IT1402181B1 - Dispositivo microelettromeccanico elettro-attivo e relativo procedimento di rivelazione - Google Patents
Dispositivo microelettromeccanico elettro-attivo e relativo procedimento di rivelazioneInfo
- Publication number
- IT1402181B1 IT1402181B1 ITTO2010A000748A ITTO20100748A IT1402181B1 IT 1402181 B1 IT1402181 B1 IT 1402181B1 IT TO2010A000748 A ITTO2010A000748 A IT TO2010A000748A IT TO20100748 A ITTO20100748 A IT TO20100748A IT 1402181 B1 IT1402181 B1 IT 1402181B1
- Authority
- IT
- Italy
- Prior art keywords
- microelettromechanical
- electro
- active
- detection procedure
- relative detection
- Prior art date
Links
- 238000001514 detection method Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/02—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring forces exerted by the fluid on solid bodies, e.g. anemometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
- G01Q10/045—Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/03—Assembling devices that include piezoelectric or electrostrictive parts
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Aviation & Aerospace Engineering (AREA)
- Micromachines (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITTO2010A000748A IT1402181B1 (it) | 2010-09-13 | 2010-09-13 | Dispositivo microelettromeccanico elettro-attivo e relativo procedimento di rivelazione |
PCT/IB2011/053997 WO2012035491A1 (en) | 2010-09-13 | 2011-09-13 | Electro-active microelectromechanical device and corresponding detection process |
EP11773859.1A EP2617074B1 (en) | 2010-09-13 | 2011-09-13 | Electro-active microelectromechanical device and corresponding detection process |
US13/822,208 US20130283922A1 (en) | 2010-09-13 | 2011-09-13 | Electro-active microelectromechanical device and corresponding detection process |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITTO2010A000748A IT1402181B1 (it) | 2010-09-13 | 2010-09-13 | Dispositivo microelettromeccanico elettro-attivo e relativo procedimento di rivelazione |
Publications (2)
Publication Number | Publication Date |
---|---|
ITTO20100748A1 ITTO20100748A1 (it) | 2012-03-14 |
IT1402181B1 true IT1402181B1 (it) | 2013-08-28 |
Family
ID=43739139
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ITTO2010A000748A IT1402181B1 (it) | 2010-09-13 | 2010-09-13 | Dispositivo microelettromeccanico elettro-attivo e relativo procedimento di rivelazione |
Country Status (4)
Country | Link |
---|---|
US (1) | US20130283922A1 (it) |
EP (1) | EP2617074B1 (it) |
IT (1) | IT1402181B1 (it) |
WO (1) | WO2012035491A1 (it) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9414500B2 (en) | 2009-06-02 | 2016-08-09 | Hsio Technologies, Llc | Compliant printed flexible circuit |
US9761520B2 (en) | 2012-07-10 | 2017-09-12 | Hsio Technologies, Llc | Method of making an electrical connector having electrodeposited terminals |
US20140283604A1 (en) * | 2012-10-26 | 2014-09-25 | The Regents Of The University Of Michigan | Three-dimensional microelectromechanical systems structure |
US9038269B2 (en) * | 2013-04-02 | 2015-05-26 | Xerox Corporation | Printhead with nanotips for nanoscale printing and manufacturing |
US10667410B2 (en) | 2013-07-11 | 2020-05-26 | Hsio Technologies, Llc | Method of making a fusion bonded circuit structure |
WO2016007791A1 (en) * | 2014-07-09 | 2016-01-14 | Emx, International Llc | Micro-bolometer having an adjustable dynamic range |
US9755335B2 (en) * | 2015-03-18 | 2017-09-05 | Hsio Technologies, Llc | Low profile electrical interconnect with fusion bonded contact retention and solder wick reduction |
US9761787B2 (en) * | 2015-06-02 | 2017-09-12 | The Board Of Trustees Of The University Of Alabama | Consensus-based multi-piezoelectric microcantilever sensor |
WO2017036815A1 (en) * | 2015-08-31 | 2017-03-09 | Koninklijke Philips N.V. | Actuator or sensor device based on an electroactive or photoactive polymer |
US10353503B2 (en) | 2015-10-29 | 2019-07-16 | Texas Instruments Incorporated | Integrated force sensing element |
WO2017087839A1 (en) * | 2015-11-20 | 2017-05-26 | University of Virginia Patent Foundation, d/b/a University of Virginia Licensing & Ventures Group | Flexible, self-rolled superficial flow sensor |
US10191076B1 (en) * | 2015-11-24 | 2019-01-29 | Board Of Trustees Of The University Of Alabama, For And On Behalf Of The University Of Alabama In Huntsville | Airflow sensing systems and methods |
JP6073512B1 (ja) * | 2016-03-10 | 2017-02-01 | 株式会社フジクラ | 差圧検出素子、流量計測装置、及び、差圧検出素子の製造方法 |
WO2018148510A1 (en) | 2017-02-09 | 2018-08-16 | Nextinput, Inc. | Integrated piezoresistive and piezoelectric fusion force sensor |
CN116907693A (zh) | 2017-02-09 | 2023-10-20 | 触控解决方案股份有限公司 | 集成数字力传感器和相关制造方法 |
WO2019023552A1 (en) * | 2017-07-27 | 2019-01-31 | Nextinput, Inc. | PIEZORESISTIVE AND PIEZOELECTRIC FORCE SENSOR ON WAFER AND METHODS OF MANUFACTURING THE SAME |
US11579028B2 (en) | 2017-10-17 | 2023-02-14 | Nextinput, Inc. | Temperature coefficient of offset compensation for force sensor and strain gauge |
US11047874B1 (en) * | 2017-10-18 | 2021-06-29 | Government Of The United States As Represented By The Secretary Of The Air Force | System, apparatus and method for predicting aerodynamic parameters using artifical hair sensor array |
US10952642B2 (en) * | 2017-11-09 | 2021-03-23 | Amorepacific Corporation | Strain sensor unit and skin sensor module comprising the same |
WO2019099821A1 (en) | 2017-11-16 | 2019-05-23 | Nextinput, Inc. | Force attenuator for force sensor |
US11220422B2 (en) * | 2019-03-14 | 2022-01-11 | Taiwan Semiconductor Manufacturing Company Ltd. | MEMS device |
CN112885729B (zh) * | 2019-11-29 | 2022-12-13 | 成都辰显光电有限公司 | Led测试头、led测试装置及led测试装置的制备方法 |
US11864465B2 (en) * | 2020-05-22 | 2024-01-02 | Wisconsin Alumni Research Foundation | Integration of semiconductor membranes with piezoelectric substrates |
CN111965384B (zh) * | 2020-08-03 | 2022-08-12 | 上海交通大学 | 基于双稳态势能调节的仿生纤毛微传感器及其制备方法 |
CN112816733A (zh) * | 2020-12-31 | 2021-05-18 | 上海芯物科技有限公司 | 一种压电风速计及其制作方法 |
CN114675050B (zh) * | 2022-03-24 | 2024-05-10 | 中国电子科技集团公司第五十八研究所 | 一种应变计式三维mems风速风向传感器的制备方法及结构 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5914507A (en) * | 1994-05-11 | 1999-06-22 | Regents Of The University Of Minnesota | PZT microdevice |
AU8991898A (en) * | 1997-09-05 | 1999-03-29 | 1... Limited | Aerogels, piezoelectric devices, and uses therefor |
US6269685B1 (en) * | 1999-09-23 | 2001-08-07 | Ut Battelle, Llc | Viscosity measuring using microcantilevers |
US7235914B2 (en) * | 2000-10-25 | 2007-06-26 | Washington State University Research Foundation | Piezoelectric micro-transducers, methods of use and manufacturing methods for same |
US6668628B2 (en) * | 2002-03-29 | 2003-12-30 | Xerox Corporation | Scanning probe system with spring probe |
US7260980B2 (en) * | 2003-03-11 | 2007-08-28 | Adams Jesse D | Liquid cell and passivated probe for atomic force microscopy and chemical sensing |
US7357035B2 (en) * | 2003-06-06 | 2008-04-15 | The Board Of Trustees Of The University Of Illinois | Sensor chip and apparatus for tactile and/or flow sensing |
KR100513662B1 (ko) * | 2003-09-08 | 2005-09-09 | 엘지전자 주식회사 | 캔틸레버의 제조방법 |
GB0328054D0 (en) * | 2003-12-04 | 2004-01-07 | Council Cent Lab Res Councils | Fluid probe |
US7397169B2 (en) * | 2004-03-19 | 2008-07-08 | Lawrence Livermore National Security, Llc | Energy harvesting using a thermoelectric material |
US7556775B2 (en) * | 2004-05-25 | 2009-07-07 | The United States Of America As Represented By The Secretary Of The Navy | Microelectro-mechanical chemical sensor |
GB0605273D0 (en) * | 2006-03-16 | 2006-04-26 | Council Cent Lab Res Councils | Fluid robe |
US20080011058A1 (en) * | 2006-03-20 | 2008-01-17 | The Regents Of The University Of California | Piezoresistive cantilever based nanoflow and viscosity sensor for microchannels |
US8141427B2 (en) | 2008-06-04 | 2012-03-27 | Georgia Tech Research Corporation | Piezoelectric and piezoresistive cantilever sensors |
FR2951014B1 (fr) * | 2009-10-06 | 2011-11-25 | Commissariat Energie Atomique | Structure d'actionnement piezoelectrique comportant une jauge de contrainte piezoresistive integree et son procede de realisation |
-
2010
- 2010-09-13 IT ITTO2010A000748A patent/IT1402181B1/it active
-
2011
- 2011-09-13 US US13/822,208 patent/US20130283922A1/en not_active Abandoned
- 2011-09-13 EP EP11773859.1A patent/EP2617074B1/en active Active
- 2011-09-13 WO PCT/IB2011/053997 patent/WO2012035491A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2012035491A1 (en) | 2012-03-22 |
US20130283922A1 (en) | 2013-10-31 |
EP2617074A1 (en) | 2013-07-24 |
ITTO20100748A1 (it) | 2012-03-14 |
EP2617074B1 (en) | 2017-04-26 |
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