JP5276128B2 - 流体プローブ - Google Patents
流体プローブ Download PDFInfo
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- JP5276128B2 JP5276128B2 JP2011001311A JP2011001311A JP5276128B2 JP 5276128 B2 JP5276128 B2 JP 5276128B2 JP 2011001311 A JP2011001311 A JP 2011001311A JP 2011001311 A JP2011001311 A JP 2011001311A JP 5276128 B2 JP5276128 B2 JP 5276128B2
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- flexible element
- fluid
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N11/00—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
- G01N11/10—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material
- G01N11/16—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material by measuring damping effect upon oscillatory body
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
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- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Pathology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Health & Medical Sciences (AREA)
- Fluid Mechanics (AREA)
- Testing Or Calibration Of Command Recording Devices (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
- Measuring Volume Flow (AREA)
- Micromachines (AREA)
- Geophysics And Detection Of Objects (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Temperature-Responsive Valves (AREA)
- Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Description
制層間剥離するために、第1の付着促進剤層2aに開口を得る。パターンは、基本的に、固定層イメージの逆である。即ち、矩形構造の開口端に囲まれた領域上に溶着された材料が、最終的に可撓性要素3を形成することとなる。それに対して、この領域の周囲に溶着された材料が、可撓性要素3がそこから解放されることとなる固定層を形成することとなる。該パターンは、寸法500μm×80μmの長方形の3辺により定義される細いトラックであり、それによって、矩形構造の‘開口端’である。これは事実上、可撓性要素3のサイズも500μm×80μmに定義している。開口端において、解放された状態で、可撓性要素3の一端部は、本体部2から伸びる他方が自由に動く間、本体部2に固定されたままである。
機械的防護のために、PI2566の第2層が、ヒーター4構造に埋めこまれる様にスピンコートされ得ることは、言うまでもない。
が出来る。
度上昇がない。ヒーター4は、熱を消散させる導電材料でもよい。ヒーター4は、非一体型電気伝導フィラメントの様な、別個の装置でもよい。ヒーター4は、電気伝導材料の蒸着薄膜であってもよい。ヒーター4は、伝導材料のトラックでもよい。例えば、ヒーター4は、可撓性要素3に沿って、可撓性要素3を前後に往復する波状曲線であってもよい。従って、それについて均一な熱の消散を生じる。
Claims (13)
- 撓みによって第1形状から第2形状に可動である可撓性要素と、可撓性要素を第1形状と第2形状との間で動かすための作動部分とを備えた検出要素を使用して、流体の特性を測定する方法であって、
前記可撓性要素に熱信号を印加することによって、前記可撓性要素における第1形状と第2形状との間の動きを誘発することと、
前記検出要素から、前記流体中での可撓性要素の誘発された動きを示す信号を受信することと、
前記信号を処理して、前記流体の少なくとも1つの特性を示す値を測定することとを含み、
該方法は、可撓性要素を磁力または静電気力によって前記2つの形状のうち少なくとも1つに保持することをさらに含む方法。 - 前記信号は、粘性、温度、流れ率、及び剪断率から構成される1つの群の少なくとも1つの特性を示す値を測定するために処理される請求項1記載の方法。
- 時間とともに受信信号の変化をモニタすることによって、前記可撓性要素の動きの変化率を測定することと、
前記動きの変化率から、前記流体の粘性を示す値を測定することとをさらに含む請求項2記載の方法。 - 所定の印加熱信号による前記受信信号から、前記可撓性要素の動きの大きさを測定することと、
前記大きさから前記流体の粘性を示す値を測定することとをさらに含む請求項2記載の方法。 - 前記可撓性要素の前記作動部分は、各層が異なる熱膨張係数を有する少なくとも2層の積層体を具えており、
熱信号の印加による動きの誘発の前に、前記流体の温度を示す値が測定される請求項1〜4のいずれかに記載の方法。 - 装置は、複数の可撓性要素を具えており、
前記複数の可撓性要素が、前記流体の少なくとも1つの特性を示す値を、複数位置で測定するために用いられる様になっている請求項1〜5のいずれかに記載の方法。 - 流体の特性を検出するための装置であって、
本体部と、
第1端および第2端を有する可撓性要素とを備え、
前記第1端は、前記本体部に固定的に設置され、前記可撓性要素は、撓みによって少なくとも第1形状から第2形状へと動くように構成され、
前記可撓性要素は、少なくとも2層の積層体と、前記可撓性要素を前記第1形状と前記第2形状との間で動かすための作動部とを備え、
該作動部には、少なくとも、前記積層体の第2層とは異なる熱膨張係数を有する前記積層体の第1層が設けられ、前記可撓性要素の温度変化が、可撓性要素を前記第1形状から前記第2形状へと動かす様になっており、
前記可撓性要素は、少なくとも前記可撓性要素を加熱し、それによって前記温度変化を与えるための加熱要素をさらに備え、
該装置は、前記可撓性要素の前記動きを検出し、可撓性要素が浸されている流体の特性を示す信号を供給するための動作検出器をさらに備えており、
該装置は、可撓性要素を、前記2つの形状うち少なくとも1つに保持するための係合手段をさらに備える装置。 - 前記動作検出器は、前記可撓性要素上に設置されたピエゾ抵抗素子を具えており、前記可撓性要素の動きによって、ピエゾ抵抗素子の電気抵抗が変化する様になっている請求項7記載の装置。
- 前記積層体の第1層および第2層の少なくとも1つは、ポリマーを含む請求項7または8記載の装置。
- 前記積層体の第1層および第2層の少なくとも1つは、ポリイミド、ポリアミド、及びアクリル系ポリマーから成る群から選ばれた材料を含む請求項9記載の装置。
- 前記積層体の第2層は、金属を含む請求項7〜10のいずれかに記載の装置。
- 金属は、金、或いはアルミニウムから成る群から選ばれる請求項11記載の装置。
- 可撓性要素の第1端から第2端までの長さは、100μm〜1mmであり、
前記第1形状での可撓性要素の第2端と、前記第2形状での可撓性要素の第2端との間の距離は、30μm〜650μmである請求項7〜12のいずれかに記載の装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0328054.2A GB0328054D0 (en) | 2003-12-04 | 2003-12-04 | Fluid probe |
GB0328054.2 | 2003-12-04 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006542012A Division JP4742197B2 (ja) | 2003-12-04 | 2004-12-03 | 流体プローブ |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011069188A Division JP5352611B2 (ja) | 2003-12-04 | 2011-03-28 | 流体プローブ |
Publications (2)
Publication Number | Publication Date |
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JP2011102810A JP2011102810A (ja) | 2011-05-26 |
JP5276128B2 true JP5276128B2 (ja) | 2013-08-28 |
Family
ID=29764521
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006542012A Expired - Fee Related JP4742197B2 (ja) | 2003-12-04 | 2004-12-03 | 流体プローブ |
JP2011001311A Expired - Fee Related JP5276128B2 (ja) | 2003-12-04 | 2011-01-06 | 流体プローブ |
JP2011069188A Expired - Fee Related JP5352611B2 (ja) | 2003-12-04 | 2011-03-28 | 流体プローブ |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
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JP2006542012A Expired - Fee Related JP4742197B2 (ja) | 2003-12-04 | 2004-12-03 | 流体プローブ |
Family Applications After (1)
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JP2011069188A Expired - Fee Related JP5352611B2 (ja) | 2003-12-04 | 2011-03-28 | 流体プローブ |
Country Status (8)
Country | Link |
---|---|
US (3) | US7775084B2 (ja) |
EP (1) | EP1690077B1 (ja) |
JP (3) | JP4742197B2 (ja) |
CN (4) | CN102269686B (ja) |
AT (1) | ATE427478T1 (ja) |
DE (1) | DE602004020377D1 (ja) |
GB (1) | GB0328054D0 (ja) |
WO (1) | WO2005054817A1 (ja) |
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2003
- 2003-12-04 GB GBGB0328054.2A patent/GB0328054D0/en not_active Ceased
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2004
- 2004-12-03 JP JP2006542012A patent/JP4742197B2/ja not_active Expired - Fee Related
- 2004-12-03 AT AT04805908T patent/ATE427478T1/de not_active IP Right Cessation
- 2004-12-03 WO PCT/GB2004/005079 patent/WO2005054817A1/en active Application Filing
- 2004-12-03 US US10/596,208 patent/US7775084B2/en active Active
- 2004-12-03 EP EP04805908A patent/EP1690077B1/en not_active Not-in-force
- 2004-12-03 CN CN201110139143.7A patent/CN102269686B/zh not_active Expired - Fee Related
- 2004-12-03 CN CN2011101448168A patent/CN102221515A/zh active Pending
- 2004-12-03 CN CN2004800413367A patent/CN1914498B/zh not_active Expired - Fee Related
- 2004-12-03 CN CN2011101355835A patent/CN102192866B/zh not_active Expired - Fee Related
- 2004-12-03 DE DE602004020377T patent/DE602004020377D1/de active Active
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2010
- 2010-06-21 US US12/819,873 patent/US8210030B2/en not_active Expired - Fee Related
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2011
- 2011-01-06 JP JP2011001311A patent/JP5276128B2/ja not_active Expired - Fee Related
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EP1690077B1 (en) | 2009-04-01 |
CN102269686A (zh) | 2011-12-07 |
US20080028837A1 (en) | 2008-02-07 |
JP4742197B2 (ja) | 2011-08-10 |
CN102221515A (zh) | 2011-10-19 |
CN102192866A (zh) | 2011-09-21 |
ATE427478T1 (de) | 2009-04-15 |
GB0328054D0 (en) | 2004-01-07 |
JP5352611B2 (ja) | 2013-11-27 |
JP2007516438A (ja) | 2007-06-21 |
CN102269686B (zh) | 2015-05-06 |
US20100251806A1 (en) | 2010-10-07 |
US8210030B2 (en) | 2012-07-03 |
CN1914498A (zh) | 2007-02-14 |
JP2011154036A (ja) | 2011-08-11 |
US20110302996A1 (en) | 2011-12-15 |
DE602004020377D1 (de) | 2009-05-14 |
CN102192866B (zh) | 2013-11-20 |
CN1914498B (zh) | 2012-01-04 |
US8607619B2 (en) | 2013-12-17 |
JP2011102810A (ja) | 2011-05-26 |
WO2005054817A1 (en) | 2005-06-16 |
US7775084B2 (en) | 2010-08-17 |
EP1690077A1 (en) | 2006-08-16 |
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