200812925 • 九、發明說明: ,(相關申請案) 本案係根據曰本專利申請案號2〇〇6_2489〇9號而主張 優先權者。 【發明所屬之技術領域】 本發明係關於一種將使用於電漿顯示器(以下簡稱為 PDP)等之複數個玻璃基板保持在直立狀態進行鍛燒而使 用的玻璃基板保持構件,以及在該玻璃基板保持構件將複 、數個玻璃基板保持直立狀態並藉由搬運裝置於鍛燒爐内依 序地予以移動、而對保持於該玻璃基板保持構件之玻璃基 板進仃鍛燒處理之玻璃基板連續鍛燒裝置,尤其具有以下 特徵者:在將上述玻璃基板保持構件予以改良,並設有於 鍛燒後使該玻璃基板保持構件回到锻燒爐裝a 口侧之回送 裝置時’具有抑制玻璃基板連續锻燒裝置整體的設置面積 變大之特點。 、 【先前技術】 純用玻㈣«造PDP料,通”形成於玻璃基 板上的隔壁、螢光體、或密封轴料(sealfrit)進行锻燒。 在此’在將上述玻璃基板進行锻燒處理時,為了抑制 力玻.璃基板在锻燒時產生歪斜,通t在以耐熱玻璃構成之托 架(嫌〇上水平載置上述玻璃基板,此外將如此於把竿 ^水平載置玻璃基板者在上下方向隔著所需間隔而疊層複 數個,並藉由爐床滾筒(hea油_er)等搬運裝置使 複數個疊層者在锻燒爐内移動,透過輻射主體的加執來進 319304 5 200812925 •行锻燒的動作。 …、 透過軺射主體的加熱對如此於托架上水平載置 离土板者進仃鍛燒動作時,朝玻璃基板的熱 變小 J 若^栋田 μ 4’入日 宜層之玻璃基板的數量增加,則各玻璃基 溫差將變大而難以進行穩定的锻燒處理。因此,0 = 玻璃基板數量無法增加太多,不能有效率地將玻璃基板進 行锻燒處理的問題。 p 一,近年來如日本國特開平u_3n484號公報所揭 0卞有種於托盤上以直立狀態保持複數枚玻璃基 並在於此狀態下藉由爐床滾筒等搬運裝置使上述托盤 2锻燒爐内移動的同時,於該锻燒爐内將加熱的氣體從上 辽至下方以對上述破璃基板進行锻燒處理者。 能ΪΓ i為了在如上述於托盤上以直立狀態保持複數枚 二W於托盤上安裝以溶接L型角材等所組裝成 心:月ίί女裝於該框架之側部支持板的侧部支持構件 頁’於藉由該板片彈菁挟持上述玻璃基板之側 端:二將下端支持構件設於托盤上,使玻璃基板之下 知支持在该下端支持構件。 =後,在如上述之托盤上以直立狀態保持複數枚玻璃 二板並於锻燒爐内進行锻燒處理後,將上述托盤送回至鍛 w盧的裝人口側時,通常於锻燒爐h置滾筒式輸送機 (roll⑽—)等回送裝置,藉由該回送裝置將 框體等的托盤以維持該狀態的方式沿著锻燒爐搬運而予以 送回。 319304 6 200812925 然而,如此於鍛燒爐旁設置滾筒式輸送機等回送 時’必須要有該回送裝置用的执罢 置用的^又置面知,而有所謂破璃基 板連續鍛燒裝置整體的設置面積變大之問題。200812925 • IX. Invention Description: (Related application) This case is based on the patent application No. 2〇〇6_2489〇9. [Technical Field] The present invention relates to a glass substrate holding member used for holding a plurality of glass substrates used in a plasma display (hereinafter abbreviated as PDP) in an upright state, and for use in the glass substrate. The holding member holds the plurality of glass substrates in an upright state and sequentially moves them in the calcining furnace by the conveying device, and continuously forges the glass substrate which is subjected to the calcining treatment on the glass substrate held by the glass substrate holding member. In particular, the above-described glass substrate holding member is improved in that the glass substrate holding member is provided after the calcination, and the glass substrate holding member is returned to the returning device on the side of the calciner, and has a glass substrate. The overall installation area of the continuous calcining device is characterized by an increase in the installation area. [Prior Art] Pure glass (4) «made PDP material, pass" is formed on the glass substrate by a partition, a phosphor, or a seal shaft (sealfrit) for calcination. Here, the glass substrate is calcined. During the treatment, in order to suppress the force of the glass substrate, the glass substrate is skewed during the calcination, and the tray is placed on the holder made of heat-resistant glass (the glass substrate is placed horizontally on the surface of the glass), and the glass substrate is placed horizontally. A plurality of layers are stacked in the vertical direction at a required interval, and a plurality of laminators are moved in the calciner by a conveying device such as a hearth drum (hea oil) to transmit the radiation body. 319304 5 200812925 • The action of the calcination. ..., by the heating of the squirting body, when the slab is placed horizontally on the carrier, the heat toward the glass substrate becomes small. When the number of glass substrates in the field 4's into the Japanese layer is increased, the temperature difference between the glass bases will become large and it is difficult to perform stable calcination treatment. Therefore, 0 = the number of glass substrates cannot be increased too much, and the glass cannot be efficiently efficiently Substrate for calcination In the recent years, as disclosed in Japanese Laid-Open Patent Publication No. H_3n484, a plurality of glass substrates are held in an upright state on a tray, and the tray 2 is forged by a conveying device such as a hearth roller in this state. While the inside of the furnace is moving, the heated gas is burned from the upper part to the lower side in the calcining furnace, and the glass substrate is calcined. In order to maintain a plurality of pieces in an upright state on the tray as described above. The two W are assembled on the tray to be assembled by melting the L-shaped angle material, etc.: the side support member page of the side support plate of the frame is held on the side of the glass substrate by the sheet elastic End: The lower end support member is disposed on the tray so that the support member at the lower end is supported under the glass substrate. After that, the plurality of glass plates are held in an upright state on the tray as described above and are carried out in the calciner. After the calcination treatment, when the tray is returned to the loading side of the forged w-lu, the returning device such as a roller conveyor (roll (10)) is usually placed in the calciner h, and the tray of the casing or the like is placed by the feeding device. To maintain the The mode is sent back along the kiln. 319304 6 200812925 However, when the drum conveyor is provided next to the kiln, it is necessary to have the return device for the return device. As described above, there is a problem that the entire installation area of the so-called glass substrate continuous calcining apparatus becomes large.
此外’如近年來之情形,絲燒處理之玻縣板變大, 則將玻璃基板舉起時的撓曲變大而容易破裂。因此,如上 述在一體地設置於托盤上之框體的側部支持板安裝側部支 持構件,並藉由設置於該側部支持構件的板片彈簧挟持上 述玻璃基板之側料方式,亦有將玻板以直立狀態保 持於托盤上的作業變得非常困難的問題。 【發明内容】 (發明欲解決的課題) *本發日狀目的在於,在將使料PDP等之玻璃基板連 績進行鍛燒處理之玻璃基板連續锻燒裝置中,提供以直立 狀態保持複數個玻璃基板之新穎的玻璃基板保持構件,即 使在锻燒處理之玻璃基板變大的情形下,亦可使該玻璃基 U板於玻璃基板保持構件適當地保持直立狀態。 4此外,本發明其他的目的係為,於锻紐將該玻璃基 板保持構件送回鍛燒爐的裝入口側設置回送裝置之情形 中,抑制玻璃基板連續鍛燒裝置整體的設置面積變大。 (解決課題的手段) “在本發明中,為了解決如上述的課題,係將在倉匣基 座(magazine base)上,隔著必要間隔且裝卸自由地立設 有Μ直立狀態保持玻璃基板的複數個基板支架予以使用 為用以將複數個玻璃基板保持在直立狀態進行鍛燒的玻 319304 7 200812925 ^ 璃基板保持構件。 • 此外,在本發明之玻璃基板連續鍛燒裝置中,係在上 j玻璃基板保持構件以直立狀態保持複數個玻璃基板,並 藉由搬運裝置使該玻璃基板保持構件從鍛燒爐的裝入口朝 向抽出口在鍛燒爐内依序地移動,且對保持於該玻璃基板 保持構件之玻璃基板進行鍛燒處理,該鍛燒裝置係於上述 鈑燒爐之下或上的位置,設有在使上述玻璃基板保持構件 中之启匣基座與基板支架以呈分離的狀態被送回鍛燒爐裝 / 入口侧的回送裝置。 在此,於上述玻璃基板連續鍛燒裝置中,在上述鍛燒 爐的裝入口側,以設有下述手段為佳,該手段包括··玻璃 基板導入手段,係使玻璃基板成為水平狀態而安置在從倉 匣基座分離之基板支架;以及基板支架安裝手段,係使安 置有玻璃基板之上述基板支架立起而安裝於上述倉匣基 座。 ^ 此外,於上述鍛燒爐的抽出口侧,以設有下述手段為 佳,該手段包括:基板支架脫離手段,係使保持鍛燒後之 玻璃基板的上述基板支架從上述倉匿基座脫離並予以安置 為水平狀態;以及玻璃基板排出手段,係從被安置為上述 水平狀態的基板支架取出上述玻璃基板。 (發明的效果) 在本發明之玻璃基板保持構件中,由於在倉匠基座上 隔著必要間隔且裝卸自由地立設置複數個以直立狀態保持 玻璃基板的基板支架,因而可在使基板支架從倉匣基座分 319304 8 200812925 •離的狀態下,將玻璃基板安置於該基板支架,或將鍛燒處 •理後之玻璃基板從該基板支架取出。此外,將鍛燒處理後 之玻璃基板從該基板支架取出後,亦可在分離成該基板支 架與倉匣基座的狀態下予以送回至鍛燒爐的裝入口側。 然後,在本發明之玻璃基板連續鍛燒裝置中,由於將 回送衣置δ又置於锻燒爐之下或上的位置,其中該回送裝置 係如上述在使基板支架與倉匣基座分離的狀態下使玻璃基 板保持構件送回至鍛燒爐裝入口側,因此無須如以往在鍛 ^燒爐旁設置回送裝置,即可使玻璃基板連續鍛燒裝置整體 的設置面積變小。 此外’如上所述於鍛燒爐的裝入口侧,設置玻璃基板 ν入手&與基板支架安裝手段,在藉由玻璃基板導入手段 使玻璃基板成為水平狀態並予以安置在從倉g基座分離之 基板支架’並藉由基板支架安裝手段使如上所述安裝有玻 璃基板的基板支架立起並予以安裝在倉匣基座時,即使在 I鍛燒處理的玻璃基板變大的情形下,也能防止在將該玻璃 基板以直立狀悲保持於玻璃基板保持構件時玻璃基板撓曲 破裂。因此,即使為大的玻璃基板,亦可保持於該基板支 4並於玻璃基板保持構件適當地以直立狀態被保持。 再者,如上述於鍛燒爐的抽出口侧,設置基板支架脫 離手段與玻璃基板排出手段,在藉由基板支架脫離手段使 保持鍛燒後之玻璃基板的基板支架從倉匿基座脫離而安裝 為水平狀態,並藉由玻璃基板排出手段從安裝為如此之水 平狀態的基板支架取出玻璃基板時,即使為如上述之巨大 319304 9 200812925 '的玻璃基板也能防止破璃基板因撓曲而破列^ ^ ^ •從玻璃基板保持構件予以取出叫曲而破髮,而可適當地 本!X明之目的、優點及特徵係根據以下描述以及 本發明具體實施例之附圖而得以實現。 ” 【實施方式】 ' 以下㈣_具體地說明本發明之實施型態的破璃基 板保持構件及玻璃基板連續锻燒裝置。另外,有關本發$ 之玻璃基板保持構件及玻璃基板連續鍛燒裝置係非限定於 下述實施形態所示者,在不變更發明主旨的範圍,可適當 變更而實施者。 田 在該實施形態之玻璃基板保持構件1〇中,如第i圖所 示’於倉£基s η上裝卸自由地立設有使玻璃基板i以直 立狀怨被保持之複數個基板支架12。 在此如第1圖及第2圖所示,於上述基板支架12中, 在形成四角環形之框體12a下部形成支持玻璃基板i之下 、端的承載部12b,於該承载部12b上設有抑制玻璃基板i 之偏移的擋止構件12c,且從該承载部12b朝下方延伸出 安裝腳12d,此外以使其比上述框體12a之側框12&1更突 出於前方之方式,將前面擋止構件12e安裝成跨越於兩側 之側框12al。 另一方面,在上述倉匣基座u中,如第2圖所示,在 其上面lla設有使設置於上述基板支架12之安裝腳12d 插入的安裝孔11 b。 然後’將設置於上述各基板支架12的安裝腳12d分別 319304 10 200812925 使各基板支架12 插入設置於倉匣基座η之安裝孔nb 裝卸自由地立設於倉匣基座η上。 此外’在該實施形態之玻璃基板連續锻燒裝置中,如 以上所述在玻璃基板保持構件〗0之倉匿基座11上,立設 f將玻璃基板1保持直立狀態之複數個基板支架12的狀 恶,如第3圖所示,將該玻璃基板保持構件1〇從設置於鍛 燒爐20之裝入口 20a的襄入門21依序裝入至锻燒爐2〇Further, as in the case of recent years, when the glass plate of the wire-fired treatment is increased, the deflection when the glass substrate is lifted up is large and the film is easily broken. Therefore, as described above, the side support members are integrally attached to the side support plates of the frame body integrally provided on the tray, and the side plates of the glass substrate are held by the leaf springs provided on the side support members. The problem of holding the glass plate in an upright state on the tray becomes a very difficult problem. [Problems to be Solved by the Invention] The purpose of the present invention is to provide a glass substrate continuous calcining apparatus in which a glass substrate such as a PDP or the like is subjected to calcination treatment, and a plurality of sheets are kept in an upright state. In the novel glass substrate holding member of the glass substrate, even when the glass substrate for calcination is large, the glass-based U plate can be appropriately held in an upright state on the glass substrate holding member. Further, another object of the present invention is to prevent the installation area of the entire glass substrate continuous calcining apparatus from being increased in the case where the glass substrate holding member is returned to the inlet side of the calcining furnace to provide a returning device. (Means for Solving the Problem) In the present invention, in order to solve the above problems, the glass substrate is held in an upright state on the magazine base at a necessary interval. A plurality of substrate holders are used as a glass substrate holding member for holding a plurality of glass substrates in an upright state for honing. Further, in the continuous calcining apparatus for a glass substrate of the present invention, the system is attached thereto. j the glass substrate holding member holds a plurality of glass substrates in an upright state, and the glass substrate holding member is sequentially moved in the calciner from the charging inlet of the calciner toward the suction port by the conveying means, and is held in the same The glass substrate of the glass substrate holding member is subjected to a calcining treatment, and the calcining apparatus is disposed at a position below or above the crucible furnace, and is provided to separate the opening base and the substrate holder in the glass substrate holding member The state is sent back to the retort/inlet side returning device. Here, in the above-mentioned glass substrate continuous calcining apparatus, the above-mentioned calcining furnace is loaded. On the side, it is preferable to provide a means for introducing a glass substrate into a substrate holder which is horizontally placed and separated from the base of the magazine; and a substrate holder mounting means for positioning The substrate holder having the glass substrate is erected and attached to the cartridge base. Further, it is preferable to provide the following means on the discharge port side of the calciner, and the means includes: a substrate holder detaching means The substrate holder that holds the glass substrate after calcination is detached from the storage base and placed in a horizontal state; and the glass substrate discharge means removes the glass substrate from the substrate holder placed in the horizontal state. (Effect of the invention) In the glass substrate holding member of the present invention, since the substrate holder holding the glass substrate in an upright state is provided on the mortuary base at a necessary interval and detachably and detachably, the substrate holder can be removed from the warehouse.匣Base 319304 8 200812925 •In the state of separation, place the glass substrate on the substrate holder, or place the calcination The glass substrate is taken out from the substrate holder. Further, after the glass substrate after the calcination treatment is taken out from the substrate holder, it can be returned to the calciner in a state where the substrate holder and the cartridge base are separated. Then, in the continuous calcining apparatus for glass substrate of the present invention, since the returning garment δ is placed at a position below or above the calcining furnace, the loopback device is as described above for the substrate holder and the cartridge base. Since the glass substrate holding member is returned to the inlet side of the calciner in a state where the seat is separated, it is not necessary to provide a returning device in the vicinity of the forging furnace, and the entire installation area of the glass substrate continuous calcining apparatus can be made small. Further, as described above, the glass substrate ν starter & and the substrate holder mounting means are provided on the inlet side of the calciner, and the glass substrate is horizontally placed by the glass substrate introduction means and placed in the detachment from the clerk g base. The substrate holder 'and the substrate holder on which the glass substrate is mounted as described above is erected by the substrate holder mounting means and mounted on the cartridge base, even in the I forging Lower glass substrate processing situation becomes large, the glass substrate can be prevented from cracking when flexing the glass substrate holding member holding sad to erect on the glass substrate. Therefore, even a large glass substrate can be held by the substrate support 4 and held in an upright state in the glass substrate holding member. Further, as described above, the substrate holder detaching means and the glass substrate discharging means are provided on the discharge port side of the dig furnace, and the substrate holder for holding the tempered glass substrate is detached from the accommodating base by the substrate holder detaching means. When the glass substrate is removed from the substrate holder mounted in such a horizontal state by the glass substrate discharge means, the glass substrate of the large 319304 9 200812925' can be prevented from being deflected by the glass substrate. Broken ^ ^ ^ • Remove the call from the glass substrate holding member and break it, and properly! The objects, advantages and features of the present invention are realized in accordance with the following description and the accompanying drawings. [Embodiment] The following is a description of a glass substrate holding member and a glass substrate continuous calcining apparatus according to an embodiment of the present invention, and a glass substrate holding member and a glass substrate continuous calcining apparatus according to the present invention. The present invention is not limited to the scope of the invention, and can be appropriately changed without departing from the scope of the invention. The glass substrate holding member 1 of the embodiment is as shown in Fig. A plurality of substrate holders 12 for holding the glass substrate i in an upright manner are erected on the basis s η. Here, as shown in Figs. 1 and 2, the substrate holder 12 is formed. A lower portion of the frame 12a of the four-corner ring is formed with a supporting portion 12b for supporting the lower end of the glass substrate i, and a stopper member 12c for suppressing the deviation of the glass substrate i is provided on the carrying portion 12b, and extends downward from the carrying portion 12b. The mounting leg 12d is ejected, and the front stopper member 12e is attached across the side frames 12al on both sides so as to protrude further from the side frame 12&1 of the frame 12a. Cang Jiji u, as shown in Fig. 2, a mounting hole 11b for inserting the mounting leg 12d provided on the substrate holder 12 is provided on the upper surface 11a. Then, the mounting legs 12d provided in the respective substrate holders 12 are respectively 319304. 10 200812925 The substrate holder 12 is inserted into the mounting hole nb of the cartridge base η, and is detachably mounted on the cartridge base η. Further, in the glass substrate continuous calcining apparatus of the embodiment, as described above In the storage base 11 of the glass substrate holding member 00, the plurality of substrate holders 12 that hold the glass substrate 1 in an upright state are erected, and the glass substrate holding member 1 is as shown in FIG. The crucible is inserted into the calciner 2 from the crucible inlet 21 provided in the inlet 20a of the calciner 20.
内。然後’藉由設置於該鍛燒爐2〇内且由爐床滾筒構成之 搬運裝置22’使如上述農人之玻璃基板保持構件1〇依序 於鍛燒爐20内移動。 此外’藉由設置於該鍛燒爐20之上部的循環風扇23, 將透過加熱器(heater)等加熱手段(未圖示)加熱的氣 體從上方送至下方,並藉由該被加熱之氣體將以直立狀能 保持於各玻璃基板保持構件1Ό之基板支架22的玻璃基板 1依序加熱以進行鍛燒處理。 然後,將f已如此對玻璃基板i進行鍛燒處理之玻璃 基板保持構件10,從設置於鍛燒爐20之抽出口 2〇b的抽 出門24依序引導至鍛燒爐2〇外。 此外,於該實施形態之玻璃基板連續鍛燒裝置中,將 如上所述從鍛燒爐20的抽出門24被引導至鍛燒爐初外之 玻璃基板保持構件10的各基板支架12從倉匣基座11予以 分離’並取出保持於各基板支架12之鍛燒後的各玻璃基2 1。然後,如上述藉由設置於上述鍛燒爐2〇之下的輸送帶 等回送裝置30,在倉匣基座U與各基板支架12維持著$ 319304 11 200812925 10送回至鍛燒爐20之裝 離的狀悲下將玻璃基板保持構件 入口 20a側。 在此’如上述於锻燒爐2〇之下設置回送裝置%時, :目=乂 :將回送裳置設於锻燒爐旁的情形,可使玻璃基 板連、,鍛U置整體的設置面積變小。此外,如上所述使 玻璃,板保持構件1G分離成”基座u與各基板支架η 的狀態時’可使其高度變低而能夠使上述鍛燒爐20的底部 與回送裝置30的間隔變小。Inside. Then, the glass substrate holding member 1 of the above-mentioned farmer is moved in the inside of the calcining furnace 20 by the conveying device 22' which is provided in the calcining furnace 2 and is composed of a hearth drum. Further, by the circulation fan 23 provided in the upper portion of the calciner 20, a gas heated by a heating means (not shown) such as a heater is sent from above to the lower side, and the heated gas is used. The glass substrate 1 which can be held in the vertical direction on the substrate holder 22 of each of the glass substrate holding members 1 is sequentially heated to perform a calcination treatment. Then, the glass substrate holding member 10 which has been subjected to the calcination treatment of the glass substrate i in this manner is sequentially guided from the extraction door 24 provided in the extraction port 2〇b of the calciner 20 to the outside of the calciner 2 . Further, in the glass substrate continuous calcining apparatus of the embodiment, the substrate holder 12 of the glass substrate holding member 10 of the calcining furnace is guided from the drawing door 24 of the calcining furnace 20 as described above. The susceptor 11 is separated '' and the glass bases 21 held after calcination of each of the substrate holders 12 are taken out. Then, as described above, by the returning device 30 such as a conveyor belt provided under the above-mentioned calciner 2, the cartridge base U and each of the substrate holders 12 are returned to the calciner 20 by holding $319304 11 200812925 10 The glass substrate is held on the side of the inlet 20a of the member. Here, when the returning device % is set under the simmering furnace 2 上述, the following is the case: when the returning skirt is placed beside the smelting furnace, the glass substrate can be connected and the forging U can be set as a whole. The area becomes smaller. Further, as described above, when the glass and the plate holding member 1G are separated into the "state of the susceptor u and the respective substrate holders η", the height can be made low, and the interval between the bottom of the aging furnace 20 and the returning device 30 can be changed. small.
此外,在鍛燒爐20之裝入口 2〇a側,為了如上所述將 鍛燒處理之玻縣W保持在玻璃基板保持構件ιό之各基 板支架12並予以立設於倉£基座u上,在該實施形態之 玻璃基板連續锻燒裝置中,如第4圖(A)所示,使玻璃 基板1成為水平狀態並保持在以必要間隔設置於引導構件 41之圓形的支持構件41a上,且藉由該引導構件4ι將玻 璃基板1引導至處於水平倒下狀態之基板支架12的框體 12a 14鈾面擋止構件J2e之間,使玻璃基板}的端部抵接 到上述承载部12b與擋止構件i2c。 然後,如第4圖(B)所示,藉由機器人(未圖示) 等,以如上所述將玻璃基板丨保持於引導構件41之支持構 件41a的狀態下,使其與上述基板支架12 一起立起後,如 第4圖(C)所示,使上述引導構件41從基板支架12取 出。之後’如上所述將設置於基板支架12之安裝腳l2d 插入至設置於倉匣基座u之安裝孔ut),而使該基板支架 12裝卸自由地立設於倉匣基座1]L上。 12 319304 200812925 ' /如此進行時,即使在鍛燒處理之玻璃基板i變大的情 '形下,在將該玻璃基板1以直立狀態保持》玻璃基板保持 構件10時,也能防止玻璃基板〗彎曲破裂。 此外’如上所述將玻璃基板保持構件〗〇的各基板支架 Η從倉E基座U分離,並將保持於各基板支架12之锻燒 後之各玻璃基板1予以取出時,在該實施形態之玻璃基板 連續鍛燒裝置中,係將處於立設於倉g基座n上之狀態的 基板支架12,如第5圖(A)所示,藉由機器人(未圖 等以直立狀態使其從倉^基座U分離後,如第5圖⑻ 所不,將以必要間隔設置有圓形的支持構件42&之取出構 件42導引至該基板支架12的框架12a内,使該取出構件 42之支持構件42a抵接到玻璃基板^。 然後,如此在使取出構件42之支持構件42a抵接到玻 璃基板1的狀態下,藉由上述之機器人等,如第5圖(C) 所示,使基板支架12倒下並使玻璃基板丨成為水平狀態而 保持於取出構件42之支持構件42a上,之後藉由該取^構 件42將玻璃基板!從基板支架12的框體l2a與前面 構件12e之間取出。 如此進行時,即使如上所述在玻璃基板1變大的情形 下,在將以直立狀態保持於玻璃基板保持構件10的鍛燒後 之玻璃基板1予以取出時,也能防止玻璃基板丨彎曲破裂。 雖然已藉例示完全描述本發明,但熟習該技術領域者 仍可實行各種變更及修飾。 因此,只要不脫出本發明之範圍,均可作變更及修飾, 319304 13 200812925 -惟仍應涵蓋在本發明所申請之專利範圍内。 •【圖式簡單說明】 第1圖係顯示在本發明之一實施形態的玻璃基板保持 構件中’於倉ϋ基座上裝卸自由地立設以直立狀態保持破 璃基板之複數個基板支架的狀態之概要說明圖。 第2圖係為在該實施形態之玻璃基板保持構件的基板 支架之概要正面圖。 第3圖係為使用該實施形態之玻璃基板保持構件將玻 Γ璃基板進行鍛燒處理之本發明之一實施形態的玻璃基板連 縯鍛燒裝置之概要說明圖。 第4圖(A )至(C )係顯示在該實施形態之玻璃基板 連續给燒裝置中,將鍛燒處理之玻璃基板以直立狀態保持 於上述玻璃基板保持構件之基板支架的步驟之概要說明 圖。 第5圖(A)至(C)係顯示在該實施形態之玻璃基板 “連續鍛燒裝置中,將鍛燒處理後之玻璃基板從上述玻璃基 板保持構件的基板支架予以取出之步驟的概要說明圖。 【主要元件符號說明】 1 玻璃基板 10 玻璃基板保持構件 11 倉匣基座 11a 上面 lib 安裝孔 12 基板支架 12a 框體 12al 側框 12b 承載部 12c 撞止構件 12d 安裝腳 12e 前面擋止構件 319304 14 200812925 20 鍛燒爐 20a 20b 抽出口 21 22 搬運裝置 23 24 抽出門 30 41 引導構件 41a 42 取出構件 裝入口 裝入門 循環風扇 回送裝置 42a 支持構件 15 319304Further, on the side of the inlet 2〇a of the calciner 20, in order to hold the calcined glass County W on each of the substrate holders 12 of the glass substrate holding member ι as described above, it is erected on the susceptor u. In the glass substrate continuous calcining apparatus of the embodiment, as shown in Fig. 4(A), the glass substrate 1 is horizontally held and held on the circular support member 41a provided at a necessary interval on the guide member 41. And the glass substrate 1 is guided between the frame 12a of the substrate holder 12 in the horizontally collapsed state by the guiding member 4ι, and the end of the glass substrate is abutted to the above-mentioned bearing portion. 12b and the stopper member i2c. Then, as shown in FIG. 4(B), the glass substrate 丨 is held by the support member 41a of the guiding member 41 as described above by a robot (not shown) or the like, and the substrate holder 12 is attached to the substrate holder 12 as described above. After standing together, the guide member 41 is taken out from the substrate holder 12 as shown in Fig. 4(C). Then, the mounting leg l2d provided on the substrate holder 12 is inserted into the mounting hole ut provided in the cartridge base u as described above, and the substrate holder 12 is detachably mounted on the cartridge base 1]L. . 12 319304 200812925 ' / When this is done, even when the glass substrate 1 of the calcination process is enlarged, when the glass substrate 1 is held in the upright state, the glass substrate holding member 10 can be prevented. Bending and cracking. Further, when the substrate holders 玻璃 of the glass substrate holding member 分离 are separated from the hopper E base U as described above, and the glass substrates 1 held by the respective substrate holders 12 are taken out, the embodiment is taken out. In the glass substrate continuous calcining apparatus, the substrate holder 12 is placed in a state of being erected on the base n of the magazine g, as shown in Fig. 5(A), and is robotized (not shown or the like in an upright state). After being separated from the cartridge base U, as shown in Fig. 5 (8), the take-up member 42 provided with a circular support member 42 & at a necessary interval is guided into the frame 12a of the substrate holder 12 to make the take-up member The support member 42a of 42 is abutted against the glass substrate. Then, in a state where the support member 42a of the take-up member 42 is brought into contact with the glass substrate 1, by the above-described robot or the like, as shown in Fig. 5(C) The substrate holder 12 is dropped and the glass substrate 丨 is horizontally held on the support member 42a of the take-up member 42. Thereafter, the glass substrate is removed from the frame 12a and the front member of the substrate holder 12 by the take-up member 42. Take out between 12e. When doing this, even When the glass substrate 1 is enlarged as described above, it is possible to prevent the glass substrate from being bent and broken when the glass substrate 1 that has been immersed in the glass substrate holding member 10 in an upright state is taken out. The present invention is fully described, but various modifications and changes can be made by those skilled in the art. Therefore, modifications and changes can be made without departing from the scope of the invention, 319304 13 200812925 - but should still be covered by the present application. [Brief Description of the Drawings] Fig. 1 is a view showing a glass substrate holding member according to an embodiment of the present invention, which is detachably attached to a shovel base to hold the glass substrate in an upright state. FIG. 2 is a schematic front view of a substrate holder of the glass substrate holding member of the embodiment. FIG. 3 is a glass substrate holding member of the embodiment. A schematic view of a glass substrate continuous calcining apparatus according to an embodiment of the present invention in which the glass substrate is subjected to calcination treatment. Fig. 4 (A) to (C) show In the glass substrate continuous firing device of the embodiment, a schematic view of the step of holding the calcined glass substrate in the upright state on the substrate holder of the glass substrate holding member is shown in Fig. 5 (A) to (C). In the glass substrate "continuous calcining apparatus of the embodiment, the outline of the step of taking out the glass substrate after the calcination treatment from the substrate holder of the glass substrate holding member is shown. [Description of main component symbols] 1 Glass Substrate 10 Glass substrate holding member 11 Crocker base 11a Upper lib Mounting hole 12 Substrate holder 12a Frame 12al Side frame 12b Bearing portion 12c Collision member 12d Mounting foot 12e Front stopper member 319304 14 200812925 20 Forging furnace 20a 20b Port 21 22 handling device 23 24 extraction door 30 41 guiding member 41a 42 removal member loading port loading door circulation fan return device 42a supporting member 15 319304