JP5174118B2 - Scribing wheel and manufacturing method thereof - Google Patents

Scribing wheel and manufacturing method thereof Download PDF

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JP5174118B2
JP5174118B2 JP2010228754A JP2010228754A JP5174118B2 JP 5174118 B2 JP5174118 B2 JP 5174118B2 JP 2010228754 A JP2010228754 A JP 2010228754A JP 2010228754 A JP2010228754 A JP 2010228754A JP 5174118 B2 JP5174118 B2 JP 5174118B2
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apex angle
polishing
polished
scribing wheel
scribing
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JP2012081623A (en
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孝志 関島
義之 浅井
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Mitsuboshi Diamond Industrial Co Ltd
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Mitsuboshi Diamond Industrial Co Ltd
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Priority to JP2010228754A priority Critical patent/JP5174118B2/en
Priority to TW100122326A priority patent/TWI449680B/en
Priority to TW103125003A priority patent/TWI529147B/en
Priority to CN201110243195.9A priority patent/CN102557422B/en
Priority to CN201410664515.1A priority patent/CN104529143A/en
Priority to KR1020110090574A priority patent/KR20120036740A/en
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/10—Glass-cutting tools, e.g. scoring tools
    • C03B33/105—Details of cutting or scoring means, e.g. tips
    • C03B33/107—Wheel design, e.g. materials, construction, shape
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033—Apparatus for opening score lines in glass sheets
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/03—Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Description

本発明はガラス基板等の脆性材料基板をスクライブするためのスクライビングホイール及びその製造方法に関するものである。   The present invention relates to a scribing wheel for scribing a brittle material substrate such as a glass substrate and a manufacturing method thereof.

従来のスクライビングホイールは、超硬合金製または焼結ダイヤモンド製の円板に対して円周部を両側より互いに斜めに削り込み、円周面にＶ字形の刃先を形成している。スクライビングホイールは中心に貫通孔を有しており、スクライビング装置のスクライブヘッド等に回転自在に軸着して用いられる。   In the conventional scribing wheel, the circumferential portion is cut obliquely from both sides of a cemented carbide or sintered diamond disc to form a V-shaped cutting edge on the circumferential surface. The scribing wheel has a through hole at the center, and is used by being rotatably attached to a scribing head or the like of a scribing device.

従来スクライビングホイールの円周面にＶ字形の刃先を形成するためには、まず円板１０１の中心に貫通孔１０２を形成する。図１（ａ）はこの円板１０１の側面図を示している。次いで図１（ｂ）に側面図、図１（ｃ）に正面図を示すように、円周部分を両側よりＶ字状に研磨して刃先部１０３とする。場合によっては刃先部１０３を更に細かい粒度の研磨剤によって仕上げ研磨して、スクライビングホイール１００を構成している。   In order to form a V-shaped cutting edge on the circumferential surface of a conventional scribing wheel, first, a through hole 102 is formed at the center of the disc 101. FIG. 1A shows a side view of the disc 101. Next, as shown in a side view in FIG. 1 (b) and a front view in FIG. 1 (c), the circumferential portion is polished into a V shape from both sides to form a blade edge portion 103. In some cases, the scribing wheel 100 is configured by finish-polishing the blade edge portion 103 with a finer grain abrasive.

特許第３７５９３１７号公報Japanese Patent No. 3759317

ガラス基板等の脆性材料基板を分断する際には、スクライビングホイールを用いてスクライブした後スクライブラインに沿って分断するが、分断した脆性材料基板端面には傷が残るため圧力が加わったときに端面から破壊されることが多い。スクライビングホイールの円周面に形成されたＶ字形の刃先に凹凸があると分断したときの脆性材料基板端面に傷が残るため、脆性材料基板の機械的な強度が低下する。そのため、スクライビングホイールのＶ字形の刃先の稜線にはできるだけ凹凸が少ない方が好ましい。近年ではフラットパネルディスプレイなどに用いるガラス基板の薄板化が望まれており、更に携帯機器等の小型機器ではガラスの板厚が例えば０．４ｍｍ〜０．２ｍｍへと薄くなっている。このような薄いガラスでは基板の強度が低下するため、脆性材料基板端面強度の低下が大きな問題となっている。   When cutting a brittle material substrate such as a glass substrate, it is cut along the scribe line after scribing using a scribing wheel, but the end face when pressure is applied because scratches remain on the cut brittle material substrate end face. Often destroyed from. If there are irregularities on the V-shaped cutting edge formed on the circumferential surface of the scribing wheel, scratches remain on the end face of the brittle material substrate when it is divided, so that the mechanical strength of the brittle material substrate decreases. Therefore, it is preferable that the ridge line of the V-shaped cutting edge of the scribing wheel has as little as possible unevenness. In recent years, it has been desired to reduce the thickness of a glass substrate used for a flat panel display or the like. Further, in a small device such as a portable device, the thickness of the glass is reduced to 0.4 mm to 0.2 mm, for example. In such a thin glass, the strength of the substrate is lowered, so that the strength of the brittle material substrate end face is a serious problem.

スクライビングホイールの刃先稜線の凹凸を少なくするためには、より微細な研磨剤を用いて研磨する必要がある。しかるに従来のスクライビングホイールでは、Ｖ字形の刃先を形成するための粗研磨と仕上げ研磨を同一の面積に対して行っている。研磨剤の粒径は小さいほど研磨しにくくなるため、仕上げ研磨にあたって粒径の小さい研磨剤を用いるほど加工時間が長くなる、という問題点があった。   In order to reduce the unevenness of the edge of the cutting edge of the scribing wheel, it is necessary to polish using a finer abrasive. However, in the conventional scribing wheel, rough polishing and finish polishing for forming a V-shaped cutting edge are performed on the same area. Since the smaller the particle size of the abrasive, the harder it is to polish, there is a problem that the processing time becomes longer as the abrasive having a smaller particle size is used in the final polishing.

本発明はこのような従来の問題点に着目してなされたもので、スクライビングホイールにおいてＶ字形の刃先を形成する際の研磨加工時間を短縮するスクライビングホイール及びその製造方法を提供することを目的とする。   The present invention has been made paying attention to such conventional problems, and it is an object of the present invention to provide a scribing wheel that shortens the polishing time when forming a V-shaped cutting edge in the scribing wheel, and a method for manufacturing the scribing wheel. To do.

この課題を解決するために、本発明は、円板状ホイールの円周部に沿ってＶ字形の刃先を形成してなる、厚さが０．２〜０．４ｍｍの脆性材料基板をスクライブするためのスクライビングホイールの製造方法であって、円板の中心位置に貫通孔を形成し、前記円板の円周に沿って側面の両側より互いに斜めに削り込むよう粗研磨して第１の研磨面を形成することにより円周部分を第１の頂角を有するＶ字状として形成し、前記Ｖ字状の第１研磨面の先端部分のみを仕上げ研磨して第１の頂角より大きい第２の頂角を有する刃先部として第２の研磨面を形成し、前記第２の研磨面を粒度６０００番以上の研磨剤により前記第２の頂角が９５〜１２５°となるように超仕上げ研磨するものである。 In order to solve this problem, the present invention scribes a brittle material substrate having a thickness of 0.2 to 0.4 mm formed by forming a V-shaped cutting edge along the circumferential portion of a disc-shaped wheel. A scribing wheel manufacturing method for forming a through hole in a central position of a disk, and performing rough polishing so as to cut the surface obliquely from both sides along the circumference of the disk. By forming the surface, the circumferential portion is formed as a V shape having a first apex angle, and only the tip portion of the V-shaped first polishing surface is finish-polished to obtain a larger number than the first apex angle. A second polishing surface is formed as a cutting edge portion having an apex angle of 2, and the second polishing surface is superfinished with an abrasive having a grain size of 6000 or more so that the second apex angle is 95 to 125 ° It is to be polished.

この課題を解決するために、本発明は、円板状ホイールの円周部に沿ってＶ字形の刃先を形成してなるスクライビングホイールの製造方法であって、円板の中心位置に貫通孔を形成し、前記円板の円周に沿って側面の両側より互いに斜めに削り込むよう粗研磨して第１の研磨面を形成することにより円周部分を第１の頂角を有するＶ字状として形成し、前記Ｖ字状の第１研磨面を仕上げ研磨して第２の研磨面を形成し、前記第２の研磨面の先端部分のみを第１の頂角より大きい第２の頂角を有する刃先部として、粒度６０００番以上の研磨剤により前記第２の頂角が９５〜１２５°となるように超仕上げ研磨するものである。 In order to solve this problem, the present invention is a method of manufacturing a scribing wheel in which a V-shaped cutting edge is formed along the circumference of a disc-shaped wheel, and a through hole is formed at the center of the disc. And forming a first polished surface by rough polishing so as to be obliquely cut from both sides of the side surface along the circumference of the disk, thereby forming a V-shaped circumferential portion having a first apex angle. The V-shaped first polishing surface is finish-polished to form a second polishing surface, and only the tip portion of the second polishing surface has a second apex angle larger than the first apex angle. As the cutting edge portion having the above, superfinish polishing is performed with an abrasive having a particle size of 6000 or more so that the second apex angle is 95 to 125 ° .

この課題を解決するために、本発明のスクライビングホイールは、厚さが０．２〜０．４ｍｍの脆性材料基板をスクライブするためのスクライビングホイールであって、円板状ホイールの円周部に沿って第１の頂角となるようにＶ字状に形成した第１の研磨面を有し、前記第１の研磨面の先端の稜線に前記第１の頂角より大きい第２の頂角を有する第２の研磨面を有し、前記第２の研磨面は粒度６０００番以上の研磨材により研磨されたものであり、前記第２の頂角は９５°〜１２５°である。 In order to solve this problem, the scribing wheel of the present invention is a scribing wheel for scribing a brittle material substrate having a thickness of 0.2 to 0.4 mm, and is provided along the circumferential portion of the disc-shaped wheel. A first polishing surface formed in a V shape so as to have a first apex angle, and a ridge line at the tip of the first polishing surface has a second apex angle larger than the first apex angle. The second polishing surface is polished by an abrasive having a particle size of 6000 or more, and the second apex angle is 95 ° to 125 ° .

このような特徴を有する本発明によれば、スクライビングホイールの刃先を粗研磨し、Ｖ字形に構成すると共に、その先端部分のみを仕上げ研磨し、その後に超仕上げ研磨している。従って刃先として必要な稜線部分の凹凸を少なくすることができる。このためスクライビングホイールを用いて脆性材料基板を分断したときに端面強度を増すことができる、という優れた効果が得られる。このような特徴は特に薄い脆性材料基板をスクライブし、切断するときに特に有効となる。   According to the present invention having such a feature, the cutting edge of the scribing wheel is roughly polished to form a V shape, and only the tip portion thereof is finish-polished and then superfinished. Therefore, the unevenness of the ridge line portion necessary as the cutting edge can be reduced. For this reason, the outstanding effect that an end surface intensity | strength can be increased when a brittle material board | substrate is parted using a scribing wheel is acquired. Such a feature is particularly effective when scribing and cutting a thin brittle material substrate.

図１は従来例によるスクライビングホイールとその製造過程を示す側面図及び正面図である。FIG. 1 is a side view and a front view showing a conventional scribing wheel and its manufacturing process. 図２は本発明の実施の形態によるスクライビングホイールの正面図及び側面図である。FIG. 2 is a front view and a side view of the scribing wheel according to the embodiment of the present invention. 図３は本実施の形態によるスクライビングホイールの製造過程を示す側面図である。FIG. 3 is a side view showing the manufacturing process of the scribing wheel according to the present embodiment. 図４は超仕上げ研磨を行ったスクライビングホイールの先端部分を示す拡大図である。FIG. 4 is an enlarged view showing a tip portion of a scribing wheel that has undergone super-finish polishing. 図５はスクライビングホイールの機械的強度の試験状態を示す図である。FIG. 5 is a diagram showing a test state of the mechanical strength of the scribing wheel. 図６は本発明の他の実施の形態によるスクライビングホイールの製造過程を示す側面図である。FIG. 6 is a side view showing a manufacturing process of a scribing wheel according to another embodiment of the present invention.

図２（ａ）は本発明の実施の形態によるスクライビングホイールの正面図、図２（ｂ）はその側面図である。又図３（ａ）〜（ｄ）はこの実施の形態のスクライビングホイールの製造過程を示す側面図である。スクライビングホイールを製造する際には、まず図３（ａ）に示す円板１１の中央に図３（ｂ）に示すように軸穴となる貫通孔１２を形成する。次にこの貫通孔１２にモータ等の回転軸を連通して回転させつつ、図３（ａ）に示す円板１１の全円周を両側より粗研磨して図３（ｂ）に示すようにＶ字形に形成する。この粗研磨の工程では、例えば粒度３００番の微粉の研磨剤を用いた研磨を行うものとする。こうして形成した研磨面を研磨面１３とする。このときの頂角α１は刃先として必要となる頂角よりも鋭くなるように研磨する。頂角α１は好ましくは１５°〜１４０°であり、より好ましくは６０°〜１２０°であり、さらに好ましくは８０°〜１００°である。１５°以下であると稜線先端が加工時に破損しやすく、１４０°以上であると刃先としての実用性がなくなる傾向にある。   FIG. 2A is a front view of a scribing wheel according to the embodiment of the present invention, and FIG. 2B is a side view thereof. FIGS. 3A to 3D are side views showing the manufacturing process of the scribing wheel of this embodiment. When manufacturing the scribing wheel, first, a through hole 12 serving as an axial hole is formed in the center of the disc 11 shown in FIG. 3A as shown in FIG. Next, the rotating shaft such as a motor is connected to the through hole 12 and rotated, and the entire circumference of the disk 11 shown in FIG. 3A is roughly polished from both sides as shown in FIG. 3B. It is formed in a V shape. In this rough polishing step, for example, polishing using a fine abrasive powder having a particle size of 300 is performed. The polished surface thus formed is referred to as a polished surface 13. Polishing is performed so that the apex angle α1 at this time is sharper than the apex angle required for the cutting edge. The apex angle α1 is preferably 15 ° to 140 °, more preferably 60 ° to 120 °, and still more preferably 80 ° to 100 °. When the angle is 15 ° or less, the tip of the ridge line is easily damaged during processing, and when the angle is 140 ° or more, the utility as a cutting edge tends to be lost.

次に粗研磨で研磨した研磨面１３に仕上げ研磨を行う。仕上げ研磨では、例えば粒度２０００番の微粉の研磨剤を用いる。仕上げ研磨では図３（ｃ）に示すように外形はほとんど変化しない。こうして形成した研磨面を研磨面１４とする。   Next, final polishing is performed on the polished surface 13 polished by rough polishing. In the final polishing, for example, a fine abrasive with a particle size of 2000 is used. In the finish polishing, the outer shape hardly changes as shown in FIG. The polished surface thus formed is referred to as a polished surface 14.

更に本実施の形態では図３（ｄ）に示すように先端部分についてのみ超仕上げ研磨を行う。この超仕上げ研磨では粒度６０００番以上の微粉の研磨剤を用いて研磨する。又この工程では先端部分のみ所望の頂角α２（α２＞α１）となるように研磨を行う。図４はこの先端部分を示す拡大図である。こうして形成した超仕上げによる研磨面を１５とする。ここで研磨剤の粒度は好ましくは粒度６０００番以上であり、より好ましくは８０００番以上であり、さらに好ましくは１００００番以上である。粒度３０００番以下であると、分断した脆性材料基板端面には傷が残りやすい傾向がある。ここで頂角α２は好ましくは９０°〜１４０°、より好ましくは９５°〜１２５°、更に好ましくは１００°〜１１５°とする。頂角α２が大きいものは高いスクライブ荷重で使用するのに適しており、頂角α２が小さいものは低いスクライブ荷重で使用するのに適している。   Further, in this embodiment, as shown in FIG. 3D, superfinish polishing is performed only on the tip portion. In this super-finish polishing, polishing is performed using a fine abrasive having a particle size of 6000 or more. In this step, polishing is performed so that only the tip portion has a desired apex angle α2 (α2> α1). FIG. 4 is an enlarged view showing the tip portion. The superfinished polished surface thus formed is assumed to be 15. Here, the particle size of the abrasive is preferably 6000 or more, more preferably 8000 or more, and further preferably 10000 or more. When the particle size is 3000 or less, scratches tend to remain on the end face of the divided brittle material substrate. The apex angle α2 is preferably 90 ° to 140 °, more preferably 95 ° to 125 °, and still more preferably 100 ° to 115 °. Those having a large apex angle α2 are suitable for use at a high scribe load, and those having a small apex angle α2 are suitable for use at a low scribe load.

このように刃先を２段のＶ字状とすることでスクライビングホイールとして必要な刃先の先端部分のみを超仕上げ研磨とし、加工面積を減らすことで加工時間を短縮しつつ、刃先の稜線の凹凸を少なくすることができる傾向にある。   In this way, the cutting edge has a two-stage V-shape, so that only the tip of the cutting edge necessary as a scribing wheel is superfinished, and the processing area is reduced to reduce the processing time, and the unevenness of the edge of the cutting edge is reduced. It tends to be less.

このように刃先の稜線を鋭くしたスクライビングホイールを用いてスクライブを行い、脆性材料基板を分断すれば、脆性材料基板の切断面に生じる傷を小さくすることができ、脆性材料基板端面強度を強くすることができる。脆性材料基板端面強度は切断後の脆性材料基板の機械的強度を支配する主要な因子である。そこで本実施の形態によるスクライビングホイールの効果を確認するため、本実施の形態と従来のスクライビングホイールを用いて分断した脆性材料基板の機械的強度を比較した。図５は４点曲げ強度の強度試験を行う試験装置の一例を示している。この試験では４０ｍｍ×５０ｍｍにスクライブし分断した０．３ｍｍ厚のガラス板を試験片２０，２１として用いた。試験片２０は従来のスクライビングホイールを用いて分断したもの、試験片２１は本実施の形態によるスクライビングホイールを用いて分断したものである。   If scribing is performed using the scribing wheel with the sharp edge of the blade edge in this way and the brittle material substrate is divided, scratches generated on the cut surface of the brittle material substrate can be reduced, and the brittle material substrate end face strength is increased. be able to. The brittle material substrate end face strength is a major factor governing the mechanical strength of the brittle material substrate after cutting. Therefore, in order to confirm the effect of the scribing wheel according to the present embodiment, the mechanical strength of the brittle material substrate divided using the present embodiment and the conventional scribing wheel was compared. FIG. 5 shows an example of a test apparatus for performing a strength test of four-point bending strength. In this test, 0.3 mm-thick glass plates scribed and divided into 40 mm × 50 mm were used as the test pieces 20 and 21. The test piece 20 is divided using a conventional scribing wheel, and the test piece 21 is divided using a scribing wheel according to the present embodiment.

図５に示すようにベース３１の上面に所定間隔、例えば２０ｍｍの間隔の支持台３２，３３を配置し、その上部に試料となる試験片２０（２１）をスクライブした面を下方として配置する。試験片２０の上部には１０ｍｍの間隔の押圧部３４，３５を有する加圧部３６を載置し、均一に押圧して破断するまでの圧力を測定した。そして従来のスクライビングホイールを用いた試験片２０では、上部より印加した圧力が平均で８４．８Ｎのときに端面より分断していた。これに対して本実施の形態によるスクライビングホイールを用いて分断した試験片２１を用いた場合には、平均の破壊加圧が１０３．６Ｎとなり、端面強度が強くなっていることが確認できた。   As shown in FIG. 5, support bases 32 and 33 having a predetermined interval, for example, a 20 mm interval, are disposed on the upper surface of the base 31, and a surface on which a test piece 20 (21) as a sample is scribed is disposed below. On the upper part of the test piece 20, a pressure part 36 having pressure parts 34, 35 with a spacing of 10 mm was placed, and the pressure until the pressure part was uniformly pressed and broken was measured. And in the test piece 20 using the conventional scribing wheel, when the pressure applied from the upper part was 84.8N on the average, it divided from the end surface. On the other hand, when the test piece 21 divided using the scribing wheel according to the present embodiment was used, it was confirmed that the average breaking pressure was 103.6 N and the end face strength was increased.

尚この実施の形態では円板のスクライビングホイールに対してＶ字形に粗研磨を行い、更に仕上げ研磨を行った後、先端部分のみを所望の角度になるように超仕上げ研磨を行っている。これに代えて仕上げ研磨を行う際に先端の角度を所望の頂角α２となるように研磨してもよい。図６はこの実施の形態の製造過程を示す図である。この場合には、図６（ａ）に示す円板１１の全周を粗研磨して図６（ｂ）に示すようにＶ字形に研磨する。この後、先端部分のみを頂角α２となるように研磨する。このときの研磨面を１６とする。次いで図６（ｄ）に示すように先端の研磨面１６に更に超仕上げ研磨による研磨を行う。このときの研磨面を１７とする。粗研磨、仕上げ研磨及び超仕上げ研磨で用いる研磨剤は前述した実施の形態のものと同様である。頂角α１，α２についても前述したものと同様である。この場合には仕上げ研磨の段階で頂角α２となるようにしているため、製造工程をより効率化することができる。   In this embodiment, the disc scribing wheel is coarsely polished in a V shape, and further subjected to finish polishing, and then superfinish polishing is performed so that only the tip portion has a desired angle. Instead of this, polishing may be performed so that the tip angle becomes a desired apex angle α2 when performing final polishing. FIG. 6 shows the manufacturing process of this embodiment. In this case, the entire circumference of the disc 11 shown in FIG. 6A is roughly polished and polished into a V shape as shown in FIG. 6B. Thereafter, only the tip portion is polished so as to have the apex angle α2. The polished surface at this time is 16. Next, as shown in FIG. 6 (d), the polishing surface 16 at the tip is further polished by superfinish polishing. The polished surface at this time is set to 17. The abrasive used in rough polishing, finish polishing and superfinish polishing is the same as that in the above-described embodiment. The apex angles α1 and α2 are the same as described above. In this case, since the apex angle α2 is set at the stage of finish polishing, the manufacturing process can be made more efficient.

又ここで示した研磨剤の粒度は一例であり、この粒度に限定されるものでないことはいうまでもない。   Needless to say, the particle size of the abrasive shown here is merely an example, and is not limited to this particle size.

上述した本発明のスクライビングホイールは、脆性材料基板をスクライブするスクライブ装置に用いることができ、特に薄い脆性材料基板をスクライブするスクライブ装置に有効である。   The scribing wheel of the present invention described above can be used in a scribing apparatus for scribing a brittle material substrate, and is particularly effective for a scribing apparatus for scribing a thin brittle material substrate.

１１ スクライビングホイール
１２ 貫通孔
１３〜１７ 研磨面 11 Scribing wheel 12 Through hole 13-17 Polished surface

Claims (3)

円板状ホイールの円周部に沿ってＶ字形の刃先を形成してなる、厚さが０．２〜０．４ｍｍの脆性材料基板をスクライブするためのスクライビングホイールの製造方法であって、
円板の中心位置に貫通孔を形成し、
前記円板の円周に沿って側面の両側より互いに斜めに削り込むよう粗研磨して第１の研磨面を形成することにより円周部分を第１の頂角を有するＶ字状として形成し、
前記Ｖ字状の第１研磨面の先端部分のみを仕上げ研磨して第１の頂角より大きい第２の頂角を有する刃先部として第２の研磨面を形成し、
前記第２の研磨面を粒度６０００番以上の研磨剤により前記第２の頂角が９５〜１２５°となるように超仕上げ研磨するスクライビングホイールの製造方法。 A method for manufacturing a scribing wheel for scribing a brittle material substrate having a thickness of 0.2 to 0.4 mm, which is formed by forming a V-shaped cutting edge along the circumference of a disc-shaped wheel,
A through hole is formed at the center of the disk,
The circumferential portion is formed into a V shape having a first apex angle by rough polishing so as to be cut obliquely from both sides of the side surface along the circumference of the disc to form a first polished surface. ,
Only the tip portion of the V-shaped first polishing surface is finish-polished to form a second polishing surface as a cutting edge portion having a second apex angle larger than the first apex angle,
A method for manufacturing a scribing wheel, wherein the second polished surface is superfinish polished with an abrasive having a grain size of 6000 or more so that the second apex angle is 95 to 125 ° . 円板状ホイールの円周部に沿ってＶ字形の刃先を形成してなるスクライビングホイールの製造方法であって、
円板の中心位置に貫通孔を形成し、
前記円板の円周に沿って側面の両側より互いに斜めに削り込むよう粗研磨して第１の研磨面を形成することにより円周部分を第１の頂角を有するＶ字状として形成し、
前記Ｖ字状の第１研磨面を仕上げ研磨して第２の研磨面を形成し、
前記第２の研磨面の先端部分のみを第１の頂角より大きい第２の頂角を有する刃先部として、粒度６０００番以上の研磨剤により前記第２の頂角が９５〜１２５°となるように超仕上げ研磨するスクライビングホイールの製造方法。 A scribing wheel manufacturing method in which a V-shaped cutting edge is formed along the circumference of a disc-shaped wheel,
A through hole is formed at the center of the disk,
The circumferential portion is formed into a V shape having a first apex angle by rough polishing so as to be cut obliquely from both sides of the side surface along the circumference of the disc to form a first polished surface. ,
Final polishing the V-shaped first polished surface to form a second polished surface;
Using only the tip portion of the second polishing surface as a blade edge portion having a second apex angle larger than the first apex angle, the second apex angle becomes 95 to 125 ° with an abrasive having a particle size of # 6000 or more. A method of manufacturing a scribing wheel that is superfinish polished. 厚さが０．２〜０．４ｍｍの脆性材料基板をスクライブするためのスクライビングホイールであって、円板状ホイールの円周部に沿って第１の頂角となるようにＶ字状に形成した第１の研磨面を有し、
前記第１の研磨面の先端の稜線に前記第１の頂角より大きい第２の頂角を有する第２の研磨面を有し、前記第２の研磨面は粒度６０００番以上の研磨材により研磨されたものであり、前記第２の頂角は９５°〜１２５°であるスクライビングホイール。 A scribing wheel for scribing a brittle material substrate having a thickness of 0.2 to 0.4 mm, which is formed in a V shape so as to have a first apex angle along the circumferential portion of the disc-shaped wheel. Having a first polished surface,
A ridge line at the tip of the first polishing surface has a second polishing surface having a second apex angle larger than the first apex angle, and the second polishing surface is made of an abrasive having a grain size of 6000 or more. A scribing wheel that has been polished and has a second apex angle of 95 ° to 125 ° .
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