KR20140056103A - Scribing wheel and method for manufacturing the same - Google Patents

Abstract

The purpose of the present invention is to provide a scribing wheel without a cobalt cemented layer in a through-hole by performing a cementation of cobalt on the surface of the scribing wheel. As a disc-shaped scribing wheel base material, used is a hard metal which is composed of tungsten carbide particles as the main component and cobalt as a binder, and on a surface layer of which cobalt cementation is performed. The cobalt cementation is performed by immersing the base material in an acidic fluid after applying a sealing material in the through-hole or removing the cobalt cemented layer in the through-hole. Thereafter, a diamond film is formed at a cutting edge of the scribing wheel base material by a CVD method and a ridge part is ground. Accordingly, the adhesion of the diamond film is promoted and the possibility of exfoliation is reduced, thereby enabling the scribing wheel to have a longer life.

Description

[0001] SCRIBING WHEEL AND METHOD FOR MANUFACTURING THE SAME [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scribing wheel for scribing a brittle material substrate by press-contact, rolling, and a manufacturing method thereof.

As shown in Patent Documents 1 to 3, a conventional scribing wheel is made of a base plate made of a cemented carbide or polycrystalline sintered diamond (hereinafter referred to as PCD). The PCD disk is obtained by sintering diamond particles with cobalt or the like. The scribing wheel is formed by obliquely cutting the edges of the circumference from both sides of the original plate as a substrate to form a V-shaped edge of the circumference. The scribing wheel thus formed can be scribed by rotating the scribing wheel of the scribing device or the like in a rotatable manner, pushing the brittle material substrate with a predetermined load, and moving the brittle material substrate along the surface of the brittle material substrate.

In order to eliminate a slip with a brittle material substrate, particularly a glass plate, Patent Document 2 discloses a method of polishing a brittle material substrate, particularly a glass plate, by polishing the blade end in a direction forming an angle with respect to the radial direction from the axial direction, ) Are formed on the glass substrate.

Patent Document 3 proposes a wheel cutter which can form a deep vertical crack by polishing along the circumferential direction of the grinding direction in a wheel cutter for glass cutting made of ceramics.

Patent Document 4 discloses a glass cutting blade in which a blade surface of a V-shaped edge is coated with diamond in order to extend the service life of the glass cutting blade. This glass cutting blade is formed by covering a diamond surface with a surface of a blade formed of a ceramic having good affinity with diamond and polishing the diamond surface by surface polishing. By using such a glass cutting blade, it is possible to cut a high hardness glass so that the blade has a long life and the cut surface is smoothed.

Patent Document 5 discloses a method for improving the adhesion between a cemented carbide and a diamond film by forming a de-cobalt layer having a reduced content of cobalt on the surface portion of the cemented carbide before coating the diamond coating on the surface of the cutting tool of the cemented carbide A cutting tool has been proposed. Similarly, Patent Document 6 proposes a scribing wheel in which a diamond film is formed at the end of a blade.

Japanese Patent Application Laid-Open No. 06-056451 Japanese Laid-Open Patent Publication No. 05-254865 Japanese Laid-Open Patent Publication No. 04-224128 International Publication WO2003 / 51784 Japanese Patent Application Laid-Open No. 07-223101 Japanese Laid-Open Patent Publication No. 2011-012675

Since a conventional scribing wheel formed of polycrystalline sintered diamond (PCD) is composed of diamond particles and a binder, scribing a brittle material substrate having high hardness, such as ceramics, There was a drawback that the lifetime was short. Recently, the thickness of the glass has been made thinner and larger, and a brittle material substrate has been required to be scribed and the strength of the end face of the brittle material substrate at the time of braking has been demanded.

As described in Patent Document 2, when a blade is polished in an oblique direction with respect to the ridgeline at the time of manufacturing a scribing wheel for scribing a glass plate, there is a problem that the ridgeline portion is likely to be broken.

The wheel cutter disclosed in Patent Document 3 is a wheel cutter made of ceramics and does not have a diamond coating on its surface. Therefore, when scribing a brittle material substrate having high hardness such as ceramic, the abrasion proceeds sharply and the life is short.

On the other hand, when the diamond film is formed on the surface of the cemented carbide, the durability of the cutting tool is increased, but the cobalt contained in the cemented carbide deteriorates the adhesion of the diamond film, and peeling of the film occurs. However, in the above-described Patent Document 5, in order to reduce the content of cobalt on the surface, the cutting tool is immersed in an acidic solution such as HNO ₃ to form a decalcobalt layer on the surface of the substrate of the tool, thereby improving the adhesion of the film. Also in the scribing wheel, when a cemented carbide is used as a material for covering the diamond film on the scribing wheel base material disclosed in Patent Document 4, the adhesion of the diamond film is deteriorated. On the other hand, in the case of attempting to form such a decalobalt layer on the scribing wheel base material as in Patent Document 6, the inner wall of the through hole at the center of the scribing wheel is subjected to decarburization treatment. When such a brittle material substrate is scribed by using a scribing wheel having a diamond coating formed on the tip end portion of the decarburization treatment, the tungsten carbide particles tend to fall off because cobalt is removed from the inner wall surface of the through hole. For this reason, a problem has arisen that a wear powder is generated in the through hole and attached to the pin to increase the rotational resistance. Further, there is a problem that the surface where the cobalt is dropped off becomes a rough surface, or the mechanical strength is lowered.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and it is an object of the present invention to provide a scribing wheel and a method of manufacturing the scribing wheel capable of solving the problems involved in the de-cobalt treatment of the substrate of the scribing wheel.

In addition, the present invention provides a scribing wheel capable of preventing breakage or peeling of a diamond film in a scribing wheel coated with a diamond film, thereby making it possible to increase the life span of the scribing wheel, and a manufacturing method thereof .

In order to solve this problem, a scribing wheel according to a first embodiment of the present invention comprises: a scribing wheel base material having a disc shape and a through hole through which a pin is inserted at a central position; Wherein the scribing wheel base material is made of a cemented carbide mainly composed of tungsten carbide particles and containing cobalt as a binder. The scribing wheel base material is a cemented carbide material containing tungsten carbide particles as a main component, And at least a de-cobalt layer having an average thickness of 1 to 15 탆 at the tip of the diamond film is formed.

A manufacturing method of a scribing wheel according to a second embodiment of the present invention is a manufacturing method of a scribing wheel having a through hole through which a pin is inserted at a center position of a disk and has a blade tip along a circumference, A through hole is formed at a center position of the original plate using cemented carbide containing cobalt as a binder and a sharp edge portion is formed in a circumferential portion of the original plate to form a scribing wheel base material, A sealing material is applied to the opening of the through hole of the substrate to perform decalcification treatment and a diamond film is formed on the edge portion of the scribing wheel base material by chemical vapor deposition (CVD).

A manufacturing method of a scribing wheel according to a third embodiment of the present invention is a manufacturing method of a scribing wheel having a through hole through which a pin is inserted at a center position of a disk and having a blade tip along a circumference, Forming a scribing wheel base material by forming a through hole at a center position of the original plate using a cemented carbide containing cobalt as a binder and forming a sharp edge portion on an outer peripheral portion of the original plate, Cobalt layer is removed by grinding the decalburized layer on the inner wall of the through hole to form a diamond film on the edge portion of the scribing wheel base material by a chemical vapor deposition method.

Here, the step of removing the dec-cobalt layer may be performed by removing the dec-cobalt layer by inserting fins to which abrasive grains are fixed on the surface of the through-hole of the scribing wheel base material and performing dummy scribing.

Here, the step of removing the dec-cobalt layer may be performed by flowing a fluid including abrasive grains in the through-hole of the scribing wheel base material, thereby removing the dec-cobalt layer.

Here, in the step of removing the dec-cobalt layer, honing may be performed on the through-hole of the scribing wheel base material to remove the dec-cobalt layer.

A scribing wheel according to a fourth aspect of the present invention is characterized in that a ridge line is formed along a circumference portion and has a blade edge formed by both the ridge line and the inclined surfaces on both sides of the ridge line, A scribing wheel substrate having a grinding streak, and a diamond film formed on a surface of the edge of the scribing wheel base material.

Here, the grinding streaks formed on the scribing wheel base material may be formed in a range of 20 mu m or more in width around the ridgeline on both sides of the ridgeline.

A manufacturing method of a scribing wheel according to a fifth aspect of the present invention is a manufacturing method of a scribing wheel having a ridge along a circumferential portion of a disk and an edge formed by inclined surfaces on both sides of the ridge, To form a scribing wheel base material, and a diamond film is formed on the edge portion of the scribing wheel base material by a chemical vapor deposition method.

Here, the scribing wheel base material may be constituted by polishing the edge portion of the scribing wheel base material in parallel with the ridgeline in a range of 20 mu m or more in width around the ridge line.

Here, the ridgeline means a ridgeline portion of the scribing wheel base material is curved, or, when the ridgeline portion has a predetermined width, it also includes a virtual ridge extending and intersecting the two inclined surfaces.

According to the first to third embodiments of the present invention, as the scribing wheel base material, a cemented carbide containing cobalt as a binder is used as tungsten carbide particles having a particle diameter within a predetermined range, and the surface thereof is subjected to decarburization treatment to form a diamond film And is polished to form a scribing wheel. Therefore, the adhesion of the diamond film can be improved, the abrasion resistance of the scraping wheel can be improved, and the longevity can be increased. Further, since there is no de-cobalt treated layer in the inner diameter portion of the scribing wheel base material, there is obtained an effect that the wear resistance is not adhered to the pin, and the rotational resistance is not increased or the mechanical strength is not lowered.

According to the fourth to fifth embodiments of the present invention, if the edge of the scribing wheel base material is polished parallel to the ridgeline, fine scratches parallel to the ridgeline are left. A diamond film is formed on the scribing wheel base material to form a scribing wheel. An effect that cracking or peeling of the diamond film is less likely to occur is obtained by polishing in parallel with the ridgeline of the scribing wheel base material. When the brittle material substrate is scribed and braked by using the scribing wheel, since the diamond film is used, even when scribing a brittle material substrate having a high hardness, the wear of the scribing wheel is reduced and the life of the scribing wheel .

1A is a side view of a scribing wheel according to the first and second embodiments of the present invention.
1B is a front view of the scraping wheel according to the first and second embodiments.
Fig. 2 is a view showing a state in which the edge of the scribing wheel is polished according to the first and second embodiments of the present invention. Fig.
Fig. 3 is an enlarged view of the circular portion shown in Fig. 1B when the ridgeline is in the lateral direction.
Fig. 4A is an enlarged view of the ridgeline portion of the scribing wheel base according to the first and second embodiments viewed from the front. Fig.
4B is an enlarged view of the scribing wheel base material according to the first and second embodiments as seen from the side.
5 is a view showing a state in which a blade edge of a scribing wheel is polished according to a modified example of the first and second embodiments of the present invention.
FIG. 6A is an enlarged view showing a scribing wheel substrate which is obliquely polished with respect to a ridge line of a scribing wheel base material according to a comparative example of the present invention. FIG.
6B is an enlarged view showing a ridge portion of the scribing wheel base material according to the first and second embodiments;
7A is a view showing a state in which a sealing material is applied to both ends of a through hole of a scribing wheel base material.
Fig. 7B is a view showing a state in which a sealing material is applied to both ends of the through holes of a plurality of scribing wheel base materials through a fin. Fig.
8A is an enlarged cross-sectional view of the ridge portion before the polishing of the edge of the scribing wheel of the first and second embodiments.
8B is an enlarged cross-sectional view of the ridge portion after polishing according to the first and second embodiments.
9 is a view showing an example of the weight percentage of cobalt in the through-holes of the scribing wheel base material and the through-holes of the first and second embodiments before and after the de-cobalt treatment.
Fig. 10 is a graph showing changes in scribe resistance when scribing 100 m for each wheel shown in Fig. 9; Fig.

(Mode for carrying out the invention)

Fig. 1A is a side view of a scraping wheel according to the first and second embodiments of the present invention, and Fig. 1B is a front view thereof. In manufacturing the scribing wheel, a hard metal is used as a material of the disk serving as the scribing wheel base 11. [ The cemented carbide is formed by sintering tungsten carbide (WC) particles as main components and cobalt (Co) as a binder. At the center of the disk made of the cemented carbide, a through hole 12 to be a shaft hole is formed as shown in Fig. 1A.

Next, the entire circumference of the disk is polished from both sides while the rotation shaft of a motor or the like is communicated with the through hole 12 and rotated about the center axis 12a of the through hole 12, And a substantially V-shaped edge having a vertical section having a ridge line. The V-shaped inclined surface thus formed is referred to as a polishing surface 13.

2 is a view showing a method of polishing the scribing wheel base 11. In this method, a stright-type wheel 20 is used in polishing. The grindstone preferably has a roughness of 400 to 1000, more preferably 600 to 800, for example. The straight grinding wheel 20 has a cylindrical shape, and a grindstone is formed on the circumferential surface. The straight grinding wheel 20 is rotated along the grinding wheel shaft 20a to polish the scribing wheel base 11. The grinding wheel 20a and the rotating shaft 12a of the scribing wheel base 11 are rotated in a single plane (a paper surface) while the straight grinding wheel 20 is rotated along the grinding wheel 20a at a constant speed And the scribing wheel base material 11 is also rotated along its rotation axis 12a. Thus, the inclined surface of the scribing wheel base 11 becomes the abrasive surface 13 having a plurality of concentric grinding streaks 14 formed around the rotation axis. When the polishing of one side is finished, the other side is polished as well. When polishing is finished in this manner, a plurality of fine grinding streaks 14 parallel to the ridgelines are formed on the V-shaped polishing surface.

Fig. 3 is an enlarged view of the circular portion shown in Fig. 1B when the ridgeline is in the lateral direction. Here, fine grinding marks may be formed on the entire surface of the polishing surface 13, but only the peripheral portion of the ridgeline may be formed. Thus, the ridgeline of the scribing wheel base 11 is slightly curved so as to show an enlarged view as seen from the front of the ridgeline portion in Fig. 4A by grinding so as to form a concentric grinding ridge around the rotation axis. 4B is an enlarged view of the scribing wheel base as seen from the side. As shown in Fig. 4B, the ridges have irregularities, and a plurality of grinding streaks 14 are formed substantially parallel to the imaginary ridgelines 15 in the transverse direction.

Next, a scribing wheel and a manufacturing method thereof according to modified examples of the first and second embodiments of the present invention will be described with reference to Fig. This modified example differs from the first and second embodiments only in the polishing process of the scribing wheel base 11. In the polishing step of this embodiment, a disk-shaped cup grindstone 21 shown in Fig. 5 is used. The cup grindstone (21) has a polished surface formed on the surface of the disk. In this embodiment, the distal end surface of the scribing wheel base 11 is tilted toward the grinding wheel shaft 21a of the cup grinding wheel 21. At this time, while rotating the cup grinding wheel 21 at a constant speed around the grinding wheel shaft 21a, the grinding wheel shaft 21a and the rotating shaft 12a of the scribing wheel base 11 are rotated in one plane ), And the scribing wheel base 11 is rotated and rotated along the rotating shaft 12a. Even in this case, since the scribing wheel base material is sufficiently small as compared with the circle of the polishing area on the outer circumferential surface of the cup grinding wheel 21, polishing can be performed substantially parallel to the ridgeline. Therefore, as shown in Fig. 3, a plurality of grinding streaks parallel to the ridgeline are formed. Thereafter, a diamond thin film is formed on the scribing wheel base material 11 to finish the scribing wheel, the same effect as in the first embodiment can be obtained.

Next, the directions of the grinding streaks of the scribing wheel base material and the effects based thereon will be described using specific examples. 6A is an enlarged view of a comparative example showing the vicinity of the ridge line of the scribing wheel base material obliquely formed at an angle of about 30 DEG with respect to the ridge line from the ridge line, Fig. 3 is an enlarged view of an embodiment of the present invention showing the vicinity of the ridge line of the scribing wheel base material having a grinding streak from the front. Fig.

As shown in FIG. 6A, when the grinding streaks are formed on the scribing wheel base material before the diamond film is grown so as to cross the ridgeline of the ridgeline width d1, the ridgeline portion of the scribing wheel base material of FIG. 6A becomes sharper. In addition, although cracks are generated somewhere at the tip of the ridgeline, such as a portion indicated by A1, the tip of the concavity and convexity due to this fracture becomes comparatively sharp. That is, since the surface area of the ridgeline portion is small, the adhesion of diamond is low, and the diamond film tends to peel off when scribing a hard brittle material substrate.

On the other hand, in each embodiment of the present invention, as shown in Fig. 6B, a grinding stripe substantially parallel to the ridge line of the ridge line width d2 is formed. In this case, it is difficult to sharpen the ridgeline, and the ridge line width d2 becomes wide in comparison with the case where the grinding streaks cross the ridgeline. Therefore, if a diamond film is grown on the edge of the blade, the adhesion area between the scraping wheel base material and the diamond film can be increased, and the adhesion of the diamond film can be enhanced. In addition, as shown in the area A2 and the like indicated by ellipses in the ridgeline portion, small and irregular unevenness derived from the base material or the grindstone is left, and thus the area of adhesion with the diamond film becomes larger. Therefore, even if a force is applied to the diamond film during scribing, the diamond film is hardly peeled from the scribing wheel base material, and as a result, the life of the scribing wheel can be prolonged.

In order to obtain this effect, it is sufficient that the grinding streak of the polishing surface 13 is in a range in which the diamond film contacts the brittle material substrate. Therefore, the grinding streak 14 may be formed after the V-shaped edge is formed. The range in which the grinding streaks are formed is at least 20 mu m or more, preferably 100 mu m or more, from the ridge line. In this case, the diamond film is hardly peeled off, and the life of the scraping wheel can be prolonged.

Here, as for the cemented carbide of the scribing wheel base material 11, the average particle diameter of the main component tungsten carbide (WC) particles is 0.5 占 퐉 or more, preferably 0.7 占 퐉 or more and 2.0 占 퐉 or less, preferably 1.2 占 퐉 or less Of the cemented carbide is selected. If the particle size of the tungsten carbide particles as the material of the cemented carbide is too small, the strength of the cemented carbide is lowered because the bonding strength between the tungsten carbide particles is weak when sintering to form the cemented carbide. For this reason, the diamond film formed on the cemented carbide tends to peel off together with the surface layer of the cemented carbide, so that the lifetime of the film deteriorates. If the particle diameter of the tungsten particles is too large, the gap of the tungsten carbide particles becomes large, so that the strength is lowered in the surface layer of the cemented carbide by removing the cobalt, and the diamond film is easily peeled off likewise.

The weight ratio of cobalt as a binder of the cemented carbide is, for example, 3% or more, preferably 4% or more, and 8% or less, preferably 6% or less. If the content of cobalt is excessively large, the cobalt is removed, and the strength of the cemented carbide surface layer is greatly lowered, and the diamond film is liable to peel off. If the content of cobalt is too small, it is difficult to sufficiently adhere the diamond particles to be nuclei when forming the diamond film, because the gap of the tungsten particles becomes small after the removal of cobalt, and it becomes difficult to uniformly form the film.

Next, the decalcification treatment and the formation of the diamond film will be described. First, the polishing surface 13 of the blade edge of the scribing wheel base 11 is previously roughened. By making the surface roughened by the polishing surface 13, diamond particles becoming nuclei are easily attached.

However, when cobalt is present in the surface layer of the edge of the scribing wheel base material, diamond is graphitized when the diamond film is formed, making it difficult to form a film. On the other hand, when the cobalt is removed, the gaps between the tungsten particles become minute concavities and convexities, so that the diamond particles becoming nuclei are easily attached. Thus, a decarburization treatment is performed to remove at least the surface layer of the polishing surface 13 where the diamond film is to be formed. 7A, the sealing material 30 is applied to both sides of the opening of the through-hole 12 of the scribing wheel base 11, and the acidic liquid does not penetrate into the through-hole 12 The pre-processing is performed in advance. As shown in Fig. 7B, the side walls of the scribing wheel base 11 are brought into contact with each other, and the pins 31 are inserted and fixed in the sidewalls of the scribing wheel base 11, Only the sealing material 30 may be applied.

Here, the sealing material 30 has a high acid resistance, while a resin such as acrylic resin, epoxy resin, phenol resin, nitrocellulose, etc. which can be easily removed by using a solvent is used. Then, the scribing wheel base material 14 was immersed in HNO ₃ Or the like, to form a decalbalt layer on the surface of the scribe wheel base material. The thickness of the dec-cobalt layer formed at this time is thicker as the immersion time in the acid solution becomes longer, but the average thickness is set to, for example, 1 to 15 탆, preferably 1 to 10 탆, more preferably 1 to 7 탆 Thickness. In this case, even if the scribing wheel base material 11 is immersed in the acid solution, since the liquid does not enter into the through hole 12, the decarburization treatment is not performed on the inner surface of the through hole. The decalcification treatment may be performed at least only on the edge portion where the diamond film is to be formed, and the sealing treatment may be performed on the portion where the diamond film is not formed, such as the periphery of the through hole.

After the decarburization treatment is performed in this way, the scribing wheel base material 11 is immersed in a solvent for melting the resin, and the sealing material 30 is removed.

Next, as shown in an enlarged cross-sectional view of the ridge portion of the blade edge of FIG. 8A, a diamond serving as a nucleus having a particle diameter of submicron or less is formed on the polishing surface 13, followed by chemical vapor deposition (CVD) The diamond thin film is grown. In this way, a diamond film 16 having a film thickness of, for example, 20 to 30 占 퐉 is formed on the V-shaped slope portion of the scribing wheel by a chemical vapor deposition method. Thereafter, polishing is performed so that at least the tip portion is sharpened. The polishing is carried out by various polishing methods such as mechanical polishing. For example, it may be carried out by mechanical polishing using an abrasive. 8B is a partially enlarged cross-sectional view showing the state after the polishing. As described above, the diamond film 16 may have an obtuse angle of about 5 degrees when polished, for example. Then, the surface including the circle formed by the ridges after polishing is made perpendicular to the through hole 12. Here, the area to be polished may be only the strip-shaped portion including the ridgeline at the center. The region of width w in Fig. 8B represents the polishing region of this tip portion, and for example, the width w is 10 to 20 mu m.

By polishing in this way, all of the portions in contact with the brittle material substrate become diamond as compared with the conventional scribing wheel, and the roughness of the ridgeline can be made finer. By removing the cobalt on the surface of the scribing wheel base 11, the diamond particles becoming nuclei are easy to adhere, so that the diamond film is difficult to peel off. Therefore, the abrasion resistance of the scraping wheel can be improved. Therefore, by scribing and dividing the brittle material substrate by using the scribing wheel, the cross-sectional precision of the cut surface of the brittle material substrate is improved, and consequently the cross-section strength can be improved. Therefore, the scribing wheel of the present invention is suitable for scribing a hard brittle material substrate such as a ceramic substrate.

Next, a manufacturing method of the scraping wheel according to the second embodiment of the present invention will be described. In the above-described first embodiment, the liquid does not enter the through hole when the entire scribing wheel base material is immersed in the acidic liquid. In this embodiment, the entire scribing wheel base material 11 is immersed in the acidic liquid, The inner surface of the through hole 12 is polished to remove the decalcobalt layer on the inner wall surface. The thickness of the layer to be polished depends on the depth of the portion where the cobalt is removed, but is, for example, 1 to 15 μm thick from the surface, preferably 1 to 10 μm, more preferably 1 to 7 μm. The process other than the removal of the dec-cobalt layer is the same as in the first embodiment. This polishing may be carried out, for example, in the following manner. However, the method is not limited to the following method as far as it can remove the decalcified layer on the inner surface of the through hole.

The first method is a method in which a dummy scribe is performed by using a pin fixed to the surface of the abrasive grains. As a method for fixing the abrasive grains on the surface of the fin, there is a method (electrodeposition) in which abrasive grains are fixed on the surface by, for example, electroplating the surface with a nickel plating solution in which diamond grains are dispersed. Hereinafter, the pin having the abrasive grains adhered to the surface by electrodeposition is also referred to as an electrodeposition pin. The electrodeposition pin is passed through the through hole (12) of the scribing wheel (10) to perform a predetermined distance dummy scribe. Thus, polishing can be performed on the inner wall of the through hole 12 from the surface of the inner wall toward the inner side, for example, to a depth of about 5 탆 to remove the surface decolorization layer in the through hole 12. The surface roughness (arithmetic mean roughness (Ra)) of the surface layer after this treatment is set to 0.35 탆 or less, preferably 0.30 탆 or less. This is because when the arithmetic average roughness Ra is larger than 0.35 mu m, the rotational resistance is increased when scribing is performed by inserting a normal pin.

The second method is a method of grinding using free abrasive grains such as wire wraps. A fluid (slurry) containing an abrasive is flowed into the through hole 12 of the scribing wheel 10 and the inner wall is polished by sliding a wire or the like to remove the decobalt layer.

The third method is a honing process using fixed abrasive grain. And a honing process is performed to polish the inner wall of the through hole to remove the decalcobalt layer on the inner wall surface. In this way, it is possible to remove the decalcified layer from the inner wall of the through hole 12 of the scribing wheel 10.

Next, Fig. 9 shows the weight percentage of cobalt in the scribing wheel base material on the front and rear surface portions where the decarburization treatment of the scribing wheel base material according to the first and second embodiments is carried out. In the case of the first embodiment in which the de-cobalt treatment was performed after the sealing material was applied to the surface and in the case of the second embodiment in which the de-cobalt layer was polished and removed by using the electrodeposition fin, the weight of the cobalt in the through- The percentage is also shown in Fig. According to this measurement result, the scribing wheel base material 11 itself has a cobalt content of, for example, about 4%, and it becomes less than 1% by performing the decarburization treatment. In FIG. 9, there was only one measurement value of the amount of cobalt after the decolorization treatment, but there was a sample in which the amount of cobalt was small and could not be detected. The amount of cobalt in the through hole when sealing was performed so that the acid solution did not enter the through hole was about 2%, and when the inside of the through hole was polished, the amount of cobalt was about 3.5%.

10 is a graph showing the relationship between the scribe resistance value at 0 m (at the start of scribing) and the scribing resistance after scribing at 100 m when scribing with a scribing load of 500 g using a scribing wheel equipped with a diamond film using these scribing wheel substrates Is a graph showing a change in a value. When the decalcification treatment is also performed in the through hole of the scribing wheel, as shown by the straight line B in FIG. 10, when the scribing distance becomes 100 m, the scribing resistance increases greatly. However, when the scribing wheel is not subjected to the decarburization treatment (straight line A), when the de-cobalt seal is performed in the through hole (straight line C), or when the polishing is performed (straight line D) not. Therefore, according to the present invention, it is possible to realize a scraping wheel in which abrasive powder adheres to the fin, and the rotational resistance is not increased or the mechanical strength is not lowered.

The scribing wheel according to the present invention can provide a scribing wheel capable of cutting a brittle material substrate having high abrasion resistance and a high section strength, and can be suitably used in a scribing apparatus.

10: Scraping wheel
11: Scribing wheel substrate
12: Through hole
13: Polishing surface
14: Grinding streak
15: ridge
16: Diamond film
20: Straight grindstone
21: Cup grinding wheel
30: Seal material
31: pin

Claims (10)

A scribing wheel base material having a circular plate shape and having a through hole through which a pin is inserted at a center position,
And a diamond film formed on a blade edge portion of the scribing wheel base material,
The scribing wheel base material may further comprise:
A cemented carbide mainly composed of tungsten carbide particles and containing cobalt as a binder,
And a de-cobalt layer having an average thickness of 1 to 15 mu m in depth at a tip portion where at least the diamond film is formed on the surface of the scribing wheel base excluding the inner wall of the through hole. A manufacturing method of a scribing wheel having a through hole through which a pin is inserted in a center position of a disk and having a blade tip along a circumference,
A through hole is formed at the central position of the disk using cemented carbide mainly composed of tungsten carbide particles and containing cobalt as a binder,
Forming a scribing wheel base material on the circumferential portion of the disk,
A sealing material is applied to the opening of the through hole of the scribing wheel base material to perform decalcification treatment,
Wherein a diamond film is formed on the edge portion of the scribing wheel base material by chemical vapor deposition (CVD). A method of manufacturing a scribing wheel having a through hole through which a pin is inserted in a center position of a disk and having a blade tip along a circumference,
A through hole is formed at the central position of the disk using cemented carbide mainly composed of tungsten carbide particles and containing cobalt as a binder,
Forming a scribing wheel base material on the circumferential portion of the disk,
The scribing wheel base material is subjected to decarburization treatment,
Cobalt layer on the inner wall of the through hole is ground to remove the decalobalt layer,
Wherein a diamond film is formed on a blade edge portion of the scribing wheel base material by a chemical vapor deposition method. The method of claim 3,
The step of removing the dec-cobalt layer comprises:
Wherein a pin having an abrasive grain fixed on a surface thereof is inserted into a through hole of the scribing wheel base material, and a dummy scribe is performed to remove the decarburized layer. The method of claim 3,
The step of removing the dec-cobalt layer comprises:
Wherein the de-cobalt layer is removed by flowing a fluid including abrasive grains in the through hole of the scribing wheel base material. The method of claim 3,
The step of removing the dec-cobalt layer comprises:
And removing the dec-cobalt layer by performing a honing process on the through hole of the scribing wheel base material. A scribing wheel base material having a ridge line formed along the circumference thereof and having a blade edge formed by the ridge line and sloped surfaces on both sides of the ridge line and having grinding streaks parallel to the ridge line on both sides of the ridge line, ,
A scribing wheel having a diamond film formed on a blade surface of the scribing wheel base material. 8. The method of claim 7,
Wherein the grinding streaks formed on the scribing wheel base material are formed in a range of 20 mu m or more in width around the ridge line on both sides of the ridge line. There is provided a manufacturing method of a scribing wheel having a ridge along a circumferential portion of a disk and a blade tip composed of inclined surfaces on both sides of the ridge,
The edge of the blade is polished parallel to the ridgeline to constitute the scribing wheel base material,
Wherein a diamond film is formed on a blade edge portion of the scribing wheel base material by a chemical vapor deposition method. 10. The method of claim 9,
Wherein a scribing wheel base material is constituted by polishing the edge portion of the scribing wheel base material in parallel with the ridgeline in a range of 20 占 퐉 or more in width around the ridge line.

Images