CN101143760A - Glass substrate holding component and glass substrate continuously calcining device - Google Patents
Glass substrate holding component and glass substrate continuously calcining device Download PDFInfo
- Publication number
- CN101143760A CN101143760A CNA2007101280601A CN200710128060A CN101143760A CN 101143760 A CN101143760 A CN 101143760A CN A2007101280601 A CNA2007101280601 A CN A2007101280601A CN 200710128060 A CN200710128060 A CN 200710128060A CN 101143760 A CN101143760 A CN 101143760A
- Authority
- CN
- China
- Prior art keywords
- glass substrate
- frame
- substrate
- calcining
- holding component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B27/00—Tempering or quenching glass products
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B35/00—Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
- C03B35/14—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
- C03B35/20—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by gripping tongs or supporting frames
- C03B35/202—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by gripping tongs or supporting frames by supporting frames
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B25/00—Annealing glass products
- C03B25/04—Annealing glass products in a continuous way
- C03B25/06—Annealing glass products in a continuous way with horizontal displacement of the glass products
- C03B25/08—Annealing glass products in a continuous way with horizontal displacement of the glass products of glass sheets
- C03B25/087—Annealing glass products in a continuous way with horizontal displacement of the glass products of glass sheets being in a vertical position
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B27/00—Tempering or quenching glass products
- C03B27/012—Tempering or quenching glass products by heat treatment, e.g. for crystallisation; Heat treatment of glass products before tempering by cooling
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B29/00—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins
- C03B29/04—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a continuous way
- C03B29/06—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a continuous way with horizontal displacement of the products
- C03B29/08—Glass sheets
- C03B29/10—Glass sheets being in a vertical position
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B35/00—Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Furnace Charging Or Discharging (AREA)
- Tunnel Furnaces (AREA)
Abstract
After a glass substrate attachment component calcinates a number of glass substrates in erectility in calciner, the said glass substrate attachment component is sent back in the entrance side of the calciner using a return device, in order to prevent the whole area of a glass substrate continuous firing device from increasing. The glass substrate attachment component is used in a glass substrate continuous firing device to calcinate the glass substrate (1) on the glass substrate attachment component (10). The said glass substrate attachment component (10) at storing seat (11) is provided with a number of substrate holders (12) in erectility for enabling free attachment and detachment in a required interval. A return device (10) for returning the storing seat of the glass substrate attachment component and substrate holder in state of separating into the entrance side of the calciner is set at the position of under or above the calciner.
Description
Related application
The application requires the right of priority based on Japanese patent application No. 2006-248909 number.
Technical field
The present invention relates to a kind of plasma display panel (is designated hereinafter simply as PDP.) the multi-disc glass substrate that uses in waiting is held in erectility and carries out the incinerating glass substrate holding component, and with the multi-disc glass substrate to stand upright on state on this glass substrate holding component and kept and to utilize Handling device in calcining furnace, to move successively, carry out the glass substrate continuously calcining device of calcination processing to remaining on glass substrate on this glass substrate holding component, relate in particular to above-mentioned glass substrate holding component is improved, be provided with the device of sending back to of the oral-lateral of packing into of after calcining, this glass substrate holding component being sent back to calcining furnace, can suppress the device that area increases that is provided with of glass substrate continuously calcining device integral body.
Background technology
When utilizing glass substrate to make PDP etc., generally partition wall, fluor and the sealing glass material etc. that are formed on the glass substrate are calcined.
At this, when above-mentioned glass substrate is carried out calcination processing, glass substrate takes place crooked in order to prevent to calcine, usually above-mentioned glass substrate is lain in a horizontal plane on the setter that is made of thermal glass, have under the state of glass substrate they are a plurality of stacked across required compartment of terrain along the vertical direction in horizontal positioned on the above-mentioned setter then, the duplexer of the setter that obtains thus and glass substrate is utilized Handling device such as burner hearth roller-way in calcining furnace, move, calcine by the heating of radiating principal.
Yet, when the glass substrate of horizontal positioned is calcined by the heating of radiating principal on to setter, heat transfer speed to glass substrate is less, in the quantity of stacked glass substrate more for a long time, temperature head on each glass substrate is bigger, thus be difficult to carry out certain calcination processing, therefore, the quantity of stacked glass substrate can not be too much, causes carrying out calcination processing to glass substrate efficiently.
Therefore, in recent years, shown in Japanese patent laid-open 11-311484 communique, proposition remains on the multi-disc glass substrate on the pallet with erectility, under this state, above-mentioned pallet utilized Handling device such as burner hearth roller-way in calcining furnace, to move, and the gas after in this calcining furnace, will being heated from above deliver to below, above-mentioned glass substrate is carried out calcination processing.
At this, when remaining on pallet on erectility the multi-disc glass substrate as described above, to be mounted on the pallet by the framework that assembles such as L type angle steel being welded, on the side supports parts of the side brace panels that is installed on this framework, leaf spring is set, utilize the sidepiece of the above-mentioned glass substrate of this leaf spring clamping, and the lower end support component is set on pallet, the lower end of glass substrate is supported on this lower end support component.
Then, to the multi-disc glass substrate with after in calcining furnace, carrying out calcination processing at the state of being kept upright on the above-mentioned pallet, for above-mentioned pallet being sent back to the oral-lateral of packing into of calcining furnace, generally send device back to, utilize this to send the pallet that device will be equipped with framework etc. back to and keep its original state ground to transport back along calcining furnace at the other roller conveyer etc. of being provided with of calcining furnace.
Yet, like this in that calcining furnace is other when roller conveyer etc. being set sending device back to, must consider that this sends the area that is provided with of device back to, what cause glass substrate continuously calcining device integral body is provided with the area increase.
In addition, as situation in recent years, if it is bigger to carry out the glass substrate of calcination processing, then the amount of deflection when picking up glass substrate is big ruptures easily.Therefore, the sidepiece support component is installed on the side brace panels that is arranged on the framework on the pallet as described above with being integral, utilization is arranged on the sidepiece of the leaf spring clamping glass substrate on these side supports parts, makes glass substrate very difficult with the operation that erectility remains on the pallet.
Summary of the invention
The objective of the invention is to, carry out continuously in the substrate continuously calcining device of calcination processing at the glass substrate that will use among the PDP etc., a kind of novel glass substrate holder that the multi-disc glass substrate is held in erectility is provided, even it is bigger to carry out the glass substrate of calcination processing, also can make this glass substrate state of on glass substrate holding component, suitably being kept upright.
In addition, other purpose of the present invention is that under the situation of sending device back to that the oral-lateral of packing into of this glass substrate holding component after the calcining being sent back to calcining furnace is installed, the area that is provided with that suppresses glass substrate continuously calcining device integral body increases.
For addressing the above problem, among the present invention, carry out the incinerating glass substrate holding component as being used for that the multi-disc glass substrate is held in erectility, on Storage tray with the releasably upright a plurality of frame substrates that glass substrate are held in erectility that are provided with in required interval.
In addition, in the glass substrate continuously calcining device of the present invention, make the multi-disc glass substrate state of on above-mentioned glass substrate holding component, being kept upright, utilize Handling device that this glass substrate holding component is moved in calcining furnace to extracting mouth out successively from the loading port of calcining furnace, the glass substrate that remains on this glass substrate holding component is carried out calcination processing, below the above-mentioned calcining furnace or above the position on be provided with the device of sending back to of the oral-lateral of packing into of sending the Storage tray and the frame substrate of above-mentioned glass substrate holding component back to calcining furnace with isolating state.
At this, in the above-mentioned glass substrate continuously calcining device, the oral-lateral of packing into that is preferably in above-mentioned calcining furnace is provided with: glass substrate is placed on glass substrate on the frame substrate that has separated from Storage tray imports member and make the aforesaid substrate frame that is placed with glass substrate hold up and be installed in frame substrate installation component on the above-mentioned Storage tray with horizontality.
In addition, the extraction oral-lateral that is preferably in above-mentioned calcining furnace is provided with: the aforesaid substrate frame that keeps the glass substrate after the calcining is broken away from and the frame substrate that is placed as horizontality breaks away from member and discharges member from the glass substrate that the above-mentioned frame substrate that is placed as horizontality takes out above-mentioned glass substrate from above-mentioned Storage tray.
In the glass substrate holding component of the present invention, on Storage tray, make be kept upright a plurality of frame substrates of state of glass substrate with releasably upright being provided with in required interval, therefore under the state that frame substrate is broken away from from Storage tray, glass substrate can be arranged on this frame substrate, and the glass substrate after the calcination processing is taken out from this frame substrate.In addition, after the glass substrate after the calcination processing taken out from this frame substrate, frame substrate and Storage tray can be sent back to the oral-lateral of packing into of calcining furnace with isolating state.
And, in the glass substrate continuously calcining device of the present invention, as described above below the calcining furnace or above the position on be provided with glass substrate holding component send back to Storage tray and the isolating state of frame substrate calcining furnace the oral-lateral of packing into send device back to, therefore need not to reduce the area that is provided with of glass substrate continuously calcining device integral body as sent device back to other setting of calcining furnace in the past.
In addition, the oral-lateral of packing at above-mentioned calcining furnace is provided with glass substrate importing member and frame substrate installation component as described above, utilizing glass substrate to import member is placed on glass substrate from the isolating frame substrate of Storage tray with horizontality, after the frame substrate that will be placed with glass substrate like this utilizes the frame substrate installation component to be installed on the Storage tray with the state of holding up, even it is bigger to carry out the incinerating glass substrate, when making this glass substrate on glass substrate holding component, be kept upright state, also can prevent glass substrate generation deflection and rupture.Therefore, even bigger substrate also can remain on this frame substrate the state of suitably being kept upright on glass substrate holding component.
And, extraction oral-lateral at calcining furnace is provided with frame substrate disengaging member and glass substrate discharge member as described above, making the frame substrate that keeps the glass substrate after the calcining utilize frame substrate to break away from member breaks away from and is placed as horizontality from Storage tray, after utilizing glass substrate to discharge member taking-up glass substrate from the frame substrate that is placed as horizontality like this, even aforesaid bigger substrate, also can prevent glass substrate generation deflection and rupture, thereby suitably from glass substrate holding component, take out.
These and other purpose of the present invention, advantage and technical characterictic can become obvious after having seen following description and the accompanying drawing in conjunction with expression the specific embodiment of the present invention.
Description of drawings
Fig. 1 is that releasably upright being provided with makes the be kept upright diagrammatic illustration figure of state of a plurality of frame substrates of state of glass substrate in the glass substrate holding component of expression one embodiment of the present invention, on Storage tray.
Fig. 2 is the general principal view of the frame substrate in the glass substrate holding component of same embodiment.
Fig. 3 utilizes the glass substrate holding component of same embodiment glass substrate to be carried out the diagrammatic illustration figure of glass substrate continuously calcining device of one embodiment of the present invention of calcination processing.
Fig. 4 is in the glass substrate continuously calcining device of the same embodiment of expression, make the diagrammatic illustration figure of the operation of the state of being kept upright on the frame substrate of glass substrate in above-mentioned glass substrate holding component that needs calcination processing.
The diagrammatic illustration figure of the operation that Fig. 5 is in the glass substrate continuously calcining device of the same embodiment of expression, take out the frame substrate of the glass substrate after the calcination processing from above-mentioned glass substrate holding component.
(nomenclature)
1 glass substrate, 10 glass substrate holding components
11 Storage tray 11a upper surfaces
11b open holes 12 frame substrates
12a framework 12a1 side frame
12b bears the 12c of portion repellent parts
20 calcining furnace 20a loading ports
20b extracts mouthfuls 21 doors of packing into out
22 Handling devices, 23 air-circulating fans
24 extract door 30 out sends device back to
41 guide member 41a support components
42 take out parts 42a support component
Embodiment
Below, glass substrate holding component and the glass substrate continuously calcining device to embodiment of the present invention is specifically described with reference to the accompanying drawings.In addition, glass substrate holding component of the present invention and glass substrate continuously calcining device are not limited to following embodiment, in the scope that does not change inventive concept, can carry out suitable change.
In the glass substrate holding component 10 of present embodiment, as shown in Figure 1, releasably upright being provided with makes be kept upright a plurality of frame substrates 12 of state of glass substrate 1 on Storage tray 11.
At this, in the aforesaid substrate frame 12, as shown in Figures 1 and 2, be formed with the 12b of the portion of bearing in order to the lower end of support glass substrate 1 in the bottom that forms four jiaos of cyclic framework 12a, this bears the 12b of portion and is provided with the repellent parts 12c that prevents glass substrate 1 dislocation, and bear the 12b of portion from this and be extended with installation foot 12d downwards, and on the side frame 12a1 of both sides, set up front surface and stoped parts 12e with the outstanding state in the place ahead to the side frame 12a1 of above-mentioned framework 12a.
On the other hand, in the above-mentioned Storage tray 11, as shown in Figure 1, its upper surface 11a is provided with open holes 11b, and this open holes 11b can insert for the installation foot 12d that is arranged at aforesaid substrate frame 12.
And, insert respectively in the open holes 11b that is arranged at Storage tray 11 by the installation foot 12d that will be arranged at above-mentioned each frame substrate 12, can be located on the Storage tray 11 each frame substrate 12 is releasably upright.
In addition, in the glass substrate continuously calcining device of present embodiment, upright being provided with on the Storage tray 11 of glass substrate holding component 10 glass substrate 1 is kept upright under the state of a plurality of frame substrates 12 of state as described above, as shown in Figure 3, pack this glass substrate holding component 10 into calcining furnace 20 successively from the door 21 of packing into of the loading port 20a that is arranged on calcining furnace 20 in.Then, utilize the Handling device 22 that constitutes by the burner hearth roller-way be arranged in this calcining furnace 20, the above-mentioned glass substrate holding component of packing into 10 is moved in burning stove 20 successively.
In addition, gas utilization after heating units such as well heater (not shown) are heated is arranged on the air-circulating fan 23 on the top of this calcining furnace 20 and delivers to the below from the top, and the gas after utilizing this to be heated heats to carry out calcination processing successively to the glass substrate 1 on the frame substrate 12 that remains on each glass substrate holding component 10 with erectility.
Then, the glass substrate holding component 10 that will carry out as above calcination processing to glass substrate 1 guides to outside the calcining furnace 20 successively from the extraction door 24 of the extraction mouth 20b that is arranged at calcining furnace 20.
In addition, in the glass substrate continuously calcining device of present embodiment, glass substrate holding component 10 is guided to outside the calcining furnace 20 by the extraction door 24 from calcining furnace 20 as described above, each frame substrate 12 in this glass substrate holding component 10 is separated from Storage tray 11, each glass substrate 1 after the calcining that remains on each frame substrate 12 is taken out.Then, as described above glass substrate holding component 10 is kept isolating state with Storage tray 11 and each frame substrate 12, utilize the handling machinery etc. of the below that is arranged on above-mentioned calcining furnace 20 to send the loading port 20a side that device 30 is sent calcining furnace 20 back to back to.
At this, send device 30 back to if below calcining furnace 20, be provided with as described above, then be arranged on the other situation of calcining furnace and compare with such device of will sending back in the past, can reduce the area that is provided with of glass substrate continuously calcining device integral body.In addition, make glass substrate holding component 10 keep Storage tray 11 and each frame substrate 12 isolating state as described above, can reduce its height, thereby dwindle the bottom of above-mentioned calcining furnace 20 and send the interval of device 30 back to.
In addition, in the loading port 20a of calcining furnace 20 side, remain at the glass substrate 1 that will carry out calcination processing as described above on each frame substrate 12 of glass substrate holding component 10, exist side by side when being located on the Storage tray 11, in the glass substrate continuously calcining device of present embodiment, shown in Fig. 4 (A), make glass substrate 1 be in horizontality, and remain on on the required round-shaped support component 41a that is arranged at intervals on the guide member 41, utilize between framework 12a that this guide member 41 imports glass substrate 1 frame substrate 12 that along continuous straight runs fell and the front surface prevention parts 12e, the end and the above-mentioned 12b of portion and the repellent parts 12c butt of bearing of glass substrate 1.
Then, utilize mechanical arm (not shown) etc., shown in Fig. 4 (B) with glass substrate 1 with the state on the support component 41a that remains on guide member 41 as described above after aforesaid substrate frame 12 is holded up, shown in Fig. 4 (C), guide sections part 41 is taken out from frame substrate 12.Then, the installation foot 12d that will be arranged at frame substrate 12 as described above inserts and to be arranged in the open holes 11b of Storage tray 11, thereby is located on the Storage tray 11 this frame substrate 12 is releasably upright.
Thus, even it is bigger to carry out incinerating glass substrate 1, when making this glass substrate 1 on glass substrate holding component 10, be kept upright state, can prevent that also glass substrate 1 from deflection taking place and rupture.
In addition, each frame substrate 12 with glass substrate holding component 10 separates from Storage tray 11 as described above, and will remain on each glass substrate 1 after the calcining on each frame substrate 12 when taking out, in the glass substrate continuously calcining device of present embodiment, be located at frame substrate 12 on the Storage tray 11 shown in Fig. 5 (A) with upright, after utilizing mechanical arm (not shown) etc. to separate from Storage tray 11 with erectility, shown in Fig. 5 (B), to guide in the framework 12a of this frame substrate 12 with the required taking-up parts 42 that are arranged at intervals with round-shaped support component 42a, make the support component 42a and glass substrate 1 butt of these taking-up parts 42.
Then, under the state of support component 42a that makes taking-up parts 42 as described above and glass substrate 1 butt, utilize above-mentioned mechanical arm etc., frame substrate 12 fell shown in Fig. 5 (C), and make glass substrate 1 remain on the support component 42a that takes out parts 42 with horizontality, then, utilizing these taking-up parts 42 that glass substrate 1 is stoped between the parts 12e from the framework 12a of frame substrate 12 and front surface takes out.
Thus, even glass substrate 1 is bigger as mentioned above, when glass substrate after the calcining that will remain on erectility on the glass substrate holding component 10 1 takes out, can prevent that also glass substrate 1 from deflection taking place and rupture.
Although present embodiment has been described in detail the present invention, yet should be noted that various changes and modification will be readily apparent to persons skilled in the art.
Therefore, unless these changes and modification have broken away from scope of the present invention, in they should be interpreted as being included in so.
Claims (5)
1. one kind is used for that the multi-disc glass substrate is held in erectility and carries out the incinerating glass substrate holding component, it is characterized in that, on Storage tray with the releasably upright a plurality of frame substrates that glass substrate are held in erectility that are provided with in required interval.
2. glass substrate continuously calcining device, make the multi-disc glass substrate state of on the described glass substrate holding component of claim 1, being kept upright, utilize Handling device that this glass substrate holding component is moved in calcining furnace to extracting mouth out successively from the loading port of calcining furnace, the glass substrate that remains on this glass substrate holding component is carried out calcination processing, it is characterized in that, below the described calcining furnace or above the position on be provided with the device of sending back to of the oral-lateral of packing into of sending the Storage tray and the frame substrate of described glass substrate holding component back to calcining furnace with isolating state.
3. glass substrate continuously calcining device as claimed in claim 2, it is characterized in that, be provided with: glass substrate is placed on glass substrate on the frame substrate after separating from Storage tray with horizontality and imports member and make the described frame substrate that is placed with glass substrate hold up and be installed in frame substrate installation component on the described Storage tray at the oral-lateral of packing into of described calcining furnace.
4. glass substrate continuously calcining device as claimed in claim 2, it is characterized in that, be provided with: the described frame substrate that keeps the glass substrate after the calcining is broken away from and the frame substrate that is placed as horizontality breaks away from member and discharges member from the glass substrate that the described frame substrate that is placed as horizontality takes out described glass substrate from described Storage tray at the extraction oral-lateral of described calcining furnace.
5. glass substrate continuously calcining device as claimed in claim 3, it is characterized in that, be provided with: the described frame substrate that keeps the glass substrate after the calcining is broken away from and the frame substrate that is placed as horizontality breaks away from member and discharges member from the glass substrate that the described frame substrate that is placed as horizontality takes out described glass substrate from described Storage tray at the extraction oral-lateral of described calcining furnace.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006248909A JP5137363B2 (en) | 2006-09-14 | 2006-09-14 | Glass substrate continuous firing equipment |
| JP2006248909 | 2006-09-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101143760A true CN101143760A (en) | 2008-03-19 |
Family
ID=39206517
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007101280601A Pending CN101143760A (en) | 2006-09-14 | 2007-06-25 | Glass substrate holding component and glass substrate continuously calcining device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5137363B2 (en) |
| KR (1) | KR20080024959A (en) |
| CN (1) | CN101143760A (en) |
| TW (1) | TW200812925A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112981506A (en) * | 2021-02-09 | 2021-06-18 | 苏州晶洲装备科技有限公司 | Electrochemical deposition equipment |
| CN115216734B (en) * | 2022-08-09 | 2024-01-26 | 中国科学院力学研究所 | Method for improving binding force of platinum film and substrate material |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0829072A (en) * | 1994-07-19 | 1996-02-02 | Senda Kawara Kogyo Kk | Standing-upright aligning shelf tool for burning plate-form substance, such as tile |
| JPH11311484A (en) * | 1998-04-30 | 1999-11-09 | Chugai Ro Co Ltd | Atmosphere-in-furnace circulation type roller hearth type continuous baking furnace |
| JP4082082B2 (en) * | 2002-05-10 | 2008-04-30 | 松下電器産業株式会社 | Method for manufacturing plasma display panel |
-
2006
- 2006-09-14 JP JP2006248909A patent/JP5137363B2/en not_active Expired - Fee Related
-
2007
- 2007-06-14 TW TW096121461A patent/TW200812925A/en unknown
- 2007-06-20 KR KR1020070060276A patent/KR20080024959A/en not_active Application Discontinuation
- 2007-06-25 CN CNA2007101280601A patent/CN101143760A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112981506A (en) * | 2021-02-09 | 2021-06-18 | 苏州晶洲装备科技有限公司 | Electrochemical deposition equipment |
| CN115216734B (en) * | 2022-08-09 | 2024-01-26 | 中国科学院力学研究所 | Method for improving binding force of platinum film and substrate material |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200812925A (en) | 2008-03-16 |
| KR20080024959A (en) | 2008-03-19 |
| JP2008070038A (en) | 2008-03-27 |
| JP5137363B2 (en) | 2013-02-06 |
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| Date | Code | Title | Description |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20080319 |