JP5196344B2 - Method for improving adhesion of polyimide film - Google Patents

Method for improving adhesion of polyimide film Download PDF

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JP5196344B2
JP5196344B2 JP2008079581A JP2008079581A JP5196344B2 JP 5196344 B2 JP5196344 B2 JP 5196344B2 JP 2008079581 A JP2008079581 A JP 2008079581A JP 2008079581 A JP2008079581 A JP 2008079581A JP 5196344 B2 JP5196344 B2 JP 5196344B2
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polyimide film
adhesion
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polyamic acid
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JP2009235145A (en
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盛嗣 末廣
孔一 沢崎
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Du Pont Toray Co Ltd
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本発明は、ポリイミドフィルムの接着性を向上させる方法に関するものである。 The present invention relates to a method of improving the contact adhesion of port Riimidofiru beam.

ポリイミドフィルムのような耐熱性フィルムは、電子部品などのフレキシブルプリント配線基板(FPC)に用いる基材であるTAB(Tape Automated Bonding)、COF(Chip On Flex)の基材絶縁フィルムとして、あるいは半導体装置における支持部材であるLOC用テープなどとして用いられている。
そして、このような用途では、基材となるフィルムの接着性が大きいことが望まれており、特に近年の高密度配線や微細加工といったファインピッチ化に伴って、その要求レベルは益々厳しくなってきている。
A heat-resistant film such as a polyimide film is used as a base insulating film for TAB (Tape Automated Bonding) and COF (Chip On Flex), which are base materials used for flexible printed circuit boards (FPC) such as electronic components, or for semiconductor devices. It is used as a tape for LOC which is a support member.
In such applications, it is desired that the film as a base material has high adhesiveness, and the required level is becoming increasingly severe, especially with the recent fine pitches such as high-density wiring and fine processing. ing.

また、耐熱性フィルムは、磁気記録媒体のベース材料としても用いられており、このような場合においても、フィルムの耐熱性と共に高い接着性が求められている。   Further, the heat resistant film is also used as a base material for a magnetic recording medium. Even in such a case, high adhesiveness is required in addition to the heat resistance of the film.

これまでに、耐熱性フィルムの接着性を向上させる表面改質方法としては、コロナ放電処理する方法(例えば、特許文献1参照)、アルカリ処理する方法(例えば、特許文献2参照)、サンドマット処理する方法(例えば、特許文献3参照)、およびプラズマ放電処理する方法(例えば、特許文献4参照)等の種々の技術が提案されている。   So far, surface modification methods for improving the adhesiveness of heat-resistant films include corona discharge treatment (for example, see Patent Document 1), alkali treatment method (for example, Patent Document 2), sand mat treatment. Various techniques have been proposed, such as a method (for example, see Patent Document 3) and a method for plasma discharge treatment (for example, see Patent Document 4).

現在実施されているこれらの処理は、いずれもソルベントキャスト法による製造工程において形成されたフィルム表面の脆弱層が接着性を阻害するものと考え、その脆弱層の除去を目的とするものと考えられる。   These treatments currently being implemented are considered to have the purpose of removing the fragile layer because the fragile layer on the surface of the film formed in the manufacturing process by the solvent cast method impedes adhesion. .

しかしながら、これらの方法はすべて、製品化されたフィルムにさらに後処理を施すことにより接着性を向上させようとするものである。したがって、後処理前の製品フィルムの接着能力の変動や後処理の安定性、均質性等の点で問題が生じる場合があり、接着能力を改善したフィルムを安定供給することは基本的には困難であった。また、上記製品化されたフィルムに接着性を改善するための処理を行う新たな工程を要し、事実上コストの上昇を招くことが避けられないという問題があった。   However, all of these methods attempt to improve the adhesion by further post-treating the commercialized film. Therefore, problems may arise in terms of fluctuations in the adhesive ability of the product film before post-treatment, stability of post-treatment, homogeneity, etc., and it is basically difficult to stably supply a film with improved adhesive ability. Met. In addition, there is a problem in that a new process for performing the treatment for improving the adhesiveness is required for the commercialized film, and it is inevitable that the cost is increased.

従来技術では、ポリイミドフィルムに十分に満足すべき接着性を安定的に付与することが困難であり、その改良がしきりに望まれていた。
特開平7−330930号公報 特開平8−12779号公報 特開平8−34866号公報 特開2004−51712号公報
In the prior art, it has been difficult to stably impart sufficiently satisfactory adhesion to a polyimide film, and improvements have been continually desired.
JP 7-330930 A Japanese Patent Laid-Open No. 8-12779 JP-A-8-34866 JP 2004-51712 A

そこで、本発明者らは、このような実状に鑑み、強い接着強度を有するフィルムを安定的に供給することを目的として、上述の技術的課題を解決すべく鋭意研究を重ねた結果、製品化後のフィルム表面層への処理による接着性を改善するのではなく、従来は考えられていなかったフィルム成形工程において、フィルムの接着能力を向上させる方法に想到したのである。 Therefore, in view of such a situation, the present inventors have conducted earnest research to solve the above technical problems with the aim of stably supplying a film having strong adhesive strength, and as a result, commercialized. instead of improving the adhesion by processing the surface of the film layer after, in full Irumu molding process has not been conventionally considered, it was conceived to a method of improving the adhesion ability of the film.

上述の課題を解決するために、本発明にかかるポリイミドフィルムの接着性を向上させる方法の要旨とするところは、キャスティングにより流延塗布したポリアミック酸ゲルフィルムを加熱処理することにより、色調L値、及びフィルム表面の酸素/炭素比を制御することにより、接着性を制御することにある。 To solve the problems described above, it is an gist of a method for improving the adhesion of the polyimide film of the present invention, Ri by the heating process the polyamic acid gel film was cast coated by casting, hue L By controlling the value and the oxygen / carbon ratio of the film surface, the adhesiveness is controlled.

また、本発明にかかるポリイミドフィルムの接着性を向上させる方法の要旨とするところは、キャスティングにより流延塗布したポリアミック酸ゲルフィルムを加熱処理することにより、色調L値が35以上、及びフィルム表面の酸素/炭素比が0.215以上に調整することでポリイミドフィルムの接着性を向上させる方法であり、ポリイミドフィルムは、12〜30モル%のパラフェニレンジアミン、70〜88モル%の4,4’−ジアミノジフェニルエーテル、50〜99.5モル%のピロメリット酸二無水物および0.5〜50モル%の3,3’,4,4’−ビフェニルテトラカルボン酸二無水物から形成されたものである。 According to yet gist of a method for improving the adhesion of the polyimide film of the present invention, Ri by the heating process the polyamic acid gel film was cast coated by casting, color L value is 35 or more, and the film by oxygen / carbon ratio of the surface is adjusted to more than 0.215, a method for improving the adhesion of the polyimide film, Po Li imide film, 12 to 30 mole% of p-phenylenediamine, 70 to 88 mol% Of 4,4'-diaminodiphenyl ether, 50-99.5 mol% pyromellitic dianhydride and 0.5-50 mol% 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride It is formed.

本発明によれば、以下に説明するとおり、製品化されたフィルムにさらに後処理を施すことなく、均質的に低コストで、銅箔との接着性が高いポリイミドフィルムを得ることができる。   According to the present invention, as will be described below, a polyimide film having high adhesion to a copper foil can be obtained uniformly and at low cost without further post-treatment of the commercialized film.

以下、本発明のポリイミドフィルムの接着性を向上させる方法についてさらに詳しく説明する。 Hereinafter will be described in more detail how to improve the adhesion of the port Riimidofiru arm of the present invention.

まず、本発明のポリイミドフィルムの接着性を向上させる方法において、ポリイミドフィルムを得るに際してその前駆体であるポリアミック酸について説明する。本発明に用いられるポリアミック酸は、例えばジアミン成分としてのパラフェニレンジアミンおよび4,4’−ジアミノジフェニルエーテルと、酸成分としてのピロメリット酸二無水物および3,3’,4,4’−ビフェニルテトラカルボン酸二無水物を重合させることで得られるものである。パラフェニレンジアミンおよび4,4’−ジアミノジフェニルエーテルは、有機溶媒に溶解させて用いるのが好ましい。ピロメリット酸二無水物および3,3’,4,4’−ビフェニルテトラカルボン酸二無水物並びにパラフェニレンジアミン、4,4’−ジアミノジフェニルエーテルを重合してポリアミック酸を得る方法は、各種公知の方法で行ってもよく、例えば予め所定量のパラフェニレンジアミン、4,4’−ジアミノジフェニルエーテルと3,3’,4,4’−ビフェニルテトラカルボン酸二無水物を有機溶媒に溶解させておき、それにピロメリット酸二無水物を添加し、所定の粘度を有するポリアミック酸を得る方法が挙げられる。 First, a method of improving the adhesion of Po Li imide film of the present invention, the polyamic acid which is a precursor in obtaining a polyimide film will be described. The polyamic acid used in the present invention includes, for example, paraphenylenediamine and 4,4′-diaminodiphenyl ether as a diamine component, pyromellitic dianhydride and 3,3 ′, 4,4′-biphenyltetra as an acid component. It is obtained by polymerizing carboxylic dianhydride. Paraphenylenediamine and 4,4′-diaminodiphenyl ether are preferably used after being dissolved in an organic solvent. There are various known methods for obtaining polyamic acid by polymerizing pyromellitic dianhydride, 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride, paraphenylenediamine, and 4,4′-diaminodiphenyl ether. For example, a predetermined amount of paraphenylenediamine, 4,4′-diaminodiphenyl ether and 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride are dissolved in an organic solvent in advance, An example is a method in which pyromellitic dianhydride is added thereto to obtain a polyamic acid having a predetermined viscosity.

次に、得られたポリアミック酸溶液からポリイミドフィルムを得る方法を説明する。   Next, a method for obtaining a polyimide film from the obtained polyamic acid solution will be described.

まず、開環触媒および脱水剤を用いて脱水する化学閉環法または加熱処理によって脱水する熱閉環法によりポリアミック酸を環化させることにより、共重合ポリイミドのゲルフィルムを得ることが好ましく行われる。そして、得られたゲルフィルムの端部を固定し、縦方向に1.05〜1.5の倍率、横方向に1.05〜2.0の倍率で2軸延伸して共重合ポリイミドフィルムを得ることができる。かかる2軸延伸を行うことにより、得られるポリイミドフィルムの機械的特性を向上させることができる。化学閉環法または熱閉環法のいずれの方法で行っても良いが、得られるポリイミドフィルムの弾性率を向上させることができること、熱膨張係数を低下せせることができることなどの利点を有する化学閉環法が好ましく採用される。   First, it is preferable to obtain a copolyimide gel film by cyclizing the polyamic acid by a chemical ring closure method using a ring-opening catalyst and a dehydrating agent or a thermal ring closure method in which dehydration is performed by heat treatment. And the edge part of the obtained gel film was fixed, biaxially stretched by the magnification of 1.05-1.5 in the vertical direction, and the magnification of 1.05-2.0 in the horizontal direction, and the copolymerization polyimide film was obtained. Can be obtained. By performing such biaxial stretching, the mechanical properties of the resulting polyimide film can be improved. Although it may be carried out by either the chemical ring closure method or the thermal ring closure method, there is a chemical ring closure method having advantages such as an improvement in the elastic modulus of the resulting polyimide film and a reduction in the thermal expansion coefficient. Preferably employed.

化学閉環法で使用される脱水剤としては、無水酢酸などの脂肪族酸無水物,N−ジアルキルカルボジイミド類、低級脂肪酸ハロゲン化物、アリルホスホン酸次ハロゲン化物、安息香酸無水物、フタル酸無水物などの芳香族酸無水物およびケテンなどが好ましい。   Dehydrating agents used in the chemical ring closure method include aliphatic acid anhydrides such as acetic anhydride, N-dialkylcarbodiimides, lower fatty acid halides, allylphosphonic acid subhalides, benzoic acid anhydrides, phthalic acid anhydrides, etc. Aromatic acid anhydrides and ketene are preferred.

また、使用される環化触媒としては、3,4’−Nルチジン、3,5−ルチジン、4−メチルピリジン、4−イソプロピルピリジン、4−ベンジルピリジンなどのピリジン類、N−ジメチルベンジルアミン、4−ジメチルベンジルアミン、4−ジメチルドデシルアミン、β−ピコリンなどのピコリン類、トリエチルアミン、N−ジメチルアニリン、キノリンおよびイソキノリンなどが好ましく、これらを単独または混合して使用するのが好ましい。   Examples of the cyclization catalyst used include pyridines such as 3,4′-N lutidine, 3,5-lutidine, 4-methylpyridine, 4-isopropylpyridine, 4-benzylpyridine, N-dimethylbenzylamine, Preferred are picolines such as 4-dimethylbenzylamine, 4-dimethyldodecylamine and β-picoline, triethylamine, N-dimethylaniline, quinoline and isoquinoline, and these are preferably used alone or in combination.

化学閉環法を行うに際しては、ポリアミック酸溶液中に環化触媒、脱水剤を混合させイミド化した後に、この溶液をコ−ティングして共重合ポリイミドフィルムを得る方法、およびポリアミック酸溶液をコ−ティングして薄膜化させた後、これを環化触媒、脱水剤の混合中に浸積してイミド化させることによってポリイミドフィルムを得る方法などを採用し得る。   In carrying out the chemical ring closure method, a polyamic acid solution is mixed with a cyclization catalyst and a dehydrating agent and imidized, and then this solution is coated to obtain a copolymerized polyimide film, and the polyamic acid solution is coated. For example, a method of obtaining a polyimide film by immersing it in a mixture of a cyclization catalyst and a dehydrating agent and imidizing it after forming a thin film by coating can be employed.

なお、得られるポリイミドフィルムの機械的性質などを改善させるために、種々の添加剤と触媒をポリアミック酸に添加することができるが
本発明においては、ポリイミドフィルムの表面を粗化させてフィルムに滑り性を付与し工程安定性を向上させる観点から、無機粒子をポリアミック酸に混合することが好ましい。
In order to improve the mechanical properties of the resulting polyimide film, various additives and catalysts can be added to the polyamic acid. In the present invention, the surface of the polyimide film is roughened and slipped on the film. From the viewpoint of imparting properties and improving process stability, it is preferable to mix inorganic particles with polyamic acid.

本発明のポリイミドフィルムを構成するポリイミドは、ブロックポリマ−、ランダムポリマ−および混合ポリマ−のいずれであってもよい。   The polyimide constituting the polyimide film of the present invention may be any of a block polymer, a random polymer, and a mixed polymer.

ポリアミック酸溶液は粘性が高いことから、通常、キャスティングドラムあるいはエンドレスベルトの上にポリアミック酸溶液をフィルム状に押し出し、あるいは流延塗布し、前記キャスティングドラムまたはエンドレスベルトの上にポリアミック酸を少なくとも自己支持を備える程度に硬化させた後、必要に応じて熱処理などを施し、安定なポリイミドフィルムとすることも好ましく行われる。   Since the polyamic acid solution is highly viscous, the polyamic acid solution is usually extruded onto a casting drum or an endless belt in the form of a film or cast, and at least the polyamic acid is self-supported on the casting drum or the endless belt. It is also preferably performed to make a stable polyimide film by performing heat treatment or the like as necessary after curing to the extent that it is provided.

本発明では、ポリイミドフィルムは、12〜30モル%のパラフェニレンジアミン、70〜88モル%の4,4’−ジアミノジフェニルエーテル、50〜99.5モル%のピロメリット酸二無水物および0.5〜50モル%の3,3’,4,4’−ビフェニルテトラカルボン酸二無水物から形成される。 In the present invention, Po Li imide film, 12 to 30 mole% of p-phenylenediamine, 70 to 88 mole% of 4,4'-diaminodiphenyl ether, 50 to 99.5 mole% of pyromellitic dianhydride and 0 Formed from 5 to 50 mol% 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride.

ましい組成は、ジアミン成分としてパラフェニレンジアミン12モル%と4,4’−ジアミノジフェニルエーテル88モル%、酸性分としてピロメリット酸二無水物80モル%と3,3’,4,4’−ビフェニルテトラカルボン酸二無水物20モル%から形成されるポリイミドフィルムである。 The composition good Masui as diamine component paraphenylenediamine 12 mol% 4,4'-diaminodiphenyl ether 88 mole%, 80 mole% pyromellitic dianhydride as an acid component and 3,3 ', 4,4'- It is a polyimide film formed from 20 mol% of biphenyltetracarboxylic dianhydride.

上記の組成からなる本発明の高接着性ポリイミドフィルムは、色調L値が37以上、かつフィルム表面酸素/炭素比が0.215以上であることを特徴とする。   The highly adhesive polyimide film of the present invention having the above composition has a color tone L value of 37 or more and a film surface oxygen / carbon ratio of 0.215 or more.

ここで、ポリイミドフィルムの色調L値、及びフィルム表面酸素/炭素比が上記の条件を外れる場合、すなわち色調L値36未満の場合、フィルム表面酸素/炭素比が0.214未満の場合は、いずれも接着性改良効果が不十分となる。色調L値、およびフィルム表面酸素/炭素比の2条件が上記の範囲を満たすことにより、銅箔との接着性が高く、接着性に優れたポリイミドフィルムを得ることができるのである。 Here, when the color tone L value of the polyimide film and the film surface oxygen / carbon ratio are outside the above conditions, that is, when the color tone L value is less than 36, the film surface oxygen / carbon ratio is less than 0.214, that also Do insufficient adhesion improving effect. When the two conditions of the color tone L value and the film surface oxygen / carbon ratio satisfy the above range, a polyimide film having high adhesion to the copper foil and excellent adhesion can be obtained.

色調L値は、フィルム熱処理温度にて制御することができ、色調L値37以上に維持するためには、フィルム加熱処理温度が450℃以下である。また、フィルム表面酸素/炭素比はフィルム乾燥温度にて制御することができ、O/C比を0.215以上に維持するためにはフィルム乾燥温度が260℃以下である。 Color L value may be controlled by a film heat treatment temperature, in order to maintain the above tonal L value 37, the film heating temperature is Ru der 450 ° C. or less. The film surface oxygen / carbon ratio can be controlled by film drying temperature, Ru der film drying temperature of 260 ° C. or less in order to maintain the O / C ratio than 0.215.

色調L値とフィルム表面O/C比はいずれもフィルム成形工程で制御することができるため、プラズマ処理等の後処理の不安定性、不均質性の問題の発生がなく、低コストで接着性を改良することができる。   Since both the color tone L value and the film surface O / C ratio can be controlled in the film forming process, there is no problem of instability or inhomogeneity of post-treatment such as plasma treatment, and low cost adhesiveness. It can be improved.

ここでフィルムとは、厚み数μm〜数mmの平板な形状の樹脂を指す。本発明では、ポリイミドフィルムの厚みは、通常3〜300μmであり、好ましくは5〜125μm、より好ましくは7.5〜75μm、さらに好ましくは7.5〜50μmである。 Here, the film refers to a flat resin having a thickness of several μm to several mm. In this invention , the thickness of a polyimide film is 3-300 micrometers normally, Preferably it is 5-125 micrometers, More preferably, it is 7.5-75 micrometers, More preferably, it is 7.5-50 micrometers.

発明のポリイミドフィルムの接着性を向上させる方法で得られたポリイミドフィルムは、銅箔との接着性が高く、この特性を活かして、電子部品などのフレキシブルプリント配線基板(FPC)に用いる基材であるTAB(Tape Automated Bonding)、COF(Chip On Flex)の基材絶縁フィルムとして、あるいは半導体装置における支持部材であるLOC用テープなどとして有用に利用することができる。 The polyimide film obtained by the method for improving the adhesion of the polyimide film of the present invention has high adhesion to a copper foil, and a base material used for a flexible printed wiring board (FPC) such as an electronic component by utilizing this characteristic. It can be usefully used as a base insulating film of TAB (Tape Automated Bonding) and COF (Chip On Flex), or as a LOC tape as a support member in a semiconductor device.

以下、実施例により本発明を具体的に説明する。   Hereinafter, the present invention will be described specifically by way of examples.

なお、実施例中のPPDはパラフェニレンジアミンを、ODAは4,4’−ジアミノジフェニルエーテルを、PMDAはピロメリット酸二無水物を、BPDAは3,3’,4,4’−ビフェニルテトラカルボン酸二無水物を、DMACはN,N−ジメチルアセトアミドを、それぞれ表す。   In the examples, PPD is paraphenylenediamine, ODA is 4,4′-diaminodiphenyl ether, PMDA is pyromellitic dianhydride, and BPDA is 3,3 ′, 4,4′-biphenyltetracarboxylic acid. The dianhydride and DMAC represent N, N-dimethylacetamide, respectively.

また、実施例中のポリイミドフィルムの各特性は、次の方法で評価した。   Moreover, each characteristic of the polyimide film in an Example was evaluated with the following method.

(1)色調L値
スガ試験機株式会社製SMカラーコンピューターにてフィルム2枚重ねにて評価した。
(1) Color tone L value Evaluation was performed by superposing two films on an SM color computer manufactured by Suga Test Instruments Co., Ltd.

(2)フィルム表面酸素/炭素比
米国SSI社製SSX―100を用いX線光電子分光法にてフィルム表面酸素/炭素比を求めた。
(2) Film surface oxygen / carbon ratio Film surface oxygen / carbon ratio was determined by X-ray photoelectron spectroscopy using SSX-100 manufactured by SSI, USA.

(3)各フィルムの接着力評価
デュポン社製アクリル系接着剤(商品名パイララックスLF0100)を用いてフィルムと銅箔(日鉱金属(株)製圧延銅箔“BHY−13B−T”35μmとをラミネートし、160℃30分で接着剤の硬化反応を行い、銅貼り品幅が10mmとなるようサンプルを切り出し、引張試験器(オリエンテック社製“RTM−250”)により90度剥離の引張試験を行った。n=5の平均値による測定結果を表に示した。
(3) Adhesive strength evaluation of each film A film and a copper foil (rolled copper foil “BHY-13B-T” 35 μm made by Nikko Metal Co., Ltd.) using a DuPont acrylic adhesive (trade name: PIRALAX LF0100) Laminate, cure the adhesive at 160 ° C. for 30 minutes, cut out the sample so that the width of the copper-attached product is 10 mm, and perform a tensile test of 90-degree peeling with a tensile tester (Orientec “RTM-250”) The measurement results based on the average value of n = 5 are shown in the table.

接着強度は、20N/cm以上の値が得られれば良好な接着性を示す。   Adhesive strength shows good adhesiveness if a value of 20 N / cm or more is obtained.

<実施例1〜3>
ジメチルアセトアミド(DMAC)にパラフェニレンジアミン(PPD)14モル%とピロメリット酸二無水物(PMDA)の一部14.5モル%を投入し、常温常圧中窒素雰囲気下で1時間反応させた。次に、ここに4,4’−ジアミノジフェニルエーテル(ODA)86モル%を投入し均一になるまで撹拌した後、3,3’、4,4’−ビフェニルテトラカルボン酸二無水物(BPDA)20モル%を添加し、1時間撹拌反応させた。
続いてここに残りのPMDA65.5モル%を添加しさらに1時間反応させ3500ポイズのポリアミック酸溶液を得た。固形分濃度は、最終的に20.3重量%になるようにDMACを添加した。得られたポリアミック酸に無水酢酸、β−ピコリンを添加混合した後、キャスティングドラム上にキャストし高温で数秒乾燥して得られる自己支持性のフィルムを引き離し、端部を固定した後、テンタ−炉にて段階的に乾燥、熱処理して、厚さ38μm、色調L値が37.4〜40、フィルム表面酸素/炭素比0.219〜0.224の範囲の3水準のポリイミドフィルムを得た。得られたフィルムの接着強度測定結果を表1に示す。
<Examples 1-3>
Dimethylacetamide (DMAC) was charged with 14 mol% of paraphenylenediamine (PPD) and 14.5 mol% of pyromellitic dianhydride (PMDA) and allowed to react for 1 hour in a nitrogen atmosphere at room temperature and pressure. . Next, 86 mol% of 4,4′-diaminodiphenyl ether (ODA) was added thereto and stirred until uniform, and then 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride (BPDA) 20 Mol% was added and the reaction was allowed to stir for 1 hour.
Subsequently, 65.5 mol% of the remaining PMDA was added thereto, and the mixture was further reacted for 1 hour to obtain a 3500 poise polyamic acid solution. DMAC was added so that the solid content concentration was finally 20.3% by weight. After adding and mixing acetic anhydride and β-picoline to the polyamic acid obtained, casting on a casting drum and drying at high temperature for a few seconds, the self-supporting film is pulled off, the ends are fixed, and a tenter furnace Were dried and heat-treated in steps to obtain a three-level polyimide film having a thickness of 38 μm, a color tone L value of 37.4 to 40, and a film surface oxygen / carbon ratio of 0.219 to 0.224. Table 1 shows the adhesive strength measurement results of the obtained film.

<比較例1〜5>
DMACにPPD14モル%とPMDAの一部14.5モル%を投入し、常温常圧中窒素雰囲気下で1時間反応させた。次に、ここにODA86モル%を投入し均一になるまで撹拌した後、BPDA20モル%を添加し、1時間撹拌反応させた。
<Comparative Examples 1-5>
14 mol% of PPD and 14.5 mol% of a part of PMDA were added to DMAC, and reacted for 1 hour in a nitrogen atmosphere at normal temperature and pressure. Next, 86 mol% of ODA was added thereto and stirred until uniform, and then 20 mol% of BPDA was added and allowed to react for 1 hour with stirring.

続いてここに残りのPMDA65.5モル%を添加しさらに1時間反応させ3500ポイズのポリアミック酸溶液を得た。固形分濃度は、最終的に20.3重量%になるようにDMACを添加した。得られたポリアミック酸に無水酢酸、β−ピコリンを添加混合した後、キャスティングドラム上にキャストし高温で数秒乾燥して得られる自己支持性のフィルムを引き離し、端部を固定した後、テンタ−炉にて段階的に乾燥、熱処理して、厚さ38μm、色調L値が31〜36、フィルム表面酸素/炭素比0.196〜0.219の範囲の5水準のポリイミドフィルムを得た。得られたフィルムの接着強度測定結果を表1に示す。   Subsequently, 65.5 mol% of the remaining PMDA was added thereto, and the mixture was further reacted for 1 hour to obtain a 3500 poise polyamic acid solution. DMAC was added so that the solid content concentration was finally 20.3% by weight. After adding and mixing acetic anhydride and β-picoline to the polyamic acid obtained, casting on a casting drum and drying at high temperature for a few seconds, the self-supporting film is pulled off, the ends are fixed, and a tenter furnace Were dried and heat-treated in steps to obtain a 5-level polyimide film having a thickness of 38 μm, a color tone L value of 31 to 36, and a film surface oxygen / carbon ratio of 0.196 to 0.219. Table 1 shows the adhesive strength measurement results of the obtained film.

<比較例6>
実施例1〜3と同組成のフィルムを用い、高接着処理を施すため、希ガスが20モル%以上含有される760torr(常圧)の雰囲気下で、表面が誘電体によって被覆され、かつ50℃に冷却された電極と、これに対向してもうけられた表面が誘電体によって被覆された電極を用いて処理電力密度500W・min/mの条件でプラズマ処理を行った。結果を表1に示した。
<Comparative Example 6>
Since a film having the same composition as in Examples 1 to 3 was used and a high adhesion treatment was performed, the surface was covered with a dielectric in an atmosphere of 760 torr (normal pressure) containing 20 mol% or more of a rare gas, and 50 Plasma treatment was performed under the condition of a treatment power density of 500 W · min / m 2 using an electrode cooled to 0 ° C. and an electrode having a surface opposite to the electrode covered with a dielectric. The results are shown in Table 1.

Figure 0005196344
Figure 0005196344

表1の結果から、色調L値37以上、かつフィルム表面酸素/炭素比0.215以上のフィルム(実施例1〜3)は、プラズマ処理を施したフィルム(比較例6)と同等の接着強度を示し、後処理を施すことなく接着性に優れるものであることがわかる。   From the results shown in Table 1, the films having the color tone L value of 37 or more and the film surface oxygen / carbon ratio of 0.215 or more (Examples 1 to 3) have the same adhesive strength as the plasma-treated film (Comparative Example 6). It can be seen that it has excellent adhesion without post-treatment.

本発明のポリイミドフィルムの接着性を向上させる方法で得られたポリイミドフィルムは、後処理を施すことなく、均質的に低コストで銅箔との接着性が高いポリイミドフィルムが得られ、電子部品などのフレキシブルプリント配線基板(FPC)に用いる基材であるTAB(Tape Automated Bonding)、COF(Chip On Flex)の基材絶縁フィルムとして、あるいは半導体装置における支持部材であるLOC用テープなどとして有用に利用することができる。 The polyimide film obtained by the method for improving the adhesion of the polyimide film of the present invention can be obtained as a polyimide film having high adhesion to a copper foil at a low cost uniformly and without post-treatment, such as an electronic component. Useful as a base insulating film for TAB (Tape Automated Bonding), COF (Chip On Flex), which is a base material used in flexible printed wiring boards (FPC), or as a LOC tape as a support member in semiconductor devices can do.

Claims (1)

キャスティングにより流延塗布したポリアミック酸ゲルフィルムを260℃以下の温度で乾燥し、その後450℃以下の温度で加熱処理することにより、色調L値が37以上、かつフィルム表面の酸素/炭素比が0.215以上に調整することでポリイミドフィルムの接着性を向上させる方法であって、ポリイミドフィルムが、12〜30モル%のパラフェニレンジアミン、70〜88モル%の4,4’−ジアミノジフェニルエーテル、50〜99.5モル%のピロメリット酸二無水物および0.5〜50モル%の3,3’,4,4’−ビフェニルテトラカルボン酸二無水物から形成されたものであるポリイミドフィルムの接着性を向上させる方法。 Drying the polyamic acid gel film was cast coated by casting at a temperature of 260 ° C. or less, then Ri by the heating treatment at 450 ° C. temperature below tone L value 37 or more, and an oxygen / carbon ratio of the film surface there by adjusting the above 0.215, a way Ru improve the adhesion of the polyimide film, polyimide film, 12 to 30 mole% of p-phenylenediamine, 70 to 88 mole% of 4,4 ' -Formed from diaminodiphenyl ether, 50-99.5 mol% pyromellitic dianhydride and 0.5-50 mol% 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride Ah Lupo method for improving the adhesion of Li imide film.
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