JP5143563B2 - 小型ガス液化装置 - Google Patents
小型ガス液化装置 Download PDFInfo
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- JP5143563B2 JP5143563B2 JP2007540103A JP2007540103A JP5143563B2 JP 5143563 B2 JP5143563 B2 JP 5143563B2 JP 2007540103 A JP2007540103 A JP 2007540103A JP 2007540103 A JP2007540103 A JP 2007540103A JP 5143563 B2 JP5143563 B2 JP 5143563B2
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- gas
- valve
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- nitrogen
- purified
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- 239000007789 gas Substances 0.000 claims description 160
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 156
- 229910052757 nitrogen Inorganic materials 0.000 claims description 71
- 239000003507 refrigerant Substances 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 23
- 238000009835 boiling Methods 0.000 claims description 19
- 238000010926 purge Methods 0.000 claims description 19
- 239000012528 membrane Substances 0.000 claims description 17
- 238000001816 cooling Methods 0.000 claims description 15
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 14
- 238000009413 insulation Methods 0.000 claims description 13
- 238000000605 extraction Methods 0.000 claims description 10
- 230000006835 compression Effects 0.000 claims description 9
- 238000007906 compression Methods 0.000 claims description 9
- 238000000746 purification Methods 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 description 26
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 15
- 239000001301 oxygen Substances 0.000 description 15
- 229910052760 oxygen Inorganic materials 0.000 description 15
- 238000005057 refrigeration Methods 0.000 description 12
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 10
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 6
- 229910002092 carbon dioxide Inorganic materials 0.000 description 5
- 239000001569 carbon dioxide Substances 0.000 description 5
- 239000012535 impurity Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 239000012466 permeate Substances 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 238000013019 agitation Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000003345 natural gas Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000010257 thawing Methods 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 208000001034 Frostbite Diseases 0.000 description 1
- 230000005355 Hall effect Effects 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000003337 fertilizer Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000011045 prefiltration Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 208000023504 respiratory system disease Diseases 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000005514 two-phase flow Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 239000006200 vaporizer Substances 0.000 description 1
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- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
- F17C7/02—Discharging liquefied gases
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J1/00—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
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- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J1/00—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
- F25J1/0002—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures characterised by the fluid to be liquefied
- F25J1/0012—Primary atmospheric gases, e.g. air
- F25J1/0015—Nitrogen
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- F25J1/00—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
- F25J1/0002—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures characterised by the fluid to be liquefied
- F25J1/0012—Primary atmospheric gases, e.g. air
- F25J1/0017—Oxygen
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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- F25J1/00—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
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- F25J1/0047—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures characterised by the kind of cold generation within the liquefaction unit for compensating heat leaks and liquid production using an "external" refrigerant stream in a closed vapor compression cycle
- F25J1/0052—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures characterised by the kind of cold generation within the liquefaction unit for compensating heat leaks and liquid production using an "external" refrigerant stream in a closed vapor compression cycle by vaporising a liquid refrigerant stream
- F25J1/0055—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures characterised by the kind of cold generation within the liquefaction unit for compensating heat leaks and liquid production using an "external" refrigerant stream in a closed vapor compression cycle by vaporising a liquid refrigerant stream originating from an incorporated cascade
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- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
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- F25J1/006—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures characterised by the refrigerant fluid used
- F25J1/0097—Others, e.g. F-, Cl-, HF-, HClF-, HCl-hydrocarbons etc. or mixtures thereof
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
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- F25J1/0212—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures requiring the use of refrigeration, e.g. of helium or hydrogen ; Details and kind of the refrigeration system used; Integration with other units or processes; Controlling aspects of the process using a multi-component refrigerant [MCR] fluid in a closed vapor compression cycle as a single flow MCR cycle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J1/00—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
- F25J1/02—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures requiring the use of refrigeration, e.g. of helium or hydrogen ; Details and kind of the refrigeration system used; Integration with other units or processes; Controlling aspects of the process
- F25J1/0225—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures requiring the use of refrigeration, e.g. of helium or hydrogen ; Details and kind of the refrigeration system used; Integration with other units or processes; Controlling aspects of the process using other external refrigeration means not provided before, e.g. heat driven absorption chillers
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J1/00—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
- F25J1/02—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures requiring the use of refrigeration, e.g. of helium or hydrogen ; Details and kind of the refrigeration system used; Integration with other units or processes; Controlling aspects of the process
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- F25J1/0248—Stopping of the process, e.g. defrosting or deriming, maintenance; Back-up mode or systems
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- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J1/00—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J1/00—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
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- F25J1/0243—Start-up or control of the process; Details of the apparatus used; Details of the refrigerant compression system used
- F25J1/0257—Construction and layout of liquefaction equipments, e.g. valves, machines
- F25J1/0275—Construction and layout of liquefaction equipments, e.g. valves, machines adapted for special use of the liquefaction unit, e.g. portable or transportable devices
- F25J1/0276—Laboratory or other miniature devices
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- F25J2205/24—Processes or apparatus using other separation and/or other processing means using regenerators, cold accumulators or reversible heat exchangers
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- F25J2205/00—Processes or apparatus using other separation and/or other processing means
- F25J2205/40—Processes or apparatus using other separation and/or other processing means using hybrid system, i.e. combining cryogenic and non-cryogenic separation techniques
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- F25J2220/00—Processes or apparatus involving steps for the removal of impurities
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- F25J2270/90—External refrigeration, e.g. conventional closed-loop mechanical refrigeration unit using Freon or NH3, unspecified external refrigeration
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- F25J2270/91—External refrigeration, e.g. conventional closed-loop mechanical refrigeration unit using Freon or NH3, unspecified external refrigeration by regenerative chillers, i.e. oscillating or dynamic systems, e.g. Stirling refrigerator, thermoelectric ("Peltier") or magnetic refrigeration using pulse tube refrigeration
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- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
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- Emergency Medicine (AREA)
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- Separation By Low-Temperature Treatments (AREA)
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Description
J. W. H. Kohler、C. O. Jonkers著、フィリップス技術レビュー(Philips Techn. Rev.)1954年、16号、p. 69
A. P. Kleemenko著、「第10回冷凍国際会議会報(コペンハーゲン)1巻(Proceedings of the Xth International Congress of Refrigeration, Copenhagen 1)」、ペルガモン・プレス(ロンドン)(Pergamon Press, London)、1959年、p. 34-39 D. Dew-Hughes、R. G. Scurlock、J. H. P. Watson著、「クリメンコサイクル冷却器:極低温の低コスト冷凍機(Kleemenko Cycle Coolers: Low Cost Refrigeration at Cryogenic Temperatures)」、第17回国際極低温技術会議会報(Proc. Seventeenth International Cryogenic Engineering Conference)、Institute of Physics Publishing(ブリストル)、1998年、p. 1-9 W. A. Little著「MMRのクリメンコサイクル冷却器(状況、性能、信頼性、生産)(MMR ' s Kleemenko Cycle Coolers: Status, Performance, Reliability, and Production)」低コスト極低温冷却器の軍事及び商業的装置の第4回ワークショップ(M-CALC IV, Fourth Workshop on Military and Commercial Applications of Low-Cost Cryocoolers)、Strategic Analysis, Inc、2003年11月、p. 20-21
Peter Kittel他著、「パルスチューブ冷却器の小史(A Short History of Pulse Tube Refrigerators)」、[online]、インターネット<URL:http://ranier.oact.hq.nasa.gov/Sensors_page/Cryo/CryoPT/CryoPTHist.html>
Claims (17)
- 空気から精製した窒素ガスの液化のための装置であって、
精製ガスが液化され捕集される断熱領域と、
前記断熱領域の外部にある第1部分及び前記断熱領域の内部にある第2部分を備えると共に、精製ガス流を前記第1部分から前記第2部分のガス供給管に供給するガス供給システムと、
前記断熱領域の外部にある温部分及び前記断熱領域の内部にある冷部分を備えると共に、前記冷部分が前記精製ガス流を冷却するために前記ガス供給システムの前記第2部分と熱交換する極低温冷却器と、
前記断熱領域の内部にある入力端及び前記断熱領域の外部にある出力端を備える取り出し管とを含み、
前記ガス供給システムの前記第1部分は、前記精製ガス流を大気圧以上の高圧にするべく空気を圧縮するための圧縮機を含み、
前記極低温冷却器の前記冷部分は、大気圧下での窒素ガスの沸点より高くかつ前記高圧下での窒素ガスの沸点より低い最低温度を有し、
前記ガス供給システムの前記第2部分は、前記圧力を前記高圧から大気圧へと低下させ、前記精製ガス流の一部を蒸発させるようにして前記精製ガス流の留分を大気圧下での窒素ガスの沸点に冷却する流量制限器を含み、
前記ガス供給システムの第1の部分は、前記圧縮機の出力側に位置し圧縮された空気が乾燥される圧縮スイング吸着器、前記圧縮スイング吸着器の出力側に位置し圧縮された精製ガス流が通過する膜分離器、該膜分離器に接続され該膜分離器の膜を透過するガスの水分含有量を検出する湿度計及び該湿度計により検出されたガスの純度の程度に応じて前記ガス供給システムの第2の部分へのガス流れを制御する弁を含み、該弁は、前記水分含有量が予め設定した値以下に低下するまで閉鎖されることを特徴とする装置。 - 前記極低温冷却器は、パルスチューブ極低温冷却器であることを特徴とする請求項1に記載の装置。
- 前記極低温冷却器は、複数成分混合冷媒を用いた閉サイクル、カスケード、絞り膨張冷却サイクル極低温冷却器であることを特徴とする請求項1に記載の装置。
- 前記極低温冷却器の前記冷部分は、第1熱交換器と第2熱交換器とを備えた対向流式熱交換器を含み、
前記ガス供給システムの前記第2部分は、前記対向流式熱交換器と熱交換する熱交換器部分を含むことを特徴とする請求項1に記載の装置。 - 前記ガス供給システムの前記第2部分は、前記ガス供給管の低温端に接続した温パージ管を含み、
前記ガス供給システムの前記第1部分は、前記温パージ管に入る温ガスの流れを制御するパージ弁と、前記温ガスが前記ガス供給管を上方へと通過して流れ、排気されることを許可する3方向弁とを含むことを特徴とする請求項1に記載の装置。 - 前記弁は、前記湿度計に接続されていることを特徴とする請求項1に記載の装置。
- 前記ガス供給システムの前記第1部分は、圧縮ガスが前記断熱領域に流れ込むことを許可する取り出し弁と、前記ガスが前記断熱領域に入る前に前記ガスの圧力を低下させる圧力調整器とを含むことを特徴とする請求項1に記載の装置。
- 前記取り出し弁に接続したキーロックを更に含み、
前記キーロックは、ロックされているときに前記取り出し弁が開くことを防止し、ユーザーキーによってアンロックされているときに前記取り出し弁を開くようにすることを特徴とする請求項7に記載の装置。 - 前記取り出し弁に接続した近接センサを更に含み、
前記近接センサは、取り出しデュワーが検出されていない時に前記取り出し弁が開くことを防止し、取り出しデュワーが検出されている時に前記取り出し弁が開くようにすることを特徴とする請求項7に記載の装置。 - 空気から精製した窒素から液化窒素ガスを製造する方法であって、
精製ガスを製造するために、ガス供給システムの第1部分でガスを精製し、
凝縮ガスを製造するために、前記ガス供給システムの第2部分で前記精製ガスを冷却し、
断熱領域で前記凝縮ガスを捕集し、
前記凝縮ガスを前記断熱領域から取り出し管を通して取り出し、
前記ガスの冷却は、大気圧下での窒素ガスの沸点より高く、かつ高圧下での窒素ガスの沸点より低い最低温度を有する極低温冷却器を用いて前記精製ガスの温度を低下させることを含み、
前記ガスの精製は、空気を圧縮スイング吸着器に通過させて乾燥させる過程、乾燥されたガスを膜分離器に通過させる過程、該膜分離器でのガス純度の程度を検出する過程、及び検出されたガス純度に応じて前記精製ガスの流れを制御する過程をこの順序で含み、前記検出する過程は、該膜分離器の膜を透過したガスの水分含有度を検出することを含み、前記制御する過程は、前記水分含有量が予め設定した値以下に低下するまで前記ガス供給システムの第2の部分への前記精製ガスの流れを遮断し、
該方法は、更に、前記精製ガスが大気圧以上の圧力となるように、前記精製の前に、空気を圧縮し、
該方法は、前記凝縮ガスの一部を蒸発させて前記凝縮ガスの留分を大気圧下での窒素ガスの沸点に冷却するために前記凝縮ガスを大気圧まで膨張させることを特徴とする製造方法。 - 前記極低温冷却器は、パルスチューブ極低温冷却器であることを特徴とする請求項10に記載の製造方法。
- 前記極低温冷却器は、複数成分混合冷媒を用いた閉サイクル、カスケード、絞り膨張冷却サイクル極低温冷却器であることを特徴とする請求項10に記載の製造方法。
- 前記極低温冷却器は、対向流式熱交換器であり、前記精製ガスを前記対向流式熱交換器と熱交換させることを含み前記精製ガスの温度を低下させることを特徴とする請求項10に記載の製造方法。
- 更に、
前記精製ガスが温パージ管を通過して流れることを許可するパージ弁を断続的に開放する過程と、
前記温ガスを前記温パージ管から上方へガス供給管の低温端を通して送る過程と、
前記温ガスを前記ガス供給管から外部へと3方向弁を通して排気する過程とを含むことを特徴とする請求項10に記載の製造方法。 - 前記凝縮ガスの取り出しは、
ガスが断熱領域の内部へと流れることを許可する取り出し弁を開放する過程と、
前記ガスが前記断熱領域に入る前に前記ガスの圧力を低下させる過程とを含むことを特徴とする請求項10に記載の製造方法。 - 前記凝縮ガスの取り出しは、
取り出し可能とするためにユーザーキーを要求することを特徴とする請求項10に記載の製造方法。 - 前記凝縮ガスの取り出しは、
取り出しデュワーの近接を検出する過程と、
取り出しを可能とするために取り出しデュワーの存在の検出を要求する過程とを含むことを特徴とする請求項10に記載の製造方法。
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