TW201741260A

TW201741260A - Scribing wheel and method of manufacturing the same capable of increasing the yield of a scribing wheel, improving sliding resistance during use, and preventing damages to a wheel holder

Info

Publication number: TW201741260A
Application number: TW106117346A
Authority: TW
Inventors: 北沢正明; 宮川清文; 留井直子; 林弘義
Original assignee: 三星鑽石工業股份有限公司
Priority date: 2016-05-30
Filing date: 2017-05-25
Publication date: 2017-12-01
Also published as: CN107443592B; TWI730103B; KR102381646B1; CN107443592A; JP2017213866A; JP6504196B2; KR20170135717A

Abstract

The present invention relates to a scribing wheel and a method of manufacturing the same. A diamond film (17) is formed on the inclined surfaces (13, 14) of the scribing wheel base material (12) via a pair of spacers (21, 22). After the formation of the diamond film (17), the diamond film (17) is cut by a laser beam in order to remove the diamond film adhering to the boundary between the inclined surfaces (13, 14) and the lateral surfaces (15, 16) to which the film adheres. As a result, the diamond film (17) does not remain on the outer peripheral portion of the lateral surfaces (15, 16), thereby increasing the yield of the scribing wheel and improving the sliding resistance in use.

Description

Scribing wheel and manufacturing method thereof

本發明係關於一種用於壓接於脆性材料基板並滾動而進行劃線之劃線輪及其製造方法。The present invention relates to a scribing wheel for crimping a substrate of a brittle material and rolling it for scribing, and a method of manufacturing the same.

先前之劃線輪將超硬合金製或多晶燒結金剛石(以下稱為PCD (Polymerize Crystal Diamond，聚晶金剛石))製之圓板作為基材。PCD係使金剛石粒子與鈷等一起燒結而成者。劃線輪係自成為基材之圓板之兩側將圓周之邊緣相互傾斜地削入而於圓周面形成有V字形之刀尖者。將如此般形成之劃線輪旋轉自如地軸接於劃線裝置之劃線頭等並以特定之負荷按壓至脆性材料基板，使其沿著脆性材料基板之面移動，藉此可使其一面滾動一面進行劃線。於日本專利特開平04-224128號公報中，關於用於切斷玻璃基板之玻璃切斷用刀，揭示有為了延長其壽命而利用金剛石對V字形狀之刀尖表面進行覆膜之玻璃切斷用刀。該玻璃切斷用刀係對由與金剛石之相容性良好之陶瓷形成之刀尖表面被覆金剛石膜，並對該金剛石膜進行表面研磨處理而調整形狀。藉由使用此種玻璃切斷用刀，而刀之壽命延長，又，表現為能夠以切斷面變得平滑之方式將高硬度玻璃切斷。又，於日本專利特開2013-220554號公報中，提出有一種劃線輪，該劃線輪係於具有剖面形成為V字形之圓周部之劃線輪之成為刀尖之傾斜面使金剛石膜生長，並對稜線之兩側之區域進行研磨而成。然而，於剖面形成為V字形之劃線輪基材之傾斜面形成金剛石膜之情形時，為了避免金剛石膜附著於貫通孔或側壁，而如圖1(a)所示，將劃線輪基材100(以下，簡稱為輪基材)夾於一對間隔件101、102之間，並使輪基材100之側壁接觸間隔件101、102地保持於成膜爐中。然後，於成膜爐中完成金剛石膜對輪基材100之傾斜面之附著之後，如圖1(b)所示，將間隔件101、102分離並清洗輪基材100。通常，為了確保膜厚而必須複數次使金剛石膜附著，將該作業重複複數次。然而，有如下情況：即便於使金剛石膜附著時使輪基材100之側面接觸間隔件101、102，膜亦繞進並附著於側面之外周面周邊，而側面之外周面之膜厚增大數μm左右。而且，輪基材100若暫且與間隔件101、102分離，則於清洗後無法如先前般夾入至間隔件之間，因此，有如下情形，即，再次使金剛石膜附著時，金剛石膜會進一步繞進至外周面周邊而周邊部分之膜厚變大，從而超出容許公差之範圍。已完成之劃線輪插入至輪保持器之切口之間隙中，旋轉自如地保持而進行使用。此時，有如下問題：若於側面附著有金剛石膜，則超出供劃線輪插入之間隙之容許公差之範圍，從而有無法保持於輪保持器之情形。即便於能夠保持於輪保持器之情形時，亦有如下問題：若劃線輪之側面與傾斜面之邊界部分之厚度較大，則伴隨劃線輪之旋轉而使用劃線輪時之滑動阻力容易變大。進而，亦有如下問題：只有位於輪保持器之切口之側面之貫通孔之周邊部分呈環狀磨損，輪保持器亦產生損傷。The previous scribing wheel uses a disc made of cemented carbide or polycrystalline sintered diamond (hereinafter referred to as PCD (Polymerize Crystal Diamond)) as a substrate. PCD is a method in which diamond particles are sintered together with cobalt or the like. The scribing wheel system is formed by cutting the edges of the circumference obliquely from each other on both sides of the circular plate which becomes the base material, and forming a V-shaped blade tip on the circumferential surface. The scribing wheel thus formed is rotatably coupled to a scribing head or the like of the scribing device, and is pressed against the brittle material substrate with a specific load to move along the surface of the brittle material substrate, thereby rolling the surface Dash on one side. Japanese Patent Publication No. 04-224128 discloses a glass cutting blade for cutting a glass substrate, and discloses a glass cutting for coating a V-shaped blade tip surface with diamond in order to extend the life thereof. Use a knife. This glass cutting blade coats the surface of the blade tip formed of a ceramic having good compatibility with diamond, and the surface of the diamond film is subjected to surface polishing treatment to adjust the shape. By using such a glass cutting blade, the life of the blade is extended, and the high hardness glass can be cut so that the cut surface becomes smooth. Further, Japanese Laid-Open Patent Publication No. 2013-220554 proposes a scribing wheel which is attached to a scribing wheel having a V-shaped cross section and which becomes an inclined surface of a cutting edge to form a diamond film. Grown and grind the areas on both sides of the ridgeline. However, in the case where the inclined surface of the V-shaped scribing wheel substrate is formed into a diamond film, in order to prevent the diamond film from adhering to the through hole or the side wall, as shown in FIG. 1(a), the scribing wheel base is used. The material 100 (hereinafter simply referred to as a wheel substrate) is sandwiched between the pair of spacers 101 and 102, and the side wall of the wheel substrate 100 is held in the film forming furnace in contact with the spacers 101 and 102. Then, after the diamond film is adhered to the inclined surface of the wheel substrate 100 in the film forming furnace, as shown in FIG. 1(b), the spacers 101, 102 are separated and the wheel substrate 100 is cleaned. Usually, in order to secure a film thickness, it is necessary to attach a diamond film several times, and this operation is repeated several times. However, there is a case where even if the side surface of the wheel substrate 100 is brought into contact with the spacers 101, 102 when the diamond film is attached, the film is wound around and adhered to the periphery of the outer peripheral surface of the side surface, and the film thickness of the outer peripheral surface of the side surface is increased. A few μm or so. Further, if the wheel base material 100 is temporarily separated from the spacers 101 and 102, it cannot be sandwiched between the spacers as before after cleaning. Therefore, when the diamond film is attached again, the diamond film is Further, it is wound around the periphery of the outer peripheral surface and the film thickness of the peripheral portion is increased to exceed the allowable tolerance range. The completed scribing wheel is inserted into the gap of the slit of the wheel holder, and is rotatably held for use. At this time, there is a problem that if the diamond film is attached to the side surface, the tolerance of the gap for the insertion of the scribing wheel is exceeded, and the wheel holder cannot be held. That is, when it is convenient to be held in the wheel holder, there is also a problem that if the thickness of the boundary portion between the side surface of the scribing wheel and the inclined surface is large, the sliding resistance when the scribing wheel is used in conjunction with the rotation of the scribing wheel It is easy to get bigger. Further, there is a problem in that only the peripheral portion of the through hole on the side of the slit of the wheel holder is annularly worn, and the wheel holder is also damaged.

本發明係鑒於如上所述之問題而完成者，其目的在於提供一種劃線輪及其製造方法，該劃線輪防止伴隨輪基材之側面之金剛石膜之附著而產生之良率之降低，並且於使用劃線輪時滑動阻力不會變大。為了解決該課題，本發明之劃線輪具備：劃線輪基材，其沿著圓周部形成稜線，且具有由上述稜線與上述稜線之兩側之傾斜面構成之刀尖；金剛石膜，其位於上述劃線輪基材之傾斜面；及環狀槽，其位於上述劃線輪基材之兩側之側面之成為與形成有金剛石膜之傾斜面之邊界之環狀區域。為了解決該課題，本發明之劃線輪之製造方法係沿著圓板之圓周部形成稜線且具有由上述稜線與上述稜線之兩側之傾斜面構成之刀尖的劃線輪之製造方法，且沿著圓板狀之劃線輪基材之圓周自側面之兩側以相互傾斜地削入之方式進行研磨而於圓周部分形成由傾斜面與稜線構成之刀尖部分，於上述劃線輪基材之傾斜面形成金剛石膜，對劃線輪基材之兩側之側面中成為與具有上述金剛石膜之傾斜面之邊界之環狀區域進行切削而將側面之環狀區域之金剛石膜去除並且形成環狀槽。此處，上述劃線輪基材之側面之環狀槽亦可藉由呈環狀照射雷射光而形成。此處，亦可使形成有上述刀尖部分之複數個劃線輪基材與上述各劃線輪基材之側面全面接觸之間隔件交替地接觸而於上述各金剛石輪基材之傾斜面形成金剛石膜。此處，亦可使形成有上述刀尖部分之複數個上述劃線輪基材將側面對合而相互接觸，使上述兩側之劃線輪基材之外側之側面全面接觸之一對間隔件接觸於外側，而於上述各金剛石輪基材之傾斜面形成金剛石膜。此處，上述劃線輪基材之環狀槽亦可藉由對側面水平地照射雷射光而形成。此處，上述劃線輪基材之環狀槽亦可藉由對側面垂直地照射雷射光而形成。根據具有此種特徵之本發明，即便於在成為金剛石膜之傾斜面與側面之邊界部分之側面上附著有膜之情形時，由於將側面之膜去除，故而亦能夠防止伴隨因膜之附著所引起之劃線輪厚度變化而產生之良率降低。又，由於膜未附著於劃線輪之側面，故而可獲得如下效果，即，可減小將劃線輪安裝於輪保持器進行使用時之滑動阻力，從而可防止輪保持器之損傷。The present invention has been made in view of the above problems, and an object thereof is to provide a scribing wheel which prevents a decrease in yield due to adhesion of a diamond film on a side surface of a wheel substrate, and a method of manufacturing the same. Also, the sliding resistance does not become large when the scribing wheel is used. In order to solve the problem, the scribing wheel of the present invention includes: a scribing wheel base material having a ridge line along a circumferential portion thereof, and a blade edge formed by the ridge line and the inclined surfaces on both sides of the ridge line; a diamond film; An inclined surface located on the scribing wheel base material; and an annular groove located on an annular surface of a side surface of the both sides of the scribing wheel base material at a boundary with the inclined surface on which the diamond film is formed. In order to solve the problem, the method for manufacturing a scribing wheel according to the present invention is a method of manufacturing a scribing wheel in which a ridge line is formed along a circumferential portion of a circular plate and has a blade edge formed by the inclined surface of the ridge line and the ridge line. And grinding along the circumference of the disc-shaped scribing wheel base material from both sides of the side surface so as to be inclined obliquely to each other, and forming a cutting edge portion formed by the inclined surface and the ridge line in the circumferential portion, on the scribing wheel base The inclined surface of the material forms a diamond film, and the annular surface of the side surface of the both sides of the scribing wheel substrate is cut with the edge of the inclined surface of the diamond film, and the diamond film of the annular region of the side surface is removed and formed. Annular groove. Here, the annular groove on the side surface of the scribing wheel base material may be formed by irradiating laser light in a ring shape. Here, the plurality of scribing wheel base materials on which the cutting edge portion is formed may be alternately brought into contact with the spacers in contact with the side surfaces of the scribing wheel base materials to form an inclined surface of each of the diamond wheel base materials. Diamond film. Here, the plurality of scribing wheel base materials on which the cutting edge portion is formed may be flanked and brought into contact with each other such that the side surfaces on the outer side of the scribing wheel base material on both sides are in full contact with one of the pair of spacers. Contact with the outside, and forming a diamond film on the inclined surface of each of the above-mentioned diamond wheel substrates. Here, the annular groove of the scribing wheel base material may be formed by horizontally irradiating the side surface with laser light. Here, the annular groove of the scribing wheel base material may be formed by irradiating laser light perpendicularly to the side surface. According to the present invention having such a feature, even when a film is adhered to the side surface which is a boundary portion between the inclined surface and the side surface of the diamond film, since the film on the side surface is removed, it is possible to prevent the adhesion of the film due to the adhesion of the film. The yield caused by the change in the thickness of the scribing wheel is reduced. Further, since the film is not attached to the side surface of the scribing wheel, it is possible to reduce the sliding resistance when the scribing wheel is attached to the wheel holder for use, and the wheel holder can be prevented from being damaged.

圖2(a)、(b)係表示本發明之第1實施形態之劃線輪之製造過程之前視圖及其側視圖。當製造劃線輪時，首先，如圖2(a)所示，例如於超硬合金之成為劃線輪基材之圓板10之中央形成成為軸孔之貫通孔11。其次，將未圖示之馬達等之軸連通於該貫通孔11並以貫通孔11之中心軸為旋轉軸進行旋轉，並且對圓板10之整個圓周自圓板之正背兩側相對於旋轉軸傾斜地進行研磨，而如圖2(b)所示形成為垂直剖面V字形而製成劃線輪基材12，將V字形部分設為刀尖。將以此方式形成之V字形之斜面記為傾斜面13、14，將側面記為15、16。其次，對在傾斜面13、14形成金剛石薄膜之過程進行說明。首先，預先使V字形之傾斜面13、14成為粗糙面以使金剛石膜容易附著。繼而，如圖3所示，利用一對間隔件21、22夾住劃線輪基材12並使圓柱狀之構件23貫通而上下固定。間隔件21、22之側面之直徑略大於劃線輪基材12之側面15、16之直徑。如此一來，劃線輪基材之側面15、16分別可完全接觸間隔件21、22之側面。以該狀態進行預處理後，放入至成膜爐而於劃線輪基材之傾斜面13、14成膜金剛石膜17。繼而，將劃線輪基材12與一對間隔件21、22分離之後，利用超音波清洗等進行清洗。再者，於藉由1次成膜無法獲得所需之膜厚之情形時，亦可將上述成膜與劃線輪基材之側面之金剛石膜之成膜處理重複複數次，藉此獲得所需之膜厚。當利用成膜爐使金剛石膜附著時，金剛石粒子亦繞進至側面15、16之最外周之環狀部分並少量附著而成為環狀凸部。圖4(a)係將傾斜面13與側面15交叉之外周之一部分放大表示之剖視圖，表示於傾斜面13及側面15之外周部分附著有金剛石膜17。繼而，為了將繞進並附著於側面15之金剛石膜去除，而於成膜後，如圖5所示，對劃線輪之側面15之成為與V字形傾斜面之邊界之環狀區域15a照射雷射光。作為雷射光源，為了減輕對金剛石膜及輪基材之熱影響，較佳為使用例如脈衝寬度為10奈秒以下之較短者。而且，圖5(a)之以影線表示之部分表示照射有雷射光之部分。藉由照射雷射光，不僅將附著於側面15之金剛石膜17去除，而且構成劃線輪基材12之超鋼合金之環狀區域15a亦少量地例如以深度5 μm左右呈環狀地去除，如圖4(b)中表示圖5(b)之小圓部分之剖視圖般形成環狀槽15b。因此，即便於側面15附著有少量之金剛石膜17之情形時，於照射雷射光後，亦能夠將金剛石膜自側面15完全去除。進而，為了將繞進並附著於側面16之金剛石膜去除，而如圖5所示，使劃線輪基材12翻轉，以相同之方式對側面16與研磨面14之邊界之環狀區域16a照射雷射光。藉此，將環狀部分16a之金剛石膜17去除，進而將劃線輪基材呈環狀地去除而形成成為5 μm左右之凹部之環狀槽16b。環狀槽15b、16b之寬度較佳為設為100 μm～200 μm，以能夠確實地將側面之凸部去除。於本實施形態中，設為150 μm左右。其後，利用磨石等研磨材對附有金剛石膜之前端部分以前端變尖之方式進行研磨。研磨可設為粗研磨與精研磨之2個階段，亦可成為較原來之金剛石膜17小例如5°左右之鈍角。圖6係表示以此方式完成之劃線輪之前視圖及側視圖。藉由以此方式將附著於側面15、16之金剛石膜去除，而側面不存在環狀凸部，因此，輪保持器之側面與傾斜面之邊界部分之摩擦變少，而可改善滑動阻力。再者，於本實施形態中，自相對於劃線輪之側面垂直之方向照射雷射光而消除側面之附著有金剛石膜之環狀凸部，但亦可如圖7所示，自與劃線輪之側面平行之方向照射雷射光。又，亦可代替雷射光而使用磨石將附著於側面之金剛石膜去除。又，於本實施形態中，當使金剛石薄膜附著於劃線輪基材之傾斜面時，經由一對間隔件而保持輪基材，但於同時使金剛石薄膜附著於複數個輪基材之情形時，亦可如圖8(a)所示使輪基材12與間隔件31、32、33…交替地接觸而成膜。又，於同時使金剛石薄膜附著於複數個輪基材之情形時，亦可如圖8(b)所示，僅於兩端配置間隔件31、32，使複數個輪基材12將側面對合而相互接觸地保持於上述間隔件31、32之間而成膜金剛石薄膜。於該情形時，若如圖9(a)、(b)所示自側面照射雷射光，則可同時進行附著於側面之金剛石膜之去除及各輪基材之分離。再者，圖9(c)係表示圖9(b)中以圓表示之側面與傾斜面之邊界部分之局部放大圖。又，於本實施形態中，將附著於側面之金剛石膜去除之後，對附有金剛石膜之前端部分進行研磨，但亦可於對金剛石膜之前端進行研磨之後，將附著於側面之金剛石膜去除。2(a) and 2(b) are a front view and a side view showing a manufacturing process of the scribing wheel according to the first embodiment of the present invention. When the scribing wheel is manufactured, first, as shown in FIG. 2(a), for example, a through hole 11 serving as a shaft hole is formed in the center of the circular plate 10 which becomes a scribing wheel base material of the cemented carbide. Next, a shaft of a motor or the like (not shown) communicates with the through hole 11 and rotates with the central axis of the through hole 11 as a rotation axis, and the entire circumference of the circular plate 10 is rotated relative to the front and back sides of the circular plate. The shaft is polished obliquely, and as shown in Fig. 2(b), a V-shaped vertical cross section is formed to form the scribing wheel base material 12, and the V-shaped portion is set as the cutting edge. The slopes of the V-shape formed in this manner are referred to as inclined faces 13, 14, and the side faces are denoted as 15, 16. Next, a process of forming a diamond thin film on the inclined faces 13, 14 will be described. First, the V-shaped inclined faces 13, 14 are previously made rough to make the diamond film easily adhere. Then, as shown in FIG. 3, the scribing wheel base material 12 is sandwiched by the pair of spacers 21 and 22, and the columnar member 23 is penetrated and fixed vertically. The diameter of the sides of the spacers 21, 22 is slightly larger than the diameter of the sides 15, 16 of the scribing wheel substrate 12. In this way, the sides 15, 16 of the scribing wheel substrate can completely contact the sides of the spacers 21, 22, respectively. After pretreatment in this state, the film is placed in a film forming furnace to form a diamond film 17 on the inclined faces 13 and 14 of the scribing wheel substrate. Then, the scribing wheel base material 12 is separated from the pair of spacers 21 and 22, and then washed by ultrasonic cleaning or the like. In addition, when the desired film thickness cannot be obtained by one film formation, the film formation process of the film formation and the diamond film on the side surface of the scribing wheel substrate may be repeated a plurality of times, thereby obtaining a The film thickness required. When the diamond film is adhered by the film forming furnace, the diamond particles are also wound around the annular portion of the outermost circumference of the side faces 15, 16 and adhered in a small amount to become an annular convex portion. 4( a ) is a cross-sectional view showing an enlarged portion of the outer surface of the inclined surface 13 and the side surface 15 , and shows the diamond film 17 attached to the outer peripheral portion of the inclined surface 13 and the side surface 15 . Then, in order to remove the diamond film that is wound around and attached to the side surface 15, after the film formation, as shown in FIG. 5, the side surface 15 of the scribing wheel is irradiated with the annular region 15a which is at the boundary with the V-shaped inclined surface. laser. As the laser light source, in order to reduce the thermal influence on the diamond film and the wheel substrate, it is preferable to use, for example, a shorter pulse width of 10 nanoseconds or less. Further, a portion indicated by hatching in Fig. 5(a) indicates a portion irradiated with laser light. By irradiating the laser light, not only the diamond film 17 adhering to the side surface 15 but also the annular region 15a of the super-steel alloy constituting the scribing wheel base material 12 is removed in a ring shape at a depth of, for example, about 5 μm. An annular groove 15b is formed as shown in a cross-sectional view of the small round portion of Fig. 5(b) as shown in Fig. 4(b). Therefore, even when a small amount of the diamond film 17 is attached to the side surface 15, the diamond film can be completely removed from the side surface 15 after the laser light is irradiated. Further, in order to remove the diamond film wound around and attached to the side surface 16, as shown in Fig. 5, the scribing wheel substrate 12 is inverted, and the annular region 16a which borders the side surface 16 and the polishing surface 14 in the same manner is used. Irradiate the laser light. Thereby, the diamond film 17 of the annular portion 16a is removed, and the scribing wheel base material is removed in an annular shape to form an annular groove 16b which is a concave portion of about 5 μm. The width of the annular grooves 15b and 16b is preferably set to 100 μm to 200 μm so that the convex portions on the side surface can be surely removed. In the present embodiment, it is set to about 150 μm. Thereafter, the front end portion to which the diamond film is attached is polished by a polishing material such as a grindstone so that the tip end is sharpened. The polishing can be carried out in two stages of rough polishing and fine polishing, and can also be an obtuse angle smaller than the original diamond film 17 by, for example, about 5°. Figure 6 is a front view and a side view showing the scribing wheel completed in this manner. By removing the diamond film adhering to the side faces 15 and 16 in this manner, the annular convex portion is not present on the side surface, so that the friction between the side surface of the wheel holder and the inclined portion is less, and the sliding resistance can be improved. Further, in the present embodiment, the laser light is irradiated from the direction perpendicular to the side surface of the scribing wheel to eliminate the annular convex portion to which the diamond film adheres on the side surface, but as shown in FIG. The side of the wheel is illuminated in parallel with the laser beam. Further, instead of the laser light, the diamond film attached to the side surface may be removed using a grindstone. Further, in the present embodiment, when the diamond thin film is attached to the inclined surface of the scribing wheel base material, the wheel base material is held by the pair of spacers, but the diamond thin film is simultaneously attached to the plurality of wheel base materials. At the same time, as shown in Fig. 8(a), the wheel base material 12 and the spacers 31, 32, 33, ... may be alternately brought into contact with each other to form a film. Further, when the diamond film is simultaneously attached to the plurality of wheel substrates, as shown in FIG. 8(b), the spacers 31 and 32 may be disposed only at both ends, so that the plurality of wheel substrates 12 are laterally opposed. The diamond film is formed by being held between the spacers 31 and 32 in contact with each other. In this case, when the laser light is irradiated from the side as shown in FIGS. 9(a) and 9(b), the removal of the diamond film adhering to the side surface and the separation of the substrate of each wheel can be simultaneously performed. Further, Fig. 9(c) is a partially enlarged view showing a boundary portion between the side surface indicated by a circle and the inclined surface in Fig. 9(b). Further, in the present embodiment, after the diamond film adhered to the side surface is removed, the end portion to which the diamond film is attached is polished, but the diamond film attached to the side surface may be removed after the diamond film is polished at the front end. .

11‧‧‧貫通孔
12‧‧‧劃線輪基材
13‧‧‧傾斜面
14‧‧‧傾斜面
15‧‧‧側面
15a‧‧‧環狀區域
15b‧‧‧環狀槽
16‧‧‧側面
16a‧‧‧環狀區域
16b‧‧‧環狀槽
17‧‧‧金剛石膜
21‧‧‧間隔件
22‧‧‧間隔件
23‧‧‧構件
31‧‧‧間隔件
32‧‧‧間隔件
100‧‧‧劃線輪基材
101‧‧‧間隔件
102‧‧‧間隔件11‧‧‧through holes
12‧‧‧ scribing wheel substrate
13‧‧‧Sloping surface
14‧‧‧Sloping surface
15‧‧‧ side
15a‧‧‧ring area
15b‧‧‧ring groove
16‧‧‧ side
16a‧‧‧ring area
16b‧‧‧ring groove
17‧‧‧Diamond film
21‧‧‧ spacers
22‧‧‧ spacers
23‧‧‧ components
31‧‧‧ spacers
32‧‧‧ spacers
100‧‧‧ scribing wheel substrate
101‧‧‧ spacers
102‧‧‧ spacers

圖1(a)、(b)係表示劃線輪之製造時之金剛石膜之附著處理之概略圖。圖2(a)、(b)係本發明之第1實施形態之劃線輪之製造過程之前視圖及側視圖。圖3係表示本發明之第1實施形態之劃線輪基材上之金剛石膜之附著處理的概略圖。圖4(a)、(b)係表示雷射照射前後之劃線輪之側面與傾斜面之邊界部分的放大剖視圖。圖5(a)、(b)係表示本發明之實施形態之對劃線輪基材之雷射光之照射的前視圖及側視圖。圖6(a)、(b)係本實施形態之雷射照射後之劃線輪之前視圖及側視圖。圖7係表示本發明之另一實施形態之對劃線輪基材之雷射光之照射之側視圖。圖8(a)、(b)係表示另一實施形態之劃線輪基材上之金剛石膜之附著處理的概略圖。圖9(a)～(c)係表示本發明之另一實施形態之對劃線輪基材之雷射光之照射之側視圖。Fig. 1 (a) and (b) are schematic views showing the adhesion treatment of the diamond film at the time of manufacture of the scribing wheel. 2(a) and 2(b) are a front view and a side view showing a manufacturing process of the scribing wheel according to the first embodiment of the present invention. Fig. 3 is a schematic view showing a process of attaching a diamond film on a scribing wheel substrate according to the first embodiment of the present invention. 4(a) and 4(b) are enlarged cross-sectional views showing a boundary portion between the side surface of the scribing wheel and the inclined surface before and after the laser irradiation. 5(a) and 5(b) are a front view and a side view showing irradiation of laser light to a scribing wheel base material according to an embodiment of the present invention. 6(a) and 6(b) are a front view and a side view of the scribing wheel after the laser irradiation of the embodiment. Fig. 7 is a side view showing irradiation of laser light to a scribing wheel base material according to another embodiment of the present invention. Fig. 8 (a) and (b) are schematic views showing the adhesion treatment of the diamond film on the scribing wheel substrate of another embodiment. 9(a) to 9(c) are side views showing irradiation of laser light to a scribing wheel base material according to another embodiment of the present invention.

13‧‧‧傾斜面 13‧‧‧Sloping surface

15‧‧‧側面 15‧‧‧ side

15a‧‧‧環狀區域 15a‧‧‧ring area

15b‧‧‧環狀槽 15b‧‧‧ring groove

17‧‧‧金剛石膜 17‧‧‧Diamond film

Claims

A scribing wheel comprising: a scribing wheel base material having a ridge line along a circumferential portion thereof; and having a cutting edge formed by the inclined surface of the ridge line and the ridge line; and a diamond film located on the scribing wheel An inclined surface of the substrate; and an annular groove located on an end surface of the both sides of the scribing wheel base material to form an annular region at a boundary with the inclined surface on which the diamond film is formed.

A method for manufacturing a scribing wheel, which is a method for manufacturing a scribing wheel which forms a ridge line along a circumferential portion of a circular plate and has a cutting edge formed by the inclined surface of the ridge line and the ridge line, and along the circular plate The circumference of the scribing wheel base material is ground from both sides of the side surface so as to be inclined obliquely to each other, and the tip end portion formed by the inclined surface and the ridge line is formed on the circumferential portion, and is formed on the inclined surface of the scribing wheel base material. The diamond film cuts an annular region on the side faces of the both sides of the scribing wheel base material at the boundary with the inclined surface of the diamond film, and removes the diamond film in the annular region on the side surface to form an annular groove.

The method of manufacturing the scribing wheel of claim 2, wherein the annular groove on the side surface of the scribing wheel base material is formed by irradiating the laser light in a ring shape.

The method of manufacturing the scribing wheel of claim 2, wherein the plurality of scribing wheel base materials on which the cutting edge portion is formed are alternately contacted with the spacers of the side surfaces of the scribing wheel base materials in an alternating manner The inclined surface of the diamond wheel substrate forms a diamond film.

The manufacturing method of the scribing wheel of claim 2, wherein the plurality of scribing wheel base materials on which the cutting edge portion is formed are flanked and brought into contact with each other, and the outer sides of the scribing wheel base materials on the both sides are One of the pair of sides is in full contact with the pair of spacers to contact the outside, and a diamond film is formed on the inclined surface of each of the above-mentioned diamond wheel substrates.

The method of manufacturing the scribing wheel of claim 3, wherein the annular groove of the scribing wheel substrate is formed by horizontally irradiating the side surface with laser light.

The method of manufacturing the scribing wheel of claim 3, wherein the annular groove of the scribing wheel base material is formed by vertically irradiating the side surface with the laser light.