了する前に、およびステップf)を次の単一の基板を製造するために行う前に、1つまたは複数のさらなる処理ステップを行ってもよいことを強調しなければならない。
ア電極11が設けられており、それは、そのような場合、真空反応装置1の壁3からの基板キャリア電極11の電気絶縁性を必要とする。非伝導性または少なくとも伝導性の非常に低い層を蒸着するために適するように、電源ユニット7によって、電力を2つの電極5、11に印加する。このように、電源ユニット7は、電極5、11の電気的RF電源またはDCバイアスを有するRF電源またはパルスRF電源または高繰り返し周波数のパルス化DC電源などを備えている。
、十分に本発明による効果を引き出すために必ず被覆しなければならない。図2によれば、プレコーティング後のさらなるステップで、図1の反応装置のタイプを利用して、少なくとも2500cm2の広さを有する、例えば、ガラスからなる1つの単一の表面の大きな基板を反応装置内に導入し、基板キャリア電極11上に置く。それにより、現今の操作された実施形態では、基板15は、基板キャリア電極11より小さく、その結果、電極11は、基板の周囲全体に突出している。
基板15上に誘電体層17を蒸着するとき、被覆される基板15に隣接する反応空間3から見られ得る壁3の金属面は、既に実質的に存在しないことを留意されたい。したがって、基板15上に誘電体層17を蒸着する場合、そのような金属面が、蒸着平衡に対するエッチングに影響を及ぼすことはない。それにより、既に、誘電体層17を、基板15の表面15Oすべてにわたって、実質的に一定の厚みおよび実質的に一定の材料特性で蒸着する。基板15上に誘電体層の蒸着を行った後、言及した誘電体層17上に、μc−Siのケイ素層をPECVD蒸着する。このμc−Si層は、参照番号19の破線で、図3に示している。PECVDによって、μc−Si層19を蒸着する場合、反応空間Rは、再度、基板15の外周部に沿って蒸着平衡に対するエッチングを変更する壁3の金属面のいずれも見ないことを強調しなければならない。μc−Si層の厚みおよび構造は、基板表面15に沿って均一になる。
前の、後の層のための蒸着ステップを、有利には同一の真空反応装置内で行うことにさらに留意しなければならない。
実施例1
ボトムゲート(BG)μc−Si:H TFTを、200℃〜約330℃で製造した。まず、SF6/O2ガス混合物でプラズマ洗浄することによって反応装置の壁を洗浄した。次いで、反応装置の壁を低ストレスSiN層で被覆した。これに関して、既に言及したとおり、プレコーティングのための最適厚みは、200nm〜約500nmである。
PECVDシステムに、SiH4を110sccm、NH3を800sccm、N2を800sccm、H2を500sccm注入した。プロセス圧力は、0.75mbarであり、RF電力は、電極表面5000cm2につき850Wであった。基板はここでも、720mm×650mmのガラス基板(基板表面は約4700cm2)であった。言及されたパラメーターは、反応装置の有意な内表面積に沿って、図1によってプレコート誘電体層13として低い内部応力を有する非晶質窒化ケイ素の蒸着をもたらした。プレコーティング層の蒸着後、言及された寸法のガラス基板を、図1の反応装置1としての真空反応装置内に移動し、層のTFT蒸着物を、真空を遮断することなく、本技術分野で公知の次のような技術および手法で蒸着した。第1の層は、プレコーティング層として、同じ誘電体、従って、窒化ケイ素からなる。基板上に蒸着されたこの誘電体層についての典型的な厚みも、200nm〜500nmである。基板に塗布された誘電体層の厚みに関して、図3の層17は、300nm未満であり、図3のプレコーティング層13の厚みは、少なくとも400nmであることが要求されてもよい。これは、均一性の必要条件が百分率であり、より薄い層について実現されることがより重大であるからである。
子がオフ状態(Ioff)である場合に、電流の漏出を回避するために、必要に応じて、さらなるa−Si:H材料層をオーム接触層の蒸着に先立って添加してもよい。考えられる高い蒸着速度により、標準非晶質ケイ素層を有するμc−Siの固有層を完成させると、平均機械処理能力が向上する可能性がある。
実施例2
実施例1の状況で説明したように、プレコーティング層の蒸着後に、ガラス基板をPECVD真空反応装置に移動し、TFT層蒸着物を異なる誘電体層から蒸着する。それにより、80sccmのSiH4、350sccmのNH3、620sccmのN2および1200sccmのH2を注入した。プロセス圧力は、750WのRF電力で0.6mbarであった。次いで、フッ素リッチ−ケイ素リッチ、水素−希ガスの検討例の比率が10:1:100:400である、大部分がSiF4などのフッ素リッチケイ素含有ガス、ケイ素リッチガス、SiH4、水素、および不活性ガス、Arを含むガス混合物から、約150nmの厚みでμc−Si層を蒸着した。層の蒸着物を機能性TFTを達成するために、約30nmの厚みでn+a−Si:H接触層の蒸着によって完成させた。ここで指定しないパラメーターは、すべて、実施例1と同様であった。
実施例3
BGμc−Si:H TFTは、200℃〜約330℃で製造した。まず、洗浄後、反応装置の壁を、400nmの厚みで誘電体プレコートによってプレコートした。プレコート層は、フッ素化酸化ケイ素からなる。実施例1、2に使用される装置では、0.5mbarのプロセス圧力および200WのRF電力で、そのような層を、100sccmのSiH4、100sccmのSiF4、400sccmのN2O、100sccmのArを使用して蒸着した。基板の範囲は、実施例1、2で言及したとおりである。これらのパラメーターは、低い内部応力を有する非晶質フッ素化酸化ケイ素の蒸着をもたらした。そのようなプレコート層を蒸着した後、ガラス基板を、反応チャンバに移動し、本技術分野で公知の技術および手法でTFT積層物をPECVD反応装置内で真空を遮断することなく蒸着した。例えば、第1の層、誘電体層を、以下の手法でPECVDによって蒸着した:0.6mbarのプロセス圧力および750WのRF電力で、80sccmのSiH4、350sccmのNH3、620sccmのN2、1200sccmのH2。次いで、約120nmの厚みでμc−Si層を、大部分がSiF4などのフッ素リッチケイ素ガス、水素および不活性ガスのArを含むガス混合物から、SiF4/H2の比率が1:1:1:10の範囲で、SiF4/不活性ガスの比率を1:10〜約1:30として蒸着した。μc−Si層を、230℃の反応装置の温度で毎秒およそ0.1nmの蒸着速度で蒸着した。次いで、層の積層物を機能性TFTを達成するために、つまり、約30nmのn+a−Si:H接触層の蒸着によって完成させた。
よび図5に示す結果をもたらす基板の処理に関して同様とした。明らかにわかるように、本発明による処理は、基板に沿ってその端までの厚み均一性の著しい向上、すなわち、プレコートなしの平均厚みに対して、25%の偏差の向上をもたらし、プレコートを適用する場合の平均の厚みに対して7%の著しく低減した偏差をもたらした。
まず、それが、直接測定されずに、偏光解析スペクトルに直接由来する光学指数から計算されたからである。
Claims (19)
- 少なくとも2500cm2の広さを有し、基板キャリア第1電極と、基板キャリア第1電極から間隔をあけられたガス・シャワー第2電極とを有する真空反応装置内でPECVDプロセスによって蒸着されたμc−Si層を有する平坦基板を製造する方法であって、
a)前記電極間の反応空間内でRFプラズマ放電を生成するステップと、
b)前記反応装置の内面の少なくとも一部の上に200nm≦d≦400nmの厚みdを有する誘電体プレコートを蒸着するステップと、
c)前記反応装置内に1つの基板を導入するステップと、
d)前記基板の表面に200nm〜500nmの厚みを有する誘電体層を蒸着するステップと、
e)前記誘電体層上に前記μc−Si層としてSi層をPECVD蒸着するステップと、
f)ステップb)〜e)を繰り返して、各単一の基板を製造するステップと、を有する、方法。 - 基板キャリア第1電極と、基板キャリア第1電極から間隔をあけられたガス・シャワー第2電極と、を有する前記反応装置を準備するステップと、
ステップc)において、前記基板を導入して、前記第1の基板キャリア電極上に存在させるステップと、を有する、請求項1の方法。 - 前記反応装置の内面の少なくとも一部の上に誘電体プレコートを蒸着するステップと、前記基板の第2の表面上に誘電体層を蒸着するステップの少なくとも1つは、PECVD処理によって行われる、請求項1の方法。
- 前記誘電体層に前記Si層を蒸着するステップは、エッチング・ラジカルおよび層成長寄与ラジカルを生成するガスまたはガス混合物をプラズマ活性化するステップを含む、請求項1の方法。
- 前記ガスまたはガス混合物は、SiF4を含む、請求項4の方法。
- ステップe)は、ケイ素含有ガス、ハロゲン含有ガス、水素を含むガス混合物をプラズマ活性化するステップを含む、請求項1の方法。
- ステップe)は、ガスまたは希ガスを含むガス混合物をプラズマ活性化するステップを含む、請求項1の方法。
- 前記基板の少なくとも前記表面は、ガラスからなる、請求項1の方法。
- ステップb)およびステップd)のうちの少なくとも1つは、酸化ケイ素、窒化ケイ素、酸窒化ケイ素、フッ素化酸化ケイ素のうちの少なくとも1つを蒸着するステップを含む、請求項1の方法。
- ステップb)は、窒化ケイ素を蒸着するステップを含む、請求項1の方法。
- 前記ステップb)は、非晶質材料構造の層として、前記誘電体プレコートを蒸着するステップを含む、請求項1の方法。
- ステップb)において蒸着された前記プレコートの材料と、ステップd)において蒸着された前記誘電体層の材料とが等しい、請求項1の方法。
- ステップb)を行う前に、反応装置の内面の前記少なくとも一部をプラズマ洗浄するステップをさらに含む、請求項1の方法。
- 前記洗浄ステップを、プラズマ活性化SF6および酸素中で行う、請求項13の方法。
- 薄膜トランジスタ・ディスプレイ基板を製造する、請求項1の方法。
- 液晶ディスプレイ基板を製造する、請求項1の方法。
- 太陽電池基板を製造する、請求項1の方法。
- 有機発光ディスプレイ・パネルを製造する、請求項1の方法。
- 半導体素子の層としてのμc−Si層を有する基板を製造する、請求項1の方法。
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-
2006
- 2006-06-28 JP JP2008518843A patent/JP5276979B2/ja not_active Expired - Fee Related
- 2006-06-28 CN CN2006800231103A patent/CN101208457B/zh not_active Expired - Fee Related
- 2006-06-28 WO PCT/EP2006/063660 patent/WO2007000469A1/en not_active Application Discontinuation
- 2006-06-28 EP EP06763956.7A patent/EP1899498B1/en not_active Not-in-force
- 2006-06-28 US US11/427,048 patent/US7514374B2/en not_active Expired - Fee Related
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EP1899498B1 (en) | 2014-05-21 |
US7514374B2 (en) | 2009-04-07 |
WO2007000469A1 (en) | 2007-01-04 |
JP2009500813A (ja) | 2009-01-08 |
US20090155494A1 (en) | 2009-06-18 |
CN101208457B (zh) | 2010-12-29 |
EP1899498A1 (en) | 2008-03-19 |
CN101208457A (zh) | 2008-06-25 |
US7897966B2 (en) | 2011-03-01 |
US20070004220A1 (en) | 2007-01-04 |
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