JP5197004B2 - 熱制御方法及びそのシステム - Google Patents
熱制御方法及びそのシステム Download PDFInfo
- Publication number
- JP5197004B2 JP5197004B2 JP2007515156A JP2007515156A JP5197004B2 JP 5197004 B2 JP5197004 B2 JP 5197004B2 JP 2007515156 A JP2007515156 A JP 2007515156A JP 2007515156 A JP2007515156 A JP 2007515156A JP 5197004 B2 JP5197004 B2 JP 5197004B2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- flow
- liquid
- stream
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B41/00—Fluid-circulation arrangements
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B15/00—Sorption machines, plants or systems, operating continuously, e.g. absorption type
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B41/00—Fluid-circulation arrangements
- F25B41/20—Disposition of valves, e.g. of on-off valves or flow control valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B49/00—Arrangement or mounting of control or safety devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2339/00—Details of evaporators; Details of condensers
- F25B2339/04—Details of condensers
- F25B2339/047—Water-cooled condensers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
- F25B2400/04—Refrigeration circuit bypassing means
- F25B2400/0403—Refrigeration circuit bypassing means for the condenser
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
- F25B2400/04—Refrigeration circuit bypassing means
- F25B2400/0411—Refrigeration circuit bypassing means for the expansion valve or capillary tube
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
- F25B2400/04—Refrigeration circuit bypassing means
- F25B2400/0415—Refrigeration circuit bypassing means for the receiver
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
- F25B2400/13—Economisers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
- F25B2400/16—Receivers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2600/00—Control issues
- F25B2600/02—Compressor control
- F25B2600/026—Compressor control by controlling unloaders
- F25B2600/0261—Compressor control by controlling unloaders external to the compressor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2600/00—Control issues
- F25B2600/25—Control of valves
- F25B2600/2501—Bypass valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2700/00—Sensing or detecting of parameters; Sensors therefor
- F25B2700/21—Temperatures
- F25B2700/2115—Temperatures of a compressor or the drive means therefor
- F25B2700/21151—Temperatures of a compressor or the drive means therefor at the suction side of the compressor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2700/00—Sensing or detecting of parameters; Sensors therefor
- F25B2700/21—Temperatures
- F25B2700/2117—Temperatures of an evaporator
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B30/00—Heat pumps
- F25B30/02—Heat pumps of the compression type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B40/00—Subcoolers, desuperheaters or superheaters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B49/00—Arrangement or mounting of control or safety devices
- F25B49/02—Arrangement or mounting of control or safety devices for compression type machines, plants or systems
- F25B49/027—Condenser control arrangements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A40/00—Adaptation technologies in agriculture, forestry, livestock or agroalimentary production
- Y02A40/90—Adaptation technologies in agriculture, forestry, livestock or agroalimentary production in food processing or handling, e.g. food conservation
- Y02A40/963—Off-grid food refrigeration
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Control Of Temperature (AREA)
- Devices That Are Associated With Refrigeration Equipment (AREA)
- Separation By Low-Temperature Treatments (AREA)
- Compression-Type Refrigeration Machines With Reversible Cycles (AREA)
- Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
- Steam Or Hot-Water Central Heating Systems (AREA)
- Surgical Instruments (AREA)
- Treatment Of Sludge (AREA)
- Adhesives Or Adhesive Processes (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US57670504P | 2004-06-02 | 2004-06-02 | |
| US60/576,705 | 2004-06-02 | ||
| US11/057,383 | 2005-02-15 | ||
| US11/057,383 US7178353B2 (en) | 2004-02-19 | 2005-02-15 | Thermal control system and method |
| PCT/US2005/016740 WO2005121657A2 (en) | 2004-06-02 | 2005-05-12 | Thermal control system and method |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011258812A Division JP5581300B2 (ja) | 2004-06-02 | 2011-11-28 | 熱制御方法及びそのシステム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008501927A JP2008501927A (ja) | 2008-01-24 |
| JP2008501927A5 JP2008501927A5 (enExample) | 2009-10-22 |
| JP5197004B2 true JP5197004B2 (ja) | 2013-05-15 |
Family
ID=35503754
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007515156A Expired - Lifetime JP5197004B2 (ja) | 2004-06-02 | 2005-05-12 | 熱制御方法及びそのシステム |
| JP2011258812A Expired - Lifetime JP5581300B2 (ja) | 2004-06-02 | 2011-11-28 | 熱制御方法及びそのシステム |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011258812A Expired - Lifetime JP5581300B2 (ja) | 2004-06-02 | 2011-11-28 | 熱制御方法及びそのシステム |
Country Status (7)
| Country | Link |
|---|---|
| US (3) | US7178353B2 (enExample) |
| EP (4) | EP2096379B1 (enExample) |
| JP (2) | JP5197004B2 (enExample) |
| KR (1) | KR100970065B1 (enExample) |
| AT (3) | ATE507445T1 (enExample) |
| DE (3) | DE602005027760D1 (enExample) |
| WO (1) | WO2005121657A2 (enExample) |
Families Citing this family (89)
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| US8034180B2 (en) * | 2005-10-11 | 2011-10-11 | Applied Materials, Inc. | Method of cooling a wafer support at a uniform temperature in a capacitively coupled plasma reactor |
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| US8092638B2 (en) * | 2005-10-11 | 2012-01-10 | Applied Materials Inc. | Capacitively coupled plasma reactor having a cooled/heated wafer support with uniform temperature distribution |
| US7988872B2 (en) * | 2005-10-11 | 2011-08-02 | Applied Materials, Inc. | Method of operating a capacitively coupled plasma reactor with dual temperature control loops |
| US20070091541A1 (en) * | 2005-10-20 | 2007-04-26 | Applied Materials, Inc. | Method of processing a workpiece in a plasma reactor using feed forward thermal control |
| US20070164426A1 (en) * | 2006-01-18 | 2007-07-19 | International Business Machines Corporation | Apparatus and method for integrated circuit cooling during testing and image based analysis |
| DE102006016950B4 (de) * | 2006-04-11 | 2010-09-23 | LacTec Gesellschaft für moderne Lackiertechnik mbH | Lackiereinrichtung und Verfahren zum Ausbringen von Lack |
| SG136816A1 (en) * | 2006-04-18 | 2007-11-29 | Daytona Control Co Ltd | Temperature control apparatus |
| US20070240870A1 (en) * | 2006-04-18 | 2007-10-18 | Daytona Control Co., Ltd. | Temperature control apparatus |
| JP4996184B2 (ja) * | 2006-09-19 | 2012-08-08 | 東京エレクトロン株式会社 | ウエハの温度制御装置及びウエハの温度制御方法 |
| MX2009008231A (es) * | 2007-01-30 | 2009-12-04 | Bradley University | Un aparato y metodo de transferencia termica. |
| JP5020664B2 (ja) * | 2007-03-09 | 2012-09-05 | 関東精機株式会社 | 工作機械の温度制御装置 |
| US20090025405A1 (en) * | 2007-07-27 | 2009-01-29 | Johnson Controls Technology Company | Economized Vapor Compression Circuit |
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| JP6629081B2 (ja) * | 2016-01-26 | 2020-01-15 | 伸和コントロールズ株式会社 | 温度制御装置 |
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2005
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- 2005-05-12 AT AT09161171T patent/ATE507445T1/de not_active IP Right Cessation
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- 2005-05-12 AT AT05748205T patent/ATE447150T1/de not_active IP Right Cessation
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- 2005-05-12 KR KR1020077000070A patent/KR100970065B1/ko not_active Expired - Lifetime
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|---|---|
| EP2098808A3 (en) | 2009-10-14 |
| ATE507444T1 (de) | 2011-05-15 |
| DE602005017400D1 (de) | 2009-12-10 |
| US7415835B2 (en) | 2008-08-26 |
| EP1779046B1 (en) | 2009-10-28 |
| EP2098808A2 (en) | 2009-09-09 |
| JP2008501927A (ja) | 2008-01-24 |
| EP2096379A2 (en) | 2009-09-02 |
| KR20070046813A (ko) | 2007-05-03 |
| EP2096380A3 (en) | 2009-10-14 |
| US7765820B2 (en) | 2010-08-03 |
| JP5581300B2 (ja) | 2014-08-27 |
| US20050183432A1 (en) | 2005-08-25 |
| DE602005027760D1 (de) | 2011-06-09 |
| KR100970065B1 (ko) | 2010-07-16 |
| EP1779046A4 (en) | 2008-02-13 |
| US20080319587A1 (en) | 2008-12-25 |
| EP2096380B1 (en) | 2011-04-27 |
| DE602005027759D1 (de) | 2011-06-09 |
| JP2012088039A (ja) | 2012-05-10 |
| US20070169491A1 (en) | 2007-07-26 |
| EP2098808B1 (en) | 2011-04-27 |
| ATE507445T1 (de) | 2011-05-15 |
| EP1779046A2 (en) | 2007-05-02 |
| US7178353B2 (en) | 2007-02-20 |
| EP2096379B1 (en) | 2011-11-23 |
| ATE447150T1 (de) | 2009-11-15 |
| EP2096379A3 (en) | 2009-10-14 |
| WO2005121657A2 (en) | 2005-12-22 |
| WO2005121657A3 (en) | 2006-11-16 |
| EP2096380A2 (en) | 2009-09-02 |
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