JP5195188B2 - 回転直動位置検出装置および回転直動位置検出方法 - Google Patents

回転直動位置検出装置および回転直動位置検出方法 Download PDF

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Publication number
JP5195188B2
JP5195188B2 JP2008228720A JP2008228720A JP5195188B2 JP 5195188 B2 JP5195188 B2 JP 5195188B2 JP 2008228720 A JP2008228720 A JP 2008228720A JP 2008228720 A JP2008228720 A JP 2008228720A JP 5195188 B2 JP5195188 B2 JP 5195188B2
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linear motion
rotation
detector
phase detector
output
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JP2010063315A5 (enExample
JP2010063315A (ja
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博信 吉武
透 鹿山
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Yaskawa Electric Corp
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Yaskawa Electric Corp
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JP2008228720A 2008-09-05 2008-09-05 回転直動位置検出装置および回転直動位置検出方法 Expired - Fee Related JP5195188B2 (ja)

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JP2008228720A JP5195188B2 (ja) 2008-09-05 2008-09-05 回転直動位置検出装置および回転直動位置検出方法

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JP2010063315A JP2010063315A (ja) 2010-03-18
JP2010063315A5 JP2010063315A5 (enExample) 2012-01-26
JP5195188B2 true JP5195188B2 (ja) 2013-05-08

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017060361A (ja) * 2015-09-18 2017-03-23 日本電産サンキョー株式会社 直動回転駆動装置
JP2017058328A (ja) 2015-09-18 2017-03-23 日本電産サンキョー株式会社 直動回転検出器

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09126811A (ja) * 1995-10-27 1997-05-16 Fuji Electric Co Ltd 電子式センサを備える電動シリンダ
JP2004045177A (ja) * 2002-07-11 2004-02-12 Nsk Ltd 回転検出装置
JP2004312880A (ja) * 2003-04-07 2004-11-04 Tamagawa Seiki Co Ltd モータ構造
JP5261913B2 (ja) * 2005-10-21 2013-08-14 株式会社安川電機 直動回転アクチュエータおよびシステム

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