JP5137363B2 - Glass substrate continuous firing equipment - Google Patents

Glass substrate continuous firing equipment Download PDF

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JP5137363B2
JP5137363B2 JP2006248909A JP2006248909A JP5137363B2 JP 5137363 B2 JP5137363 B2 JP 5137363B2 JP 2006248909 A JP2006248909 A JP 2006248909A JP 2006248909 A JP2006248909 A JP 2006248909A JP 5137363 B2 JP5137363 B2 JP 5137363B2
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glass substrate
holding member
substrate
magazine base
substrate holder
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JP2008070038A (en
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昌徳 新谷
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Chugai Ro Co Ltd
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Chugai Ro Co Ltd
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Priority to TW096121461A priority patent/TW200812925A/en
Priority to KR1020070060276A priority patent/KR20080024959A/en
Priority to CNA2007101280601A priority patent/CN101143760A/en
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
    • C03B35/14Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
    • C03B35/20Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by gripping tongs or supporting frames
    • C03B35/202Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by gripping tongs or supporting frames by supporting frames
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B27/00Tempering or quenching glass products
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B25/00Annealing glass products
    • C03B25/04Annealing glass products in a continuous way
    • C03B25/06Annealing glass products in a continuous way with horizontal displacement of the glass products
    • C03B25/08Annealing glass products in a continuous way with horizontal displacement of the glass products of glass sheets
    • C03B25/087Annealing glass products in a continuous way with horizontal displacement of the glass products of glass sheets being in a vertical position
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B27/00Tempering or quenching glass products
    • C03B27/012Tempering or quenching glass products by heat treatment, e.g. for crystallisation; Heat treatment of glass products before tempering by cooling
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B29/00Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins
    • C03B29/04Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a continuous way
    • C03B29/06Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a continuous way with horizontal displacement of the products
    • C03B29/08Glass sheets
    • C03B29/10Glass sheets being in a vertical position
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Furnace Charging Or Discharging (AREA)
  • Tunnel Furnaces (AREA)

Description

この発明は、プラズマディスプレイパネル(以下、PDPと略す。)等に使用する複数のガラス基板を立てた状態で保持して焼成するのに使用するガラス基板保持部材を用い、このガラス基板保持部材に複数のガラス基板を立てた状態で保持させて搬送装置により焼成炉内を順々に移動させ、このガラス基板保持部材に保持されたガラス基板を焼成処理するガラス基板連続焼成装置に係り、特に、上記のガラス基板保持部材を改良し、焼成後にこのガラス基板保持部材を焼成炉の装入口側に戻す戻し装置を設けた場合に、ガラス基板連続焼成装置全体としての設置面積が大きくなるのを抑制するようにした点に特徴を有するものである。 This invention includes a plasma display panel (hereinafter, abbreviated as PDP.) Using a glass substrate holding member for use in baked held in a standing state a plurality of glass substrates to be used for such, to the glass substrate holding member The present invention relates to a glass substrate continuous baking apparatus that holds a plurality of glass substrates in an upright state and moves them sequentially in a baking furnace by a transfer device, and performs a baking process on the glass substrate held by the glass substrate holding member. When the glass substrate holding member is improved and a return device is provided to return the glass substrate holding member to the inlet side of the firing furnace after firing, the overall installation area of the continuous glass substrate firing device is suppressed. It has the feature in the point made to do.

ガラス基板を用いてPDP等を製造するにあたっては、ガラス基板の上に形成した隔壁や蛍光体やシールフリット等を焼成することが一般に行われている。   In manufacturing a PDP or the like using a glass substrate, it is generally performed to fire a partition, a phosphor, a seal frit, or the like formed on the glass substrate.

ここで、上記のようなガラス基板を焼成処理するにあたっては、焼成時にガラス基板が歪んだりするのを抑制するため、一般に耐熱ガラスで構成されたセッターの上に上記のガラス基板を水平に載置させ、またこのようにセッターの上にガラス基板を水平に載置させたものを上下方向に所要間隔を介して複数積層させたものを、ハースローラ等の搬送装置により焼成炉内を移動させ、輻射主体の加熱によって焼成させることが行われている。   Here, in firing the glass substrate as described above, the glass substrate is generally placed horizontally on a setter generally made of heat-resistant glass in order to prevent the glass substrate from being distorted during firing. In addition, a plurality of glass substrates that are horizontally placed on the setter in this manner are stacked in a vertical direction at a required interval, and are moved in a firing furnace by a conveying device such as a hearth roller to emit radiation. Firing is performed by heating the main body.

しかし、このようにセッターの上にガラス基板を水平に載置させたものを輻射主体の加熱によって焼成処理する場合、ガラス基板への熱伝達速度が小さくなり、積層させるガラス基板の数を多くすると、各ガラス基板における温度差が大きくなって一定した焼成処理を行うことが困難になり、このため、積層させるガラス基板の数をあまり多くすることができず、ガラス基板を効率よく焼成処理することができないという問題があった。   However, in the case where the glass substrate is horizontally placed on the setter as described above and fired by radiation-based heating, the heat transfer rate to the glass substrate is reduced, and the number of glass substrates to be laminated is increased. The temperature difference between the glass substrates becomes large and it becomes difficult to perform a constant baking process. For this reason, the number of glass substrates to be laminated cannot be increased so much, and the glass substrates are efficiently fired. There was a problem that could not.

このため、近年においては、トレイ上に複数枚のガラス基板を立てた状態で保持させ、この状態で上記のトレイをハースローラ等の搬送装置により焼成炉内を移動させると共に、この焼成炉内において加熱された気体を上方から下方に送って上記のガラス基板を焼成処理するようにしたものが提案されている(例えば、特許文献1参照。)。   For this reason, in recent years, a plurality of glass substrates are held upright on a tray, and the tray is moved in a firing furnace by a conveying device such as a hearth roller in this state, and is heated in the firing furnace. There has been proposed a method in which the above-mentioned glass substrate is fired by sending the generated gas downward from above (see, for example, Patent Document 1).

ここで、上記のようにトレイ上に複数枚のガラス基板を立てた状態で保持させるにあたっては、トレイ上にL型アングルを溶接などで組み立てた枠体を取り付け、この枠体の側部支持プレートに取り付けられた側部支持部材に板ばねを設けて、この板ばねにより上記のガラス基板の側部を挟持させると共に、トレイ上に下端支持部材を設け、この下端支持部材にガラス基板の下端を支持させることが行われている。   Here, in order to hold a plurality of glass substrates in an upright state on the tray as described above, a frame body assembled by welding an L-shaped angle on the tray is attached, and a side support plate of this frame body A plate spring is provided on the side support member attached to the plate, the side portion of the glass substrate is sandwiched by the plate spring, a lower end support member is provided on the tray, and the lower end of the glass substrate is provided on the lower end support member. It is done to support.

そして、上記のようなトレイ上に複数枚のガラス基板を立てた状態で保持させて焼成炉内において焼成処理した後、上記のトレイを焼成炉の装入口側に戻すにあたっては、一般に、焼成炉の横にローラコンベア等の戻し装置を設け、この戻し装置により、枠体等が取り付けられたトレイをそのままの状態で焼成炉に沿って搬送させて戻すようにしている。   Then, after holding a plurality of glass substrates in an upright state on the tray as described above and performing a baking treatment in the baking furnace, when returning the tray to the loading side of the baking furnace, Next, a return device such as a roller conveyor is provided, and with this return device, the tray on which the frame or the like is attached is conveyed as it is along the firing furnace and returned.

しかし、このように焼成炉の横にローラコンベア等の戻し装置を設ける場合、この戻し装置のための設置面積が必要となり、ガラス基板連続焼成装置全体としての設置面積が大きくなるという問題があった。   However, when a return device such as a roller conveyor is provided next to the firing furnace in this way, an installation area for the return device is required, and there is a problem that the installation area of the entire glass substrate continuous firing device is increased. .

また、近年のように焼成処理させるガラス基板が大きくなると、ガラス基板の持ち上げ時における撓みが大きくなって割れやすくなり、上記のようにトレイ上に一体に設けられた枠体の側部支持プレートに側部支持部材を取り付け、この側部支持部材に設けられた板ばねによりガラス基板の側部を挟持させるようにして、ガラス基板を立てた状態でトレイ上に保持させる作業が非常に困難になるという問題もあった。
特開平11−311484号公報
In addition, when the glass substrate to be fired becomes large as in recent years, the bending at the time of lifting the glass substrate becomes large and it is easy to break, and the side support plate of the frame body integrally provided on the tray as described above It becomes very difficult to attach the side support member and hold the glass substrate on the tray in an upright state by sandwiching the side portion of the glass substrate by the leaf spring provided on the side support member. There was also a problem.
Japanese Patent Laid-Open No. 11-311484

この発明は、PDP等に使用するガラス基板を連続して焼成処理するガラス基板連続焼成装置において、複数のガラス基板を立てた状態で保持する新規なガラス基板保持部材を提供し、焼成後にこのガラス基板保持部材を焼成炉の装入口側に戻す戻し装置を設けた場合に、ガラス基板連続焼成装置全体としての設置面積が大きくなるのを抑制し、また焼成処理させるガラス基板が大きくなった場合においても、このガラス基板をガラス基板保持部材に適切に立てた状態で保持できるようにすることを課題とするものである。   The present invention provides a novel glass substrate holding member for holding a plurality of glass substrates in a standing state in a glass substrate continuous firing apparatus for continuously firing a glass substrate used for PDP or the like, and this glass after firing When a return device is provided to return the substrate holding member to the inlet side of the firing furnace, the installation area of the entire glass substrate continuous firing device is suppressed, and when the glass substrate to be fired becomes large However, another object of the present invention is to enable the glass substrate to be held in a state where it is properly stood on the glass substrate holding member.

この発明の第1のガラス基板連続焼成装置においては、上記のような課題を解決するため、ガラス基板を立てた状態で保持する基板ホルダが、マガジンベースの上に所要間隔を介して複数着脱自在に立設されてなるガラス基板保持部材を用い、このガラス基板保持部材に複数のガラス基板を立てた状態で保持させ、このガラス基板保持部材を搬送装置により焼成炉の装入口から抽出口に向けて焼成炉内を順々に移動させて、このガラス基板保持部材に保持されたガラス基板を焼成処理するガラス基板連続焼成装置において、上記の焼成炉の下又は上の位置に、上記のガラス基板保持部材におけるマガジンベースと基板ホルダとを分離させた状態で焼成炉の装入口側に戻す戻し装置を設けると共に、上記の焼成炉の装入口側に、ガラス基板を水平状態にしてマガジンベースから分離された基板ホルダにセットするガラス基板導入手段と、ガラス基板がセットされた上記の基板ホルダを起立させて上記のマガジンベースに取り付ける基板ホルダ取付手段とを設けるようにした。 In the first glass substrate continuous firing apparatus of the present invention, in order to solve the above-described problems, a plurality of substrate holders that hold the glass substrate in an upright state can be detachably mounted on the magazine base at a required interval. The glass substrate holding member is erected on the glass substrate, and a plurality of glass substrates are held upright on the glass substrate holding member, and the glass substrate holding member is directed from the charging furnace inlet to the extraction port by the transport device. In the glass substrate continuous firing apparatus that sequentially moves the inside of the firing furnace and fires the glass substrate held by the glass substrate holding member, the glass substrate is placed at a position below or above the firing furnace. A return device for returning the magazine base and the substrate holder in the holding member to the inlet side of the baking furnace is provided, and the glass substrate is placed on the inlet side of the baking furnace. Glass substrate introduction means for setting the substrate holder separated from the magazine base in a state, and substrate holder mounting means for mounting the substrate holder on which the glass substrate is set up and attaching to the magazine base are provided. .

また、この発明の第2のガラス基板連続焼成装置においては、上記のような課題を解決するため、ガラス基板を立てた状態で保持する基板ホルダが、マガジンベースの上に所要間隔を介して複数着脱自在に立設されてなるガラス基板保持部材を用い、このガラス基板保持部材に複数のガラス基板を立てた状態で保持させ、このガラス基板保持部材を搬送装置により焼成炉の装入口から抽出口に向けて焼成炉内を順々に移動させて、このガラス基板保持部材に保持されたガラス基板を焼成処理するガラス基板連続焼成装置において、上記の焼成炉の下又は上の位置に、上記のガラス基板保持部材におけるマガジンベースと基板ホルダとを分離させた状態で焼成炉の装入口側に戻す戻し装置を設けると共に、上記の焼成炉の抽出口側に、焼成後のガラス基板を保持する上記の基板ホルダを上記のマガジンベースから離脱させて水平状態にセットする基板ホルダ離脱手段と、上記の水平状態にセットされた基板ホルダから上記のガラス基板を取り出すガラス基板排出手段とを設けるようにした。Further, in the second glass substrate continuous firing apparatus of the present invention, in order to solve the above-described problems, a plurality of substrate holders that hold the glass substrate in an upright state are arranged on the magazine base with a required interval. A glass substrate holding member that is detachably installed is used, and a plurality of glass substrates are held upright on the glass substrate holding member, and the glass substrate holding member is extracted from the inlet of the firing furnace by the transfer device. In the glass substrate continuous firing apparatus that sequentially moves the inside of the firing furnace toward the glass substrate and fires the glass substrate held by the glass substrate holding member, the above-mentioned firing furnace is placed at a position below or above the firing furnace. In addition to providing a return device for returning the magazine base and the substrate holder in the glass substrate holding member to the inlet side of the baking furnace, the post-baking is provided on the extraction port side of the baking furnace. A substrate holder detaching means for detaching the substrate holder holding the glass substrate from the magazine base and setting it in a horizontal state, and a glass substrate discharging means for taking out the glass substrate from the substrate holder set in the horizontal state And so on.

また、上記の第1及び第2のガラス基板連続焼成装置とを組み合わせて、焼成炉の装入口側に、ガラス基板を水平状態にしてマガジンベースから分離された基板ホルダにセットするガラス基板導入手段と、ガラス基板がセットされた上記の基板ホルダを起立させて上記のマガジンベースに取り付ける基板ホルダ取付手段とを設けると共に、焼成炉の抽出口側に、焼成後のガラス基板を保持する上記の基板ホルダを上記のマガジンベースから離脱させて水平状態にセットする基板ホルダ離脱手段と、上記の水平状態にセットされた基板ホルダから上記のガラス基板を取り出すガラス基板排出手段とを設けることもできる。Further, a glass substrate introducing means for combining the first and second glass substrate continuous firing apparatuses and setting the glass substrate in a horizontal state on the inlet side of the firing furnace and setting the substrate in a substrate holder separated from the magazine base. And a substrate holder attaching means for erecting the substrate holder on which the glass substrate is set and attaching it to the magazine base, and holding the glass substrate after firing on the extraction port side of the firing furnace It is also possible to provide substrate holder detachment means for detaching the holder from the magazine base and setting it in a horizontal state, and glass substrate discharge means for taking out the glass substrate from the substrate holder set in the horizontal state.

この発明におけるガラス基板連続焼成装置においては、上記のガラス基板保持部材におけるマガジンベースの上に、ガラス基板を立てた状態で保持する基板ホルダを、所要間隔を介して複数着脱自在に立設させるようにしたため、マガジンベースから基板ホルダを分離させた状態で、この基板ホルダにガラス基板をセットさせたり、焼成処理後のガラス基板をこの基板ホルダから取り出したりすることができ、また焼成処理後のガラス基板をこの基板ホルダから取り出した後、この基板ホルダとマガジンベースとを分離させた状態で焼成炉の装入口側に戻すことができるようになる。 In the glass substrate continuous firing apparatus according to the present invention, a plurality of substrate holders that hold the glass substrate in an upright state are detachably provided on the magazine base of the glass substrate holding member with a predetermined interval. Therefore, in a state where the substrate holder is separated from the magazine base, a glass substrate can be set on the substrate holder, and the glass substrate after the baking treatment can be taken out from the substrate holder. After the substrate is taken out from the substrate holder, the substrate holder and the magazine base can be returned to the inlet side of the firing furnace in a state where they are separated.

そして、この発明におけるガラス基板連続焼成装置においては、上記のようにマガジンベースと基板ホルダとを分離させた状態でガラス基板保持部材を焼成炉の装入口側に戻す戻し装置を、焼成炉の下又は上の位置に設けるようにしたため、従来のように焼成炉の横に戻し装置を設ける必要がなく、ガラス基板連続焼成装置全体としての設置面積を小さくすることができる。   In the continuous glass substrate baking apparatus according to the present invention, the apparatus for returning the glass substrate holding member to the inlet side of the baking furnace with the magazine base and the substrate holder separated as described above is provided below the baking furnace. Alternatively, since it is provided at the upper position, it is not necessary to provide a return device beside the baking furnace as in the prior art, and the installation area of the entire glass substrate continuous baking apparatus can be reduced.

また、前記のように焼成炉の装入口側に、ガラス基板導入手段と基板ホルダ取付手段とを設け、ガラス基板導入手段によりガラス基板を水平状態にしてマガジンベースから分離された基板ホルダにセットさせ、このようにガラス基板がセットされた基板ホルダを基板ホルダ取付手段により起立させてマガジンベースに取り付けるようにすると、焼成処理するガラス基板が大きくなった場合においても、このガラス基板をガラス基板保持部材に立てた状態で保持させる際に、ガラス基板が撓んで割れたりするのが防止され、大きなガラス基板であっても基板ホルダに保持させて、ガラス基板保持部材に適切に立てた状態で保持できるようになる。   Further, as described above, the glass substrate introducing means and the substrate holder attaching means are provided on the inlet side of the baking furnace, and the glass substrate is horizontally placed by the glass substrate introducing means and set on the substrate holder separated from the magazine base. When the substrate holder on which the glass substrate is set in this way is erected by the substrate holder attaching means and attached to the magazine base, even when the glass substrate to be baked becomes large, this glass substrate is attached to the glass substrate holding member. When the glass substrate is held in a standing state, the glass substrate is prevented from being bent and cracked, and even a large glass substrate can be held by the substrate holder and held in a properly standing state on the glass substrate holding member. It becomes like this.

さらに、前記のように焼成炉の抽出口側に、基板ホルダ離脱手段とガラス基板排出手段とを設け、焼成後のガラス基板を保持する基板ホルダを基板ホルダ離脱手段によりマガジンベースから離脱させて水平状態にセットし、このように水平状態にセットされた基板ホルダからガラス基板排出手段によりガラス基板を取り出すようにすると、上記のような大きなガラス基板であってもガラス基板が撓んで割れたりするのが防止され、ガラス基板保持部材から適切に取り出すことができるようになる。   Further, as described above, the substrate holder detachment means and the glass substrate discharge means are provided on the extraction port side of the baking furnace, and the substrate holder that holds the glass substrate after baking is detached from the magazine base by the substrate holder detachment means. If the glass substrate is taken out by the glass substrate discharging means from the substrate holder set in the horizontal state as described above, the glass substrate may be bent and cracked even if it is a large glass substrate as described above. Is prevented, and the glass substrate holding member can be appropriately taken out.

以下、この発明の実施形態に係るガラス基板連続焼成装置を添付図面に基づいて具体的に説明する。なお、この発明に係るガラス基板連続焼成装置は下記の実施形態に示したものに限定されず、発明の要旨を変更しない範囲において、適宜変更して実施できるものである。 Hereinafter, a glass substrate continuous firing apparatus according to an embodiment of the present invention will be specifically described with reference to the accompanying drawings. In addition, the glass substrate continuous baking apparatus according to the present invention is not limited to the one shown in the following embodiment, and can be implemented with appropriate modifications within a range not changing the gist of the invention.

この実施形態におけるガラス基板連続焼成装置に使用するガラス基板保持部材10においては、図1に示すように、マガジンベース11の上に、ガラス基板1を立てた状態で保持する複数の基板ホルダ12を着脱自在に立設させるようにしている。 In the glass substrate holding member 10 used in the glass substrate continuous firing apparatus in this embodiment, as shown in FIG. 1, a plurality of substrate holders 12 that hold the glass substrate 1 in an upright state on a magazine base 11 are provided. It is designed to stand detachably.

ここで、上記の基板ホルダ12においては、図1及び図2に示すように、四角環状に形成された枠体12aの下部にガラス基板1の下端を支持する受け部12bを形成し、この受け部12b上にガラス基板1のズレを抑制する当止め部材12cを設けると共にこの受け部12bから下方に取付脚12dを延出させ、また上記の枠体12aの側枠12a1よりも前方に突出するようにして前面止め部材12eを両側の側枠12a1に架け渡すように取り付けている。   Here, in the substrate holder 12, as shown in FIGS. 1 and 2, a receiving portion 12 b that supports the lower end of the glass substrate 1 is formed at the lower portion of a frame body 12 a formed in a square ring shape. A stopper member 12c that suppresses the displacement of the glass substrate 1 is provided on the portion 12b, and the mounting leg 12d extends downward from the receiving portion 12b, and protrudes further forward than the side frame 12a1 of the frame body 12a. In this way, the front stop member 12e is attached so as to span the side frames 12a1 on both sides.

一方、上記のマガジンベース11においては、図1に示すように、その上面11aに上記の基板ホルダ12に設けられた取付脚12dを挿入させる取付穴11bを設けている。そして、上記の各基板ホルダ12に設けられた取付脚12dをそれぞれマガジンベース11に設けた取付穴11bに挿入させて、各基板ホルダ12をマガジンベース11の上に着脱自在に立設させるようにしている。   On the other hand, the magazine base 11 is provided with a mounting hole 11b for inserting a mounting leg 12d provided on the substrate holder 12 on the upper surface 11a thereof as shown in FIG. Then, the mounting legs 12 d provided on each of the substrate holders 12 are inserted into the mounting holes 11 b provided on the magazine base 11, respectively, so that each of the substrate holders 12 is detachably installed on the magazine base 11. ing.

また、この実施形態におけるガラス基板連続焼成装置においては、上記のようにガラス基板保持部材10におけるマガジンベース11の上に、ガラス基板1を立てた状態で保持した複数の基板ホルダ12を立設させた状態で、図3に示すように、このガラス基板保持部材10を焼成炉20の装入口20aに設けられた装入扉21から焼成炉20内に順々に装入させ、この焼成炉20内に設けられたハースローラからなる搬送装置22により、上記のように装入させたガラス基板保持部材10を順々に焼成炉20内において移動させるようにしている。   Moreover, in the glass substrate continuous baking apparatus in this embodiment, a plurality of substrate holders 12 that hold the glass substrate 1 in an upright state are erected on the magazine base 11 of the glass substrate holding member 10 as described above. In this state, as shown in FIG. 3, the glass substrate holding member 10 is sequentially inserted into the baking furnace 20 from the charging door 21 provided at the charging port 20 a of the baking furnace 20. The glass substrate holding member 10 loaded as described above is sequentially moved in the firing furnace 20 by the transfer device 22 including a hearth roller provided in the inside.

そして、ヒータ等の加熱手段(図示せず)によって加熱された気体を、この焼成炉20の上部に設けられた循環ファン23によって上方から下方に送り、この加熱された気体により、各ガラス基板保持部材10の基板ホルダ12に立てた状態で保持されたガラス基板1を順々に加熱させて焼成処理し、このようにガラス基板1が焼成処理されたガラス基板保持部材10を焼成炉20の抽出口20bに設けられた抽出扉24から焼成炉20の外に順々に導くようにしている。   And the gas heated by heating means (not shown), such as a heater, is sent from the upper side to the lower side by a circulation fan 23 provided on the upper portion of the baking furnace 20, and each glass substrate is held by the heated gas. The glass substrate 1 held on the substrate holder 12 of the member 10 is sequentially heated and fired, and the glass substrate holding member 10 thus fired is extracted from the firing furnace 20. The extraction door 24 provided at the opening 20b is sequentially led out of the firing furnace 20.

また、この実施形態におけるガラス基板連続焼成装置においては、上記のように焼成炉20の抽出扉24から焼成炉20の外に導かれたガラス基板保持部材10における各基板ホルダ12をマガジンベース11から分離させて、各基板ホルダ12に保持された焼成後の各ガラス基板1を取り出すと共に、上記のようにガラス基板保持部材10をマガジンベース11と各基板ホルダ12とに分離させたままの状態で、上記の焼成炉20の下に設けたコンベアなどの戻し装置30によって焼成炉20の装入口20a側に戻すようにしている。   Moreover, in the glass substrate continuous baking apparatus in this embodiment, each substrate holder 12 in the glass substrate holding member 10 led out of the baking furnace 20 from the extraction door 24 of the baking furnace 20 as described above from the magazine base 11. Each glass substrate 1 after firing that has been separated and held by each substrate holder 12 is taken out, and the glass substrate holding member 10 is separated into the magazine base 11 and each substrate holder 12 as described above. The return device 30 such as a conveyor provided under the firing furnace 20 is returned to the charging port 20a side of the firing furnace 20.

ここで、上記のようにガラス基板保持部材10をマガジンベース11と各基板ホルダ12とに分離させたままの状態にすると、その高さを低くすることができて、上記の焼成炉20の底部と戻し装置30との間隔を小さくすることができ、また従来のように戻し装置を焼成炉の横に設ける場合に比べて、ガラス基板連続焼成装置全体としての設置面積を小さくすることができる。   Here, when the glass substrate holding member 10 is left separated into the magazine base 11 and the substrate holders 12 as described above, the height can be reduced, and the bottom portion of the firing furnace 20 can be reduced. As compared with the conventional case where the return device is provided on the side of the firing furnace, the installation area of the entire glass substrate continuous firing device can be reduced.

また、焼成炉20の装入口20a側において、上記のようにガラス基板保持部材10の各基板ホルダ12に焼成処理するガラス基板1を保持させて、マガジンベース11の上に立設させるにあたり、この実施形態におけるガラス基板連続焼成装置においては、図4(A)に示すように、ガラス基板1を水平な状態にして、案内部材41に所要間隔で設けられた円形状の支持部材41aの上に保持させ、この案内部材41によりガラス基板1を、水平に倒した状態にある基板ホルダ12の枠体12aと前面止め部材12eとの間に導いて、ガラス基板1の端部を上記の受け部12bに当止め部材12cとに当接させるようにする。   Further, when the glass substrate 1 to be fired is held on each substrate holder 12 of the glass substrate holding member 10 as described above on the side of the inlet 20 a of the firing furnace 20, In the glass substrate continuous firing apparatus in the embodiment, as shown in FIG. 4A, the glass substrate 1 is placed in a horizontal state, and on a circular support member 41a provided on the guide member 41 at a required interval. The glass substrate 1 is guided by the guide member 41 between the frame body 12a of the substrate holder 12 and the front surface stopping member 12e in a state where the glass substrate 1 is tilted horizontally. 12b is brought into contact with the stopper member 12c.

そして、ロボット(図示せず)等により、図4(B)に示すように、上記のようにガラス基板1を案内部材41の支持部材41aに保持させた状態で、上記の基板ホルダ12と一緒に起立させ、その後、図4(C)に示すように、上記の案内部材41を基板ホルダ12から取り出した後、前記のように基板ホルダ12に設けられた取付脚12dをマガジンベース11に設けた取付穴11bに挿入させて、この基板ホルダ12をマガジンベース11の上に着脱自在に立設させるようにする。   Then, as shown in FIG. 4B, the glass substrate 1 is held together with the substrate holder 12 with the support member 41a of the guide member 41 as described above by a robot (not shown) or the like. 4C, after the guide member 41 is removed from the substrate holder 12, the mounting legs 12d provided on the substrate holder 12 are provided on the magazine base 11 as described above. The substrate holder 12 is detachably installed on the magazine base 11 by being inserted into the mounting holes 11b.

このようにすると、焼成処理するガラス基板1が大きくなった場合においても、このガラス基板1をガラス基板保持部材10に立てた状態で保持させる際に、ガラス基板1が撓んで割れたりするのが防止されるようになる。   In this case, even when the glass substrate 1 to be baked becomes large, when the glass substrate 1 is held on the glass substrate holding member 10 in a standing state, the glass substrate 1 is bent and cracked. Will be prevented.

また、上記のようにガラス基板保持部材10の各基板ホルダ12をマガジンベース11から分離させて、各基板ホルダ12に保持された焼成後の各ガラス基板1を取り出すにあたり、この実施形態におけるガラス基板連続焼成装置においては、マガジンベース11上に立設された状態にある基板ホルダ12を、図5(A)に示すように、ロボット(図示せず)等によりマガジンベース11から立てた状態で分離させた後、図5(B)に示すように、この基板ホルダ12の枠体12a内に、円形状の支持部材42aが所要間隔で設けられた取出し部材42を導いて、この取出し部材42の支持部材42aをガラス基板1に当接させるようにする。   Further, as described above, each substrate holder 12 of the glass substrate holding member 10 is separated from the magazine base 11 and each glass substrate 1 after firing held by each substrate holder 12 is taken out. In the continuous firing apparatus, the substrate holder 12 standing on the magazine base 11 is separated from the magazine base 11 by a robot (not shown) or the like as shown in FIG. Then, as shown in FIG. 5 (B), a take-out member 42 in which circular support members 42a are provided at a required interval is guided into the frame 12a of the substrate holder 12, and the take-out member 42 The support member 42a is brought into contact with the glass substrate 1.

そして、このように取出し部材42の支持部材42aをガラス基板1に当接させた状態で、上記のロボット等により、図5(C)に示すように、基板ホルダ12を倒して、ガラス基板1を水平な状態にして取出し部材42の支持部材42aの上に保持させ、その後、この取出し部材42によりガラス基板1を基板ホルダ12の枠体12aと前面止め部材12eとの間から取り出すようにする。   Then, with the support member 42a of the take-out member 42 in contact with the glass substrate 1 as described above, the substrate holder 12 is tilted by the robot or the like as shown in FIG. Are held on the support member 42a of the take-out member 42, and thereafter, the glass substrate 1 is taken out from between the frame 12a of the substrate holder 12 and the front surface stopping member 12e by the take-out member 42. .

このようにすると、前記のようにガラス基板1が大きくなった場合においても、ガラス基板保持部材10に立てた状態で保持された焼成後のガラス基板1を取り出す際に、ガラス基板1が撓んで割れたりするのが防止されるようになる。   In this way, even when the glass substrate 1 becomes larger as described above, the glass substrate 1 is bent when the glass substrate 1 after firing held in a state where it is stood on the glass substrate holding member 10 is taken out. It will be prevented from cracking.

この発明の一実施形態に係るガラス基板連続焼成装置に使用するガラス基板保持部材において、マガジンベースの上に、ガラス基板を立てた状態で保持する複数の基板ホルダを着脱自在に立設させた状態を示した概略説明図である。In the glass substrate holding member used in the glass substrate continuous firing apparatus according to one embodiment of the present invention, a state in which a plurality of substrate holders that hold the glass substrate in an upright state are detachably installed on the magazine base It is the schematic explanatory drawing which showed. 同実施形態において使用する上記のガラス基板保持部材における基板ホルダの概略正面図である。It is a schematic front view of the substrate holder in said glass substrate holding member used in the embodiment. 上記のガラス基板保持部材を用いてガラス基板を焼成処理するこの発明の一実施形態に係るガラス基板連続焼成装置の概略説明図である。It is a schematic explanatory drawing of the glass substrate continuous baking apparatus which concerns on one Embodiment of this invention which bakes a glass substrate using said glass substrate holding member. 同実施形態に係るガラス基板連続焼成装置において、上記のガラス基板保持部材における基板ホルダに焼成処理するガラス基板を立てた状態で保持させる工程を示した概略説明図である。In the glass substrate continuous baking apparatus which concerns on the embodiment, it is the schematic explanatory drawing which showed the process hold | maintained in the state which stood the glass substrate to baking at the substrate holder in said glass substrate holding member. 同実施形態に係るガラス基板連続焼成装置において、焼成処理後のガラス基板を上記のガラス基板保持部材における基板ホルダから取り出す工程を示した概略説明図である。In the glass substrate continuous baking apparatus which concerns on the embodiment, it is the schematic explanatory drawing which showed the process of taking out the glass substrate after baking processing from the substrate holder in said glass substrate holding member.

符号の説明Explanation of symbols

1 ガラス基板
10 ガラス基板保持部材
11 マガジンベース
11a 上面
11b 取付穴
12 基板ホルダ
12a 枠体
12a1 側枠
12b 受け部
12c 当止め部材
12d 取付脚
12e 前面止め部材
20 焼成炉
20a 装入口
20b 抽出口
21 装入扉
22 搬送装置
23 循環ファン
24 抽出扉
30 戻し装置
41 案内部材
41a 支持部材
42 取出し部材
42a 支持部材
DESCRIPTION OF SYMBOLS 1 Glass substrate 10 Glass substrate holding member 11 Magazine base 11a Upper surface 11b Mounting hole 12 Substrate holder 12a Frame body 12a1 Side frame 12b Receiving part 12c Holding member 12d Mounting leg 12e Front surface stopping member 20 Firing furnace 20a Inlet 20b Extraction port 21 Installation Entrance door 22 Transport device 23 Circulating fan 24 Extraction door 30 Return device 41 Guide member 41a Support member 42 Extraction member 42a Support member

Claims (4)

ガラス基板を立てた状態で保持する基板ホルダが、マガジンベースの上に所要間隔を介して複数着脱自在に立設されてなるガラス基板保持部材を用い、このガラス基板保持部材に複数のガラス基板を立てた状態で保持させ、このガラス基板保持部材を搬送装置により焼成炉の装入口から抽出口に向けて焼成炉内を順々に移動させて、このガラス基板保持部材に保持されたガラス基板を焼成処理するガラス基板連続焼成装置において、上記の焼成炉の下又は上の位置に、上記のガラス基板保持部材におけるマガジンベースと基板ホルダとを分離させた状態で焼成炉の装入口側に戻す戻し装置を設けると共に、上記の焼成炉の装入口側に、ガラス基板を水平状態にしてマガジンベースから分離された基板ホルダにセットするガラス基板導入手段と、ガラス基板がセットされた上記の基板ホルダを起立させて上記のマガジンベースに取り付ける基板ホルダ取付手段とを設けたことを特徴とするガラス基板連続焼成装置。A substrate holder for holding the glass substrate in an upright state uses a glass substrate holding member that is detachably mounted on the magazine base with a predetermined interval, and a plurality of glass substrates are attached to the glass substrate holding member. The glass substrate holding member is held in an upright state, and the glass substrate holding member is moved in order in the baking furnace from the inlet of the baking furnace to the extraction port by the transfer device, and the glass substrate held by the glass substrate holding member is moved. In the continuous baking apparatus for the glass substrate to be baked, the magazine base and the substrate holder in the glass substrate holding member are separated and returned to the loading side of the baking furnace at a position below or above the baking furnace. And a glass substrate introduction means for setting the glass substrate on a substrate holder separated from the magazine base in a horizontal state on the inlet side of the firing furnace. The above substrate holder glass substrate is set by standing the glass substrate continuous firing apparatus characterized in that a substrate holder attachment means for attaching to the magazine base. ガラス基板を立てた状態で保持する基板ホルダが、マガジンベースの上に所要間隔を介して複数着脱自在に立設されてなるガラス基板保持部材を用い、このガラス基板保持部材に複数のガラス基板を立てた状態で保持させ、このガラス基板保持部材を搬送装置により焼成炉の装入口から抽出口に向けて焼成炉内を順々に移動させて、このガラス基板保持部材に保持されたガラス基板を焼成処理するガラス基板連続焼成装置において、上記の焼成炉の下又は上の位置に、上記のガラス基板保持部材におけるマガジンベースと基板ホルダとを分離させた状態で焼成炉の装入口側に戻す戻し装置を設けると共に、上記の焼成炉の抽出口側に、焼成後のガラス基板を保持する上記の基板ホルダを上記のマガジンベースから離脱させて水平状態にセットする基板ホルダ離脱手段と、上記の水平状態にセットされた基板ホルダから上記のガラス基板を取り出すガラス基板排出手段とを設けたことを特徴とするガラス基板連続焼成装置。A substrate holder for holding the glass substrate in an upright state uses a glass substrate holding member that is detachably mounted on the magazine base with a predetermined interval, and a plurality of glass substrates are attached to the glass substrate holding member. The glass substrate holding member is held in an upright state, and the glass substrate holding member is moved in order in the baking furnace from the inlet of the baking furnace to the extraction port by the transfer device, and the glass substrate held by the glass substrate holding member is moved. In the continuous baking apparatus for the glass substrate to be baked, the magazine base and the substrate holder in the glass substrate holding member are separated and returned to the loading side of the baking furnace at a position below or above the baking furnace. An apparatus is provided, and the substrate holder for holding the glass substrate after firing is detached from the magazine base and set in a horizontal state on the extraction port side of the firing furnace. A substrate holder withdrawal means that a glass substrate continuous firing apparatus characterized by comprising a glass substrate discharge means for removing the glass substrate from the substrate holder set in a horizontal state of the. 請求項2に記載したガラス基板連続焼成装置において、上記の焼成炉の装入口側に、ガラス基板を水平状態にしてマガジンベースから分離された基板ホルダにセットするガラス基板導入手段と、ガラス基板がセットされた上記の基板ホルダを起立させて上記のマガジンベースに取り付ける基板ホルダ取付手段とを設けたことを特徴とするガラス基板連続焼成装置。The glass substrate continuous firing apparatus according to claim 2, wherein a glass substrate introduction means for placing the glass substrate in a horizontal state and setting it on a substrate holder separated from the magazine base is disposed on the inlet side of the firing furnace. A glass substrate continuous firing apparatus, comprising: a substrate holder attaching means for raising the set substrate holder and attaching it to the magazine base. 請求項1〜請求項3の何れか1項に記載したガラス基板連続焼成装置において、上記の焼成炉の下又は上の位置に、上記のガラス基板保持部材におけるマガジンベースと基板ホルダとを分離させて水平にした状態で焼成炉の装入口側に戻す戻し装置を設けたことを特徴とするガラス基板連続焼成装置。The glass substrate continuous firing apparatus according to any one of claims 1 to 3, wherein the magazine base and the substrate holder in the glass substrate holding member are separated at a position below or above the firing furnace. A glass substrate continuous firing apparatus, characterized in that a return device is provided to return to the inlet side of the firing furnace in a horizontal state.
JP2006248909A 2006-09-14 2006-09-14 Glass substrate continuous firing equipment Expired - Fee Related JP5137363B2 (en)

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JP2006248909A JP5137363B2 (en) 2006-09-14 2006-09-14 Glass substrate continuous firing equipment
TW096121461A TW200812925A (en) 2006-09-14 2007-06-14 Glass substrate-retaining member and continuous burning apparatus for glass substrate
KR1020070060276A KR20080024959A (en) 2006-09-14 2007-06-20 Glass substrate-retaining member and continuous burning apparatus for glass substrate
CNA2007101280601A CN101143760A (en) 2006-09-14 2007-06-25 Glass substrate holding component and glass substrate continuously calcining device

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