CA2637484A1 - An interdigitated microelectrode and a process for producing the interdigitated microelectrode - Google Patents
An interdigitated microelectrode and a process for producing the interdigitated microelectrode Download PDFInfo
- Publication number
- CA2637484A1 CA2637484A1 CA002637484A CA2637484A CA2637484A1 CA 2637484 A1 CA2637484 A1 CA 2637484A1 CA 002637484 A CA002637484 A CA 002637484A CA 2637484 A CA2637484 A CA 2637484A CA 2637484 A1 CA2637484 A1 CA 2637484A1
- Authority
- CA
- Canada
- Prior art keywords
- layer
- metal
- interdigitated microelectrode
- substrate
- process according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000000034 method Methods 0.000 title claims abstract description 45
- 229910052751 metal Inorganic materials 0.000 claims abstract description 63
- 239000002184 metal Substances 0.000 claims abstract description 63
- 239000000758 substrate Substances 0.000 claims abstract description 53
- 238000007789 sealing Methods 0.000 claims description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 16
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 14
- 239000010931 gold Substances 0.000 claims description 13
- 229910052737 gold Inorganic materials 0.000 claims description 13
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 12
- 239000000919 ceramic Substances 0.000 claims description 10
- 238000000206 photolithography Methods 0.000 claims description 7
- 229910052697 platinum Inorganic materials 0.000 claims description 7
- 230000008021 deposition Effects 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
- 239000010408 film Substances 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- 238000005755 formation reaction Methods 0.000 description 7
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 5
- 239000000460 chlorine Substances 0.000 description 5
- 229910052801 chlorine Inorganic materials 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 238000007650 screen-printing Methods 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 4
- 238000007639 printing Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 239000013626 chemical specie Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000004377 microelectronic Methods 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- QDHHCQZDFGDHMP-UHFFFAOYSA-N Chloramine Chemical compound ClN QDHHCQZDFGDHMP-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000001010 compromised effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 239000003651 drinking water Substances 0.000 description 1
- 235000020188 drinking water Nutrition 0.000 description 1
- 238000003487 electrochemical reaction Methods 0.000 description 1
- 150000002343 gold Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/28—Electrolytic cell components
- G01N27/30—Electrodes, e.g. test electrodes; Half-cells
- G01N27/307—Disposable laminated or multilayered electrodes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/404—Cells with anode, cathode and cell electrolyte on the same side of a permeable membrane which separates them from the sample fluid, e.g. Clark-type oxygen sensors
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Molecular Biology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GBGB0601703.2A GB0601703D0 (en) | 2006-01-27 | 2006-01-27 | Improvement To The Design And Construction Of Electrochemical Sensors |
| GB0601703.2 | 2006-01-27 | ||
| PCT/GB2007/000259 WO2007085838A1 (en) | 2006-01-27 | 2007-01-25 | An interdigitated microelectrode and a process for producing the interdigitated microelectrode |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2637484A1 true CA2637484A1 (en) | 2007-08-02 |
Family
ID=36061013
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002637484A Abandoned CA2637484A1 (en) | 2006-01-27 | 2007-01-25 | An interdigitated microelectrode and a process for producing the interdigitated microelectrode |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US8540858B2 (enExample) |
| EP (1) | EP1977226A1 (enExample) |
| JP (1) | JP5171646B2 (enExample) |
| CN (1) | CN101375155B (enExample) |
| AU (1) | AU2007209131B2 (enExample) |
| CA (1) | CA2637484A1 (enExample) |
| GB (1) | GB0601703D0 (enExample) |
| WO (1) | WO2007085838A1 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102009020743A1 (de) * | 2009-05-11 | 2010-12-09 | Heraeus Sensor Technology Gmbh | Fotolithographisch strukturierter Dickschichtsensor |
| US20130099956A1 (en) * | 2011-10-24 | 2013-04-25 | Lsi Corporation | Apparatus to reduce specific absorption rate |
| CN103946698B (zh) * | 2011-11-22 | 2016-03-30 | 西门子医疗保健诊断公司 | 叉指阵列和制造方法 |
| WO2014040650A1 (en) | 2012-09-17 | 2014-03-20 | Element Six Limited | Diamond microelectrode |
| US9084561B2 (en) * | 2013-06-17 | 2015-07-21 | Google Inc. | Symmetrically arranged sensor electrodes in an ophthalmic electrochemical sensor |
| CN103663342B (zh) * | 2013-11-15 | 2016-03-02 | 上海交通大学 | 共布线微电极阵列芯片及其制备方法 |
| CN103682224B (zh) * | 2013-12-15 | 2017-12-29 | 北京自动测试技术研究所 | 一种柔性芯片、具有该柔性芯片的动力电池组及电动汽车 |
| WO2017083698A1 (en) * | 2015-11-12 | 2017-05-18 | Hach Company | Combined and free chlorine measurement through electrochemical microsensors |
| CN105891292A (zh) * | 2016-05-28 | 2016-08-24 | 惠州市力道电子材料有限公司 | 一种高导电型叉指电极、其制备方法和应用 |
| WO2019039549A1 (ja) * | 2017-08-25 | 2019-02-28 | 京セラ株式会社 | センサ基板およびそれを備えるセンサ装置 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63168552A (ja) * | 1986-12-31 | 1988-07-12 | Horiba Ltd | バイオセンサ− |
| US4900405A (en) * | 1987-07-15 | 1990-02-13 | Sri International | Surface type microelectronic gas and vapor sensor |
| GB8817421D0 (en) * | 1988-07-21 | 1988-08-24 | Medisense Inc | Bioelectrochemical electrodes |
| JPH02140655A (ja) * | 1988-11-21 | 1990-05-30 | Nippon Telegr & Teleph Corp <Ntt> | 電気化学的検出器およびその製造方法 |
| WO1993021522A1 (en) * | 1992-04-22 | 1993-10-28 | The Dow Chemical Company | Polymeric film-based electrochemical sensor apparatus |
| JP3289059B2 (ja) * | 1992-05-11 | 2002-06-04 | 日本電信電話株式会社 | 電気化学検出方法および検出装置 |
| DE4318519C2 (de) * | 1993-06-03 | 1996-11-28 | Fraunhofer Ges Forschung | Elektrochemischer Sensor |
| GB9412820D0 (en) * | 1994-06-25 | 1994-08-17 | Siemens Plessey Controls Ltd | Water quality measuring apparatus |
| JPH11502617A (ja) * | 1995-03-10 | 1999-03-02 | メソ スケール テクノロジーズ，エルエルシー | 多重アレイの多重特異的な電気化学発光試験 |
| EP0821796B1 (de) * | 1995-04-18 | 2001-05-30 | Siemens Aktiengesellschaft | Funkabfragbarer sensor in oberflächenwellentechnik |
| JP2000097906A (ja) * | 1998-09-21 | 2000-04-07 | Shibuya Kogyo Co Ltd | 滅菌装置における滅菌ガス濃度制御装置 |
| JP2000105217A (ja) * | 1998-09-29 | 2000-04-11 | Shibuya Kogyo Co Ltd | 滅菌ガス濃度センサ及びその製造方法 |
| US7073246B2 (en) * | 1999-10-04 | 2006-07-11 | Roche Diagnostics Operations, Inc. | Method of making a biosensor |
| US6270651B1 (en) * | 2000-02-04 | 2001-08-07 | Abetif Essalik | Gas component sensor |
| JP3635263B2 (ja) * | 2000-03-01 | 2005-04-06 | ラジオメーター・メディカル・アクティーゼルスカブ | 固体状態参照系を持つ電極デバイス |
| TW483238B (en) * | 2000-06-30 | 2002-04-11 | Fujitsu Media Devices Ltd | Surface acoustic wave device |
| DE10041921A1 (de) * | 2000-08-25 | 2002-03-21 | Dornier Gmbh | Stoffsensor |
| JP4683862B2 (ja) * | 2004-06-02 | 2011-05-18 | イビデン株式会社 | 窒素酸化物濃度検出センサ |
| EP1859330B1 (en) * | 2005-01-28 | 2012-07-04 | Duke University | Apparatuses and methods for manipulating droplets on a printed circuit board |
| US20060211123A1 (en) * | 2005-03-18 | 2006-09-21 | Ker Eric L | Sensing element and method of making |
-
2006
- 2006-01-27 GB GBGB0601703.2A patent/GB0601703D0/en not_active Ceased
-
2007
- 2007-01-25 AU AU2007209131A patent/AU2007209131B2/en not_active Ceased
- 2007-01-25 US US12/087,940 patent/US8540858B2/en not_active Expired - Fee Related
- 2007-01-25 CA CA002637484A patent/CA2637484A1/en not_active Abandoned
- 2007-01-25 EP EP20070705030 patent/EP1977226A1/en not_active Withdrawn
- 2007-01-25 CN CN2007800036035A patent/CN101375155B/zh not_active Expired - Fee Related
- 2007-01-25 WO PCT/GB2007/000259 patent/WO2007085838A1/en not_active Ceased
- 2007-01-25 JP JP2008551873A patent/JP5171646B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US20080314744A1 (en) | 2008-12-25 |
| WO2007085838A1 (en) | 2007-08-02 |
| GB0601703D0 (en) | 2006-03-08 |
| US8540858B2 (en) | 2013-09-24 |
| JP5171646B2 (ja) | 2013-03-27 |
| CN101375155B (zh) | 2011-06-15 |
| CN101375155A (zh) | 2009-02-25 |
| AU2007209131B2 (en) | 2012-04-12 |
| EP1977226A1 (en) | 2008-10-08 |
| JP2009524811A (ja) | 2009-07-02 |
| AU2007209131A1 (en) | 2007-08-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FZDE | Discontinued |