CN215375125U

CN215375125U - Detection device

Info

Publication number: CN215375125U
Application number: CN202121181284.0U
Authority: CN
Inventors: 廖玉尚; 潘成龙
Original assignee: Dongguan Shengxiang Precision Metal Co Ltd
Current assignee: Dongguan Shengxiang Precision Metal Co Ltd
Priority date: 2021-05-28
Filing date: 2021-05-28
Publication date: 2021-12-31
Anticipated expiration: 2031-05-28

Abstract

The application discloses check out test set relates to in wafer detection technical field, and check out test set is used for detecting the wafer. The detection device comprises a detection part, a bearing part and a driving part; the detection device comprises a detection part, a bearing part and a driving part; the detection component is used for detecting the wafer; the bearing component is used for bearing the wafer disc, and the wafer disc is provided with a plurality of wafers distributed in an array mode along a first direction and a second direction; the driving part comprises a first driving device and a second driving device; the first driving device is connected with the bearing part and is used for driving the bearing part to move along a first direction; the first driving device is connected with the second driving device, and the second driving device is used for driving the first driving device and the bearing part to move along the second direction. The bearing part is moved in a stepping mode through the first driving device and the second driving device, so that the detection part can be over against each detected wafer, and the wafer detection efficiency is improved.

Description

Detection device

Technical Field

The utility model relates to the technical field of wafer testing, in particular to detection equipment.

Background

The wafer refers to a silicon wafer used for manufacturing a silicon semiconductor circuit, and various chips can be manufactured on the wafer, so that the wafer becomes a product with a specific function.

In the processing process of the wafer, a plurality of wafers on the wafer disc are generally arranged side by side in parallel and are uniformly distributed, the plurality of wafers form a circle, a general wafer testing machine station detects the next wafer by rotating the wafer disc, the detection equipment is difficult to face the wafer after the wafer disc rotates, so that part of the area of the wafer may be out of the detectable range of the detection equipment, and at the moment, the wafer to be detected needs to be subjected to position adjustment by moving the wafer disc, so that the work efficiency of detecting the wafer is reduced.

SUMMERY OF THE UTILITY MODEL

The present application is directed to solving at least one of the problems in the prior art. Therefore, the utility model provides the detection equipment, the bearing part is moved in a stepping manner through the first driving device and the second driving device, so that the detection part can be over against each detected wafer, and the wafer detection efficiency is improved.

The detection device according to the application comprises: a detection component for detecting the wafer; the wafer carrying device comprises a carrying component, a first fixing component and a second fixing component, wherein the carrying component is used for carrying a wafer disc, and the wafer disc is provided with a plurality of wafers distributed in an array mode along a first direction and a second direction; the driving part comprises a first driving device and a second driving device; the first driving device is connected with the bearing part and is used for driving the bearing part to move along a first direction; the first driving device is connected with the second driving device, and the second driving device is used for driving the first driving device and the bearing part to move along a second direction.

According to the detection device of the embodiment of the application, at least the following beneficial effects are achieved:

the wafer on the wafer disc is distributed in an array mode along a first direction and a second direction, after the detection part is opposite to one wafer on the wafer disc and the wafer is detected, the first driving device drives the bearing part to move along the first direction, the detection part can be continuously opposite to other wafers in the first direction, and the second driving device drives the first driving device to move so as to drive the bearing part to move along the second direction, so that the detection part can be continuously opposite to other wafers in the second direction; in the working process of the detection equipment, the bearing part is moved through the first driving device and the second driving device, the wafer disc is moved to the test range of the detection part, so that the detection part is opposite to and detects one of the wafers at the edge of the wafer disc, and the bearing part is moved in a stepping mode through the first driving device and the second driving device, so that the detection part can be opposite to each detected wafer, partial area of each wafer is prevented from being located outside the detectable range of the detection part, and the wafer detection efficiency is improved.

According to some embodiments of the present application, the carrier includes a carrier platform, and the carrier carries the wafer disk through the carrier platform; the bearing platform is provided with a plurality of first limiting pieces; the first limiting piece is used for abutting against the side face of the wafer disc to fix the position of the wafer disc.

According to some embodiments of the present application, the bearing platform is further provided with a second limiting member, and the second limiting member is connected to the bearing platform; the wafer disc is provided with a limiting opening, and the second limiting part is used for being matched with the limiting opening.

According to some embodiments of the present application, the carrier further includes a support frame and a conveying device, and the conveying device is disposed on the support frame; the conveying device is connected with the bearing platform and can move the bearing platform.

According to some embodiments of the present application, the conveying device includes a conveying carrier tape and a driving motor, wherein the conveying carrier tape is used for carrying the carrying platform; the driving motor is used for driving the conveying carrier tape to move the bearing platform.

According to some embodiments of the present application, the detection apparatus further comprises a clamping member, the clamping member comprising a first stop assembly and a second stop assembly; the first limiting assembly comprises a first limiting block and a first limiting driving device, the first limiting block is connected with the first limiting driving device, and the first limiting driving device is arranged on the supporting frame; the first limiting driving device can push the first limiting block to abut against the bottom surface and the side surface of the bearing platform; the second limiting assembly comprises a second limiting block and a second limiting driving device, the second limiting block is connected with the second limiting driving device, and the second limiting driving device is arranged on the supporting frame; the second limiting driving device can push the second limiting block to abut against the top surface of the bearing platform.

According to some embodiments of the present application, the first driving device includes a first guiding rail, a first moving block, and a first motor, and the first guiding rail extends along a first direction; one end face of the first moving block is connected with the supporting frame, and the other end face of the first moving block is connected with the first guide rail in a sliding mode; the first motor is used for driving the first moving block to move along the first guide rail; the second driving device comprises a second guide rail, a second moving block and a second motor, and the second guide rail extends along a second direction; one end face of the second moving block is connected with the first guide rail, and the other end face of the second moving block is connected with the second guide rail in a sliding manner; the second motor is used for driving the second moving block to move along the second guide rail.

According to some embodiments of the application, the first rail and the second rail are arranged perpendicular to each other.

According to some embodiments of the present application, the detecting component includes a camera module and a light source module, and the camera module and the light source module are disposed opposite to each other; the camera module is arranged at the top of the bearing platform, and the light source module is arranged between the camera module and the bearing platform.

According to some embodiments of the present application, the detecting apparatus further includes a base, and the detecting member and the second guide rail are disposed on the base.

Additional aspects and advantages of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.

Drawings

The above and additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

FIG. 1 is a schematic structural view of a detection apparatus of the present invention;

FIG. 2 is a schematic structural diagram of a detecting part, a bearing part, a supporting part, a driving part and a base of the detecting device of the present invention;

FIG. 3 is a schematic structural diagram of a base and a driving part of the detecting apparatus of the present invention;

fig. 4 is a schematic structural diagram of a base, a second guide rail, a second moving block and a second motor of the detection device of the present invention.

Reference numerals:

a detection part 100; a camera module 110; a light source module 120; a fixed bracket 130; a carrier member 200; a limiting opening 210; a load-bearing platform 220; a first stopper 221; a second stopper 222; a support frame 230; a bottom plate 231; a side plate 232; a carrier tape 240; a driving part 300; a first driving device 310; a first guide rail 311; a first moving block 312; a first electric motor 313; a second driving device 320; the second guide rail 321; a second moving block 322; a second motor 323; a first stop assembly 400; a first limit drive 410; a first stopper 420; a second stop assembly 500; a second limit drive 510; a second stopper 520; a base 600; a wafer disk 700; wafer 710.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.

In the description of the present invention, it should be understood that the orientation or positional relationship referred to in the description of the orientation, such as the upper, lower, left, right, front, rear, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.

In the description of the present invention, if there are first and second described only for the purpose of distinguishing technical features, it is not understood that relative importance is indicated or implied or that the number of indicated technical features or the precedence of the indicated technical features is implicitly indicated or implied.

In the description of the present invention, unless otherwise explicitly limited, terms such as arrangement, installation, connection and the like should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present invention in combination with the specific contents of the technical solutions.

A detection apparatus according to an embodiment of the present application is described below with reference to fig. 1 to 4.

According to the inspection apparatus of the embodiment of the present application, the inspection apparatus is used for inspecting the wafer 710. The detection device comprises a detection part 100, a bearing part 200 and a driving part 300; the inspection part 100 is used for inspecting the wafer 710; the carrier 200 is used for carrying a wafer disc 700, and the wafer disc 700 is provided with a plurality of wafers 710 distributed in an array along a first direction and a second direction; the driving part 300 includes a first driving device 310 and a second driving device 320; the first driving device 310 is connected with the bearing component 200, and the first driving device 310 is used for driving the bearing component 200 to move along a first direction; the first driving device 310 is connected to the second driving device 320, and the second driving device 320 is used for driving the first driving device 310 together with the carrying member 200 to move along the second direction.

The wafers 710 on the wafer disc 700 are distributed in an array along a first direction and a second direction, after the detection component 100 is over against one wafer 710 on the wafer disc 700 and the detection of the wafer 710 is completed, the first driving device 310 drives the carrying component 200 to move along the first direction, so that the detection component 100 can be over against other wafers 710 in the first direction, and the second driving device 320 drives the first driving device 310 to move so as to drive the carrying component 200 to move along the second direction, so that the detection component 100 can be over against other wafers 710 in the second direction; during the operation of the detection apparatus, the carrier 200 is moved by the first driving device 310 and the second driving device 320, the wafer disc 700 is moved into the detection range of the detection component 100, so that the detection component 100 faces and detects one of the wafers 710 located at the edge of the wafer disc 700, and the carrier 200 is moved by the first driving device 310 and the second driving device 320 in a stepping manner, so that the detection component 100 can face each detected wafer 710, thereby preventing a part of the area of the wafer 710 from being located outside the detectable range of the detection component 100, and improving the efficiency of detecting the wafer 710.

Referring to fig. 1, in some embodiments of the present application, the carrier 200 includes a carrier platform 220, and the carrier 200 carries a wafer disc 700 through the carrier platform 220; the bearing platform 220 is provided with a plurality of first limiting members 221; the first position-limiting member 221 is used to abut against a side surface of the wafer plate 700 to fix the position of the wafer plate 700.

The wafer plate 700 is disposed on the top of the supporting platform 220, the first position-limiting member 221 is disposed on the supporting platform 220, the first position-limiting member 221 abuts against a side surface of the wafer plate 700, and the first position-limiting member 221 is used for limiting a position of the wafer plate 700 relative to the supporting platform 220, so as to prevent the wafer plate 700 from moving during a movement process of the supporting member 200.

Specifically, four first limiting members 221 are provided, the four first limiting members 221 are respectively abutted against the side edges of the wafer tray 700, and the first limiting members 221 are opposite to each other in pairs; wherein, two adjacent first locating parts 221 are fixedly connected to the bearing platform 220, and the other two adjacent first locating parts 221 are magnets, and the magnets are detachably disposed on the bearing platform 220 through magnetic force, so that the bearing platform 220 is convenient to mount and dismount.

Referring to fig. 1, in some embodiments of the present disclosure, the supporting platform 220 is further provided with a second limiting member 222, and the second limiting member 222 is connected to the supporting platform 220; the wafer plate 700 is provided with a position-limiting opening 210, and the second position-limiting member 222 is used for matching with the position-limiting opening 210.

The second position-limiting member 222 is disposed on the supporting platform 220, the wafer plate 700 is provided with a position-limiting opening 210, the second position-limiting member 222 is located at the position-limiting opening 210 and is abutted against the wafer plate 700, and the second position-limiting member 222 is used for limiting the position of the wafer plate 700 relative to the supporting platform 220; two limiting ports 210 on the wafer plate 700 are symmetrically arranged, and when the wafer 710 is placed on the front surface or the back surface of the wafer plate 700, the second limiting members 222 can be arranged in the limiting ports 210 of the wafer plate 700 and abut against the wafer plate 700.

Specifically, the second limiting member 222 is a fixing bolt, a threaded hole adapted to the fixing bolt is formed in the bearing platform 220, and the fixing bolt penetrates through the threaded hole and is in threaded connection with the threaded hole, so that the stability of connection between the second limiting member 222 and the bearing platform 220 is improved, and meanwhile, the second limiting member 222 and the bearing platform 220 are convenient to install and disassemble.

Referring to fig. 1 and 2, in some embodiments of the present application, the carrier 200 further includes a supporting frame 230 and a conveying device, wherein the conveying device is disposed on the supporting frame 230; the conveyor is connected to the platform 220, and the conveyor can move the platform 220.

The conveying device is provided with a support frame 230, the support frame 230 is arranged on the top of the first driving device 310 and connected with the first driving device 310; the conveying device is used for moving the carrying platform 220, so that the carrying platform 220 is moved from the feeding station to the detection station; specifically, the supporting frame 230 includes a bottom plate 231 and two side plates 232, the two side plates 232 are disposed on the bottom plate 231 and are disposed oppositely, the bearing platform 220 is abutted to the two side plates 232, the bearing platform 220 is prevented from dropping from two sides in the process that the conveying device moves the bearing platform 220, and the conveying device is ensured to be capable of stably moving the bearing platform 220.

Referring to fig. 1 and 2, in some embodiments of the present application, the conveying device includes a conveying belt 240 and a driving motor, the conveying belt 240 is used for carrying the carrier platform 220; the driving motor is used to drive the transport tape 240 to move the carrier stage 220.

The supporting frame 230 comprises a bottom plate 231 and two side plates 232, the two side plates 232 are arranged on the bottom plate 231 and are oppositely arranged, the two conveying carrier tapes 240 are arranged on the two side plates 232 and are respectively arranged on the two side plates 232, and the two conveying carrier tapes 240 are oppositely arranged so as to keep the bearing platform 220 on the conveying carrier tapes 240 horizontal; the conveying carrier tape 240 is used for bearing the bearing platform 220, and the driving motor can drive the conveying carrier tape 240 to move so as to move the bearing platform 220 and move the bearing platform 220 from the feeding station to the detection station, so that the feeding of an operator is facilitated; wherein, the carrier tape 240 extends along the second direction, and the loading station and the detecting station are arranged in sequence along the moving direction of the carrier tape 240.

Referring to fig. 1 and 2, in some embodiments of the present application, the detection apparatus further comprises a clamping member comprising a first stop assembly 400 and a second stop assembly 500; the first limiting assembly 400 comprises a first limiting block 420 and a first limiting driving device 410, the first limiting block 420 is connected with the first limiting driving device 410, and the first limiting driving device 410 is arranged on the supporting frame 230; the first limiting driving device 410 can push the first limiting block 420 to abut against the bottom surface and the side surface of the bearing platform 220; the second limiting assembly 500 comprises a second limiting block 520 and a second limiting driving device 510, the second limiting block 520 is connected with the second limiting driving device 510, and the second limiting driving device 510 is arranged on the supporting frame 230; the second limiting driving device 510 can drive the second limiting block 520 to abut against the top surface of the bearing platform 220.

The first limiting assembly 400 comprises a first limiting block 420 and a first limiting driving device 410, the first limiting driving device 410 is connected with the first limiting block 420, and the first limiting driving device 410 is arranged at the bottom of the bearing platform 220; the first limiting block 420 is bent, and the first limiting driving device 410 pushes the first limiting block 420 upwards, so that the first limiting block 420 abuts against the bottom surface and the side surface of the bearing platform 220; specifically, two first limiting assemblies 400 are provided, and the two first limiting assemblies 400 can be respectively abutted against two opposite side surfaces of the bearing platform 220 to fix the position of the bearing platform 220; the second limiting assembly 500 comprises a second limiting block 520 and a second limiting driving device 510, the second limiting block 520 is connected with the second limiting driving device 510, the second limiting block 520 is disposed on the top of the bearing platform 220, and the second limiting driving device 510 pulls the second limiting block 520 downwards, so that the second limiting block 520 abuts against the top surface of the bearing platform 220 to limit the position of the bearing platform 220; specifically, two second limiting assemblies 500 are provided to further fix the position of the bearing platform 220; wherein the first limit driving device 410 is a first limit cylinder, and the second limit driving device 510 is a second limit cylinder; the second limiting block 520 is matched with the first limiting block 420 and can limit the height of the bearing platform 220; according to a specific situation, the first limiting component 400 and the second limiting component 500 can be provided in plurality, and the first limiting block 420 and the second limiting block 520 can also be provided in plurality.

After the carrier tape 240 is transported to the detection station from the loading station, the first limiting cylinder drives the first limiting block 420, so that the first limiting block 420 abuts against the bottom surface and the side surface of the carrier platform 220 located at the detection station and lifts the carrier platform 220, the second limiting cylinder drives the second limiting block 520, so that the second limiting block 520 abuts against the top surface of the carrier platform 220 located at the detection station and presses down the carrier platform 220, and the first limiting block 420 and the second limiting block 520 fix the position of the carrier platform 220 together.

Referring to fig. 1, 3 and 4, in some embodiments of the present application, the first driving device 310 includes a first guide rail 311, a first moving block 312 and a first motor 313, wherein the first guide rail 311 extends along a first direction; one end face of the first moving block 312 is connected to the supporting frame 230, and the other end face of the first moving block 312 is slidably connected to the first guide rail 311; the first motor 313 is used for driving the first moving block 312 to move along the first guide rail 311; the second driving device 320 includes a second guiding rail 321, a second moving block 322 and a second motor 323, wherein the second guiding rail 321 extends along the second direction; one end face of the second moving block 322 is connected to the first guide rail 311, and the other end face of the second moving block 322 is slidably connected to the second guide rail 321; the second motor 323 is used for driving the second moving block 322 to move along the second guiding rail 321

The first guide rail 311 extends along a first direction, the first moving block 312 is disposed between the first guide rail 311 and the supporting frame 230, and the first moving block 312 is connected with the first guide rail 311 and the supporting frame 230; the first motor 313 drives the first moving block 312 to move along the first guide rail 311, and the supporting frame 230 slides on the first guide rail 311 through the first moving block 312 to drive the carrying platform 220 and the wafer tray 700 to move along the first direction, so that the detecting component 100 can face and detect the wafers 710 arranged on the wafer tray 700 along the first direction one by one.

The second guide rail 321 extends along the second direction, the second moving block 322 is disposed between the first guide rail 311 and the second guide rail 321, and the first guide rail 311 slides on the second guide rail 321 through the second moving block 322, so that the first guide rail 311 can drive the bearing platform 220 and the wafer tray 700 to move along the second direction, and the detecting component 100 can face and detect the wafers 710 disposed on the wafer tray 700 along the second direction one by one.

Referring to fig. 3 and 4, in some embodiments of the present application, the first guide rail 311 and the second guide rail 321 are disposed perpendicular to each other.

The first guide rail 311 extends along a first direction, the second guide rail 321 extends along a second direction, and the first guide rail 311 and the second guide rail 321 are perpendicular to each other, so that the sliding directions of the first driving device 310 and the carrying platform 220 are defined to be perpendicular to each other for detecting the wafers 710 arranged side by side and in parallel on the wafer plate 700.

Referring to fig. 1, in some embodiments of the present disclosure, the detecting component 100 includes a camera module 110 and a light source module 120, where the camera module 110 and the light source module 120 are disposed opposite to each other; the camera module 110 is disposed on the top of the supporting platform 220, and the light source module 120 is disposed between the camera module 110 and the supporting platform 220.

The inspection part 100 includes a camera module 110, the camera module 110 is disposed on the top of the platform 220, and the inspection part 100 inspects the wafer 710 through the camera module 110; the detecting component 100 further includes a light source module 120, the light source module 120 is disposed between the supporting platform 220 and the camera module 110, and the light source module 120 is used for providing a light source for the camera module 110, so that the camera module 110 can detect the wafer 710 more accurately, and the wafer 710 is prevented from being mistakenly detected by the camera module 110 due to insufficient light; specifically, the inspection device 100 further includes a fixing bracket 130, wherein the fixing bracket 130 is used to fix the camera module 110 and the light source module 120 on the top of the supporting platform 220, and fix the positions of the camera module 110 and the light source module 120, so as to prevent the camera module 110 from being unable to inspect the wafer 710 normally due to the deviation of the position of the camera module 110.

Referring to fig. 1 and 4, in some embodiments of the present application, the detecting apparatus further includes a base 600, and the detecting member 100 and the second guiding rail 321 are disposed on the base 600.

The base 600 is used for carrying the detecting member 100 and the driving member 300, wherein the second guide rail 321 of the driving member 300 is disposed on the base 600, and the fixing bracket 130 of the detecting member 100 is disposed on the base 600.

In the description herein, references to the description of "one embodiment," "some embodiments," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

While embodiments of the present application have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the application, the scope of which is defined by the claims and their equivalents.

Claims

1. Detection equipment for detecting wafer, its characterized in that includes:

a detection component for detecting the wafer;

the wafer carrying device comprises a carrying component, a first fixing component and a second fixing component, wherein the carrying component is used for carrying a wafer disc, and the wafer disc is provided with a plurality of wafers distributed in an array mode along a first direction and a second direction;

the driving part comprises a first driving device and a second driving device; the first driving device is connected with the bearing part and is used for driving the bearing part to move along a first direction; the first driving device is connected with the second driving device, and the second driving device is used for driving the first driving device and the bearing part to move along a second direction.

2. The detection apparatus according to claim 1, wherein the carrier comprises a carrier platform, and the carrier carries the wafer disk through the carrier platform; the bearing platform is provided with a plurality of first limiting pieces; the first limiting piece is used for abutting against the side face of the wafer disc to fix the position of the wafer disc.

3. The inspection apparatus of claim 2, wherein the carrying platform is further provided with a second limiting member, and the second limiting member is connected to the carrying platform; the wafer disc is provided with a limiting opening, and the second limiting part is used for being matched with the limiting opening.

4. The detection apparatus according to claim 2, wherein the carrying member further comprises a supporting frame and a conveying device, and the conveying device is disposed on the supporting frame; the conveying device is connected with the bearing platform and can move the bearing platform.

5. The detection apparatus according to claim 4, wherein the transport device comprises a transport carrier tape and a driving motor, the transport carrier tape is used for carrying the carrying platform; the driving motor is used for driving the conveying carrier tape to move the bearing platform.

6. The detection device according to claim 4, wherein the detection device further comprises a clamping member, and the clamping member comprises a first limiting component and a second limiting component; the first limiting assembly comprises a first limiting block and a first limiting driving device, the first limiting block is connected with the first limiting driving device, and the first limiting driving device is arranged on the supporting frame; the first limiting driving device can push the first limiting block to abut against the bottom surface and the side surface of the bearing platform; the second limiting assembly comprises a second limiting block and a second limiting driving device, the second limiting block is connected with the second limiting driving device, and the second limiting driving device is arranged on the supporting frame; the second limiting driving device can push the second limiting block to abut against the top surface of the bearing platform.

7. The detecting device according to claim 4, wherein the first driving means includes a first guide rail, a first moving block and a first motor, the first guide rail extending along a first direction; one end face of the first moving block is connected with the supporting frame, and the other end face of the first moving block is connected with the first guide rail in a sliding mode; the first motor is used for driving the first moving block to move along the first guide rail; the second driving device comprises a second guide rail, a second moving block and a second motor, and the second guide rail extends along a second direction; one end face of the second moving block is connected with the first guide rail, and the other end face of the second moving block is connected with the second guide rail in a sliding manner; the second motor is used for driving the second moving block to move along the second guide rail.

8. The inspection apparatus of claim 7, wherein the first rail and the second rail are disposed perpendicular to each other.

9. The detection device according to claim 1, wherein the detection component comprises a camera module and a light source module, and the camera module and the light source module are arranged oppositely; the camera module is arranged at the top of the bearing platform, and the light source module is arranged between the camera module and the bearing platform.

10. The detecting apparatus according to claim 1, further comprising a base, wherein the detecting member and the second guiding rail are disposed on the base.