JP2013184388A - Scribing wheel and method for manufacturing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To extend the service life of a scribing wheel, and to increase the end surface strength of a substrate when a brittle material substrate is divided after scribing.SOLUTION: A rotary shaft is formed in the center of a scribing wheel substrate, and a V-shaped cutting edge is formed in the circumferential part. A diamond film is formed on the cutting edge by a CVD method. Thereafter, a ridge line part is polished so as to be parallel to a ridge line, and corrected so as to sharpen the end, thereby forming a fine ridge line part. When the brittle material substrate is scribed and divided by using the scribing wheel, the end face accuracy of the divided substrate increases and the end face strength can be improved. Separations and cracks of the ridge line part of the diamond film are small in number even if the scribing is advanced, and the scribing wheel can be increased in service life.

Description

  The present invention relates to a scribing wheel for scribing by pressing and rolling on a brittle material substrate and a method for manufacturing the scribing wheel.

  A conventional scribing wheel uses, as a base material, a disc made of cemented carbide or polycrystalline sintered diamond (hereinafter referred to as PCD), as shown in Patent Document 1 and the like. PCD is obtained by sintering diamond particles together with cobalt or the like. The scribing wheel is formed by cutting the circumferential edges obliquely from both sides of a disk as a base material to form a V-shaped cutting edge on the circumferential surface. The scribing wheel formed in this way is rotatably attached to a scribing head of a scribing device, pressed against the brittle material substrate with a predetermined load, and moved along the surface of the brittle material substrate to roll it. You can scribe while.

  In Patent Document 2, in order to eliminate slippage with a brittle material substrate, particularly a glass plate, polishing is performed in a direction that forms an angle with respect to the radial direction from the axial direction when viewed from the front of the rotating shaft. A glass cutter with streaks is shown.

  Patent Document 3 discloses a glass cutting blade having a V-shaped cutting edge surface coated with diamond in order to extend the life of the glass cutting blade. This blade for cutting a glass is shaped by coating a diamond film on the surface of a cutting edge formed of a ceramic that is compatible with diamond and then polishing the diamond film. It has been shown that by using such a glass cutting blade, it is possible to cut hard altitude glass so that the blade has a long life and the cut surface is smooth.

  Patent Document 4 discloses that a diamond layer is coated on a base material such as cemented carbide to prevent slippage and deterioration of cutting quality when cutting an optical fiber, and the surface of the diamond layer is smoothed after coating. An untreated diamond coated cutting blade is disclosed.

  Further, Patent Document 5 discloses a scribing wheel having a blade portion in which a diamond coating is coated on the surface of a tool base material. In this document, the diamond coating is polished by ion beam irradiation so that the tip of the blade has a blade edge angle larger than the original blade edge angle, and the blade width is in the range of 10 to 100 nm. It is disclosed that since a sharpened tip polishing portion is provided, excellent sharpness can be obtained regardless of diamond coating while ensuring a predetermined cutting edge strength.

International Publication WO2003 / 51784 JP-A-6-56451 Japanese Patent Laid-Open No. 04-224128 JP 2011-126754 A JP2012-11475A

  A conventional scribing wheel made of polycrystalline sintered diamond (PCD) is composed of diamond particles and a binder, so that when a brittle material substrate having a high hardness, such as ceramic, is scribed, the wear progresses rapidly and the life is shortened. There was the shortcoming of being short. In recent years, as the glass has been made thinner and larger, the end face strength of the brittle material substrate has been required when the brittle material substrate is scribed and broken. However, the conventional scribing wheel made of PCD has a rough cutting edge and ridge line depending on the size of diamond particles contained in the material, and it is difficult to make the roughness below a certain level by polishing. There was a drawback that the end face strength of the brittle material substrate was lowered when the substrate was scribed and broken.

  Further, as described in Patent Document 2, when a scribing wheel for scribing a glass plate is manufactured, if the cutting edge is polished in an oblique direction with respect to the ridgeline, there is a problem that the ridgeline portion is likely to be chipped.

  It has been found that when the brittle material substrate is actually scribed using the glass cutting blade described in Patent Document 3, chipping of the blade edge, peeling of the diamond film, and the like are likely to occur. Even in the diamond-coated cutting blade described in Patent Document 4, since the surface is not smoothed, when the brittle material substrate is scribed, the end face accuracy of the substrate is deteriorated as compared with the case where polishing is not performed. However, the end face strength is inferior. In addition, the scribing wheel described in Patent Document 5 has a sharpened edge by irradiation with an ion beam, but the cutting edge slope of the scribing wheel is not sufficiently polished and is relatively rough. There is a problem that the problem of poor end face strength cannot be solved.

  The present invention has been made in view of such problems, and in a scribing wheel coated with a diamond film, the diamond film can be prevented from being chipped or peeled off, and the life of the scribing wheel can be extended. An object of the present invention is to provide a scribing wheel that can be used and a method for manufacturing the same.

  In order to solve this problem, the scribing wheel of the present invention is a scribing wheel in which a ridge line is formed along a circumferential portion, and has a cutting edge composed of the ridge line and inclined surfaces on both sides of the ridge line, A diamond film formed on the surface of the cutting edge of the base material, the ridge line is formed of a diamond film, and the region formed by the diamond film on both sides of the ridge line has grinding striations parallel to the ridge line. is there.

  In order to solve this problem, the manufacturing method of the scribing wheel of the present invention is a manufacturing method of a scribing wheel having a ridge line and a cutting edge formed of inclined surfaces on both sides of the ridge line along the circumferential portion of the disk, A through hole is provided in the center of the disc, the center of which is the axis of rotation, and a cutting edge portion is formed along the circumferential portion to form a scribing wheel base material. Chemical vapor deposition is performed on the cutting edge portion of the scribing wheel base material. A diamond film is formed by a method, and the surface on which the diamond film is formed is polished parallel to the ridgeline so that a surface including a circle formed by the ridgeline of the diamond film is perpendicular to the rotation axis of the scribing wheel base material. Is.

  The base material may be a cemented carbide.

  Here, the scribing wheel base material may be formed with a circumferential surface parallel to the rotation axis at the blade edge portion.

  Here, a groove in which a ridge line portion of the polishing region is notched at a predetermined interval may be provided, and a portion between the grooves may be formed as a protrusion.

  According to the present invention having such characteristics, the diamond film is formed on the scribing wheel, and the diamond film at the cutting edge is polished parallel to the ridgeline. By doing so, fine streaks parallel to the ridge line remain. When scribing and breaking a brittle material substrate using this scribing wheel, the scribing wheel wear is reduced even when scribing a brittle material substrate with high hardness due to the use of a diamond film, and the life of the scribing wheel can be extended. it can. Moreover, since the surface roughness of the cutting edge of the scribing wheel can be reduced by polishing as compared with the case of using PCD, the end surface accuracy of the brittle material substrate can be improved, and the end surface strength can also be improved. can get. Also, by polishing parallel to the ridge line of the scribing wheel, fine irregularities due to grinding marks are difficult to appear on the cutting edge and ridge line, the roughness can be reduced, and when brittle material substrate with high hardness is scribed In addition, there is an effect that the diamond film is less likely to be chipped or peeled off due to fine unevenness at the ridge line portion.

FIG. 1A is a front view of a scribing wheel according to a first embodiment of the present invention. FIG. 1B is a side view of the scribing wheel according to the first embodiment. FIG. 2A is an enlarged cross-sectional view of a ridge line portion before polishing of the blade edge according to the first embodiment. FIG. 2B is an enlarged cross-sectional view of a ridge line portion after polishing according to the first embodiment. FIG. 3A is a side view showing a state in which the cutting edge of the scribing wheel according to the first embodiment of the present invention is polished. FIG. 3B is a plan view showing a state in which the cutting edge of the scribing wheel according to the second embodiment of the present invention is polished. FIG. 4 is an enlarged view of a ridge line portion after grinding of the scribing wheel according to the first and second embodiments. FIG. 5A is an enlarged cross-sectional view of a ridge line portion of a cutting edge before polishing according to a modification of the first and second embodiments. FIG. 5B is an enlarged cross-sectional view of a ridge line portion after polishing according to a modification of the first and second embodiments. FIG. 6A is a front view of a scribing wheel according to a third embodiment of the present invention. FIG. 6B is an enlarged cross-sectional view of a ridge line portion after polishing according to the third embodiment. FIG. 6C is an enlarged view of the circular portion shown in FIG. 6A.

  FIG. 1A is a front view of a scribing wheel according to an embodiment of the present invention, and FIG. 1B is a side view thereof. When manufacturing a scribing wheel, for example, a through-hole 12 serving as an axial hole is first formed in the center of a disc 11 serving as a cemented carbide or ceramic scribing wheel base as shown in FIG. 1A. Next, a shaft such as a motor (not shown) is connected to the through hole 12 to rotate the central axis of the through hole 12 as the rotation shaft 12a, and the entire circumference of the disk 11 is connected to the rotation shaft 12a from both sides of the disk. On the other hand, as shown in FIG. 1B, the ridgeline and inclined surfaces on both sides of the ridgeline are formed in a V-shaped vertical section by polishing obliquely. The V-shaped slope formed in this way is defined as a polishing surface 13.

  Next, formation of the diamond thin film will be described with reference to an enlarged cross-sectional view of the ridge line portion of the blade edge in FIG. 2A. First, the V-shaped polished surface 13 is roughened in advance so that the diamond film can be easily attached. Next, after forming diamond as a core having a particle size of submicron or less on the slope portion, a diamond thin film is grown by chemical vapor deposition. Thus, the diamond film 14 having a film thickness of, for example, 20 to 30 μm is formed on the V-shaped slope portion of the scribing wheel by chemical vapor deposition (CVD).

  Thereafter, at least the tip portion is polished so that the tip is sharp as will be described later. FIG. 2B is a partially enlarged sectional view showing the state after the polishing. In this way, the polishing may be performed at an obtuse angle of, for example, about 5 ° with respect to the original diamond film 14. Then, the surface including the circle composed of the ridge line after polishing is set to be perpendicular to the rotation axis 12a. Here, the region to be polished may be only a belt-like portion including the ridge line of the inclined surface in the center. The region of width w in FIG. 2B shows this tip portion, that is, the polishing region of the diamond film on both sides of the ridgeline. For example, the minimum value w of the width is 10 to 20 μm.

  FIG. 3A is a diagram illustrating a method of polishing a scribing wheel. In this method, a straight grindstone 20 is used during polishing. The straight grindstone 20 is cylindrical and has a grindstone formed on the circumferential surface. The straight grindstone 20 is rotated along the grindstone rotating shaft 20a to polish the cutting edge of a scribing wheel having a diamond film. At this time, while rotating the straight grindstone 20 at a constant speed along the grindstone rotating shaft 20a, the scribing wheel 10 is pressed so that the grindstone rotating shaft 20a and the rotating shaft 12a of the scribing wheel 10 form one plane (paper surface). The scribing wheel 10 is also rotated along its rotation axis 12a. In this way, the slope of the cutting edge of the scribing wheel is polished in parallel with the ridgeline. When the polishing of one surface is finished, the other surface is similarly polished. When the polishing is finished in this manner, as shown in the enlarged view of the circular part shown in FIG. 1B in FIG. 4, a large number of fine grinding striations parallel to the ridge line are formed on the polishing surface having the width w of the blade edge. .

  By polishing in this way, compared to a conventional scribing wheel made of sintered diamond, all the portions in contact with the brittle material substrate become diamond, so that the wear resistance of the scribing wheel can be improved. In addition, since all of the portion in contact with the brittle material substrate is a diamond film, the roughness of the cutting edge portion and the ridge line contributing to scribe can be reduced. Therefore, by scribing and dividing a brittle material substrate, for example, a ceramic substrate, using this scribing wheel, the accuracy of the end face of the cut surface of the brittle material substrate is improved, and the end face strength can be improved accordingly. . When the inventor polishes in a direction perpendicular or oblique to the ridgeline during polishing, fine irregularities due to grinding marks appear on the blade edge and the ridgeline, and the ridgeline portion is likely to be chipped when scribed. Obtained knowledge. Therefore, in the present invention, polishing is performed in parallel with the ridgeline, thereby reducing chipping of the ridgeline portion and peeling of the diamond film. Furthermore, the effect of making it difficult for the diamond film to peel off is obtained by reducing the roughness of the cutting edge and the ridgeline. Therefore, the scribing wheel of the present invention is suitable for scribing a ceramic substrate.

  Next, a second embodiment of the present invention will be described. This embodiment differs from the first embodiment only in the polishing process. In the polishing process of this embodiment, a disk-shaped cup grindstone 21 is used. The cup grindstone 21 has a polished surface formed on the surface of the disk. In this embodiment, as shown in FIG. 3B, the tip surface of the scribing wheel 10 inclined toward the grindstone rotating shaft 21a of the cup grindstone 21 is polished. At this time, while rotating the cup grindstone 21 at a constant speed around the grindstone rotating shaft 21a, the scribing wheel so that the grindstone rotating shaft 21a and the rotating shaft 12a of the scribing wheel 10 form one plane (a surface orthogonal to the paper surface). 10 is pressed and polished along the rotating shaft 12a. Even in this case, since the scribing wheel is sufficiently smaller than the circle in the polishing region at the outer peripheral portion of the cup grindstone 21, it can be polished substantially parallel to the ridgeline. Therefore, as shown in FIG. 4, the scribing wheel can be finished in a state where a large number of grinding striations parallel to the ridgeline are formed, and the same effects as those described above can be obtained.

  Next, modifications of the first and second embodiments will be described. In this modification, as shown in an enlarged view of the tip portion of the cutting edge portion in FIG. 5A, a flat circumferential surface 16 is provided on the ridge line portion of the base so as to be parallel to the rotating shaft 12a of the scribing wheel. Then, similarly to the first or second embodiment, the polishing surface 13 is coated with the diamond film 14 by the CVD method. In this way, the adhesion of the diamond film 14 can be improved by the circumferential surface 16. After this coating, as shown in FIG. 5B, the circumferential portion is polished as described above to form a ridge line as in the first or second embodiment. By so doing, it is possible to increase the thickness of the diamond film at the ridge line portion as compared with the first or second embodiment, and it is possible to improve the wear resistance and peeling resistance of the scribing wheel. When the brittle material substrate is scribed and divided using this scribing wheel, the end surface accuracy of the cut surface of the brittle material substrate is improved, and the end surface strength can be improved.

  Next, a third embodiment of the present invention will be described. Japanese Patent No. 3074143 proposes a scribing wheel in which a large number of grooves are formed at predetermined intervals on the circumferential surface of the scribing wheel, and a high penetration type is formed with protrusions therebetween. The present invention can also be applied to such a scribing wheel. 6A is a front view of the scribing wheel of this embodiment, FIG. 6B is an enlarged cross-sectional view of the previous ridge line portion, and FIG. 6C is an enlarged view of the circular portion indicated by a one-dot chain line in FIG. 6A. When manufacturing a scribing wheel, first, a through hole 32 serving as a shaft hole is formed in the center of a disc 31 serving as a scribing wheel base material made of cemented carbide or ceramic as shown in FIG. 6A. Next, the entire circumference of the disk 31 is polished from both sides to form a V-shape while rotating through a through shaft 32 such as a motor. The V-shaped slope formed in this way is defined as a polishing surface 33. Also in this case, as in the first embodiment, the diamond film 34 is coated on the cutting edge portion of the scribing wheel by the CVD method and polished by the method described above. When the diamond film 34 is 20 μm, the groove 35 is formed within the range of the thickness of the diamond film 34 as shown in FIG. 6C. Since the depth of the groove of the scribing wheel for achieving the high penetration type is, for example, about 10 μm, the groove 35 is formed in the diamond film 34 to obtain a high penetration type scribing wheel.

  Instead of this, a groove is formed in advance in the V-shaped cutting edge portion of the scribing wheel base material, and the scribing wheel is configured by coating and polishing a diamond film on the scribing wheel base material by the CVD method. Also good.

  The scribing wheel of the present invention can provide a scribing wheel that can cut a brittle material substrate having high wear resistance and peeling resistance and high end face strength, and can be suitably used for a scribing apparatus.

DESCRIPTION OF SYMBOLS 10,30 Scribing wheel 11,31 Disk 12,32 Through-hole 13,33 Polishing surface 14,34 Diamond film 16 Circumferential surface 20 Straight grindstone 21 Cup grindstone 35 Groove

Claims (8)

A scribing wheel having a cutting edge formed with a ridge line along a circumferential portion, the ridge line and an inclined surface on both sides of the ridge line,
It has a base material and a diamond film formed on the surface of the blade edge of the base material,
The ridge line is formed of a diamond film,
A scribing wheel having grinding striations parallel to the ridge line in regions formed by diamond films on both sides of the ridge line.   The scribing wheel according to claim 1, wherein the base material is made of a cemented carbide. The scribing wheel base material is
The scribing wheel according to claim 1, wherein a circumferential surface parallel to the rotation axis is formed on the blade edge portion.   The scribing wheel according to claim 1, further comprising a groove in which a ridge line portion of the polishing region is cut out at a predetermined interval, and a projection therebetween. A method of manufacturing a scribing wheel having a cutting edge composed of a ridge line and inclined surfaces on both sides of the ridge line along a circumferential portion of a disk,
A through hole is provided in the center of the disc, the center of which is the rotation axis, and a cutting edge portion is formed along the circumferential portion to constitute a scribing wheel base material.
A diamond film is formed on the cutting edge portion of the scribing wheel base material by chemical vapor deposition,
A method for manufacturing a scribing wheel, wherein the surface on which the diamond film is formed is polished parallel to the ridgeline so that a surface including a circle formed by the ridgeline of the diamond film is perpendicular to a rotation axis of the scribing wheel substrate.   The scribing wheel manufacturing method according to claim 5, wherein the base material is made of a cemented carbide. The scribing wheel base material is
The manufacturing method of the scribing wheel of Claim 5 which formed the circumferential surface parallel to a rotating shaft in the blade-tip part.   The manufacturing method of the scribing wheel according to claim 5 which has a groove which cut a ridgeline part of said polish field at predetermined intervals, and made the gap between them.