JP5171646B2 - 交互くし型マイクロ電極および交互くし型マイクロ電極を製造するプロセス - Google Patents

交互くし型マイクロ電極および交互くし型マイクロ電極を製造するプロセス Download PDF

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JP5171646B2
JP5171646B2 JP2008551873A JP2008551873A JP5171646B2 JP 5171646 B2 JP5171646 B2 JP 5171646B2 JP 2008551873 A JP2008551873 A JP 2008551873A JP 2008551873 A JP2008551873 A JP 2008551873A JP 5171646 B2 JP5171646 B2 JP 5171646B2
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layer
metal
microelectrode
microelectrodes
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JP2009524811A (ja
JP2009524811A5 (enExample
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ロバート ビンセント，デイビッド
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インテリテクト ウォーター リミティド
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28—Electrolytic cell components
    • G01N27/30—Electrodes, e.g. test electrodes; Half-cells
    • G01N27/307—Disposable laminated or multilayered electrodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/404—Cells with anode, cathode and cell electrolyte on the same side of a permeable membrane which separates them from the sample fluid, e.g. Clark-type oxygen sensors

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP2008551873A 2006-01-27 2007-01-25 交互くし型マイクロ電極および交互くし型マイクロ電極を製造するプロセス Expired - Fee Related JP5171646B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0601703.2 2006-01-27
GBGB0601703.2A GB0601703D0 (en) 2006-01-27 2006-01-27 Improvement To The Design And Construction Of Electrochemical Sensors
PCT/GB2007/000259 WO2007085838A1 (en) 2006-01-27 2007-01-25 An interdigitated microelectrode and a process for producing the interdigitated microelectrode

Publications (3)

Publication Number Publication Date
JP2009524811A JP2009524811A (ja) 2009-07-02
JP2009524811A5 JP2009524811A5 (enExample) 2010-03-11
JP5171646B2 true JP5171646B2 (ja) 2013-03-27

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JP2008551873A Expired - Fee Related JP5171646B2 (ja) 2006-01-27 2007-01-25 交互くし型マイクロ電極および交互くし型マイクロ電極を製造するプロセス

Country Status (8)

Country Link
US (1) US8540858B2 (enExample)
EP (1) EP1977226A1 (enExample)
JP (1) JP5171646B2 (enExample)
CN (1) CN101375155B (enExample)
AU (1) AU2007209131B2 (enExample)
CA (1) CA2637484A1 (enExample)
GB (1) GB0601703D0 (enExample)
WO (1) WO2007085838A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009020743A1 (de) 2009-05-11 2010-12-09 Heraeus Sensor Technology Gmbh Fotolithographisch strukturierter Dickschichtsensor
US20130099956A1 (en) * 2011-10-24 2013-04-25 Lsi Corporation Apparatus to reduce specific absorption rate
AU2012340870B2 (en) * 2011-11-22 2015-07-30 Siemens Healthcare Diagnostics Inc. Interdigitated array and method of manufacture
WO2014040650A1 (en) 2012-09-17 2014-03-20 Element Six Limited Diamond microelectrode
US9084561B2 (en) * 2013-06-17 2015-07-21 Google Inc. Symmetrically arranged sensor electrodes in an ophthalmic electrochemical sensor
CN103663342B (zh) * 2013-11-15 2016-03-02 上海交通大学 共布线微电极阵列芯片及其制备方法
CN103682224B (zh) * 2013-12-15 2017-12-29 北京自动测试技术研究所 一种柔性芯片、具有该柔性芯片的动力电池组及电动汽车
WO2017083698A1 (en) * 2015-11-12 2017-05-18 Hach Company Combined and free chlorine measurement through electrochemical microsensors
CN105891292A (zh) * 2016-05-28 2016-08-24 惠州市力道电子材料有限公司 一种高导电型叉指电极、其制备方法和应用
US20200182768A1 (en) * 2017-08-25 2020-06-11 Kyocera Corporation Sensor board and sensor device including sensor board

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63168552A (ja) * 1986-12-31 1988-07-12 Horiba Ltd バイオセンサ−
US4900405A (en) * 1987-07-15 1990-02-13 Sri International Surface type microelectronic gas and vapor sensor
GB8817421D0 (en) * 1988-07-21 1988-08-24 Medisense Inc Bioelectrochemical electrodes
JPH02140655A (ja) * 1988-11-21 1990-05-30 Nippon Telegr & Teleph Corp <Ntt> 電気化学的検出器およびその製造方法
EP0637382A1 (en) 1992-04-22 1995-02-08 THE DOW CHEMICAL COMPANY (a Delaware corporation) Polymeric film-based electrochemical sensor apparatus
JP3289059B2 (ja) * 1992-05-11 2002-06-04 日本電信電話株式会社 電気化学検出方法および検出装置
DE4318519C2 (de) * 1993-06-03 1996-11-28 Fraunhofer Ges Forschung Elektrochemischer Sensor
GB9412820D0 (en) * 1994-06-25 1994-08-17 Siemens Plessey Controls Ltd Water quality measuring apparatus
CN1192097C (zh) * 1995-03-10 2005-03-09 梅索磅秤技术有限公司 多阵列、多特异性的电化学发光检验
WO1996033423A1 (de) * 1995-04-18 1996-10-24 Siemens Aktiengesellschaft Funkabfragbarer sensor in oberflächenwellentechnik
JP2000097906A (ja) * 1998-09-21 2000-04-07 Shibuya Kogyo Co Ltd 滅菌装置における滅菌ガス濃度制御装置
JP2000105217A (ja) * 1998-09-29 2000-04-11 Shibuya Kogyo Co Ltd 滅菌ガス濃度センサ及びその製造方法
US7073246B2 (en) * 1999-10-04 2006-07-11 Roche Diagnostics Operations, Inc. Method of making a biosensor
US6270651B1 (en) 2000-02-04 2001-08-07 Abetif Essalik Gas component sensor
EP1269172B1 (en) * 2000-03-01 2009-05-13 Radiometer Medical ApS Electrode device with a solid state reference system
TW483238B (en) * 2000-06-30 2002-04-11 Fujitsu Media Devices Ltd Surface acoustic wave device
DE10041921A1 (de) * 2000-08-25 2002-03-21 Dornier Gmbh Stoffsensor
JP4683862B2 (ja) * 2004-06-02 2011-05-18 イビデン株式会社 窒素酸化物濃度検出センサ
PL1859330T3 (pl) * 2005-01-28 2013-01-31 Univ Duke Urządzenia i sposoby manipulacji kropelkami na płytkach obwodów drukowanych
US20060211123A1 (en) * 2005-03-18 2006-09-21 Ker Eric L Sensing element and method of making

Also Published As

Publication number Publication date
WO2007085838A1 (en) 2007-08-02
GB0601703D0 (en) 2006-03-08
US20080314744A1 (en) 2008-12-25
AU2007209131B2 (en) 2012-04-12
CN101375155B (zh) 2011-06-15
AU2007209131A1 (en) 2007-08-02
CN101375155A (zh) 2009-02-25
CA2637484A1 (en) 2007-08-02
JP2009524811A (ja) 2009-07-02
US8540858B2 (en) 2013-09-24
EP1977226A1 (en) 2008-10-08

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