JP5146336B2 - Centering unit and load port - Google Patents

Description

  The present invention relates to a centering unit and a load port provided with a plurality of centering units.

  A conventional automatic warehouse has, for example, a pair of racks, a stacker crane, a warehouse station, and a warehouse station. The pair of racks are provided at a predetermined interval in the front-rear direction. The stacker crane is provided so as to be movable in the left-right direction between the front and rear racks. The warehousing station is arranged on the side of one rack. The delivery station is arranged on the side of the other rack. The rack has a large number of article storage shelves arranged vertically and horizontally. The stacker crane has a traveling carriage, a lifting platform that can be raised and lowered by a mast provided therein, and a load transfer device (for example, a slide fork that is slidable in the front-rear direction). doing. A slide fork is known that can move horizontally according to the transfer position (see, for example, Patent Document 1).

JP 2007-70006 A

  A load port is used for transporting the liquid crystal cassette. The load port has a mounting table on which the cassette is mounted from a transport vehicle such as a crane. When the transport vehicle places the cassette on the mounting table, the robot of the processing apparatus next carries the substrate from the cassette into the processing apparatus. After the processing, the robot carries the substrate into the cassette, and then the transport vehicle loads the cassette from the mounting table.

  The loading port mounting table is supported in a floating manner. The floating support structure is a support structure that enables the mounting table to move horizontally within a predetermined range when the positioning of the mounting table is released by the positioning mechanism. When the transport vehicle transfers the cassette, the positioning mechanism accurately positions the cassette between the transport vehicle and the mounting table.

  The positioning mechanism has a plurality of centering units. The centering unit holds the centering by means of a spring balance. Or the centering holding | maintenance by the taper structure of a receiving ball seat surface is performed.

  Further, when the robot removes or inserts the substrate from the cassette, the clamp device pinches the floating cassette. Thereby, the substrate can be accurately positioned with respect to the robot.

  In the above-described positioning mechanism, the centering accuracy and the repeatability are deteriorated due to the influence of the load load and the mounting level.

  An object of the present invention is to provide a centering device and a load port having a simple structure and high positioning accuracy.

A centering unit according to the present invention is a centering unit for centering a placed article, and includes a base member, an article placement table, a lifting device, and a centering mechanism. The base member includes a sliding plate on the upper surface. The article placement table is installed so as to be horizontally movable with respect to the base member. The article placement table is provided on a table having a flat upper surface, a sliding support member fixed to the lower part of the table and having a hole penetrating in the vertical direction at the center position, and an outer peripheral lower surface of the sliding support member. And a roller in contact with the sliding plate in a rotatable state. The lifting device is disposed below the table, passes through the hole of the sliding support member and has a tip positioned on the inner peripheral side of the sliding support member, and is disposed directly below the rod so that the rod extends in the vertical direction. And a cylinder body to be driven . The centering mechanism centers the table using a lifting device. The centering mechanism has a hole in the sliding support member and an engaging member that is fixed to the tip of the rod and can be engaged with the hole. The engaging member has a tapered outer peripheral surface disposed opposite to the tapered inner peripheral surface, and taper engagement is possible by the tapered inner peripheral surface and the tapered outer peripheral surface .
In this unit, the lifting device lowers the rod and the taper member, so that the engaging member is engaged with the hole of the table in the centering mechanism. Thereby, the table is positioned. Thus, since the table is positioned by the lifting device and the engaging member, a centering unit with a simple structure and high positioning accuracy is realized.
The hole may have a tapered inner peripheral surface that decreases in diameter as it goes downward, and the engaging member may have a tapered outer peripheral surface disposed to face the tapered inner peripheral surface.
In this unit, when the lifting device lowers the rod and the taper member, the taper outer peripheral surface of the engaging member is engaged with the taper inner peripheral surface of the table in the centering mechanism. Thereby, the table is positioned. Thus, since the table is positioned by the lifting device and the engaging member, a centering unit with a simple structure and high positioning accuracy is realized.

The centering unit may further include a positioning mechanism for positioning the table at an arbitrary position using the lifting device. The positioning mechanism has a lower surface provided on the table and a friction contact portion provided at the tip of the rod and capable of frictional contact with the lower surface. The rod moves to a first position where the taper outer peripheral surface engages with the taper inner peripheral surface, a second position where the friction contact portion engages with the lower surface, and a third position intermediate between the first position and the second position. Is possible.
In this unit, when the rod is moved to the second position, the friction contact portion frictionally contacts the lower surface of the table in the positioning mechanism, thereby positioning the table. In this way, the table can be positioned not only at a fixed position but also at an arbitrary position.

The load port according to the present invention includes a mounting table and a pusher device. The mounting table has a plurality of centering units. The pusher device positions the article on the table by pushing it from at least three sides.
In this load port, for example, when the transport vehicle transfers a cassette containing a glass substrate to and from the load port, the cassette is positioned by a mounting table having a plurality of centering units. Further, for example, when the robot takes out the glass substrate, the cassette is positioned by the pusher device. As described above, the cassette can be positioned at two positions, that is, the cassette transfer position and the substrate transfer position.

  The present invention provides a centering device and a load port with a simple structure and high positioning accuracy.

The partial front view of the automatic warehouse by which one Embodiment of this invention was employ | adopted. The schematic top view of a stacker crane, a load port, and a single wafer conveyance machine. The control block diagram of a load port. The top view of a centering unit. The partial sectional view of a centering unit (floating state). The partial cross section figure of a centering unit (positioning state). The flowchart which shows the conveyance control operation | movement of the cassette and board | substrate in a load port. The fragmentary top view (floating state) of the centering unit in 2nd Embodiment. The fragmentary top view (positioning state) of the centering unit in 2nd Embodiment. The fragmentary top view (brake state) of the centering unit in 2nd Embodiment.

(1) Automatic warehouse Hereinafter, the automatic warehouse 1 which concerns on this invention is demonstrated. FIG. 1 is a partial front view of the automatic warehouse 1. In this embodiment, the direction perpendicular to the plane of FIG. 1 is the conveyance direction of the automatic warehouse 1, and the left-right direction of FIG. 1 is the transfer direction of the automatic warehouse 1.

  The automatic warehouse 1 is mainly composed of a pair of racks 2 and a stacker crane 3 in a clean room.

The pair of racks 2 are arranged so as to sandwich a stacker crane passage 5 extending in a direction orthogonal to the paper surface (conveying direction) in FIG. The rack 2 has a large number of article storage shelves 2a that are constituted by columns and luggage support members.
A processing device 7 for performing various types of processing on the liquid crystal substrate is provided on the back surface of the article storage shelf 2a. The processing apparatus 7 may be a combination of a plurality of the same types or a combination of a plurality of different types.

The stacker crane 3 can transport the cassette C between the loading / unloading station (not shown) and the load port 20 of the processing device 7.
An upper guide rail 8 and a lower guide rail 9 are provided along the stacker crane passage 5, and the stacker crane 3 is guided so as to be movable in the transport direction. The stacker crane 3 includes a traveling carriage 11 and a transfer device 17 that is mounted on a mast 13 provided on the traveling carriage 11 so as to be movable up and down. The transfer device 17 includes a turning table 72, a scalar arm 73 provided on the upper portion thereof, and a hand 74. The transfer device 17 can transfer the cassette C and can reverse the direction of the cassette C, for example, by 180 degrees.

  The cassette C is temporarily stored in the article storage shelves 2 a of the rack 2 on both sides of the crane passage 5. In this state, the inside of the article storage shelf 2 a functions as the load port 20.

  A grating floor 21 is provided in the clean room. The grating floor 21 has an opening 23 for running the stacker crane 3.

  The processing apparatus 7 is provided with a single wafer transfer machine 25. The single wafer transporter 25 transports the glass substrate G between the cassette C placed on the load port 20 and the processing apparatus 7.

  A filter fan unit 27 is provided on the ceiling of the clean room. Clean air enters the rack 2 and the crane passage 5 from the filter fan unit 27. The airflow flows from the opening 23 to the floor, so that the dust generated from the stacker crane 3 is carried to the floor by the airflow.

(2) Load Port FIG. 2 is a schematic plan view of the stacker crane 3, the load port 20, and the single wafer transport machine 25. Hereinafter, the load port 20 will be described in detail.

  The load port 20 includes a mounting table 30 and a pair of pusher devices 35 arranged at opposite corners. The mounting table 30 includes four centering units 31 placed at four corners and a pair of floating tables 33 provided on the centering unit 31. As apparent from the drawing, the floating table 33 extends between the pair of centering units 31 so that lower portions on both sides of the cassette C are placed thereon.

  FIG. 3 is a control block diagram of the load port 20. The control unit 38 has a computer such as a CPU, a RAM, and a ROM. The control unit 38 is connected to the sensor 48, the air cylinder 49, and the pusher device 35. The sensor 48 is a device for detecting the presence or absence of the cassette C on the floating table 33 of the load port 20. The air cylinder 49 is a power source for performing various operations in the centering unit 31. The air cylinder 49 will be described later.

(3) Centering unit The centering unit 31 will be described with reference to FIGS. FIG. 4 is a plan view of the centering unit 31. FIG. 5 is a partial cross-sectional view of the centering unit 31 and shows a floating state. FIG. 6 is a partial sectional view of the centering unit 31 and shows a positioning state.

  The centering unit 31 mainly includes a stationary member 41, a movable table 47, and an air cylinder 49.

  The stationary member 41 includes a base member 50, a first fixing member 51, a second fixing member 52, and a sliding plate 54. The base member 50 is a plate-like member arranged horizontally. The first fixing member 51 is fixed to the upper surface of the base member 50. The 1st fixing member 51 has the disc part 51a and the cylindrical part 51b. The cylindrical portion 51b extends upward from the outer peripheral edge of the disc portion 51a. An annular sliding plate 54 is fixed on the upper surface of the disc portion 51a. The 2nd fixing member 52 is a cyclic | annular member, and is being fixed to the upper end of the cylindrical part 51b. The stationary member 41 further has a third fixing member 53. The third fixing member 53 is fitted into the hole 50a of the base member 50, the upper part is fixed to the base member 50, and the air cylinder 49 is fixed to the lower part.

  The movable table 47 includes a table 61 and a sliding support member 62. The table 61 has a circular flat upper surface 61a. The sliding support member 62 is a cylindrical member fixed to the lower portion of the table 61, and has a hole 62a penetrating in the vertical direction at the center position. The sliding support member 62 is disposed on the inner peripheral side of the cylindrical portion 51 b and the second fixing member 52. The sliding support member 62 has a main body 63, a plurality of rollers 64, and a tapered inner peripheral portion 65. The plurality of rollers 64 are provided on the lower surface on the outer peripheral side of the main body 63 and are in contact with the sliding plate 54 in a rotatable state. The diameter of the tapered inner peripheral surface 65a decreases as it goes downward in the hole 62a of the table 61. The upper cylindrical portion 67 of the sliding support member 62 is disposed on the inner peripheral side of the second fixing member 52 of the stationary member 41. A predetermined gap is secured between the outer peripheral surface of the upper cylindrical portion 67 and the inner peripheral surface of the second fixing member 52. Therefore, the movable table 47 can slide within a predetermined range with respect to the stationary member 41.

The air cylinder 49 has a main body 56 and a rod 57. The rod 57 extends through the hole 53 a of the third fixing member 53 and the hole 51 c of the first fixing member 51, and the tip is located on the inner peripheral side of the sliding support member 62.
The air cylinder 49 further has a taper member 58. The taper member 58 is fixed to the tip of the rod 57. The tapered outer peripheral surface 58 a of the taper member 58 is formed and arranged in a complementary manner to the tapered inner peripheral surface 65 a of the tapered inner peripheral portion 65 of the sliding support member 62. The taper engagement structure 68 is constituted by the taper member 58 and the sliding support member 62.

Hereinafter, two states in the taper engagement structure 68 will be described.
In the state shown in FIG. 5, the rod 57 extends upward, and the taper member 58 is separated from the taper inner peripheral portion 65 of the sliding support member 62. Therefore, the movable table 47 is in a floating state.
In the state shown in FIG. 6, the rod 57 is retracted downward, and the tapered member 58 is in contact with the tapered inner peripheral portion 65 of the sliding support member 62. Accordingly, the movable table 47 is positioned at a fixed position.

(4) Pusher Device The pusher device 35 is disposed so as to face each other at the two corners of the load port 20. The pusher device 35 includes an air cylinder 36 and a contact member 37. The air cylinder 36 has a main body 36a and a rod 36b. The contact member 37 is fixed to the tip of the rod 36b. The contact member 37 has a pair of contact portions 37a. The contact portion 37 a is configured to be able to contact both sides of the corner of the cassette C. In the state where the rod 36 b protrudes, the contact member 37 contacts the cassette C, and the cassette C is clamped by both the pusher devices 35. When the rod 36b is retracted, the contact member 37 is separated from the cassette C.

(5) Operation Procedure FIG. 7 is a flowchart showing the transfer control operation of the cassette C and the glass substrate G in the load port. More specifically, FIG. 7 illustrates a series of operations from when the stacker crane 3 unloads the cassette C to the load port 20 and then when the stacker crane 3 unloads the cassette C from the load port 20. It is a flowchart of.

  In step S <b> 1, the control unit 38 drives the air cylinder 49 to retract the rod 57. As a result, the centering unit 31 shifts from the state of FIG. 5 to the state of FIG. That is, the taper outer peripheral surface 58 a of the taper member 58 contacts the taper inner peripheral surface 65 a of the sliding support member 62. As a result, the sliding support member 62 and the table 61 are positioned at a position that is concentric with the rod 57 of the air cylinder 49. As a result, the floating table 33 is also fixed at a predetermined position.

  In step S <b> 2, the stacker crane 3 transfers the cassette C to the load port 20. The control unit 38 knows that the cassette C has been transferred to the load port 20 based on a detection signal from the sensor 48. Specifically, both ends of the cassette C are placed on the floating table 33.

  In step S3, the control unit 38 drives the air cylinder 49 to cause the rod 57 to protrude. Thereby, the centering unit 31 shifts from the state of FIG. 6 to the state of FIG. That is, the taper outer peripheral surface 58 a of the taper member 58 is separated from the taper inner peripheral surface 65 a of the sliding support member 62. As a result, the sliding support member 62 and the table 61 can float within a predetermined range with respect to the stationary member 41.

  In step S <b> 4, the control unit 38 drives the pusher device 35 to project the rod 36 b from the main body 36 a of the air cylinder 36. Then, the abutting member 37 is pressed so as to oppose both sides of the two corners of the cassette C. By being clamped in this way, the cassette C moves horizontally together with the floating table 33 and is positioned at a predetermined position. At this time, the cassette C does not slide with respect to the floating table 33.

  In step S <b> 5, the single wafer transfer machine 25 carries the glass substrates G from the inside of the cassette C in the load port 20 to the processing device 7 one by one. During this time, the control unit 38 keeps the pusher device 35 clamping the cassette C. In step S <b> 5, the single wafer transfer machine 25 may transfer the processed glass substrate G from the processing apparatus 7 into the cassette C in the load port 20.

  The above glass substrate loading may be performed on all the glass substrates G in the cassette C, or may be performed on a part of the glass substrates G.

  In step S <b> 6, the control unit 38 drives the pusher device 35 to pull the rod 36 b into the main body 36 a of the air cylinder 36. Then, the contact portion 37a is separated from the two corners of the cassette C. By being unclamped in this way, the cassette C can move horizontally together with the floating table 33.

  In step S <b> 7, the control unit 38 drives the air cylinder 49 to retract the rod 57. As a result, the centering unit 31 shifts from the state of FIG. 5 to the state of FIG. That is, the taper outer peripheral surface 58 a of the taper member 58 contacts the taper inner peripheral surface 65 a of the sliding support member 62. As a result, the sliding support member 62 and the table 61 are positioned at a position that is concentric with the rod 57 of the air cylinder 49. As a result, the floating table 33 is also fixed at a predetermined position.

  In step S <b> 8, the stacker crane 3 transfers the cassette C from the load port 20. Based on the detection signal from the sensor 48, the control unit 38 knows that the cassette C has been taken out from the load port 20.

  As described above, the floating table 33 is accurately positioned at a predetermined position by the operation of the centering unit 31 when the stacker crane 3 loads the cassette C onto the load port 20 and loads it from the load port 20. Therefore, the position of the cassette C placed thereon has not changed. As a result, the placement position of the cassette C is accurately maintained in the stacker crane 3 as well.

  In addition, the position of the cassette C is not changed by the clamp of the pusher device 35 when the single wafer transfer machine 25 unloads the glass substrate G from the load port 20 or loads it. Therefore, the operation of the single wafer transport machine 25 is reliably performed.

  Further, in the above operation, the positioning and release of the table can be determined from the switch signal of the air cylinder. Therefore, stable cargo receiving and delivery are possible.

(6) Second Embodiment The centering unit 81 will be described with reference to FIGS. FIG. 8 is a partial plan view (floating state) of the centering unit 81 in the second embodiment. FIG. 9 is a partial plan view (positioning state) of the centering unit in the second embodiment. FIG. 10 is a partial plan view of the centering unit in the second embodiment (brake state). It is.

  The basic structure of the centering unit 81 is the same as that of the above embodiment. Therefore, the description of the same structure is omitted or simplified.

  A friction engagement portion 82 is provided on the upper portion of the taper member 58. The friction engagement portion 82 is made of, for example, resin, and the upper surface is a friction surface 82a. The friction surface 82 a faces the lower surface 61 b of the table 61. The friction surface 82a and the lower surface 61b are flat surfaces extending in the horizontal direction. A brake structure 69 is configured by the friction engagement portion 82 and the lower surface 61 b of the table 61.

  A plate 83 is fixed to the rod 57. The plate 83 is disposed in the third fixing member 53. A spring 84 for supporting the plate 83 from above and below is disposed in the third fixing member 53.

  FIG. 8 shows a state in which the rod 57 is in the intermediate position. In this state, no driving force is provided to the air cylinder 49, and the rod 57 is positioned by the spring 84. In this state, the taper member 58 is separated from the taper inner peripheral portion 65 of the sliding support member 62. Further, the friction surface 82 a of the friction engagement portion 82 is separated from the lower surface 61 b of the table 61. Therefore, the movable table 47 is in a floating state.

  In the state shown in FIG. 9, the rod 57 is retracted downward, and the tapered member 58 is in contact with the tapered inner peripheral portion 65 of the sliding support member 62. Therefore, the movable table 47 is positioned at a fixed position.

  In the brake structure 69, in the state shown in FIG. 10, the rod 57 extends upward, and the tapered member 58 is separated from the tapered inner peripheral portion 65 of the sliding support member 62. However, the friction surface 82 a of the friction engagement portion 82 is in contact with the lower surface 61 b of the table 61. Therefore, the movable table 47 is positioned at an arbitrary position.

  In this embodiment, as described above, the rod 57 can be moved to three places, and thereby the state of the movable table 47 can be changed.

  In FIG. 10, the friction engagement portion 82 positions the table 61 that is in an arbitrary position in the floating state. This is used, for example, when the cassette C is to be loaded from the load port 20 by the stacker crane 3 at a position where the cassette C is clamped by the pusher device 35. In addition, instability of the position of the cassette C can be prevented by performing frictional engagement by the frictional engagement portion 82 between the positioning of the cassette C by the centering unit 31 and the positioning of the cassette C by the pusher device 35.

(7) Features The centering unit 31 is a centering unit for centering the placed article, and includes a stationary member 41, a table 61, an air cylinder 49, and a taper engagement structure 68. The table 61 is installed so as to be horizontally movable with respect to the stationary member 41. The air cylinder 49 is disposed below the table 61 and has a rod 57. The taper engagement structure 68 centers the table 61 using the rod 57. The taper engagement structure 68 has a hole 62 a and a taper member 58. The hole 62 a passes through the table 61 in the up-down direction. The taper member 58 is fixed to the tip of the rod 57 and can be engaged with the hole 62a. In the taper engagement structure 68, taper engagement by at least one taper surface is possible. The hole 62a has a tapered inner peripheral surface 65a whose diameter decreases as it goes downward, and the taper member 58 has a tapered outer peripheral surface 58a disposed to face the tapered inner peripheral surface 65a. ing.
In this unit, the air cylinder 49 pulls the rod 57 and the taper member 58, whereby the taper outer peripheral surface 58 a of the taper member 58 is engaged with the taper inner peripheral surface 65 a of the table 61 in the taper engagement structure 68. Thereby, the table 61 is positioned. Thus, since the table 61 is positioned by the air cylinder 49 and the taper member 58, the centering unit 31 having a simple structure and high positioning accuracy is realized.

The centering unit 31 further includes a brake structure 69 for positioning the floating table 33 at an arbitrary position using the air cylinder 49. The brake structure 69 has a lower surface 61b provided on the table 61 and a friction engagement portion 82 provided at the tip of the rod 57 and engageable with the lower surface 61b. The rod 57 includes a first position where the taper outer peripheral surface 58a engages with the taper inner peripheral surface 65a, a second position where the friction engagement portion 82 engages with the lower surface 61b, and an intermediate position between the first position and the second position. It can be moved to the third position.
In this unit, when the rod 57 moves to the second position, the friction engagement portion 82 of the rod 57 engages with the lower surface 61b of the table 61 in the brake structure 69, thereby positioning the table 61. In this way, the table 61 can be positioned not only at a fixed position but also at an arbitrary position.

The load port 20 includes a mounting table 30 and a pusher device 35. The mounting table 30 has a centering unit 31. The pusher device 35 positions the cassette C on the table 61 by pushing it from at least three directions.
In the load port 20, when the stacker crane 3 transfers to and from the load port 20, the cassette C is positioned by the mounting table 30 having a plurality of centering units 31. Further, when the single wafer transport machine 25 takes out the glass substrate G, the pusher device 35 positions the cassette C. As described above, the cassette C can be positioned at two positions, that is, the cassette transfer position and the substrate transfer position.

(8) Other Embodiments Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications can be made without departing from the scope of the invention.
In the above embodiment, the taper engagement structure performs the taper engagement by bringing the two taper surfaces into contact with each other, but the taper surface may be provided only on one member.

  In this embodiment, a stacker crane is used as the transfer device, but another transfer vehicle may be used.

  In the above embodiment, the automatic warehouse is provided in a clean room such as a semiconductor factory or a liquid crystal display factory. Or you may provide in places other than clean rooms, such as machining and an assembly.

  In the above embodiment, an open rack is used. However, a closed rack may be used to open a door at the time of delivery of an article to and from a stacker crane.

  The present invention is widely applicable to centering devices and load ports.

DESCRIPTION OF SYMBOLS 1 Automatic warehouse 2 Rack 2a Goods storage shelf 3 Stacker crane 5 Crane passage 7 Processing device 8 Upper guide rail 9 Lower guide rail 11 Traveling carriage 13 Mast 17 Transfer device 20 Load port 21 Grating floor 23 Opening 25 Single wafer transfer machine 27 Filter fan unit 30 Mounting table 31 Centering unit 33 Floating table 35 Pusher device 36 Air cylinder 36a Main body 36b Rod 37 Contact member 37a Contact portion 38 Control unit 41 Stationary member 47 Movable table 48 Sensor 49 Air cylinder (elevating device)
50 Base member 50a Hole 51 First fixing member 51a Disk portion 51b Cylindrical portion 51c Hole 52 Second fixing member 53 Third fixing member 53a Hole 54 Sliding plate 56 Main body 57 Rod 58 Taper member (engaging member)
58a Tapered outer peripheral surface 61 Table (article placement table)
61a Upper surface 61b Lower surface 62 Sliding support member 62a Hole 63 Main body 64 Roller 65 Tapered inner peripheral portion 65a Tapered inner peripheral surface 67 Upper cylindrical portion 68 Taper engagement structure (centering mechanism)
69 Brake structure (positioning mechanism)
72 Swivel table 73 Scalar arm 74 Hand 81 Centering unit 82 Friction engagement part 82a Friction surface 83 Plate 84 Spring C Cassette G Glass substrate

Claims (3)

A centering unit for centering a placed article,
A base member having a sliding plate on the upper surface ;
A table that has a flat upper surface, a sliding support member that is fixed to the lower part of the table and that has a hole penetrating in the vertical direction at the center position, and is provided on the lower surface of the outer peripheral side of the sliding support member and is rotatable And an article placement table installed so as to be horizontally movable with respect to the base member.
There is a rod that penetrates the hole of the sliding support member and has a tip positioned on the inner peripheral side of the sliding support member, and a cylinder body that is disposed directly below the rod and drives the rod in the vertical direction. and a Ru temperature descending device is arranged below the table,
A centering mechanism for centering the article placement table using the lifting device,
The centering mechanism includes a hole of the sliding support member and an engaging member that is fixed to a tip of the rod and engageable with the hole, and the diameter of the hole decreases downward. The taper has a tapered inner peripheral surface, and the engaging member has a tapered outer peripheral surface disposed to face the tapered inner peripheral surface, and the taper inner surface and the taper outer peripheral surface are capable of taper engagement. is there,
Centering unit. A positioning mechanism for positioning the table at an arbitrary position using the lifting device;
The positioning mechanism includes a lower surface provided on the table and a friction contact portion provided at a tip of the rod and capable of frictional contact with the lower surface.
The rod includes a first position where the tapered outer peripheral surface engages with the tapered inner peripheral surface, a second position where the friction contact portion engages with the lower surface, and an intermediate position between the first position and the second position. The centering unit according to claim 1, wherein the centering unit is movable to the third position. A mounting table having a plurality of centering units according to claim 1 or 2 ,
A pusher device for positioning the article on the table by pushing from at least three sides;
With load port.

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