JP5171003B2 - 半導体装置 - Google Patents

半導体装置 Download PDF

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Publication number
JP5171003B2
JP5171003B2 JP2006260488A JP2006260488A JP5171003B2 JP 5171003 B2 JP5171003 B2 JP 5171003B2 JP 2006260488 A JP2006260488 A JP 2006260488A JP 2006260488 A JP2006260488 A JP 2006260488A JP 5171003 B2 JP5171003 B2 JP 5171003B2
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JP
Japan
Prior art keywords
layer
electrode layer
conductive
wiring
substrate
Prior art date
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Expired - Fee Related
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JP2006260488A
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English (en)
Japanese (ja)
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JP2007059925A (ja
JP2007059925A5 (enExample
Inventor
敏行 伊佐
将文 森末
郁子 川俣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP2006260488A priority Critical patent/JP5171003B2/ja
Publication of JP2007059925A publication Critical patent/JP2007059925A/ja
Publication of JP2007059925A5 publication Critical patent/JP2007059925A5/ja
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Publication of JP5171003B2 publication Critical patent/JP5171003B2/ja
Expired - Fee Related legal-status Critical Current
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  • Liquid Crystal (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Thin Film Transistor (AREA)
  • Electroluminescent Light Sources (AREA)
  • Electrodes Of Semiconductors (AREA)
JP2006260488A 2005-01-28 2006-09-26 半導体装置 Expired - Fee Related JP5171003B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006260488A JP5171003B2 (ja) 2005-01-28 2006-09-26 半導体装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005022248 2005-01-28
JP2005022248 2005-01-28
JP2006260488A JP5171003B2 (ja) 2005-01-28 2006-09-26 半導体装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2006017052A Division JP4761981B2 (ja) 2005-01-28 2006-01-26 半導体装置の作製方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2012235918A Division JP5707373B2 (ja) 2005-01-28 2012-10-25 液晶表示装置

Publications (3)

Publication Number Publication Date
JP2007059925A JP2007059925A (ja) 2007-03-08
JP2007059925A5 JP2007059925A5 (enExample) 2008-10-16
JP5171003B2 true JP5171003B2 (ja) 2013-03-27

Family

ID=37923068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006260488A Expired - Fee Related JP5171003B2 (ja) 2005-01-28 2006-09-26 半導体装置

Country Status (1)

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JP (1) JP5171003B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4759598B2 (ja) * 2007-09-28 2011-08-31 キヤノン株式会社 薄膜トランジスタ、その製造方法及びそれを用いた表示装置
JP5553189B2 (ja) * 2008-04-09 2014-07-16 独立行政法人産業技術総合研究所 素子用電極およびその製造方法と、該素子用電極を備えた電子デバイス
JP5510767B2 (ja) * 2008-06-19 2014-06-04 出光興産株式会社 薄膜トランジスタおよびその製造方法
WO2010032602A1 (en) * 2008-09-18 2010-03-25 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
CN111081550A (zh) 2009-06-30 2020-04-28 株式会社半导体能源研究所 用于制造半导体器件的方法及半导体器件
JP5709540B2 (ja) * 2011-01-14 2015-04-30 三菱重工業株式会社 有機ｅｌ素子の製造方法
JP5818441B2 (ja) * 2011-01-14 2015-11-18 三菱重工業株式会社 照明用有機ｅｌ素子の製造方法
JP7076092B2 (ja) * 2018-01-19 2022-05-27 旭化成株式会社 紫外線受光素子及び紫外線受光素子の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3322738B2 (ja) * 1993-12-08 2002-09-09 株式会社半導体エネルギー研究所 半導体装置及び集積回路ならびに表示装置
JP3383129B2 (ja) * 1995-07-20 2003-03-04 宮城沖電気株式会社 半導体装置の配線構造
JP2003059940A (ja) * 2001-08-08 2003-02-28 Fuji Photo Film Co Ltd ミクロファブリケーション用基板、その製造方法および像状薄膜形成方法
JP4839551B2 (ja) * 2001-09-12 2011-12-21 パナソニック株式会社 有機ｅｌ表示装置
JP4742487B2 (ja) * 2003-05-09 2011-08-10 セイコーエプソン株式会社 膜パターン形成方法

Also Published As

Publication number Publication date
JP2007059925A (ja) 2007-03-08

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