CN102209890B - 检测传感器、检测传感器的振子 - Google Patents

检测传感器、检测传感器的振子 Download PDF

Info

Publication number
CN102209890B
CN102209890B CN200980144356XA CN200980144356A CN102209890B CN 102209890 B CN102209890 B CN 102209890B CN 200980144356X A CN200980144356X A CN 200980144356XA CN 200980144356 A CN200980144356 A CN 200980144356A CN 102209890 B CN102209890 B CN 102209890B
Authority
CN
China
Prior art keywords
vibrator
vibrators
detection sensor
detection
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200980144356XA
Other languages
English (en)
Chinese (zh)
Other versions
CN102209890A (zh
Inventor
池原毅
昆野舜夫
三原孝士
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
National Institute of Advanced Industrial Science and Technology AIST
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute of Advanced Industrial Science and Technology AIST, Olympus Corp filed Critical National Institute of Advanced Industrial Science and Technology AIST
Publication of CN102209890A publication Critical patent/CN102209890A/zh
Application granted granted Critical
Publication of CN102209890B publication Critical patent/CN102209890B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/40—Concentrating samples
    • G01N1/405—Concentrating samples by adsorption or absorption
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0031—General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array

Landscapes

  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
CN200980144356XA 2008-11-07 2009-10-23 检测传感器、检测传感器的振子 Expired - Fee Related CN102209890B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008-287018 2008-07-11
JP2008287018A JP5130422B2 (ja) 2008-11-07 2008-11-07 検出センサ
PCT/JP2009/005587 WO2010052841A1 (ja) 2008-11-07 2009-10-23 検出センサ、検出センサの振動子

Publications (2)

Publication Number Publication Date
CN102209890A CN102209890A (zh) 2011-10-05
CN102209890B true CN102209890B (zh) 2013-02-20

Family

ID=42152654

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200980144356XA Expired - Fee Related CN102209890B (zh) 2008-11-07 2009-10-23 检测传感器、检测传感器的振子

Country Status (4)

Country Link
US (1) US8258675B2 (enExample)
JP (1) JP5130422B2 (enExample)
CN (1) CN102209890B (enExample)
WO (1) WO2010052841A1 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5242347B2 (ja) * 2008-11-11 2013-07-24 独立行政法人産業技術総合研究所 検出センサ
WO2014123519A1 (en) 2013-02-06 2014-08-14 Empire Technology Development Llc Devices, systems, and methods for detecting odorants
JP2014190771A (ja) * 2013-03-26 2014-10-06 National Institute Of Advanced Industrial & Technology 質量測定方法及び質量測定装置
WO2014171927A1 (en) * 2013-04-16 2014-10-23 Empire Technology Development Llc Graded structure films
US9702846B2 (en) 2013-11-08 2017-07-11 Taiwan Semiconductor Manufacturing Company, Ltd. Biosensor device and related method
US20160349216A1 (en) * 2014-01-30 2016-12-01 Empire Technology Development Llc Odor sensors
US20170040971A1 (en) * 2014-01-30 2017-02-09 Empire Technology Development Llc Crystal oscillators and methods for fabricating the same
CN105067471B (zh) * 2015-07-24 2017-12-29 中国科学院上海微系统与信息技术研究所 一种微悬臂谐振结构传感器及其制造方法
JP6764281B2 (ja) * 2016-08-09 2020-09-30 太陽誘電株式会社 ガスセンサ
JP6863009B2 (ja) * 2017-03-31 2021-04-21 Ｉ−Ｐｅｘ株式会社 物質検出素子
JP7206389B2 (ja) * 2018-12-12 2023-01-17 マイクロ モーション インコーポレイテッド 平面的振動部材、密度計、及び振動式密度計を動作させる方法
KR102739123B1 (ko) * 2018-12-28 2024-12-06 삼성전자주식회사 공진기 및 그 제조방법과, 공진기를 포함하는 스트레인 센서 및 센서 어레이
US20210041287A1 (en) 2019-08-09 2021-02-11 Apple Inc. On-Bed Differential Piezoelectric Sensor
US11896136B2 (en) 2019-09-19 2024-02-13 Apple Inc. Pneumatic haptic device having actuation cells for producing a haptic output over a bed mattress
US20210255082A1 (en) * 2020-02-19 2021-08-19 Tdk Corporation Methods and Devices for Detecting Particles Using a Cantilever Sensor
US11771406B2 (en) 2020-08-12 2023-10-03 Apple Inc. In-bed temperature array for menstrual cycle tracking
US11874189B2 (en) 2021-07-02 2024-01-16 Applied Materials, Inc. MEMS resonator sensor substrate for plasma, temperature, stress, or deposition sensing

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1269885A (zh) * 1998-11-02 2000-10-11 株式会社明电舍 Qcm(石英晶体微量天秤)传感器
WO2004061427A1 (ja) * 2002-12-27 2004-07-22 Japan Science And Technology Agency マルチカンチレバーの振動周波数の計測方法及び装置
CN1678899A (zh) * 2002-09-05 2005-10-05 学校法人东京药科大学 水晶振子型纳米管传感器
WO2008069247A1 (ja) * 2006-12-05 2008-06-12 National University Corporation Gunma University 質量測定装置及びカンチレバ
JP2008241619A (ja) * 2007-03-28 2008-10-09 Gunma Univ カンチレバー、バイオセンサ、及びプローブ顕微鏡
WO2008126519A1 (ja) * 2007-03-22 2008-10-23 Shinshu University センサー

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5162691A (en) * 1991-01-22 1992-11-10 The United States Of America As Represented By The Secretary Of The Army Cantilevered air-gap type thin film piezoelectric resonator
US5856722A (en) * 1996-01-02 1999-01-05 Cornell Research Foundation, Inc. Microelectromechanics-based frequency signature sensor
JP3348687B2 (ja) * 1998-05-22 2002-11-20 住友金属工業株式会社 振動波検出方法及び装置
US7369115B2 (en) * 2002-04-25 2008-05-06 Immersion Corporation Haptic devices having multiple operational modes including at least one resonant mode
JP2007240252A (ja) 2006-03-07 2007-09-20 National Institute Of Advanced Industrial & Technology 検出センサ、振動子
KR100975010B1 (ko) * 2008-02-29 2010-08-09 성균관대학교산학협력단 다중 크기 압전 마이크로 칸티레버 공진자 어레이를 이용한 물리센서 및 그 제작방법
US8199389B2 (en) * 2008-03-10 2012-06-12 Ricoh Company, Ltd. Vibration elements

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1269885A (zh) * 1998-11-02 2000-10-11 株式会社明电舍 Qcm(石英晶体微量天秤)传感器
CN1678899A (zh) * 2002-09-05 2005-10-05 学校法人东京药科大学 水晶振子型纳米管传感器
WO2004061427A1 (ja) * 2002-12-27 2004-07-22 Japan Science And Technology Agency マルチカンチレバーの振動周波数の計測方法及び装置
WO2008069247A1 (ja) * 2006-12-05 2008-06-12 National University Corporation Gunma University 質量測定装置及びカンチレバ
WO2008126519A1 (ja) * 2007-03-22 2008-10-23 Shinshu University センサー
JP2008241619A (ja) * 2007-03-28 2008-10-09 Gunma Univ カンチレバー、バイオセンサ、及びプローブ顕微鏡

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP特开2008-241619A 2008.10.09

Also Published As

Publication number Publication date
CN102209890A (zh) 2011-10-05
JP2010112888A (ja) 2010-05-20
JP5130422B2 (ja) 2013-01-30
US20110266919A1 (en) 2011-11-03
WO2010052841A1 (ja) 2010-05-14
US8258675B2 (en) 2012-09-04

Similar Documents

Publication Publication Date Title
CN102209890B (zh) 检测传感器、检测传感器的振子
JP5242347B2 (ja) 検出センサ
CN101617208B (zh) 检测传感器、振子
JP4388614B2 (ja) 媒質の粘度と密度を測定するためのセンサ
US8136403B2 (en) Micromechanical sensor, sensor array and method
US10326425B2 (en) Acoustic resonator with reduced mechanical clamping of an active region for enhanced shear mode response
EP3605057B1 (en) Substance detecting element
US20120195797A1 (en) MEMS Sensors with Closed Nodal Anchors for Operation in an In-Plane Contour Mode
US20140265720A1 (en) Methods and devices relating to capacitive micromachined diaphragms and transducers
US9465012B2 (en) Measurement method using a sensor; sensor system and sensor
EP1533611A1 (en) Apparatus and method for measuring micro mass using oscillation circuit
WO2011019702A1 (en) Mems in-plane resonators
JP3908713B2 (ja) 原子間力顕微鏡用力方位センサ付カンチレバー
US7716986B2 (en) Acoustic wave sensing device integrated with micro-channels and method for the same
JP7652893B2 (ja) 励起素子
Alava et al. Silicon-based micromembranes with piezoelectric actuation and piezoresistive detection for sensing purposes in liquid media
Isarakorn et al. Finite element analysis and experiments on a silicon membrane actuated by an epitaxial PZT thin film for localized-mass sensing applications
WO2018096221A1 (en) Sensor
EP2150773B8 (en) Extension sensing actuator
JP5321812B2 (ja) 物理量センサーおよび物理量測定装置
Park Capacitive micromachined ultrasonic transducer (cmut) for chemical detection in air
KR100798361B1 (ko) 감지기둥을 갖는 미세질량 측정 센서
TW202417824A (zh) 用於ｍｅｍｓ裝置的氣體類型補償
Guirardel et al. On-chip self-sensing function of 4/spl times/4 matrix micromachined resonating piezoelectric membranes for mass detection applications [biosensor/chemical sensor applications]
Heidari Design, fabrication and characterization of microelectromechanical resonators for chemical and biological applications

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20150915

Address after: Tokyo, Japan, Japan

Patentee after: Independent Administrative Corporation Industrial Comprehansive Technologles Institute

Address before: Tokyo, Japan, Japan

Patentee before: Independent Administrative Corporation Industrial Comprehansive Technologles Institute

Patentee before: Olympus Corporation

CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20130220

Termination date: 20181023