IT1402181B1 - Dispositivo microelettromeccanico elettro-attivo e relativo procedimento di rivelazione - Google Patents

Dispositivo microelettromeccanico elettro-attivo e relativo procedimento di rivelazione

Info

Publication number
IT1402181B1
IT1402181B1 ITTO2010A000748A ITTO20100748A IT1402181B1 IT 1402181 B1 IT1402181 B1 IT 1402181B1 IT TO2010A000748 A ITTO2010A000748 A IT TO2010A000748A IT TO20100748 A ITTO20100748 A IT TO20100748A IT 1402181 B1 IT1402181 B1 IT 1402181B1
Authority
IT
Italy
Prior art keywords
microelettromechanical
electro
active
detection procedure
relative detection
Prior art date
Application number
ITTO2010A000748A
Other languages
English (en)
Inventor
Adriana Passaseo
Vittorio Massimo De
Antonio Qualtieri
Gianmichele Epifani
Francesco Rizzi
Maria Teresa Todaro
Original Assignee
Fond Istituto Italiano Di Tecnologia
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fond Istituto Italiano Di Tecnologia filed Critical Fond Istituto Italiano Di Tecnologia
Priority to ITTO2010A000748A priority Critical patent/IT1402181B1/it
Priority to PCT/IB2011/053997 priority patent/WO2012035491A1/en
Priority to EP11773859.1A priority patent/EP2617074B1/en
Priority to US13/822,208 priority patent/US20130283922A1/en
Publication of ITTO20100748A1 publication Critical patent/ITTO20100748A1/it
Application granted granted Critical
Publication of IT1402181B1 publication Critical patent/IT1402181B1/it

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/02Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring forces exerted by the fluid on solid bodies, e.g. anemometer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04Fine scanning or positioning
    • G01Q10/045Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/03Assembling devices that include piezoelectric or electrostrictive parts
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/05Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041Beam type
    • H10N30/2042Cantilevers, i.e. having one fixed end
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00Methods or apparatus for measurement or analysis of nanostructures

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Micromachines (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
ITTO2010A000748A 2010-09-13 2010-09-13 Dispositivo microelettromeccanico elettro-attivo e relativo procedimento di rivelazione IT1402181B1 (it)

Priority Applications (4)

Application Number Priority Date Filing Date Title
ITTO2010A000748A IT1402181B1 (it) 2010-09-13 2010-09-13 Dispositivo microelettromeccanico elettro-attivo e relativo procedimento di rivelazione
PCT/IB2011/053997 WO2012035491A1 (en) 2010-09-13 2011-09-13 Electro-active microelectromechanical device and corresponding detection process
EP11773859.1A EP2617074B1 (en) 2010-09-13 2011-09-13 Electro-active microelectromechanical device and corresponding detection process
US13/822,208 US20130283922A1 (en) 2010-09-13 2011-09-13 Electro-active microelectromechanical device and corresponding detection process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO2010A000748A IT1402181B1 (it) 2010-09-13 2010-09-13 Dispositivo microelettromeccanico elettro-attivo e relativo procedimento di rivelazione

Publications (2)

Publication Number Publication Date
ITTO20100748A1 ITTO20100748A1 (it) 2012-03-14
IT1402181B1 true IT1402181B1 (it) 2013-08-28

Family

ID=43739139

Family Applications (1)

Application Number Title Priority Date Filing Date
ITTO2010A000748A IT1402181B1 (it) 2010-09-13 2010-09-13 Dispositivo microelettromeccanico elettro-attivo e relativo procedimento di rivelazione

Country Status (4)

Country Link
US (1) US20130283922A1 (it)
EP (1) EP2617074B1 (it)
IT (1) IT1402181B1 (it)
WO (1) WO2012035491A1 (it)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9414500B2 (en) 2009-06-02 2016-08-09 Hsio Technologies, Llc Compliant printed flexible circuit
US9761520B2 (en) 2012-07-10 2017-09-12 Hsio Technologies, Llc Method of making an electrical connector having electrodeposited terminals
US20140283604A1 (en) * 2012-10-26 2014-09-25 The Regents Of The University Of Michigan Three-dimensional microelectromechanical systems structure
US9038269B2 (en) * 2013-04-02 2015-05-26 Xerox Corporation Printhead with nanotips for nanoscale printing and manufacturing
US10667410B2 (en) 2013-07-11 2020-05-26 Hsio Technologies, Llc Method of making a fusion bonded circuit structure
WO2016007791A1 (en) * 2014-07-09 2016-01-14 Emx, International Llc Micro-bolometer having an adjustable dynamic range
US9755335B2 (en) * 2015-03-18 2017-09-05 Hsio Technologies, Llc Low profile electrical interconnect with fusion bonded contact retention and solder wick reduction
US9761787B2 (en) * 2015-06-02 2017-09-12 The Board Of Trustees Of The University Of Alabama Consensus-based multi-piezoelectric microcantilever sensor
WO2017036815A1 (en) * 2015-08-31 2017-03-09 Koninklijke Philips N.V. Actuator or sensor device based on an electroactive or photoactive polymer
US10353503B2 (en) 2015-10-29 2019-07-16 Texas Instruments Incorporated Integrated force sensing element
WO2017087839A1 (en) * 2015-11-20 2017-05-26 University of Virginia Patent Foundation, d/b/a University of Virginia Licensing & Ventures Group Flexible, self-rolled superficial flow sensor
US10191076B1 (en) * 2015-11-24 2019-01-29 Board Of Trustees Of The University Of Alabama, For And On Behalf Of The University Of Alabama In Huntsville Airflow sensing systems and methods
JP6073512B1 (ja) * 2016-03-10 2017-02-01 株式会社フジクラ 差圧検出素子、流量計測装置、及び、差圧検出素子の製造方法
WO2018148510A1 (en) 2017-02-09 2018-08-16 Nextinput, Inc. Integrated piezoresistive and piezoelectric fusion force sensor
CN116907693A (zh) 2017-02-09 2023-10-20 触控解决方案股份有限公司 集成数字力传感器和相关制造方法
WO2019023552A1 (en) * 2017-07-27 2019-01-31 Nextinput, Inc. PIEZORESISTIVE AND PIEZOELECTRIC FORCE SENSOR ON WAFER AND METHODS OF MANUFACTURING THE SAME
US11579028B2 (en) 2017-10-17 2023-02-14 Nextinput, Inc. Temperature coefficient of offset compensation for force sensor and strain gauge
US11047874B1 (en) * 2017-10-18 2021-06-29 Government Of The United States As Represented By The Secretary Of The Air Force System, apparatus and method for predicting aerodynamic parameters using artifical hair sensor array
US10952642B2 (en) * 2017-11-09 2021-03-23 Amorepacific Corporation Strain sensor unit and skin sensor module comprising the same
WO2019099821A1 (en) 2017-11-16 2019-05-23 Nextinput, Inc. Force attenuator for force sensor
US11220422B2 (en) * 2019-03-14 2022-01-11 Taiwan Semiconductor Manufacturing Company Ltd. MEMS device
CN112885729B (zh) * 2019-11-29 2022-12-13 成都辰显光电有限公司 Led测试头、led测试装置及led测试装置的制备方法
US11864465B2 (en) * 2020-05-22 2024-01-02 Wisconsin Alumni Research Foundation Integration of semiconductor membranes with piezoelectric substrates
CN111965384B (zh) * 2020-08-03 2022-08-12 上海交通大学 基于双稳态势能调节的仿生纤毛微传感器及其制备方法
CN112816733A (zh) * 2020-12-31 2021-05-18 上海芯物科技有限公司 一种压电风速计及其制作方法
CN114675050B (zh) * 2022-03-24 2024-05-10 中国电子科技集团公司第五十八研究所 一种应变计式三维mems风速风向传感器的制备方法及结构

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5914507A (en) * 1994-05-11 1999-06-22 Regents Of The University Of Minnesota PZT microdevice
AU8991898A (en) * 1997-09-05 1999-03-29 1... Limited Aerogels, piezoelectric devices, and uses therefor
US6269685B1 (en) * 1999-09-23 2001-08-07 Ut Battelle, Llc Viscosity measuring using microcantilevers
US7235914B2 (en) * 2000-10-25 2007-06-26 Washington State University Research Foundation Piezoelectric micro-transducers, methods of use and manufacturing methods for same
US6668628B2 (en) * 2002-03-29 2003-12-30 Xerox Corporation Scanning probe system with spring probe
US7260980B2 (en) * 2003-03-11 2007-08-28 Adams Jesse D Liquid cell and passivated probe for atomic force microscopy and chemical sensing
US7357035B2 (en) * 2003-06-06 2008-04-15 The Board Of Trustees Of The University Of Illinois Sensor chip and apparatus for tactile and/or flow sensing
KR100513662B1 (ko) * 2003-09-08 2005-09-09 엘지전자 주식회사 캔틸레버의 제조방법
GB0328054D0 (en) * 2003-12-04 2004-01-07 Council Cent Lab Res Councils Fluid probe
US7397169B2 (en) * 2004-03-19 2008-07-08 Lawrence Livermore National Security, Llc Energy harvesting using a thermoelectric material
US7556775B2 (en) * 2004-05-25 2009-07-07 The United States Of America As Represented By The Secretary Of The Navy Microelectro-mechanical chemical sensor
GB0605273D0 (en) * 2006-03-16 2006-04-26 Council Cent Lab Res Councils Fluid robe
US20080011058A1 (en) * 2006-03-20 2008-01-17 The Regents Of The University Of California Piezoresistive cantilever based nanoflow and viscosity sensor for microchannels
US8141427B2 (en) 2008-06-04 2012-03-27 Georgia Tech Research Corporation Piezoelectric and piezoresistive cantilever sensors
FR2951014B1 (fr) * 2009-10-06 2011-11-25 Commissariat Energie Atomique Structure d'actionnement piezoelectrique comportant une jauge de contrainte piezoresistive integree et son procede de realisation

Also Published As

Publication number Publication date
WO2012035491A1 (en) 2012-03-22
US20130283922A1 (en) 2013-10-31
EP2617074A1 (en) 2013-07-24
ITTO20100748A1 (it) 2012-03-14
EP2617074B1 (en) 2017-04-26

Similar Documents

Publication Publication Date Title
IT1402181B1 (it) Dispositivo microelettromeccanico elettro-attivo e relativo procedimento di rivelazione
BR112013009489A2 (pt) aparelho e método de conexão
BR112013012055A2 (pt) dispositivo de fenestação, sistemas e métodos
DK2544738T3 (da) Injektionsanordning
BRPI1006738A2 (pt) métodos e dispositivos optoeletrônicos para detecção de analitos
DK2479559T3 (da) Strålingsdekteteringsanordning
IT1395561B1 (it) Apparato di collaudo e relativo procedimento
IT1405344B1 (it) Linea di laminazione e relativo procedimento
FR2965795B1 (fr) Dispositif de solidarisation/desolidarisation et dispositif de largage associe
IT1398438B1 (it) Dispositivo di premacinazione e relativo procedimento
DK2568948T3 (da) Tilslutningsindretning
FI20105906A0 (fi) Laite
FR2964937B1 (fr) Triporteur et direction de triporteur
IT1403214B1 (it) Dispositivo di spostamento e di posizionamento
IT1402990B1 (it) Dispositivo di misurazione
DE102010051388A8 (de) Verbindungsvorrichtung
BR112012030878A2 (pt) dispositivo
IT1401394B1 (it) Dispositivo di sicurezza multistrato
BR112013002743A2 (pt) dispositivo de detecção de propriedade de combustível
FI20105903A0 (fi) Laite
DE112010005697A5 (de) Detektierplättchen
IT1401649B1 (it) Dispositivo di rilevamento della scrittura
BR112012024874A2 (pt) dispositivo de rotação de objetos e conjunto de rotação de objetos
IT1402832B1 (it) Dispositivo reggispinta
IT1402187B1 (it) Dispositivo di misura e relativo procedimento di misura.