JP5243585B2 - Substrate supply device - Google Patents

Substrate supply device Download PDF

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JP5243585B2
JP5243585B2 JP2011197396A JP2011197396A JP5243585B2 JP 5243585 B2 JP5243585 B2 JP 5243585B2 JP 2011197396 A JP2011197396 A JP 2011197396A JP 2011197396 A JP2011197396 A JP 2011197396A JP 5243585 B2 JP5243585 B2 JP 5243585B2
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surface plate
substrate
small surface
pin
small
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JP2013058690A (en
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勤 西尾
志丹 魏
雅樹 横山
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Chugai Ro Co Ltd
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Chugai Ro Co Ltd
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Priority to KR1020120064233A priority patent/KR101318600B1/en
Priority to TW101121540A priority patent/TWI421968B/en
Priority to CN201210327831.0A priority patent/CN102992642B/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Coating Apparatus (AREA)

Description

本発明は、基板を加工する装置に対して基板を供給および排出するための基板供給装置に関する。   The present invention relates to a substrate supply apparatus for supplying and discharging a substrate to and from an apparatus for processing a substrate.

フラットディスプレイパネルの製造等では、ガラス基板にダイコータを用いて塗工する工程がある。基板に厚みの均一な塗膜を形成するためには、基板を正確に位置決めして保持し、基板とダイヘッドとの隙間を均一に保つように、ダイヘッドを移動させる必要がある。このため、特許文献１に開示されているように、基板を保持する定盤上にダイヘッドを移動させるためのレールを固定した装置を用いるのが一般的である。   In the production of flat display panels, there is a step of coating a glass substrate using a die coater. In order to form a coating film having a uniform thickness on a substrate, it is necessary to move the die head so that the substrate is accurately positioned and held, and the gap between the substrate and the die head is kept uniform. For this reason, as disclosed in Patent Document 1, it is common to use an apparatus in which a rail for moving a die head is fixed on a surface plate that holds a substrate.

また、そのような定盤上に基板を配置および排出（交換）するために、例えば特許文献２に開示されているように、定盤から突出するピンによって基板を持ち上げ、ロボットのアームを差し込んで基板を取り出す構造が設けられる。ところが、塗工サイクルを短くするために、塗料を塗布した直後にピンにより基板を持ち上げると、基板が撓み、凹んだ部分に塗料が流動して乾燥するので膜厚が不均一になる。このため、基板の塗工サイクルの短縮には膜厚の均一性に犠牲を生じるので、製造能力を上げられない。   Further, in order to place and discharge (replace) the substrate on such a surface plate, as disclosed in Patent Document 2, for example, the substrate is lifted by a pin protruding from the surface plate, and the robot arm is inserted. A structure for taking out the substrate is provided. However, in order to shorten the coating cycle, if the substrate is lifted by a pin immediately after the coating is applied, the substrate is bent, and the coating flows and dries in the recessed portion, resulting in non-uniform film thickness. For this reason, the shortening of the substrate coating cycle sacrifices the uniformity of the film thickness, so that the production capacity cannot be increased.

特許文献３には、大きな定盤上に基板を載置する２つのステーションを設け、２つのステーション上を移動できるようにダイコータを配置した装置が開示されている。この装置では、一方のステーションにおいて基板を塗工している間に、他方のステーションの基板を交換すればよいので、処理能力が高い。しかしながら、２つのステーションに対してそれぞれ基板を交換するロボットが必要であり、装置が大型化して高価になるという問題がある。さらに、ダイヘッドの移動量が大きいので、誤差も生じやすい。   Patent Document 3 discloses an apparatus in which two stations for placing a substrate on a large surface plate are provided and a die coater is arranged so as to be able to move on the two stations. This apparatus has a high processing capability because it is only necessary to replace the substrate at the other station while the substrate is applied at one station. However, a robot for exchanging the substrates for each of the two stations is required, and there is a problem that the apparatus becomes large and expensive. Furthermore, since the amount of movement of the die head is large, errors are likely to occur.

特開２００２−２００４５０号公報JP 2002-200450 A 特開平５−４５６４１号公報Japanese Patent Laid-Open No. 5-45641 特開２００２−１０２７７１号公報JP 2002-102771 A

前記問題点に鑑みて、本発明は、短時間で基板を交換できる基板供給装置を提供することを課題とする。   In view of the above problems, an object of the present invention is to provide a substrate supply apparatus that can replace a substrate in a short time.

前記課題を解決するために、本発明による基板供給装置は、一体に回転および昇降可能に設けられ、回転軸周りに対称に配置された複数のアームと、それぞれ、前記アームに遊びを有するように支持され、且つ、基板を吸着保持可能な複数の小定盤と、前記アームの回転および昇降によって、前記基板を吸着保持している前記小定盤が載置され、且つ、前記基板を吸着保持している前記小定盤を前記遊びの範囲内で位置決めして保持する定盤保持機構を備える主定盤とを備えるものとする。 In order to solve the above-mentioned problem, a substrate supply apparatus according to the present invention is provided so as to be integrally rotatable and vertically movable, and has a plurality of arms arranged symmetrically around a rotation axis, and each arm has play. A plurality of small surface plates that are supported and capable of adsorbing and holding the substrate, and the small surface plate that adsorbs and holds the substrate by the rotation and elevation of the arm are placed, and the substrate is adsorbed and held And a main surface plate having a surface plate holding mechanism for positioning and holding the small surface plate within the range of play.

この構成によれば、塗工装置または加工装置に小定盤に保持した状態で基板を供給および排出するので、塗工（加工）直後に基板を撓ませることなく排出して、次の基板を供給できる。このため、塗工（加工）後基板を持ち上げるまでの時間を短くすることなく、塗工サイクルを短縮できる。また、小定盤とアームとの間に遊びを設けたことで、主定盤の上で小定盤の位置や姿勢を微調整可能としており、塗工または加工時の基板の位置および姿勢を正確に定められる。また、本発明の基板供給装置は、基板を取り扱うロボットが１台でよく、塗工装置または加工装置の可動範囲が大きくなることもないので、安価に提供できる。   According to this configuration, the substrate is supplied to and discharged from the coating device or the processing device while being held on the small surface plate. Therefore, the substrate is discharged without bending immediately after coating (processing), and the next substrate is discharged. Can supply. For this reason, the coating cycle can be shortened without shortening the time until the substrate is lifted after coating (processing). In addition, by providing play between the small surface plate and the arm, the position and posture of the small surface plate can be finely adjusted on the main surface plate, and the position and posture of the substrate during coating or processing can be adjusted. Accurately determined. In addition, the substrate supply apparatus of the present invention can be provided at low cost because only one robot can handle the substrate and the movable range of the coating apparatus or processing apparatus does not increase.

また、本発明の基板供給装置において、前記小定盤は、表面に突出して前記基板を持ち上げられる支持ピンを内蔵し、基板供給装置は、前記アームの１つが前記小定盤を前記主定盤の上に保持するとき、他の前記アームが支持する前記小定盤の下側に位置するように配置され、前記支持ピンを押し上げる駆動ピンを有する駆動機構をさらに備え、前記駆動ピンと前記支持ピンとは、磁力により互いに吸着するように構成されていてもよい。   In the substrate supply apparatus of the present invention, the small surface plate includes a support pin that protrudes to the surface and lifts the substrate, and the substrate supply device has one of the arms that connects the small surface plate to the main surface plate. A holding mechanism disposed on the lower surface of the small surface plate supported by the other arm, and having a driving pin that pushes up the supporting pin, the driving pin and the supporting pin; May be configured to be attracted to each other by magnetic force.

この構成によれば、磁力によって駆動ピンの後退に合わせて確実に支持ピンを後退させられるので、小定盤の内部に支持ピンを付勢する部材を配置する必要がなく、構造が簡単であり、小定盤の厚みが大きくならない。   According to this configuration, the support pin can be reliably retracted in accordance with the retraction of the drive pin by the magnetic force, so there is no need to arrange a member for biasing the support pin inside the small surface plate, and the structure is simple. The thickness of the small surface plate does not increase.

また、本発明の基板供給装置において、前記定盤保持機構は、前記小定盤を空気圧によって支持するエアパッドを有してもよい。   In the substrate supply apparatus of the present invention, the surface plate holding mechanism may include an air pad that supports the small surface plate by air pressure.

この構成によれば、小定盤の重量を支持する部分が非接触であるため、摩耗による基板を保持する高さの変化を防止できる。   According to this structure, since the part which supports the weight of a small surface plate is non-contact, the change in the height holding the board | substrate by abrasion can be prevented.

また、本発明の基板供給装置において、前記主定盤は、前記基板を加工する装置を支持してもよい。   Moreover, the board | substrate supply apparatus of this invention WHEREIN: The said main surface plate may support the apparatus which processes the said board | substrate.

この構成によれば、主定盤と加工装置との位置関係が変わらないため、小定盤に基板を位置決めし、小定盤を主定盤に位置決めすることで、基板と加工装置との間の位置関係が保証される。   According to this configuration, since the positional relationship between the main surface plate and the processing device does not change, the substrate is positioned on the small surface plate, and the small surface plate is positioned on the main surface plate. The positional relationship is guaranteed.

以上のように、複数の小定盤をアームの回転（旋回）により主定盤上に配置するので、小定盤への基板の配置と、基板の加工とを並行して実行することができる。また、小定盤とアームとの間に遊びを設けたことで、小定盤を主定盤上で微調整できるので、加工時に基板を精度よく保持できる。   As described above, since the plurality of small surface plates are arranged on the main surface plate by the rotation (turning) of the arm, the substrate placement on the small surface plate and the substrate processing can be executed in parallel. . Further, by providing play between the small surface plate and the arm, the small surface plate can be finely adjusted on the main surface plate, so that the substrate can be held with high precision during processing.

本発明の１つの実施形態の基板搬送装置を備える基板塗工装置の斜視図である。It is a perspective view of a substrate coating device provided with a substrate conveyance device of one embodiment of the present invention. 図１の基板塗工装置の側面図である。It is a side view of the board | substrate coating apparatus of FIG. 図１の基板塗工装置の部分拡大断面図である。It is a partial expanded sectional view of the board | substrate coating apparatus of FIG.

これより、発明の実施形態について、図面を参照しながら説明する。図１および２に、本発明の１つの実施形態である基板搬送装置１を備える基板塗工装置を示す。基板搬送装置１は、回転駆動部２によって垂直な軸周りに回転可能且つ垂直に昇降可能に支持された回転テーブル３と、２本１対に設けられ、回転テーブル３から径方向外側に延伸する２対のアーム４と、アーム４の各対にそれぞれ支持され、ガラス基板５を吸着して保持可能な２つの小定盤６と、一方の小定盤６を保持可能な主定盤７と、他方の小定盤６からガラス基板５を持ち上げるためのピン駆動機構８とを有する。   Embodiments of the invention will now be described with reference to the drawings. 1 and 2 show a substrate coating apparatus including a substrate transfer apparatus 1 according to one embodiment of the present invention. The substrate transfer device 1 is provided in a pair of two rotary tables 3 supported by a rotary drive unit 2 so as to be rotatable about a vertical axis and vertically movable, and extends radially outward from the rotary table 3. Two pairs of arms 4, two small surface plates 6 supported by each pair of arms 4 and capable of holding glass substrate 5 by suction, and a main surface plate 7 capable of holding one small surface plate 6 And a pin driving mechanism 8 for lifting the glass substrate 5 from the other small surface plate 6.

アーム４の対は、回転駆動部２の回転軸周りに互いに対称に、つまり、１８０°の角度で配置されている。主定盤７とピン駆動機構８とは、回転駆動部の軸周りに対称な位置に配置され、一方の小定盤６が主定盤７の上に保持されたとき、他方の小定盤６の直下にピン駆動機構８が位置するようになっている。   The pair of arms 4 are arranged symmetrically around the rotation axis of the rotary drive unit 2, that is, at an angle of 180 °. The main surface plate 7 and the pin drive mechanism 8 are arranged at symmetrical positions around the axis of the rotation drive unit, and when one small surface plate 6 is held on the main surface plate 7, the other small surface plate The pin drive mechanism 8 is positioned immediately below the pin 6.

主定盤７およびピン駆動機構８は、それぞれ、小定盤６の側辺に当接し、小定盤６の水平位置および向きを定める複数の位置決め装置９を有する。位置決め装置９は、それぞれ小定盤６との当接位置を調節可能なアクチュエータであり、主定盤７、ピン駆動機構８および回転テーブル３に設けられたエアシリンダ１０と協動して、小定盤６の水平位置および向きを、アーム４との遊びの範囲内で定める（定盤保持機構）。   The main surface plate 7 and the pin driving mechanism 8 each have a plurality of positioning devices 9 that abut on the side of the small surface plate 6 and determine the horizontal position and orientation of the small surface plate 6. The positioning device 9 is an actuator that can adjust the contact position with the small surface plate 6, and cooperates with the main surface plate 7, the pin drive mechanism 8, and the air cylinder 10 provided on the rotary table 3, The horizontal position and orientation of the surface plate 6 are determined within the range of play with the arm 4 (surface plate holding mechanism).

小定盤６は、底面にアーム４を受け入れる溝１１を有しているが、溝１１の幅がアーム４の幅よりも広く、遊びを有するように支持されている。したがって、小定盤６は、アーム４上において、その遊びの範囲内で水平移動および水平回転が可能である。   The small surface plate 6 has a groove 11 for receiving the arm 4 on the bottom surface, but the width of the groove 11 is wider than the width of the arm 4 and is supported so as to have play. Accordingly, the small surface plate 6 can be horizontally moved and rotated on the arm 4 within the range of play.

回転駆動部２は、回転テーブル３およびアーム４を回転時に障害物のない高さ（図２の二点鎖線で示す位置）まで上昇させた状態で１８０°回転し、小定盤６を主定盤７の上方に配置してから、回転テーブル３およびアーム４を下降させることによって、小定盤６を主定盤７の上に載置し、アーム４は溝１１との間に隙間が生じる位置までさらに下降する。   The rotary drive unit 2 rotates 180 ° with the rotary table 3 and the arm 4 raised to a height free from obstacles (position indicated by a two-dot chain line in FIG. 2) during rotation, and the small surface plate 6 is mainly fixed. The small surface plate 6 is placed on the main surface plate 7 by lowering the turntable 3 and the arm 4 after being arranged above the surface 7, and a gap is generated between the arm 4 and the groove 11. Further down to the position.

主定盤７は、空気圧によって小定盤６を非接触状態で支持するエアパッド１２を有する。エアパッド１２は、それぞれ空気圧の調整等で高さ調節可能に保持されており、小定盤６の上面が所定の高さで水平になるように調節され、小定盤６は、エアパッド１２の空気圧だけで保持された状態となる。   The main surface plate 7 has an air pad 12 that supports the small surface plate 6 in a non-contact state by air pressure. Each air pad 12 is held so that its height can be adjusted by adjusting the air pressure, etc., and adjusted so that the upper surface of the small surface plate 6 is horizontal at a predetermined height. It will be in the state of being held only.

エアパッド１２および位置決め装置９は、小定盤６ごとに異なる保持位置を設定できようになっている。これにより、各小定盤６に微小な傾きや形状の違いがあっても、小定盤６に吸着されたガラス基板５は、主定盤７に対して、一定の位置および向きに保持される。   The air pad 12 and the positioning device 9 can set different holding positions for each small surface plate 6. Thereby, even if each small surface plate 6 has a slight inclination or a difference in shape, the glass substrate 5 adsorbed on the small surface plate 6 is held at a fixed position and orientation with respect to the main surface plate 7. The

また、本実施形態では、エアパッド１２で空気圧によって非接触で小定盤６の重さを受け止めるだけであるので、小定盤６およびエアパッド１２が摩耗せず、一度、小定盤６ごとにエアパッド１２の高さを設定すれば、毎回、ガラス基板５を正確に同じ位置に保持することができる。また、位置決め装置９やエアシリンダ１０による位置決めも非常に小さな力で瞬時に行うことができる。   Further, in the present embodiment, since the air pad 12 only receives the weight of the small surface plate 6 in a non-contact manner by the air pressure, the small surface plate 6 and the air pad 12 are not worn, and the air pad is provided once for each of the small surface plates 6. If the height of 12 is set, the glass substrate 5 can be accurately held at the same position every time. Further, positioning by the positioning device 9 and the air cylinder 10 can be performed instantaneously with a very small force.

主定盤７は、ガラス基板５に塗工するダイヘッド１３を保持する門型の走行フレーム１４を案内するガイドレール１５を有する。つまり、主定盤７は、ダイヘッド１３を移動させることによってガラス基板５に塗工する加工装置を支持しており、ダイヘッド１３を主定盤７に対して厳密に平行移動させられる。したがって、ダイヘッド１３は、主定盤７上に正確に位置決め保持されたガラス基板５に均一な膜厚の塗膜を形成できる。   The main surface plate 7 has a guide rail 15 that guides a portal-type traveling frame 14 that holds a die head 13 that is applied to the glass substrate 5. In other words, the main surface plate 7 supports a processing device for coating the glass substrate 5 by moving the die head 13, and the die head 13 can be strictly translated with respect to the main surface plate 7. Therefore, the die head 13 can form a coating film having a uniform film thickness on the glass substrate 5 that is accurately positioned and held on the main surface plate 7.

さらに、図３に、小定盤６の内部の構造を示す。小定盤６は、ピン駆動機構８によって駆動され、ガラス基板５を小定盤６から持ち上げる支持ピン１６を内蔵している。支持ピン１６は、小定盤６に埋め込まれた案内筒１７内で摺動するスライダ１８に突設されている。スライダ１８は、下側に磁性金属片１９が取り付けられている。   FIG. 3 shows the internal structure of the small surface plate 6. The small surface plate 6 is driven by a pin drive mechanism 8 and incorporates support pins 16 that lift the glass substrate 5 from the small surface plate 6. The support pin 16 protrudes from a slider 18 that slides within a guide cylinder 17 embedded in the small surface plate 6. The slider 18 has a magnetic metal piece 19 attached to the lower side.

ピン駆動機構８は、シリンダ２０によって昇降可能に保持されたフレーム２１上に突設された駆動ピン２２を有し、駆動ピン２２の先端には、磁性金属片１９を吸着する永久磁石２３が取り付けられている。   The pin drive mechanism 8 has a drive pin 22 projecting on a frame 21 that is held up and down by a cylinder 20, and a permanent magnet 23 that attracts the magnetic metal piece 19 is attached to the tip of the drive pin 22. It has been.

ガラス基板５は、ピン駆動機構８のフレーム２１を上昇させて、駆動ピン２２により支持ピン１６を支持するスライダ１８を押し上げることで、小定盤６から持ち上げられる。そして、図１に図示すように、ロボットハンド２４が、ガラス基板５の下側に挿入され、小定盤６上からガラス基板５を取り除く。   The glass substrate 5 is lifted from the small surface plate 6 by raising the frame 21 of the pin drive mechanism 8 and pushing up the slider 18 that supports the support pin 16 by the drive pin 22. Then, as shown in FIG. 1, the robot hand 24 is inserted below the glass substrate 5, and the glass substrate 5 is removed from the small surface plate 6.

さらに、ロボットハンド２４は、新たなガラス基板５を支持ピン１６上に載置する。ロボットハンド２４が引き抜かれた後、ピン駆動機構８が駆動ピン２２を下降させることにより、支持ピン１６が小定盤６の内部に収容され、ガラス基板５は、小定盤６上に載置される。   Further, the robot hand 24 places a new glass substrate 5 on the support pins 16. After the robot hand 24 is pulled out, the pin drive mechanism 8 lowers the drive pin 22, whereby the support pin 16 is accommodated in the small surface plate 6, and the glass substrate 5 is placed on the small surface plate 6. Is done.

このとき、ロボットハンド２４がガラス基板５を載置する位置を、画像処理技術や小定盤６に内蔵する位置決め機構（不図示）等を利用して、正確に制御することにより、ガラス基板５を小定盤６に対して正確に位置決めして吸着保持させることが可能である。ガラス基板５と小定盤６の相対位置が毎回同じになることで、主定盤７においては、小定盤６を位置決めしただけで、主定盤７とガラス基板５との相対位置も、毎回同じにできることとなる。   At this time, the position where the robot hand 24 places the glass substrate 5 is accurately controlled by using an image processing technique, a positioning mechanism (not shown) built in the small surface plate 6, or the like. Can be accurately positioned with respect to the small surface plate 6 and held by suction. Since the relative position between the glass substrate 5 and the small surface plate 6 is the same every time, the main surface plate 7 can be positioned only by positioning the small surface plate 6, and the relative position between the main surface plate 7 and the glass substrate 5 is You can do the same every time.

このように、本実施形態では、ダイヘッド１３によって塗工前のガラス基板５を保持した小定盤６を、ガラス基板５に塗工するための主定盤７に供給し、塗工後のガラス基板５を保持した小定盤６を、主定盤７から搬出する。   Thus, in this embodiment, the small surface plate 6 holding the glass substrate 5 before coating by the die head 13 is supplied to the main surface plate 7 for coating the glass substrate 5, and the glass after coating is applied. The small surface plate 6 holding the substrate 5 is unloaded from the main surface plate 7.

塗膜が形成されたガラス基板５は、小定盤６に保持されたまま、アーム４が１８０°回転することによってピン駆動機構８の上に移動させられてから、新しいガラス基板５と交換するために、支持ピン１６によって小定盤６から持ち上げられる。つまり、塗工されたガラス基板５は、アーム４が回転している間は小定盤６に保持された状態であり、塗料を塗工した直後にガラス基板５を持ち上げることがない。よって、ガラス基板５が小定盤６に保持された平坦な状態のまま塗料が乾燥する。その後、ガラス基板５がピン駆動機構８によって持ち上げられて撓みが生じても、既に塗料が乾燥しているので、塗料が凹んだ部分に流動して膜厚を不均一にすることがない。   The glass substrate 5 on which the coating film has been formed is moved onto the pin driving mechanism 8 by rotating the arm 4 by 180 ° while being held on the small surface plate 6, and then replaced with a new glass substrate 5. Therefore, it is lifted from the small surface plate 6 by the support pins 16. That is, the coated glass substrate 5 is held by the small surface plate 6 while the arm 4 is rotating, and the glass substrate 5 is not lifted immediately after the coating is applied. Therefore, the paint is dried while the glass substrate 5 is held flat on the small surface plate 6. Thereafter, even if the glass substrate 5 is lifted by the pin driving mechanism 8 and is bent, the paint is already dried, so that the paint does not flow to the recessed portion and the film thickness does not become non-uniform.

このため、ガラス基板５の塗膜が形成されてから支持ピン１６によって持ち上げられるまでの時間を長くしながら、塗工されるガラス基板５の枚数を多くすることができる。   For this reason, the number of the glass substrates 5 to be coated can be increased while increasing the time from when the coating film of the glass substrate 5 is formed to when the glass substrate 5 is lifted by the support pins 16.

ここで、本発明では、アーム４に対する遊びの中で小定盤６が位置決めされ、アーム４が小定盤６を完全に離すことがないので、アーム４を小定盤６に対して位置決めしたり、アーム４による小定盤６の保持を確保するための特別な機構が不要である。   Here, in the present invention, since the small surface plate 6 is positioned in the play with respect to the arm 4 and the arm 4 does not completely separate the small surface plate 6, the arm 4 is positioned with respect to the small surface plate 6. Or a special mechanism for securing the small surface plate 6 by the arm 4 is not required.

また、本実施形態では、小定盤６の厚みの中に保持された支持ピン１６を、駆動ピン２２で押し上げるように構成したので、ピン駆動機構８のシリンダ２０のストロークは、小定盤６の厚みよりも小さくてよくなり、駆動ピン２２の昇降に要する時間が短くなり、生産量を増やすことができる。   In the present embodiment, the support pin 16 held within the thickness of the small surface plate 6 is configured to be pushed up by the drive pin 22, so that the stroke of the cylinder 20 of the pin drive mechanism 8 is the small surface plate 6. The time required for raising and lowering the drive pin 22 is shortened, and the production amount can be increased.

さらに、駆動ピン２２の永久磁石２３が支持ピン１６と一体に移動する磁性金属片１９に吸着するので、駆動ピン２２の下降は、重力に加えて、支持ピン１６を小定盤６の中に引き込む力を作用させる。これにより、支持ピン１６を収容方向に付勢するばね等を設けなくても、支持ピン１６の収容が確実に達成される。このため、支持ピン１６を保持する構造が簡素であり、小定盤６の薄型化が可能である。   Further, since the permanent magnet 23 of the drive pin 22 is attracted to the magnetic metal piece 19 that moves together with the support pin 16, the drive pin 22 descends in addition to gravity, the support pin 16 enters the small surface plate 6. Apply the pulling force. Thereby, even if it does not provide the spring etc. which urge the support pin 16 in the accommodation direction, accommodation of the support pin 16 is achieved reliably. For this reason, the structure for holding the support pins 16 is simple, and the small surface plate 6 can be thinned.

１…基板搬送装置
２…回転駆動部
３…回転テーブル
４…アーム
５…ガラス基板
６…小定盤
７…主定盤
８…ピン駆動機構
９…位置決め装置
１０…エアシリンダ
１１…溝
１２…エアパッド
１３…ダイヘッド
１４…走行フレーム
１５…ガイドレール
１６…支持ピン
１７…案内筒
１８…スライダ
１９…磁性金属片
２０…シリンダ
２１…フレーム
２２…駆動ピン
２３…永久磁石
２４…ロボットハンド DESCRIPTION OF SYMBOLS 1 ... Substrate conveyance apparatus 2 ... Rotary drive part 3 ... Rotary table 4 ... Arm 5 ... Glass substrate 6 ... Small surface plate 7 ... Main surface plate 8 ... Pin drive mechanism 9 ... Positioning device 10 ... Air cylinder 11 ... Groove 12 ... Air pad DESCRIPTION OF SYMBOLS 13 ... Die head 14 ... Traveling frame 15 ... Guide rail 16 ... Support pin 17 ... Guide cylinder 18 ... Slider 19 ... Magnetic metal piece 20 ... Cylinder 21 ... Frame 22 ... Drive pin 23 ... Permanent magnet 24 ... Robot hand

Claims (4)

一体に回転および昇降可能に設けられ、回転軸周りに対称に配置された複数のアームと、
それぞれ、前記アームに遊びを有するように支持され、且つ、基板を吸着保持可能な複数の小定盤と、
前記アームの回転および昇降によって、前記基板を吸着保持している前記小定盤が載置され、且つ、前記基板を吸着保持している前記小定盤を前記遊びの範囲内で位置決めして保持する定盤保持機構を備える主定盤とを備えることを特徴とする基板供給装置。 A plurality of arms provided so as to be integrally rotatable and vertically movable and arranged symmetrically around the rotation axis;
A plurality of small surface plates each supported by the arm so as to have play, and capable of sucking and holding the substrate;
The rotation and lifting of the arm, is the small plate is placed adsorbed hold the substrate, and, holding the small plate that attracts and holds the substrate is positioned within the range of the play A substrate supply apparatus comprising: a main surface plate including a surface plate holding mechanism. 前記小定盤は、表面に突出して前記基板を持ち上げられる支持ピンを内蔵し、
基板供給装置は、前記アームの１つが前記小定盤を前記主定盤の上に保持するとき、他の前記アームが支持する前記小定盤の下側に位置するように配置され、前記支持ピンを押し上げる駆動ピンを有する駆動機構をさらに備え、
前記駆動ピンと前記支持ピンとは、磁力により互いに吸着するように構成されていることを特徴とする請求項１に記載の基板供給装置。 The small surface plate has built-in support pins that protrude to the surface and can lift the substrate,
The substrate supply device is disposed so that one of the arms is positioned below the small surface plate supported by the other arm when the small surface plate is held on the main surface plate. A drive mechanism having a drive pin that pushes up the pin;
The substrate supply apparatus according to claim 1, wherein the drive pin and the support pin are configured to be attracted to each other by a magnetic force. 前記定盤保持機構は、前記小定盤を空気圧によって支持するエアパッドを有することを特徴とする請求項１または２に記載の基板供給装置。   3. The substrate supply apparatus according to claim 1, wherein the surface plate holding mechanism includes an air pad that supports the small surface plate by air pressure. 前記主定盤は、前記基板を加工する装置を支持することを特徴とする請求項１から３のいずれかに記載の基板供給装置。   The substrate supply apparatus according to claim 1, wherein the main platen supports an apparatus for processing the substrate.
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