JP5211808B2 - ロードポートおよびそれを備えた半導体製造装置 - Google Patents

ロードポートおよびそれを備えた半導体製造装置 Download PDF

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Publication number
JP5211808B2
JP5211808B2 JP2008094967A JP2008094967A JP5211808B2 JP 5211808 B2 JP5211808 B2 JP 5211808B2 JP 2008094967 A JP2008094967 A JP 2008094967A JP 2008094967 A JP2008094967 A JP 2008094967A JP 5211808 B2 JP5211808 B2 JP 5211808B2
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Prior art keywords
hoop
load port
open cassette
stage
lid
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JP2008094967A
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Japanese (ja)
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JP2009252780A (ja
JP2009252780A5 (enExample
Inventor
真 大崎
光昭 萩尾
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Yaskawa Electric Corp
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Yaskawa Electric Corp
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Priority to JP2008094967A priority Critical patent/JP5211808B2/ja
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JP2008094967A 2008-04-01 2008-04-01 ロードポートおよびそれを備えた半導体製造装置 Active JP5211808B2 (ja)

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JP2008094967A JP5211808B2 (ja) 2008-04-01 2008-04-01 ロードポートおよびそれを備えた半導体製造装置

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JP2008094967A JP5211808B2 (ja) 2008-04-01 2008-04-01 ロードポートおよびそれを備えた半導体製造装置

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JP2009252780A JP2009252780A (ja) 2009-10-29
JP2009252780A5 JP2009252780A5 (enExample) 2011-10-20
JP5211808B2 true JP5211808B2 (ja) 2013-06-12

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220154687A (ko) 2020-03-17 2022-11-22 니혼덴산리드가부시키가이샤 로드 포트용 어댑터

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102374274B1 (ko) * 2016-08-08 2022-03-15 신에쯔 한도타이 가부시키가이샤 로드포트 및 웨이퍼 반송방법
WO2018029915A1 (ja) * 2016-08-08 2018-02-15 信越半導体株式会社 ロードポート及びウェーハ搬送方法
CN106684023A (zh) * 2017-03-14 2017-05-17 大族激光科技产业集团股份有限公司上海分公司 全封闭式smif系统
JP6889383B2 (ja) * 2018-05-24 2021-06-18 シンフォニアテクノロジー株式会社 容器パージ装置
JP6853396B2 (ja) * 2019-03-29 2021-03-31 平田機工株式会社 ロードポート
US11094570B2 (en) * 2019-03-29 2021-08-17 Hirata Corporation Load port having movable member that abuts a pin
CN113658898B (zh) * 2021-08-04 2025-07-25 深圳市森美协尔科技有限公司 一种晶圆自动上料装置及上料检测方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10189684A (ja) * 1996-12-25 1998-07-21 Dainippon Screen Mfg Co Ltd キャリア検出装置および基板処理装置、基板移替装置
JPH1167863A (ja) * 1997-08-22 1999-03-09 Dainippon Screen Mfg Co Ltd 基板収納容器搬送装置およびそれを備えた基板処理装置
JP4555918B2 (ja) * 2000-09-18 2010-10-06 東京エレクトロン株式会社 ウェハ搬送容器装着装置
JP4082652B2 (ja) * 2001-11-02 2008-04-30 平田機工株式会社 載置装置
JP4487302B2 (ja) * 2003-05-20 2010-06-23 株式会社安川電機 ロードポート
JP3943087B2 (ja) * 2004-01-26 2007-07-11 Ｔｄｋ株式会社 ポッドオープナのポッドクランプユニット、当該クランプユニットを用いたポッドクランプ機構及びクランプ方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220154687A (ko) 2020-03-17 2022-11-22 니혼덴산리드가부시키가이샤 로드 포트용 어댑터
US12283509B2 (en) 2020-03-17 2025-04-22 Nidec Read Corporation Load port adapter

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JP2009252780A (ja) 2009-10-29

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