CN112928051A - Workpiece conveying device - Google Patents
Workpiece conveying device Download PDFInfo
- Publication number
- CN112928051A CN112928051A CN202110126829.6A CN202110126829A CN112928051A CN 112928051 A CN112928051 A CN 112928051A CN 202110126829 A CN202110126829 A CN 202110126829A CN 112928051 A CN112928051 A CN 112928051A
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- Prior art keywords
- workpiece
- detection optical
- optical fiber
- conveying
- belt
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Abstract
The invention discloses a workpiece conveying device, comprising: workpiece handling device, workpiece handling device is used for carrying the work piece along x to the motion, and workpiece handling device includes: two transport assemblies symmetrically arranged about the xz plane; the detection optical fibers are arranged on the first conveying assembly and the second conveying assembly and used for detecting the conveying state of the workpiece; the workpiece carrier plate is arranged on the two conveying assemblies, and the workpiece carrier plate bears a workpiece. The invention has simple structure, and the plurality of detection optical fibers are arranged on the workpiece conveying path, so that the workpiece conveying position is detected on one hand, the positioning is convenient, and the workpiece state is detected on the other hand, thereby avoiding the waste of processing resources and processing time caused by poor workpiece state, further improving the production efficiency, reducing the processing cost, reducing the subsequent detection work and improving the final yield.
Description
Technical Field
The invention belongs to the technical field of chip conveying, and particularly relates to a workpiece conveying device.
Background
The chip is very easily influenced by various environmental factors when being conveyed among various working procedures due to small volume and light weight, so that the state of the chip is not in accordance with the processing requirement, the state of the chip can not be detected when the chip is conveyed in the prior art, the damaged chip is processed, resources are wasted, and the manufacturing cost is higher.
Disclosure of Invention
The present invention is directed to solving at least one of the problems of the prior art.
Therefore, the invention provides a workpiece conveying device which has the advantages that the workpiece conveying device can carry out detection before and after one machining process, and the damage to the workpiece caused by the machining of the workpiece in a bad state is avoided.
According to the embodiment of the invention, the workpiece conveying device comprises: a workpiece handling apparatus for conveying a workpiece for movement in an x-direction, the workpiece handling apparatus comprising: two transport assemblies symmetrically arranged about an xz plane; the detection optical fibers are arranged on the first conveying assembly and the second conveying assembly and used for detecting the conveying state of the workpieces; and the workpiece support plate is arranged on the two conveying assemblies, and a workpiece is loaded on the workpiece support plate.
The invention has the beneficial effects that the structure is simple, the plurality of detection optical fibers are arranged on the workpiece conveying path, on one hand, the workpiece conveying position is detected, the positioning is convenient, on the other hand, the workpiece state is detected, the waste of processing resources and processing time caused by poor workpiece state is avoided, the production efficiency is further improved, the processing cost is reduced, the subsequent detection work is reduced, and the final yield is improved.
According to one embodiment of the invention, the transport assembly comprises: a substrate; the belt driving device is arranged on one side, facing the workpiece carrier plate, of the substrate.
According to one embodiment of the present invention, the belt driving apparatus includes: the two driven wheels are arranged at the left end and the right end of the substrate; the belt supporting strip is arranged on the base plate and is positioned between the two driven wheels; the synchronous belt is sleeved on the two driven wheels and the belt supporting strip; and the tensioning wheels are arranged on the base plate and abut against the outer peripheral edge of the synchronous belt.
According to an embodiment of the present invention, the at least one belt driving device has a driving wheel and a driving motor, the driving wheel is engaged with the inner periphery of the timing belt, and the output end of the driving motor is connected to the driving wheel.
According to an embodiment of the present invention, the workpiece transfer apparatus further includes: the shaft coupling and integral key shaft, the one end of integral key shaft and first conveying assembly from the driving wheel direct connection, the integral key shaft the other end with the one end of shaft coupling meets, the other end of shaft coupling and another conveying assembly from the driving wheel continuous.
According to one embodiment of the invention, the plurality of detection fibers comprises: pan feeding detection optic fibre, speed reduction detection optic fibre, material detection optic fibre and ejection of compact detection optic fibre arrive, pan feeding detection optic fibre, speed reduction detection optic fibre, material detection optic fibre and ejection of compact detection optic fibre are established along x in proper order on the base plate.
According to an embodiment of the present invention, the workpiece transfer apparatus further includes: the side pushing assembly is arranged on the substrate and is positioned between the deceleration detection optical fiber and the arrival detection optical fiber; the material arriving and blocking device is arranged on the substrate, and the connecting line of the material arriving and blocking device and the material arriving detection optical fiber is parallel to the y axis.
According to one embodiment of the invention, the plurality of detection fibers further comprises: the feeding warpage detection optical fiber and the discharging warpage detection optical fiber can be movably arranged on the substrate along the z direction, and the feeding warpage detection optical fiber and the discharging warpage detection optical fiber are respectively positioned on two sides of the side pushing assembly.
According to an embodiment of the present invention, the workpiece transfer apparatus further includes: a base; two y are to the guide rail, two y are established to the guide rail on the base, two y are to the guide rail and be on a parallel with the y axle arrangement, conveyor components slides and establishes two y are to the guide rail.
According to an embodiment of the present invention, the workpiece conveying apparatus further includes: the lifting mechanism is arranged on the base and located under the motion trail of the workpiece support plate, and the leveling adsorption locking jig is fixedly arranged on the upper surface of the lifting mechanism.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
In order to make the aforementioned and other objects, features and advantages of the present invention comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
fig. 1 is a schematic perspective view of a work conveying apparatus according to the present invention;
fig. 2 is a schematic top view of a workpiece carrier in the workpiece conveying apparatus according to the present invention;
fig. 3 is a schematic perspective view of a workpiece carrier in the workpiece conveying apparatus according to the present invention;
fig. 4 is a schematic structural view of a belt driving device in the work conveying apparatus according to the present invention;
reference numerals:
the device comprises a workpiece carrying device-1, a jacking mechanism-2, a leveling adsorption locking jig-3, a workpiece carrier plate-4, a base plate-10, a base-11, a y-direction guide rail-12, a belt driving device-13, a feeding detection optical fiber-14, a deceleration detection optical fiber-15, a feeding warpage detection optical fiber-16, a side pushing assembly-17, a feeding detection optical fiber-18, a coupler-19, a spline shaft-110, a discharging detection optical fiber-111, a feeding material blocking device-112, a discharging warpage detection optical fiber-113, a lifting support-114, a synchronous belt-13 a, a tensioning wheel-13 b, a driven wheel-13 c, a belt supporting strip-13 d, a driving wheel-13 e and a driving motor-13 f.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the invention. Furthermore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
A workpiece conveying apparatus according to an embodiment of the present invention is described in detail below with reference to the drawings.
As shown in fig. 1 to 4, a workpiece conveying apparatus according to an embodiment of the present invention includes: the workpiece carrying device 1 and the workpiece carrying plate 4, the workpiece carrying device 1 is used for conveying the workpiece to move along the x direction, the workpiece carrying device 1 comprises: two transport assemblies and a plurality of detection optical fibers, the two transport assemblies being symmetrically arranged about the xz plane; the plurality of detection optical fibers are arranged on the first conveying assembly and the second conveying assembly and used for detecting the conveying state of the workpiece; the workpiece carrier plate 4 is arranged on the two conveying assemblies, and the workpiece carrier plate 4 bears a workpiece. The invention has simple structure, and the plurality of detection optical fibers are arranged on the workpiece conveying path, so that the workpiece conveying position is detected on one hand, the positioning is convenient, and the workpiece state is detected on the other hand, thereby avoiding the waste of processing resources and processing time caused by poor workpiece state, further improving the production efficiency, reducing the processing cost, reducing the subsequent detection work and improving the final yield.
In some embodiments of the invention, as shown in fig. 4, the delivery assembly comprises: the device comprises a base plate 10 and a belt driving device 13, wherein the belt driving device 13 is arranged on one side of the base plate 10, which faces to the workpiece support plate 4, and the base plate 10 can guide in the process that the belt driving device 13 drives the workpiece support plate 4 to move, so that the workpiece support plate 4 is prevented from shifting during movement.
According to one embodiment of the present invention, the belt driving device 13 includes: two driven wheels 13c, a belt supporting strip 13d, a synchronous belt 13a and a plurality of tension wheels 13b, wherein the two driven wheels 13c are arranged at the left end and the right end of the substrate 10; the belt supporting strip 13d is arranged on the base plate 10 and is positioned between the two driven wheels 13 c; the synchronous belt 13a is sleeved on the two driven wheels 13c and the belt supporting strip 13 d; the tension pulleys 13b are provided on the base plate 10, and the tension pulleys 13b abut against the outer peripheral edge of the timing belt 13 a. Further, a belt driving device 13 is provided with a driving pulley 13d and a driving motor 13f, the driving pulley 13d is engaged with the inner periphery of the timing belt 13a, the output end of the driving motor 13f is connected with the driving pulley 13d, and the driving motor 13f is provided on the base 11. Further, the workpiece conveying apparatus 1 further includes: the shaft coupling 19 and the spline shaft 110, one end of the spline shaft 110 is directly connected with the driven wheel 13c of the first conveying assembly, one end of the spline shaft 110 can be movably inserted into the center of the driven wheel 13c of the first conveying assembly along the y direction, when workpieces with different sizes are processed, the distance between the two base plates 10 needs to be adjusted, the spline shaft 110 is directly connected to ensure that the two base plates 10 are always kept in a directly connected state no matter the two base plates are close to or far away from each other, the power transmission process cannot be influenced, the other end of the spline shaft 110 is connected with one end of the shaft coupling 19, and the other end of the shaft coupling 19 is connected with the driven wheel 13c of the. When only one driving motor 13f is adopted to drive the two synchronous belts 13a simultaneously, the movement process can be controlled in a unified manner, the occurrence of asynchronous condition caused when the two driving motors 13f drive the two synchronous belts 13a to move respectively is avoided, the two belt driving devices 13 are connected through the coupler 19 and the spline shaft 110, the movement process of the two synchronous belts 13a is kept consistent when the two belt driving devices 13 move, and further, the stability of the workpiece support plate 4 moving along the x direction is improved.
According to one embodiment of the present invention, as shown in fig. 2 and 3, the plurality of detection fibers includes: pan feeding detection optical fiber 14, speed reduction detection optical fiber 15, to material detection optical fiber 18 and ejection of compact detection optical fiber 111, pan feeding detection optical fiber 14, speed reduction detection optical fiber 15, to material detection optical fiber 18 and ejection of compact detection optical fiber 111 along x to establishing in proper order on base plate 10, get into conveying assembly to the overall process that leaves conveying assembly to work piece support plate 4 and detect and control, can acquire the motion state of work piece support plate 4 constantly, be convenient for control processing equipment to process the work piece in suitable position.
According to an embodiment of the present invention, the workpiece transfer apparatus 1 further includes: the side pushing assembly 17 and the material stopping device 112 are arranged, the side pushing assembly 17 is arranged on the substrate 10 and is positioned between the deceleration detection optical fiber 15 and the material stopping detection optical fiber 18; the material stopping device 112 is arranged on the substrate 10, and a connecting line of the material stopping device 112 and the material detection optical fiber 18 is parallel to the y axis.
Further, the plurality of detection fibers further comprises: the feeding warpage detection optical fiber 16 and the discharging warpage detection optical fiber 113, the feeding warpage detection optical fiber 16 and the discharging warpage detection optical fiber 113 can be movably arranged on the substrate 10 along the z direction, the feeding warpage detection optical fiber 16 and the discharging warpage detection optical fiber 113 are respectively positioned at two sides of the side push assembly 17, the feeding warpage detection optical fiber 16 detects the state of a workpiece before processing, warped workpieces are found in time, and poor processing caused by processing of the workpieces in warped states is avoided; the discharge warpage detection optical fiber 113 detects the processed workpiece, and can comprehensively judge whether the workpiece is warped or not in the processing process by matching with the detection result of the feed warpage detection optical fiber 16, so as to adjust the processing process. The feeding warpage detection optical fiber 16 and the discharging warpage detection optical fiber 113 are both fixed on the substrate 10 through the lifting support 114, and when the size of the workpiece changes, the heights of the feeding warpage detection optical fiber 16 and the discharging warpage detection optical fiber 113 are adjusted through the lifting support 114 according to the different thicknesses of the workpiece, so that the applicability of the detection process is improved.
According to an embodiment of the present invention, the workpiece transfer apparatus 1 further includes: base 11 and two y to guide rail 12, two y are established on base 11 to guide rail 12, and two y are arranged on guide rail 12 is parallel to the y axle, and conveying component slides and establishes on two y guide rail 12, and every y has two sliders to guide rail 12, and two base plates 10 link to each other with two sliders respectively, and two base plates 10's relative position is adjusted through two sliders, when being convenient for process not unidimensional work piece, adjusts two base plates 10's relative position.
According to an embodiment of the present invention, the workpiece conveying apparatus further includes: the lifting mechanism 2 is arranged on the base 11 and is positioned right below the movement track of the workpiece support plate 4, and the leveling adsorption locking jig 3 is fixedly arranged on the upper surface of the lifting mechanism 2.
When the automatic positioning device works, a workpiece is placed on a workpiece carrier plate 4, two ends of the workpiece carrier plate 4 move along the x axis under the drive of a synchronous belt 13a, a feeding detection optical fiber 14 detects whether the workpiece carrier plate 4 enters a conveying assembly, a deceleration detection optical fiber 15 detects the workpiece carrier plate 4, a driving motor 13f starts to decelerate, meanwhile, a feeding warpage detection optical fiber 16 detects the upper surface of the passing workpiece, if the workpiece warps, an alarm is given, when the workpiece carrier plate 4 moves to a material detection optical fiber 18, a material blocking device 112 rises upwards to complete blocking of the workpiece carrier plate 4, then a side pushing assembly 17 pushes the workpiece carrier plate 4 to abut against a base plate 10 to ensure that the workpiece carrier plate 4 completes positioning in the x direction and the y direction, then a jacking mechanism 2 lifts the workpiece carrier plate 4 upwards, and simultaneously, the adsorption locking jig 3 can be leveled to adsorb and fix the workpiece, and further complete positioning in the z direction, after the processing is finished, during discharging, the workpiece is secondarily detected by the discharging warpage detection optical fiber 113, and the discharging position of the workpiece carrier plate 4 is detected by the discharging detection optical fiber 111.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (10)
1. A workpiece conveying apparatus, comprising:
workpiece conveying device (1), the workpiece conveying device (1) is used for conveying workpieces to move along the x direction, and the workpiece conveying device (1) comprises:
two transport assemblies symmetrically arranged about an xz plane;
the detection optical fibers are arranged on the first conveying assembly and the second conveying assembly and used for detecting the conveying state of the workpieces;
the workpiece support plate (4), the workpiece support plate (4) is arranged on the two conveying assemblies, and a workpiece is loaded on the workpiece support plate (4).
2. The workpiece transport apparatus of claim 1, wherein the transport assembly comprises:
a substrate (10);
a belt drive (13), the belt drive (13) being arranged on the side of the substrate (10) facing the workpiece carrier plate (4).
3. The workpiece conveying apparatus according to claim 2, characterized in that the belt drive device (13) comprises:
two driven wheels (13c), wherein the two driven wheels (13c) are arranged at the left end and the right end of the substrate (10);
the belt supporting strip (13d) is arranged on the base plate (10) and is positioned between the two driven wheels (13 c);
the synchronous belt (13a) is sleeved on the two driven wheels (13c) and the belt supporting strip (13 d);
and a plurality of tension pulleys (13b), wherein the plurality of tension pulleys (13b) are arranged on the base plate (10), and the plurality of tension pulleys (13b) are abutted against the outer peripheral edge of the synchronous belt (13 a).
4. The workpiece conveying apparatus according to claim 3, wherein the at least one belt driving device (13) has a driving pulley (13d) and a driving motor (13f), the driving pulley (13d) is engaged with an inner periphery of the timing belt (13a), and an output end of the driving motor (13f) is connected to the driving pulley (13 d).
5. The workpiece conveying device according to claim 4, characterized in that the workpiece handling device (1) further comprises: shaft coupling (19) and integral key shaft (110), the one end of integral key shaft (110) with first conveying assembly follow driving wheel (13c) and directly link up, the other end of integral key shaft (110) with the one end of shaft coupling (19) meets, the other end and another conveying assembly of shaft coupling (19) link to each other from driving wheel (13 c).
6. The workpiece transport apparatus of claim 5, wherein the plurality of detection fibers comprise: pan feeding detection optical fiber (14), speed reduction detection optical fiber (15), material detection optical fiber (18) and ejection of compact detection optical fiber (111), pan feeding detection optical fiber (14), speed reduction detection optical fiber (15), material detection optical fiber (18) and ejection of compact detection optical fiber (111) are established along the x to in proper order on base plate (10).
7. The workpiece conveying device according to claim 6, characterized in that the workpiece handling device (1) further comprises:
the side pushing assembly (17), the side pushing assembly (17) is arranged on the substrate (10) and is positioned between the deceleration detection optical fiber (15) and the arrival detection optical fiber (18);
the material arrival blocking device (112) is arranged on the substrate (10), and the connecting line of the material arrival blocking device (112) and the material arrival detection optical fiber (18) is parallel to the y axis.
8. The workpiece transport apparatus of claim 7, wherein the plurality of detection fibers further comprise: the feeding warpage detection optical fiber (16) and the discharging warpage detection optical fiber (113) are movably arranged on the substrate (10) along the z direction, and the feeding warpage detection optical fiber (16) and the discharging warpage detection optical fiber (113) are respectively positioned on two sides of the side push assembly (17).
9. The workpiece conveying apparatus according to claim 8, characterized in that the workpiece handling apparatus (1) further comprises:
a base (11);
two y are to guide rail (12), two y are established to guide rail (12) on base (11), two y are arranged to guide rail (12) parallel to the y axle, conveyor components slides and establishes on two y are to guide rail (12).
10. The workpiece transport apparatus according to claim 9, further comprising: climbing mechanism (2) and can level adsorb locking tool (3), climbing mechanism (2) are located on base (11), and are located under work piece support plate (4) motion trail, but leveling adsorbs locking tool (3) fixed the upper surface of locating climbing mechanism (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110126829.6A CN112928051A (en) | 2021-01-29 | 2021-01-29 | Workpiece conveying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110126829.6A CN112928051A (en) | 2021-01-29 | 2021-01-29 | Workpiece conveying device |
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| Publication Number | Publication Date |
|---|---|
| CN112928051A true CN112928051A (en) | 2021-06-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110126829.6A Pending CN112928051A (en) | 2021-01-29 | 2021-01-29 | Workpiece conveying device |
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| CN (1) | CN112928051A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113865532A (en) * | 2021-12-02 | 2021-12-31 | 苏州佳祺仕信息科技有限公司 | Dimension appearance detection device and multi-station detection system |
-
2021
- 2021-01-29 CN CN202110126829.6A patent/CN112928051A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113865532A (en) * | 2021-12-02 | 2021-12-31 | 苏州佳祺仕信息科技有限公司 | Dimension appearance detection device and multi-station detection system |
| CN113865532B (en) * | 2021-12-02 | 2022-02-11 | 苏州佳祺仕信息科技有限公司 | Dimension appearance detection device and multi-station detection system |
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