JP2009524811A5 - - Google Patents

Download PDF

Info

Publication number
JP2009524811A5
JP2009524811A5 JP2008551873A JP2008551873A JP2009524811A5 JP 2009524811 A5 JP2009524811 A5 JP 2009524811A5 JP 2008551873 A JP2008551873 A JP 2008551873A JP 2008551873 A JP2008551873 A JP 2008551873A JP 2009524811 A5 JP2009524811 A5 JP 2009524811A5
Authority
JP
Japan
Prior art keywords
layer
microelectrode
metal
line
alternating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008551873A
Other languages
English (en)
Japanese (ja)
Other versions
JP5171646B2 (ja
JP2009524811A (ja
Filing date
Publication date
Priority claimed from GBGB0601703.2A external-priority patent/GB0601703D0/en
Application filed filed Critical
Publication of JP2009524811A publication Critical patent/JP2009524811A/ja
Publication of JP2009524811A5 publication Critical patent/JP2009524811A5/ja
Application granted granted Critical
Publication of JP5171646B2 publication Critical patent/JP5171646B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2008551873A 2006-01-27 2007-01-25 交互くし型マイクロ電極および交互くし型マイクロ電極を製造するプロセス Expired - Fee Related JP5171646B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0601703.2 2006-01-27
GBGB0601703.2A GB0601703D0 (en) 2006-01-27 2006-01-27 Improvement To The Design And Construction Of Electrochemical Sensors
PCT/GB2007/000259 WO2007085838A1 (en) 2006-01-27 2007-01-25 An interdigitated microelectrode and a process for producing the interdigitated microelectrode

Publications (3)

Publication Number Publication Date
JP2009524811A JP2009524811A (ja) 2009-07-02
JP2009524811A5 true JP2009524811A5 (enExample) 2010-03-11
JP5171646B2 JP5171646B2 (ja) 2013-03-27

Family

ID=36061013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008551873A Expired - Fee Related JP5171646B2 (ja) 2006-01-27 2007-01-25 交互くし型マイクロ電極および交互くし型マイクロ電極を製造するプロセス

Country Status (8)

Country Link
US (1) US8540858B2 (enExample)
EP (1) EP1977226A1 (enExample)
JP (1) JP5171646B2 (enExample)
CN (1) CN101375155B (enExample)
AU (1) AU2007209131B2 (enExample)
CA (1) CA2637484A1 (enExample)
GB (1) GB0601703D0 (enExample)
WO (1) WO2007085838A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009020743A1 (de) 2009-05-11 2010-12-09 Heraeus Sensor Technology Gmbh Fotolithographisch strukturierter Dickschichtsensor
US20130099956A1 (en) * 2011-10-24 2013-04-25 Lsi Corporation Apparatus to reduce specific absorption rate
AU2012340870B2 (en) * 2011-11-22 2015-07-30 Siemens Healthcare Diagnostics Inc. Interdigitated array and method of manufacture
WO2014040650A1 (en) 2012-09-17 2014-03-20 Element Six Limited Diamond microelectrode
US9084561B2 (en) * 2013-06-17 2015-07-21 Google Inc. Symmetrically arranged sensor electrodes in an ophthalmic electrochemical sensor
CN103663342B (zh) * 2013-11-15 2016-03-02 上海交通大学 共布线微电极阵列芯片及其制备方法
CN103682224B (zh) * 2013-12-15 2017-12-29 北京自动测试技术研究所 一种柔性芯片、具有该柔性芯片的动力电池组及电动汽车
WO2017083698A1 (en) * 2015-11-12 2017-05-18 Hach Company Combined and free chlorine measurement through electrochemical microsensors
CN105891292A (zh) * 2016-05-28 2016-08-24 惠州市力道电子材料有限公司 一种高导电型叉指电极、其制备方法和应用
US20200182768A1 (en) * 2017-08-25 2020-06-11 Kyocera Corporation Sensor board and sensor device including sensor board

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63168552A (ja) * 1986-12-31 1988-07-12 Horiba Ltd バイオセンサ−
US4900405A (en) * 1987-07-15 1990-02-13 Sri International Surface type microelectronic gas and vapor sensor
GB8817421D0 (en) * 1988-07-21 1988-08-24 Medisense Inc Bioelectrochemical electrodes
JPH02140655A (ja) * 1988-11-21 1990-05-30 Nippon Telegr & Teleph Corp <Ntt> 電気化学的検出器およびその製造方法
EP0637382A1 (en) 1992-04-22 1995-02-08 THE DOW CHEMICAL COMPANY (a Delaware corporation) Polymeric film-based electrochemical sensor apparatus
JP3289059B2 (ja) * 1992-05-11 2002-06-04 日本電信電話株式会社 電気化学検出方法および検出装置
DE4318519C2 (de) * 1993-06-03 1996-11-28 Fraunhofer Ges Forschung Elektrochemischer Sensor
GB9412820D0 (en) * 1994-06-25 1994-08-17 Siemens Plessey Controls Ltd Water quality measuring apparatus
CN1192097C (zh) * 1995-03-10 2005-03-09 梅索磅秤技术有限公司 多阵列、多特异性的电化学发光检验
WO1996033423A1 (de) * 1995-04-18 1996-10-24 Siemens Aktiengesellschaft Funkabfragbarer sensor in oberflächenwellentechnik
JP2000097906A (ja) * 1998-09-21 2000-04-07 Shibuya Kogyo Co Ltd 滅菌装置における滅菌ガス濃度制御装置
JP2000105217A (ja) * 1998-09-29 2000-04-11 Shibuya Kogyo Co Ltd 滅菌ガス濃度センサ及びその製造方法
US7073246B2 (en) * 1999-10-04 2006-07-11 Roche Diagnostics Operations, Inc. Method of making a biosensor
US6270651B1 (en) 2000-02-04 2001-08-07 Abetif Essalik Gas component sensor
EP1269172B1 (en) * 2000-03-01 2009-05-13 Radiometer Medical ApS Electrode device with a solid state reference system
TW483238B (en) * 2000-06-30 2002-04-11 Fujitsu Media Devices Ltd Surface acoustic wave device
DE10041921A1 (de) * 2000-08-25 2002-03-21 Dornier Gmbh Stoffsensor
JP4683862B2 (ja) * 2004-06-02 2011-05-18 イビデン株式会社 窒素酸化物濃度検出センサ
PL1859330T3 (pl) * 2005-01-28 2013-01-31 Univ Duke Urządzenia i sposoby manipulacji kropelkami na płytkach obwodów drukowanych
US20060211123A1 (en) * 2005-03-18 2006-09-21 Ker Eric L Sensing element and method of making

Similar Documents

Publication Publication Date Title
JP2009524811A5 (enExample)
JP5171646B2 (ja) 交互くし型マイクロ電極および交互くし型マイクロ電極を製造するプロセス
US8988079B2 (en) Carbon-based electrodes with graphene modification
US9506891B2 (en) Making imprinted thin-film electronic sensor structure
JP2013500492A5 (enExample)
EP2108955A3 (en) On-Chip Cell Migration Detection
Amatore et al. Using electrochemical coupling between parallel microbands for in situ monitoring of flow rates in microfluidic channels
JP2011516884A5 (enExample)
US20160047767A1 (en) Operating imprinted thin-film electronic sensor structure
Kim et al. Batch Nanofabrication of Suspended Single 1D Nanoheaters for Ultralow‐Power Metal Oxide Semiconductor‐Based Gas Sensors
CN104297303A (zh) 丙酮气敏传感器及其制备方法
CN202994323U (zh) 一种薄膜型铂电阻温度传感器
CN106017751A (zh) 一种高灵敏度压阻式压力传感器及其制备方法
JP2011080996A5 (enExample)
Prasad et al. Fabrication and Characterization of IDE Based Sensor through Conventional Lithography Method
Hayasaka et al. Integration of boron-doped diamond microelectrode on CMOS-based amperometric sensor array by film transfer technology
CN104215676A (zh) 用于电化学气体检测器的微电极
CN110006969A (zh) 一种基于电化学检测技术的多参数水环境集成微传感器及其制备方法
DE102015226398A1 (de) Gassensorelement und Gassensor
KR101652981B1 (ko) 입자상 물질 센서
CN102768230A (zh) 一种竖直平板电容式气体传感器及其制备方法
Wang et al. Reduced carboxylic graphene/palladium nanoparticles composite modified ultramicroelectrode array and its application in biochemical oxygen demand microsensor
Forsberg et al. Fabrication of boron doped diamond microband electrodes for electrochemical detection in a microfluidic channel
Pohl O. Vogt¹, B. Graß¹, G. Weber¹, R. Hergenröder¹, D. Siepe², A. Neyer²
Ma et al. Electrical biosensor for label-free DNA hybridization detection