JP5130422B2 - 検出センサ - Google Patents

検出センサ Download PDF

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Publication number
JP5130422B2
JP5130422B2 JP2008287018A JP2008287018A JP5130422B2 JP 5130422 B2 JP5130422 B2 JP 5130422B2 JP 2008287018 A JP2008287018 A JP 2008287018A JP 2008287018 A JP2008287018 A JP 2008287018A JP 5130422 B2 JP5130422 B2 JP 5130422B2
Authority
JP
Japan
Prior art keywords
vibrator
vibrators
frequency
detection
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2008287018A
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English (en)
Japanese (ja)
Other versions
JP2010112888A (ja
JP2010112888A5 (enExample
Inventor
毅 池原
舜夫 昆野
孝士 三原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Olympus Corp
Original Assignee
National Institute of Advanced Industrial Science and Technology AIST
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute of Advanced Industrial Science and Technology AIST, Olympus Corp filed Critical National Institute of Advanced Industrial Science and Technology AIST
Priority to JP2008287018A priority Critical patent/JP5130422B2/ja
Priority to CN200980144356XA priority patent/CN102209890B/zh
Priority to PCT/JP2009/005587 priority patent/WO2010052841A1/ja
Publication of JP2010112888A publication Critical patent/JP2010112888A/ja
Priority to US13/096,409 priority patent/US8258675B2/en
Publication of JP2010112888A5 publication Critical patent/JP2010112888A5/ja
Application granted granted Critical
Publication of JP5130422B2 publication Critical patent/JP5130422B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/40—Concentrating samples
    • G01N1/405—Concentrating samples by adsorption or absorption
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0031—General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array

Landscapes

  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP2008287018A 2008-07-11 2008-11-07 検出センサ Expired - Fee Related JP5130422B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2008287018A JP5130422B2 (ja) 2008-11-07 2008-11-07 検出センサ
CN200980144356XA CN102209890B (zh) 2008-11-07 2009-10-23 检测传感器、检测传感器的振子
PCT/JP2009/005587 WO2010052841A1 (ja) 2008-11-07 2009-10-23 検出センサ、検出センサの振動子
US13/096,409 US8258675B2 (en) 2008-07-11 2011-04-28 Detection sensor and resonator of detection sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008287018A JP5130422B2 (ja) 2008-11-07 2008-11-07 検出センサ

Publications (3)

Publication Number Publication Date
JP2010112888A JP2010112888A (ja) 2010-05-20
JP2010112888A5 JP2010112888A5 (enExample) 2011-12-15
JP5130422B2 true JP5130422B2 (ja) 2013-01-30

Family

ID=42152654

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008287018A Expired - Fee Related JP5130422B2 (ja) 2008-07-11 2008-11-07 検出センサ

Country Status (4)

Country Link
US (1) US8258675B2 (enExample)
JP (1) JP5130422B2 (enExample)
CN (1) CN102209890B (enExample)
WO (1) WO2010052841A1 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5242347B2 (ja) * 2008-11-11 2013-07-24 独立行政法人産業技術総合研究所 検出センサ
WO2014123519A1 (en) 2013-02-06 2014-08-14 Empire Technology Development Llc Devices, systems, and methods for detecting odorants
JP2014190771A (ja) * 2013-03-26 2014-10-06 National Institute Of Advanced Industrial & Technology 質量測定方法及び質量測定装置
WO2014171927A1 (en) * 2013-04-16 2014-10-23 Empire Technology Development Llc Graded structure films
US9702846B2 (en) 2013-11-08 2017-07-11 Taiwan Semiconductor Manufacturing Company, Ltd. Biosensor device and related method
US20160349216A1 (en) * 2014-01-30 2016-12-01 Empire Technology Development Llc Odor sensors
US20170040971A1 (en) * 2014-01-30 2017-02-09 Empire Technology Development Llc Crystal oscillators and methods for fabricating the same
CN105067471B (zh) * 2015-07-24 2017-12-29 中国科学院上海微系统与信息技术研究所 一种微悬臂谐振结构传感器及其制造方法
JP6764281B2 (ja) * 2016-08-09 2020-09-30 太陽誘電株式会社 ガスセンサ
JP6863009B2 (ja) * 2017-03-31 2021-04-21 Ｉ−Ｐｅｘ株式会社 物質検出素子
JP7206389B2 (ja) * 2018-12-12 2023-01-17 マイクロ モーション インコーポレイテッド 平面的振動部材、密度計、及び振動式密度計を動作させる方法
KR102739123B1 (ko) * 2018-12-28 2024-12-06 삼성전자주식회사 공진기 및 그 제조방법과, 공진기를 포함하는 스트레인 센서 및 센서 어레이
US20210041287A1 (en) 2019-08-09 2021-02-11 Apple Inc. On-Bed Differential Piezoelectric Sensor
US11896136B2 (en) 2019-09-19 2024-02-13 Apple Inc. Pneumatic haptic device having actuation cells for producing a haptic output over a bed mattress
US20210255082A1 (en) * 2020-02-19 2021-08-19 Tdk Corporation Methods and Devices for Detecting Particles Using a Cantilever Sensor
US11771406B2 (en) 2020-08-12 2023-10-03 Apple Inc. In-bed temperature array for menstrual cycle tracking
US11874189B2 (en) 2021-07-02 2024-01-16 Applied Materials, Inc. MEMS resonator sensor substrate for plasma, temperature, stress, or deposition sensing

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5162691A (en) * 1991-01-22 1992-11-10 The United States Of America As Represented By The Secretary Of The Army Cantilevered air-gap type thin film piezoelectric resonator
US5856722A (en) * 1996-01-02 1999-01-05 Cornell Research Foundation, Inc. Microelectromechanics-based frequency signature sensor
JP3348687B2 (ja) * 1998-05-22 2002-11-20 住友金属工業株式会社 振動波検出方法及び装置
AU737757B2 (en) * 1998-11-02 2001-08-30 Kabushiki Kaisha Meidensha QCM sensor
US7369115B2 (en) * 2002-04-25 2008-05-06 Immersion Corporation Haptic devices having multiple operational modes including at least one resonant mode
US20060006871A1 (en) * 2002-09-05 2006-01-12 Tatsuya Uchida Crystal oscillator nanochannel sensor
JP3958206B2 (ja) * 2002-12-27 2007-08-15 独立行政法人科学技術振興機構 マルチカンチレバーの振動周波数の計測方法及び装置
JP2007240252A (ja) 2006-03-07 2007-09-20 National Institute Of Advanced Industrial & Technology 検出センサ、振動子
US20100095774A1 (en) * 2006-12-05 2010-04-22 National University Corporation Gunma University Mass measuring device and cantilever
WO2008126519A1 (ja) * 2007-03-22 2008-10-23 Shinshu University センサー
JP2008241619A (ja) * 2007-03-28 2008-10-09 Gunma Univ カンチレバー、バイオセンサ、及びプローブ顕微鏡
KR100975010B1 (ko) * 2008-02-29 2010-08-09 성균관대학교산학협력단 다중 크기 압전 마이크로 칸티레버 공진자 어레이를 이용한 물리센서 및 그 제작방법
US8199389B2 (en) * 2008-03-10 2012-06-12 Ricoh Company, Ltd. Vibration elements

Also Published As

Publication number Publication date
CN102209890A (zh) 2011-10-05
CN102209890B (zh) 2013-02-20
JP2010112888A (ja) 2010-05-20
US20110266919A1 (en) 2011-11-03
WO2010052841A1 (ja) 2010-05-14
US8258675B2 (en) 2012-09-04

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