JP5131256B2 - 多孔質静圧気体軸受用の軸受素材及びこれを用いた多孔質静圧気体軸受 - Google Patents
多孔質静圧気体軸受用の軸受素材及びこれを用いた多孔質静圧気体軸受 Download PDFInfo
- Publication number
- JP5131256B2 JP5131256B2 JP2009187894A JP2009187894A JP5131256B2 JP 5131256 B2 JP5131256 B2 JP 5131256B2 JP 2009187894 A JP2009187894 A JP 2009187894A JP 2009187894 A JP2009187894 A JP 2009187894A JP 5131256 B2 JP5131256 B2 JP 5131256B2
- Authority
- JP
- Japan
- Prior art keywords
- porous
- bearing
- layer
- back metal
- sintered metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 title claims description 106
- 230000002706 hydrostatic effect Effects 0.000 title claims description 71
- 229910052751 metal Inorganic materials 0.000 claims description 370
- 239000002184 metal Substances 0.000 claims description 370
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 152
- 238000007747 plating Methods 0.000 claims description 91
- 229910052759 nickel Inorganic materials 0.000 claims description 59
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 51
- 229910052802 copper Inorganic materials 0.000 claims description 45
- 239000010949 copper Substances 0.000 claims description 45
- 230000003068 static effect Effects 0.000 claims description 43
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 28
- 239000011574 phosphorus Substances 0.000 claims description 28
- 229910052698 phosphorus Inorganic materials 0.000 claims description 28
- 239000002245 particle Substances 0.000 claims description 22
- 238000004891 communication Methods 0.000 claims description 21
- 229910001220 stainless steel Inorganic materials 0.000 claims description 21
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 19
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 19
- 239000000126 substance Substances 0.000 claims description 19
- 239000010935 stainless steel Substances 0.000 claims description 17
- 229910002804 graphite Inorganic materials 0.000 claims description 12
- 239000010439 graphite Substances 0.000 claims description 12
- 229910052718 tin Inorganic materials 0.000 claims description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 5
- 229910052582 BN Inorganic materials 0.000 claims description 4
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 4
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 claims description 4
- 229910001634 calcium fluoride Inorganic materials 0.000 claims description 4
- 229910010272 inorganic material Inorganic materials 0.000 claims description 4
- 239000011147 inorganic material Substances 0.000 claims description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 4
- 239000002994 raw material Substances 0.000 claims description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 4
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 4
- QLOAVXSYZAJECW-UHFFFAOYSA-N methane;molecular fluorine Chemical compound C.FF QLOAVXSYZAJECW-UHFFFAOYSA-N 0.000 claims description 3
- 238000005245 sintering Methods 0.000 description 29
- 239000007791 liquid phase Substances 0.000 description 25
- 239000000843 powder Substances 0.000 description 20
- 230000000052 comparative effect Effects 0.000 description 16
- 238000001816 cooling Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 12
- 238000005304 joining Methods 0.000 description 11
- 239000011812 mixed powder Substances 0.000 description 11
- 239000011135 tin Substances 0.000 description 11
- 238000003754 machining Methods 0.000 description 8
- 238000000227 grinding Methods 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 6
- 230000007423 decrease Effects 0.000 description 6
- 230000010354 integration Effects 0.000 description 6
- 229920003023 plastic Polymers 0.000 description 6
- 229910000963 austenitic stainless steel Inorganic materials 0.000 description 5
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 5
- 229910001105 martensitic stainless steel Inorganic materials 0.000 description 5
- RIRXDDRGHVUXNJ-UHFFFAOYSA-N [Cu].[P] Chemical compound [Cu].[P] RIRXDDRGHVUXNJ-UHFFFAOYSA-N 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 239000011148 porous material Substances 0.000 description 4
- 238000005096 rolling process Methods 0.000 description 4
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 229910000423 chromium oxide Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000010954 inorganic particle Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000035699 permeability Effects 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 2
- 229910000975 Carbon steel Inorganic materials 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 229920000663 Hydroxyethyl cellulose Polymers 0.000 description 2
- 239000004354 Hydroxyethyl cellulose Substances 0.000 description 2
- 229920002153 Hydroxypropyl cellulose Polymers 0.000 description 2
- 241000357293 Leptobrama muelleri Species 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 239000010974 bronze Substances 0.000 description 2
- 239000010962 carbon steel Substances 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 235000019447 hydroxyethyl cellulose Nutrition 0.000 description 2
- 239000001863 hydroxypropyl cellulose Substances 0.000 description 2
- 235000010977 hydroxypropyl cellulose Nutrition 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 2
- 229920000609 methyl cellulose Polymers 0.000 description 2
- 239000001923 methylcellulose Substances 0.000 description 2
- 238000003801 milling Methods 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229920002134 Carboxymethyl cellulose Polymers 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 241000257465 Echinoidea Species 0.000 description 1
- 108010010803 Gelatin Proteins 0.000 description 1
- 229920000084 Gum arabic Polymers 0.000 description 1
- 241000978776 Senegalia senegal Species 0.000 description 1
- 229920002472 Starch Polymers 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000000205 acacia gum Substances 0.000 description 1
- 235000010489 acacia gum Nutrition 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 235000019441 ethanol Nutrition 0.000 description 1
- -1 ethyl alcohol Chemical class 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000008273 gelatin Substances 0.000 description 1
- 229920000159 gelatin Polymers 0.000 description 1
- 235000019322 gelatine Nutrition 0.000 description 1
- 235000011852 gelatine desserts Nutrition 0.000 description 1
- 150000002433 hydrophilic molecules Chemical class 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000008107 starch Substances 0.000 description 1
- 235000019698 starch Nutrition 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Powder Metallurgy (AREA)
- Manufacture Of Alloys Or Alloy Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009187894A JP5131256B2 (ja) | 2002-08-28 | 2009-08-13 | 多孔質静圧気体軸受用の軸受素材及びこれを用いた多孔質静圧気体軸受 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002248477 | 2002-08-28 | ||
| JP2002248477 | 2002-08-28 | ||
| JP2009187894A JP5131256B2 (ja) | 2002-08-28 | 2009-08-13 | 多孔質静圧気体軸受用の軸受素材及びこれを用いた多孔質静圧気体軸受 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003041558A Division JP4385618B2 (ja) | 2002-08-28 | 2003-02-19 | 多孔質静圧気体軸受用の軸受素材及びこれを用いた多孔質静圧気体軸受 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009287120A JP2009287120A (ja) | 2009-12-10 |
| JP2009287120A5 JP2009287120A5 (enExample) | 2010-01-28 |
| JP5131256B2 true JP5131256B2 (ja) | 2013-01-30 |
Family
ID=41456612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009187894A Expired - Lifetime JP5131256B2 (ja) | 2002-08-28 | 2009-08-13 | 多孔質静圧気体軸受用の軸受素材及びこれを用いた多孔質静圧気体軸受 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5131256B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111894982A (zh) * | 2020-07-27 | 2020-11-06 | 珠海格力电器股份有限公司 | 可靠性高的静压气体轴承及压缩机 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0791569B2 (ja) * | 1987-10-19 | 1995-10-04 | オイレス工業株式会社 | 複層からなる焼結摺動部材の製造方法 |
| JP2501703B2 (ja) * | 1992-01-14 | 1996-05-29 | 大同メタル工業株式会社 | 複合摺動部材 |
| JPH0625870A (ja) * | 1992-07-10 | 1994-02-01 | Nisshin Steel Co Ltd | 耐食ドライベアリング用鋼板 |
| JP3039738B2 (ja) * | 1992-12-08 | 2000-05-08 | キヤノン株式会社 | 静圧流体軸受 |
| JPH07127641A (ja) * | 1993-10-28 | 1995-05-16 | Nippon Seiko Kk | 静圧気体軸受 |
| JP2733735B2 (ja) * | 1993-12-22 | 1998-03-30 | 大同メタル工業株式会社 | 銅鉛合金軸受 |
| JP3168538B2 (ja) * | 1997-04-19 | 2001-05-21 | チャン リー ウー | 滑りベアリング及びその製造方法 |
| JP4450114B2 (ja) * | 1997-11-26 | 2010-04-14 | オイレス工業株式会社 | 多孔質静圧気体軸受用の軸受素材及びこれを用いた多孔質静圧気体軸受 |
| JPH11303870A (ja) * | 1998-04-17 | 1999-11-02 | Ntn Corp | 多孔質気体軸受及びこれを用いたスピンドル装置 |
| JP2001107162A (ja) * | 1999-10-12 | 2001-04-17 | Sumitomo Electric Ind Ltd | 青銅系焼結合金とそれを用いた軸受及び製造方法 |
-
2009
- 2009-08-13 JP JP2009187894A patent/JP5131256B2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009287120A (ja) | 2009-12-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4385618B2 (ja) | 多孔質静圧気体軸受用の軸受素材及びこれを用いた多孔質静圧気体軸受 | |
| CN102933337A (zh) | 用热等静压制造部件的方法和布置，芯，覆层用预成型坯，和芯的用途 | |
| EP2900404B1 (en) | Methods of forming a metallic or ceramic article having a novel composition of functionally graded material | |
| EP1216314B1 (en) | Low thermal conductivity hard metal | |
| RU2501631C2 (ru) | Способ изготовления микросверла и микросверло | |
| SE503343C2 (sv) | Mekanisk tätning utnyttjande porinnehållande material och porinnehållande hårdmetall samt metod för framställning därav | |
| KR20030064251A (ko) | 분말 금속 스크롤 | |
| WO2012045247A1 (zh) | 一种多层壳芯复合结构零件的制备方法 | |
| EP1082180A1 (en) | Method of applying hard-facing material to a substrate | |
| JP4450114B2 (ja) | 多孔質静圧気体軸受用の軸受素材及びこれを用いた多孔質静圧気体軸受 | |
| JP2009543947A (ja) | 改良された複合材料及び該複合材料の製造方法 | |
| KR100377807B1 (ko) | 오일펌프 | |
| JP5131256B2 (ja) | 多孔質静圧気体軸受用の軸受素材及びこれを用いた多孔質静圧気体軸受 | |
| JPWO2004087351A1 (ja) | ダイカストマシン用断熱プランジャースリーブ | |
| JP2006090482A (ja) | 多孔質静圧気体軸受及びその製造方法 | |
| JP2000009142A (ja) | 軸受装置の製造方法および軸受装置 | |
| JPWO2006004011A1 (ja) | フィルター及びその製造方法 | |
| JP2000346164A (ja) | 多孔質静圧気体ねじ | |
| JP4798161B2 (ja) | 多孔質静圧気体軸受用の軸受素材及びこれを用いた多孔質静圧気体軸受 | |
| JP2017009033A (ja) | 静圧気体軸受用の円筒状複合部材及びこの円筒状複合部材の製造方法並びにこの円筒状複合部材を具備した静圧気体軸受 | |
| JP3162984B2 (ja) | 多孔質体金属複合筒 | |
| JP3600321B2 (ja) | 高純度ガス用の精密フィルター及びその製造方法 | |
| JP2000346071A (ja) | 多孔質静圧気体軸受 | |
| KR20150051993A (ko) | 정압 기체 래디얼 베어링 | |
| JP4461593B2 (ja) | 多孔質静圧気体軸受の製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090911 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20090911 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20091030 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120703 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120831 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20121009 |
|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20121022 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20151116 Year of fee payment: 3 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 5131256 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
| R360 | Written notification for declining of transfer of rights |
Free format text: JAPANESE INTERMEDIATE CODE: R360 |
|
| R370 | Written measure of declining of transfer procedure |
Free format text: JAPANESE INTERMEDIATE CODE: R370 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |