201219326 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種用於對玻璃基板等脆性材料基板進行 劃線之劃線輪及其製造方法。 【先前技術】 習知之劃線輪係，相對於超硬合金製或燒結鑽石製之圓 板之圓周部自兩側互相傾斜地削入，而於圓周面上形成v 字形之刀尖。劃線輪之中心具有貫通孔，可旋轉自由地軸 向固疋於劃線裝置之劃線頭（scribe head)等上而使用。 先前，為了於劃線輪之圓周面上形成V字形之刀尖，首 先於圓板101之中心形成貫通孔102。圖1(a)表示該圓板1〇1 之側視圖。其次如圖1(b)中之側視圖、圖1(c)申之前視圖 所示，自兩側將圓周部分研磨成v字狀而製成刀尖部1〇3。 有時，利用粒度更細小之研磨劑對刀尖部1〇3進行精研 磨’從而構成劃線輪100。 [先行技術文獻] [專利文獻] [專利文獻1]專利第37593 17號公報 【發明内容】 [發明所欲解決之問題] 當將玻璃基板等脆性材料基板切斷時，使關線輪進行 劃線後沿切割線⑽ibe Hne)將其切斷，但因為於已切斷之 脆性材料基板端面殘留有劃痕，故當施加壓力時自端面產 生破裂之情形較多。若形成於劃線輪之圓周面之V字形的 157052.doc 201219326 刀尖具有凹凸，則當切斷時於脆性材料基板端面上會殘留 有劃痕’故脆性材料基板之機械強度會降低。因此，宜儘 量使劃線輪之v字形刀尖之脊線上的凹凸較少。近年來， 期望平板顯不器等中所使用之玻璃基板實現薄板化，進而 在移動設備等小型設備中玻璃之板厚變薄，達到例如〇 4 mm〜0.2 mm。因為利用此種薄玻璃會使基板之強度降低， 故脆性材料基板端面強度之降低成為大問題。 為了減少劃線輪之刀尖脊線之凹凸，必需使用更細微之 研磨劑進行研磨。然而，就習知之劃線輪而言，為了形成 V字形之刀尖而對相同之面積進行粗研磨與精研磨。因為 研磨劑之粒徑越小則越難以進行研磨，故存在如下問題： 當進行精研磨時，使用之研磨劑之粒徑越小則加工時間越 長。 本發明係著眼於上述之先前的問題而完成，《目的在於 提供一種針對劃線輪縮短形成V字形之刀尖時的研磨加工 時間之劃線輪及其製造方法。 [解決問題之技術手段] 劃 者 孔 為了解決該課題，本發明係—種劃線輪之製造方法，該 線輪係沿著圓餘輪之圓周部形成V字形的刀尖而成 ’該劃線輪之製造方法係’於圓板之中心位置形成貫通 以/〇上述圓板之圓周自側面之兩側互相傾斜地削入之 方式進行粗研磨而形成第丨研磨面，藉此使圓周部分形成 為具有第1頂角之V字狀，僅對上述v字狀之㈣磨面之 前端部分進行精研磨㈣成第2研磨面，作為具有大於第i201219326 VI. Description of the Invention: [Technical Field] The present invention relates to a scribing wheel for scribing a brittle material substrate such as a glass substrate, and a method of manufacturing the same. [Prior Art] A conventional scribing wheel system is formed by cutting a circumferential portion of a disk made of a superhard alloy or a sintered diamond from the both sides obliquely to form a v-shaped blade edge on the circumferential surface. The center of the scribing wheel has a through hole and is rotatably and axially fixed to a scribe head or the like of the scribing device. Previously, in order to form a V-shaped blade edge on the circumferential surface of the scribing wheel, a through hole 102 was formed first in the center of the disk 101. Fig. 1(a) shows a side view of the disc 1〇1. Next, as shown in the side view of Fig. 1(b) and the front view of Fig. 1(c), the circumferential portion is ground into a v shape from both sides to form the tip end portion 1〇3. In some cases, the knurling wheel 100 is formed by grinding the tip end portion 1 〇 3 with a finer particle size. [PRIOR ART DOCUMENT] [Patent Document 1] Patent No. 37593-17 [Disclosure] [Problems to be Solved by the Invention] When a brittle material substrate such as a glass substrate is cut, the wire closing wheel is drawn. The line trailing edge cutting line (10) ibe Hne) cuts it off, but since scratches remain on the end surface of the cut brittle material substrate, cracking occurs from the end surface when pressure is applied. 157052.doc 201219326 formed in the V-shaped circumferential surface of the scribing wheel has irregularities, and when the cutting is performed, scratches remain on the end surface of the brittle material substrate, so the mechanical strength of the brittle material substrate is lowered. Therefore, it is preferable to make the unevenness of the ridge line of the v-shaped blade tip of the scribing wheel as small as possible. In recent years, it has been desired to realize thinning of a glass substrate used in a flat panel display or the like, and further, in a small device such as a mobile device, the thickness of the glass is reduced to, for example, 〇 4 mm to 0.2 mm. Since the use of such a thin glass lowers the strength of the substrate, the decrease in the end face strength of the brittle material substrate becomes a major problem. In order to reduce the unevenness of the ridge line of the scribing wheel, it is necessary to use a finer abrasive for the grinding. However, in the case of the conventional scribing wheel, coarse grinding and fine grinding are performed on the same area in order to form a V-shaped blade tip. Since the smaller the particle diameter of the abrasive, the more difficult it is to perform polishing, there is a problem that the polishing time is longer as the particle size of the polishing agent used is smaller. The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a scribing wheel which is capable of shortening a grinding processing time for forming a V-shaped blade tip with respect to a scribing wheel, and a method of manufacturing the same. [Technical means for solving the problem] In order to solve the problem, the present invention is a method for manufacturing a scribing wheel, wherein the reel is formed along a circumferential portion of a remnant wheel to form a V-shaped blade edge. The manufacturing method of the reel is formed by performing a rough grinding to form a second grinding surface by cutting the center of the circular plate at a center of the circular plate so that the circumference of the circular plate is obliquely inclined from both sides of the side surface, thereby forming the circumferential portion. In the V shape having the first vertex angle, only the front end portion of the v-shaped (four) grinding surface is finely ground (four) into the second polishing surface as having a larger than the i-th
157052.doc 201219326 頂角之第2頂角之刀尖部，且對上述第2研磨面進行超精研 磨。 為了解決該問題’本發明係一種劃線輪之製造方法，該 劃線輪係沿著圓板狀輪之圓周部形成V字形的刀尖而成 者，該劃線輪之製造方法係，於圓板之中心位置形成貫通 孔以△上述圓板之圓周自側面之兩側互相傾斜地削入之 方式進行粗研磨而形成第丨研磨面，藉此使圓周部分形成 為具有第1頂角之V字狀，對上述v字狀之第丨研磨面進行 精研磨而形成第2研磨面，僅對上述第2研磨面之前端部分 進行超精研磨，作為具有大於第丨頂角之第2頂角之刀尖 部。 此處使用於上述超精研磨中之研磨劑宜為6〇〇〇號以上， 較佳為8GGG號以上’進而更佳為刪〇號以上。若為粒度 3_號以下，則存在已切斷之脆性㈣基板端面上容易殘 留劃痕的傾向。 為了解決該問題，本發明之劃線輪具有沿圓板狀輪之圓 周部以成為第i頂角之方式形成為v字狀之糾研磨面，且 具有於上述第i研磨面之前端的脊線上具有大於上述第!頂 角之第2頂角之第2研磨面。 [發明之效果] 根據具有如此之特徵之本發明， 个赞明對劃線輪之刀尖進行粗 研磨而構成為V字形，並且僅對1二 值對其則端部分進行精研磨， 之後進行超精研磨。因此，可減. J成乂作為刀尖而必需之脊線 部分的凹凸。故可獲得如下優 赏兴之效果：當使用劃線輪將 157052.doc 201219326 脆性材料基板切斷時可增強端面強度。如此之特徵尤其於 對較溥之脆性材料基板進行劃線並切斷時特別有效。 【實施方式】 圖2⑷係本發明之實施形態中之劃線輪之前視圖，圖 2(b)係其側視圖。而且，圖3(a)〜⑷係表示本實施形態中之 劃線輪之製造過程的側視圖。當製造劃線輪時，首先如圖 3(b)所示般於圖3⑷中所示之圓的中央形成作為轴孔 之貫通孔12。接著使馬達等之旋轉轴連通於該貫通孔^並 使其旋轉，並且，自兩側對圖3⑷中所示之圓板^之整個 圓周進行粗研磨，從而如圖3(b)所示般形成為v字形。於 該粗研磨之步驟中，使用例如粒度3〇〇號之細粉研磨劑進 仃研磨。將如此所形成之研磨面作為研磨面丨3。以使此時 之頂角αΐ較作為刀尖所必需之頂角更尖之方式進行研磨。 頂角αΐ宜為15。〜140。，較佳為6〇〇〜12〇。，進而更佳為 80〜1〇〇°。若為15。以下，則於加工時脊線前端容易破 損，若為140。以上，則具有喪失作為刀尖之實用性的傾 向。 接著，對經過粗研磨進行研磨後之研磨面13進行精研 磨。於精研磨中，使用例如粒度2〇〇〇號之細粉研磨劑。於 精研磨中，如圖3(c)所示般外形幾乎不產生變化。將如此 而形成之研磨面設為研磨面14。 進而，於本實施形態中，如圖3(d)所示般僅對前端部分 進行超精研磨。於該超精研磨中，係使用粒度6〇〇〇號以上 之細粉研磨劑進行研磨。而且，於該步驟中，僅對前端部 157052.doc 201219326 刀進行研磨，以使其成為所需之頂角α2(α2 > αΐ)。圖4係 表不该前端部分的放大圖。將如此而形成的利用超精加工 所得的研磨面作為15。此處，研磨劑之粒度宜為粒度6〇〇〇 號以上，較佳為8000號以上，進而更佳為1〇〇〇〇號以上。 若為粒度3000號以下，則存在已切斷之脆性材料基板端面 上谷易殘留劃痕之傾向。此處，頂角α2宜為9〇〇〜14〇0，較 佳為95。〜125。，進而更佳為100〇〜U5〇。頂角心較大之劃 線輪適合於較高之劃線負載下使用，頂角α2較小之劃線輪 則適合於較低之劃線負載下使用。 藉此，具有如下傾向：藉由將刀尖製成2段之¥字狀而僅 對作為劃線輪所必需的刀尖之前端部分進行超精研磨可 減小加工面積，藉此可縮短加工時間，並且可減少刀尖脊 線之凹凸。 藉此，若使用刀尖之脊線變得尖銳的劃線輪進行劃線來 切斷脆性材料基板，則可減小脆性材料基板之切斷面上所 產生的劃痕，且可增強脆性材料基板端面強度。脆性材料 基板端面強度係支配切斷後之脆性材料基板的機械強度之 主要因素。因此，為了確認本實施形態中之劃線輪之效 果，對本實施形態與使用習知之劃線輪而切斷之脆性材料 基板之機械強度進行比較。圖5表示進行4點彎曲強度之強 度試驗之試驗裝置的一例。於該試驗中，將已進行劃線而 切斷成40 mm><5 0 mm之0.3 111„1厚的玻璃板用作試驗片2〇、 21。試驗片20係使用習知之劃線輪切斷而成，試驗片^係 使用本實施形態的劃線輪進行切斷而成。 157052.doc 201219326 如圖5所示般，於基底31之上表面以指定間隔、例如2〇 賴之間隔配置支樓台32、33，並將作為樣品之試驗片 20(21)之經劃線的面朝向下方而配置於上述支撐台K、μ 之上部。於試驗片20之上部载置具有間隔為i〇 mm之按壓 部34、35的加壓部36，均勻地按壓，測定直至斷裂為止之 壓力。接著’當自上部施加之壓力平均為84.8叫，使用 翫知之劃線輪之試驗片2〇自端面斷裂。相對於此，當使用 已利用本實施形態之劃線輪而切斷的試驗片21時，可確認 平均之破裂加壓為1 〇3·6 N，端面強度增強。 另外，於本實施形態中，對圓板之劃線輪進行粗研磨使 其成為V字形，進而進行精研磨，之後僅對前端部分進行 超精研磨以使其成為所需之角度。亦可並非如此，而是於 進行精研磨時以使前端之角度成為所需之頂角“之方式進 行研磨。圖6係表示該實施形態之製造過程之圖。於此情 形時，對圖6(a)中所示之圓板丨丨之整周進行粗研磨，從而 如圖6(b)所示研磨成v字形。之後，僅對前端部分進行研 磨以使其成為頂角α2。將此時之研磨面作為16。其次如圖 6(d)所示般進而利用超精研磨對前端之研磨面16進行研 磨。將此時之研磨面設為17〇粗研磨、精研磨及超精研磨 中所使用之研磨劑係與上述實施形態中所使用之研磨劑相 同。頂角αΐ、α2亦與上文所述者相同。於此情形時，因為 於精研磨之階段中成為頂角α2，故可使製造步驟之效率更 南。 而且’當然’此處所示之研磨劑之粒度僅為一例，並不 I57052.doc 201219326 限定於該粒度。 [產業上之可利用性] 上述本發明之劃線輪係可用於對脆性材料基板進行劃線 之劃線裝置中，且對於針對較薄之脆性材料基板進行劃線 之劃線裝置而言尤其有效。 【圖式簡單說明】 圖1 (a)〜(c)係表示習知例中之劃線輪及其製造過程之側 視圖及前視圖。 。 圖2(a) ' (b)係本發明之實施形態中之劃線輪之前視圖及 側視圖。 圖3(a)〜(d)係表示本實施形態中之劃線輪之製.造過程的 側視圖。 圖4係表示經過超精研磨後之劃線輪之前端部分的放大 圖。 圖5係表示劃線輪之機械強度之試驗狀態的圖。 圖6(a)〜(d)係表示本發明之另一實施形態中的劃線輪之 製造過程之側視圖。 【主要元件符號說明】 11 劃線輪 12 貫通孔 13-17 研磨面 20、21 試驗片 31 基底 32、33 支撐台 157052.doc -9- 201219326 34、35 按壓部 36 加壓部 100 劃線輪 101 圓板 102 貫通孔 103 刀尖部 αΐ、α2 頂角1 157052.doc157052.doc 201219326 The tip end of the 2nd vertex of the top corner, and the second grinding surface is superfinished. In order to solve the problem, the present invention provides a method for manufacturing a scribing wheel which is formed by forming a V-shaped blade edge along a circumferential portion of a disk-shaped wheel, and the method for manufacturing the scribing wheel is A through hole is formed at a center position of the circular plate, and the second polishing surface is formed by rough grinding so that the circumference of the circular plate is obliquely inclined from both sides of the side surface, whereby the circumferential portion is formed to have the first vertex angle V. In the shape of a word, the v-shaped second polishing surface is subjected to finish polishing to form a second polishing surface, and only the front end portion of the second polishing surface is superfinished to have a second apex angle larger than the apex angle. The tip of the knife. The abrasive used in the above ultrafine polishing is preferably 6 or more, preferably 8 or more, and more preferably more than or equal to the above. If the particle size is 3 or less, there is a tendency that the cut brittleness (4) is likely to remain scratched on the end surface of the substrate. In order to solve this problem, the scribing wheel of the present invention has a v-shaped honing surface formed so as to become an i-th apex angle along the circumferential portion of the disc-shaped wheel, and has a ridge line at the front end of the ith grinding surface. A second polishing surface having a second apex angle greater than the apex angle of the apex angle. [Effect of the Invention] According to the present invention having such a feature, it is succinctly that the tip of the scribing wheel is roughly ground to form a V-shape, and only the end portion of the dicing wheel is subjected to finish grinding, and then Super fine grinding. Therefore, it is possible to reduce the unevenness of the ridge line portion which is necessary for the cutting edge. Therefore, the following advantages can be obtained: the end face strength can be enhanced when the 157052.doc 201219326 brittle material substrate is cut using a scribing wheel. Such a feature is particularly effective when scribing and cutting a relatively thin brittle material substrate. [Embodiment] Fig. 2 (4) is a front view of a scribing wheel in an embodiment of the present invention, and Fig. 2 (b) is a side view thereof. 3(a) to (4) are side views showing the manufacturing process of the scribing wheel in the present embodiment. When the scribing wheel is manufactured, first, as shown in Fig. 3 (b), a through hole 12 as a shaft hole is formed in the center of the circle shown in Fig. 3 (4). Then, the rotating shaft of the motor or the like is communicated with the through hole and rotated, and the entire circumference of the circular plate shown in FIG. 3 (4) is roughly ground from both sides, thereby being as shown in FIG. 3(b). Formed in a v shape. In the coarse grinding step, the fine grinding is carried out using, for example, a fine powder abrasive having a particle size of 3 Å. The polished surface thus formed was used as the polished surface 丨3. Grinding is performed such that the apex angle α 此时 at this time is sharper than the apex angle necessary for the cutting edge. The apex angle α is preferably 15. ~140. Preferably, it is 6〇〇~12〇. And further preferably 80~1〇〇°. If it is 15. Hereinafter, the front end of the ridge line is easily broken during processing, and is 140. As described above, there is a tendency to lose the practicality as a tool tip. Next, the polished surface 13 which has been subjected to rough grinding is subjected to lapping. In the fine grinding, for example, a fine powder abrasive having a particle size of 2 Å is used. In the fine grinding, the shape is hardly changed as shown in Fig. 3(c). The polishing surface thus formed is referred to as a polishing surface 14. Further, in the present embodiment, as shown in Fig. 3(d), only the tip end portion is superfinished. In the ultrafine polishing, the polishing is carried out using a fine powder abrasive having a particle size of 6 Å or more. Further, in this step, only the front end portion 157052.doc 201219326 is ground to have a desired apex angle α2 (α2 > αΐ). Fig. 4 is an enlarged view of the front end portion. The polished surface obtained by the superfinishing process thus formed was taken as 15. Here, the particle size of the abrasive is preferably 6 or more, more preferably 8,000 or more, and still more preferably 1 or more. If the particle size is 3,000 or less, the grain on the end surface of the cut brittle material substrate tends to remain scratched. Here, the apex angle α2 is preferably 9 〇〇 to 14 〇 0, more preferably 95. ~125. And further preferably 100〇~U5〇. The slanting angle is larger. The reel is suitable for use under higher scribing loads. The scribing wheel with smaller apex angle α2 is suitable for lower scribing loads. Therefore, there is a tendency to reduce the processing area by super-finishing the tip end portion of the blade edge necessary for the scribing wheel by forming the blade tip into two-piece shape, thereby shortening the processing. Time, and can reduce the unevenness of the knife edge ridge. Therefore, if the slash wheel having a sharp ridge line is used to scribe the brittle material substrate, the scratches on the cut surface of the brittle material substrate can be reduced, and the brittle material can be reinforced. Substrate end face strength. Brittle material The strength of the end face of the substrate is the main factor governing the mechanical strength of the brittle material substrate after cutting. Therefore, in order to confirm the effect of the scribing wheel in the present embodiment, the mechanical strength of the brittle material substrate cut by the conventional scribing wheel is compared with the present embodiment. Fig. 5 shows an example of a test apparatus for performing a strength test of four-point bending strength. In this test, a glass plate having a thickness of 0.3 111 Å which was cut into 40 mm >< 50 mm was used as test pieces 2, 21 for the scribing. The test piece 20 was a conventional scribing wheel. The test piece is cut by using the scribing wheel of the present embodiment. 157052.doc 201219326 As shown in FIG. 5, the upper surface of the base 31 is spaced at a predetermined interval, for example, 2 Å. The gussets 32 and 33 are disposed, and the scribed surface of the test piece 20 (21) as a sample is placed on the upper side of the support tables K and μ so as to face downward. The upper portion of the test piece 20 is placed with an interval i. The pressurizing portion 36 of the pressing portions 34 and 35 of the 〇mm was uniformly pressed, and the pressure until the break was measured. Then, the pressure applied from the upper portion was 84.8 on average, and the test piece 2 of the scribing wheel was used. On the other hand, when the test piece 21 which was cut by the scribing wheel of this embodiment was used, it was confirmed that the average fracture pressure was 1 〇3·6 N, and the end surface strength was enhanced. In the embodiment, the scribing wheel of the circular plate is roughly ground to have a V shape. For fine grinding, only the front end portion is super-polished to make it the desired angle. This is not the case, but the fine angle is used to make the angle of the front end the desired apex angle. Grinding. Fig. 6 is a view showing the manufacturing process of the embodiment. In this case, the entire circumference of the disk crucible shown in Fig. 6 (a) is roughly ground to be ground into a v shape as shown in Fig. 6 (b). Thereafter, only the front end portion is ground to make it the apex angle α2. The polished surface at this time was taken as 16. Next, as shown in Fig. 6(d), the polishing surface 16 of the tip end is ground by superfinishing. The polishing agent used in the case where the polishing surface at this time is 17 〇 rough polishing, fine polishing, and ultrafine polishing is the same as the polishing agent used in the above embodiment. The apex angles αΐ and α2 are also the same as described above. In this case, since the apex angle α2 is obtained in the stage of fine polishing, the efficiency of the manufacturing step can be made more south. Further, the particle size of the abrasive shown here is only an example, and is not limited to the particle size of I57052.doc 201219326. [Industrial Applicability] The above-described scribing wheel system of the present invention can be used in a scribing apparatus for scribing a brittle material substrate, and is particularly useful for a scribing apparatus for scribing a thin brittle material substrate. effective. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 (a) to (c) show a side view and a front view of a scribing wheel and a manufacturing process thereof in a conventional example. . Fig. 2 (a) '(b) is a front view and a side view of a scribing wheel in the embodiment of the present invention. Fig. 3 (a) to (d) are side views showing the manufacturing process of the scribing wheel in the present embodiment. Fig. 4 is an enlarged view showing a portion of the front end portion of the scribing wheel after superfinishing. Fig. 5 is a view showing a test state of the mechanical strength of the scribing wheel. Fig. 6 (a) to (d) are side views showing the manufacturing process of the scribing wheel in another embodiment of the present invention. [Description of main component symbols] 11 Scribe wheel 12 Through hole 13-17 Polished surface 20, 21 Test piece 31 Base 32, 33 Support table 157052.doc -9- 201219326 34, 35 Pressing portion 36 Pressing portion 100 Scribe wheel 101 Circular plate 102 Through hole 103 Tool tip part αΐ, α2 Top angle 1 157052.doc