JP5191217B2 - 圧電型圧力センサ - Google Patents
圧電型圧力センサ Download PDFInfo
- Publication number
- JP5191217B2 JP5191217B2 JP2007302558A JP2007302558A JP5191217B2 JP 5191217 B2 JP5191217 B2 JP 5191217B2 JP 2007302558 A JP2007302558 A JP 2007302558A JP 2007302558 A JP2007302558 A JP 2007302558A JP 5191217 B2 JP5191217 B2 JP 5191217B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- outer cover
- piezoelectric
- inner cover
- cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000001133 acceleration Effects 0.000 claims description 16
- 238000005259 measurement Methods 0.000 claims description 13
- 239000013529 heat transfer fluid Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 3
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims description 3
- 229910052733 gallium Inorganic materials 0.000 claims description 3
- 229910052708 sodium Inorganic materials 0.000 claims description 3
- 239000011734 sodium Substances 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims description 2
- 239000003566 sealing material Substances 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- 238000002485 combustion reaction Methods 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000007787 solid Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 239000003507 refrigerant Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000009365 direct transmission Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 235000013372 meat Nutrition 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/08—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
- G01L23/10—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by pressure-sensitive members of the piezoelectric type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Description
4 測定圧電素子
5 ダイヤフラム
10 内部カバー
10’ 厚肉筒部
11 内部カバーの基体部
12 環状隙間
14 熱伝導流体(排熱手段)
22 波形金属シート(排熱手段)
23 筒ばね(排熱手段)
Claims (8)
- 圧力受け部側と反対側に内側肩部(20)を有する外部カバー(1)と、圧力受け部側と反対側に基体部(11)を有し、前記外部カバー(1)の前記圧力受け部側において前記外部カバー(1)に取り付けられるとともに、環状隙間(12)によって前記外部カバー(1)から分離される内部カバー(10)とを含み、圧力受け部側において内部カバー(10)に配置されたダイヤフラム(5)と内部カバー(10)の基体部(11)との間に少なくとも1つの測定圧電素子(4)が配置された圧電型圧力センサであって、
内部カバー(10)は隣接する外部カバー(1)の円筒壁の肉厚に相当する肉厚の連続した厚肉筒部(10’)を有するとともに、
前記内部カバー(10)の基体部(11)と前記外部カバー(1)の前記内側肩部(20)との間に延び、熱を前記外側カバー(1)に伝達する筒ばね又はベローズ(23)を備え、
前記筒ばね又はベローズ(23)は、軸方向に対して弱い力の伝達を提供することを特徴とする圧電型圧力センサ。 - 前記外部カバー(1)と前記内部カバー(10)との間の前記環状隙間(12)に熱伝導流体(14)が配されていることを特徴とする請求項1に記載の圧電型圧力センサ。
- 前記環状隙間(12)内には前記ダイヤフラム(5)とは反対側にシール材が配置されていることを特徴とする請求項2に記載の圧電型圧力センサ。
- 前記シール部材は、シールリング(21)、膜又はフィルム(15)であることを特徴とする請求項3に記載の圧電型圧力センサ。
- 前記外部カバー(1)と前記内部カバー(10)との間の前記環状隙間(12)内に、当該内部カバー(10)ならびに当該外部カバー(1)のいずれにも熱接触する、波形構造を有するプレス加工された金属シート(22)が配置されていることを特徴とする請求項1から4のいずれか一項に記載の圧電型圧力センサ。
- 圧力センサは、緊張手段(18)によって少なくとも一つの補償圧電素子(19,19’)に対して付勢された振動質量(17)を有する動的軸方向加速度補償部(16)を有していることを特徴とする請求項1から5のいずれか一項に記載の圧電型圧力センサ。
- 前記動的軸方向加速度補償部(16)は前記測定圧電素子(4)に対向する側で前記内部カバー(10)の前記基体部(11)に対して付勢されていることを特徴とする請求項6に記載の圧電型圧力センサ。
- 前記熱伝導流体(14)はガリウム、ナトリウム、又は高温耐熱油であることを特徴とする請求項2に記載の圧電型圧力センサ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ATA1937/2006 | 2006-11-22 | ||
AT0193706A AT504485B1 (de) | 2006-11-22 | 2006-11-22 | Piezoelektrischer drucksensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008129024A JP2008129024A (ja) | 2008-06-05 |
JP5191217B2 true JP5191217B2 (ja) | 2013-05-08 |
Family
ID=39326498
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007302558A Expired - Fee Related JP5191217B2 (ja) | 2006-11-22 | 2007-11-22 | 圧電型圧力センサ |
Country Status (4)
Country | Link |
---|---|
US (1) | US7839056B2 (ja) |
JP (1) | JP5191217B2 (ja) |
AT (1) | AT504485B1 (ja) |
DE (1) | DE102007000986A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014173995A (ja) * | 2013-03-08 | 2014-09-22 | Denso Corp | 圧力センサおよびその製造方法 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006131015A2 (de) * | 2005-06-10 | 2006-12-14 | Kistler Holding Ag | Drucksensor mit aktiver und passiver beschleunigungskompensation |
CH702257A1 (de) * | 2009-11-25 | 2011-05-31 | Kistler Holding Ag | Drucksensor. |
CH704445A1 (de) * | 2011-02-02 | 2012-08-15 | Kistler Holding Ag | Drucksensor. |
JP5880934B2 (ja) * | 2011-12-20 | 2016-03-09 | セイコーエプソン株式会社 | センサーデバイス、センサーモジュール、力検出装置、ロボット |
US9142751B2 (en) * | 2012-10-10 | 2015-09-22 | Industrial Sonomechanics, Llc | Efficient cooling of piezoelectric transducers |
CN106415229B (zh) * | 2014-03-27 | 2020-06-30 | 西铁城精密器件株式会社 | 燃烧压力传感器及其制造方法 |
CH711008A1 (de) * | 2015-04-30 | 2016-10-31 | Kistler Holding Ag | Kontaktkraft-Prüfvorrichtung, Verwendung einer solchen Kontaktkraft-Prüfvorrichtung und Verfahren zur Herstellung einer solchen Kontaktkraft-Prüfvorrichtung. |
AT518650B1 (de) | 2016-06-07 | 2017-12-15 | Piezocryst Advanced Sensorics | Piezoelektrischer drucksensor zum messen hoher drücke |
JP6817058B2 (ja) * | 2016-12-26 | 2021-01-20 | シチズンファインデバイス株式会社 | 圧力検出装置の製造方法および圧力検出装置 |
US20190326836A1 (en) * | 2018-04-19 | 2019-10-24 | The Government Of The United States Of America, As Represented By The Secretary Of The Navy | Phase Transformation in Relaxor Ferroelectric Single Crystals for Blast Sensor |
DE102018113935A1 (de) | 2018-06-12 | 2019-12-12 | IMES Intelligent Measuring Systems GmbH | Membrandrucksensor mit Messfeder-Stützrohr und darauf beschichtetem Drucksensor |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AT2036B (ja) | 1900-03-02 | 1900-08-25 | Jul Wacker & Co | |
AT215704B (de) * | 1959-10-02 | 1961-06-26 | Hans Dipl Ing Dr Techn List | Piezoelektrischer Druckgeber |
AT247028B (de) * | 1961-01-02 | 1966-05-25 | Hans Dipl Ing Dr Techn List | Piezoelektrischer Druckgeber |
AT292337B (de) * | 1967-02-23 | 1971-08-25 | List H | Piezoelektrischer Meßwandler |
AT345165B (de) | 1976-05-26 | 1978-09-11 | Illinois Tool Works | Traegerstreifen |
AT384676B (de) * | 1983-07-07 | 1987-12-28 | Avl Verbrennungskraft Messtech | Messwertaufnehmer zur messung heisser medien und verfahren zur montage eines als druckaufnehmerausgebildeten messwertaufnehmers |
JPS6352285U (ja) * | 1986-09-24 | 1988-04-08 | ||
JPH0351727Y2 (ja) * | 1986-11-15 | 1991-11-07 | ||
DE8903667U1 (de) * | 1989-03-23 | 1989-05-11 | Kistler Instrumente Ag, Winterthur | Hochdruckaufnehmer |
US6127770A (en) * | 1996-01-20 | 2000-10-03 | Forschungszentrum Karlsrahe Gmbh | Pressure wave sensor |
AT2036U1 (de) * | 1996-09-06 | 1998-03-25 | Avl Verbrennungskraft Messtech | Sensor zur druckmessung in heissen medien |
CH691625A5 (de) * | 1997-09-15 | 2001-08-31 | Kk Holding Ag | Beschleunigungskompensierter Druckkaufnehmer. |
ATE544034T1 (de) * | 2004-09-15 | 2012-02-15 | Beru Ag | Druckmessglühkerze für einen dieselmotor |
-
2006
- 2006-11-22 AT AT0193706A patent/AT504485B1/de not_active IP Right Cessation
-
2007
- 2007-11-13 DE DE102007000986A patent/DE102007000986A1/de not_active Ceased
- 2007-11-20 US US11/984,664 patent/US7839056B2/en not_active Expired - Fee Related
- 2007-11-22 JP JP2007302558A patent/JP5191217B2/ja not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014173995A (ja) * | 2013-03-08 | 2014-09-22 | Denso Corp | 圧力センサおよびその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
AT504485A4 (de) | 2008-06-15 |
DE102007000986A1 (de) | 2008-05-29 |
JP2008129024A (ja) | 2008-06-05 |
US20080116766A1 (en) | 2008-05-22 |
AT504485B1 (de) | 2008-06-15 |
US7839056B2 (en) | 2010-11-23 |
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