WO2008069247A1 - 質量測定装置及びカンチレバ - Google Patents
質量測定装置及びカンチレバ Download PDFInfo
- Publication number
- WO2008069247A1 WO2008069247A1 PCT/JP2007/073518 JP2007073518W WO2008069247A1 WO 2008069247 A1 WO2008069247 A1 WO 2008069247A1 JP 2007073518 W JP2007073518 W JP 2007073518W WO 2008069247 A1 WO2008069247 A1 WO 2008069247A1
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- WIPO (PCT)
- Prior art keywords
- cantilever
- frequency
- vibration
- mass
- vibrator
- Prior art date
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0255—(Bio)chemical reactions, e.g. on biosensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
Definitions
- the present invention relates to a mass measuring apparatus for measuring a minute mass and a technique suitably applied to a cantilever that is a sensor used therefor.
- cantilever As a technique for measuring a minute object, a technique using a cantilever (cantilever) is known.
- FIG. 9 shows a conventional minute mass measurement system using the cantilever 902 by the same inventor.
- the cantilever 902 for measuring micro-objects is a very small cantilever made of semiconductor material or corrosion-resistant metal or alloy, for example about 100 Hm long, about 50 ⁇ m wide and about 4 thick. It is.
- a detection sensor 903 made of a piezoresistor is embedded in the detection end portion of the cantilever 902.
- a vibration actuating unit 904 made of a piezoelectric element is attached to the support portion of the cantilever 902.
- the detection sensor 903 is connected to a detection circuit 905 including a Wheatstone bridge.
- the detection circuit 905 extracts a signal from the midpoint of the Wheatstone bridge, and this signal is amplified by an amplification circuit 906 made of an operational amplifier.
- the output signal amplified by the amplifier circuit 906 is input to a positive feedback circuit 907 including a band-pass filter and an amplifier circuit, which are similarly composed of operational amplifiers.
- the excitation actuator 904 is driven by the output of the positive feedback circuit 907.
- Excitation actuator 904, cantilever 902, detection sensor 903, detection circuit 905, amplification circuit 906, and positive feedback circuit 907 constitute an oscillator composed of positive feedback.
- the oscillation frequency becomes the natural vibration frequency of the cantilever 902.
- the mass of the cantilever 902 increases, and thereby the natural vibration frequency of the force cantilever 902 decreases. That is, this change in natural vibration frequency corresponds to an increase in the mass of the inspection object attached to the 1S cantilever 902.
- the FM demodulation circuit 908 is a circuit that detects the change in the natural vibration frequency.
- the change in the frequency is detected as a DC component signal.
- This signal is input to a PC system 909 mainly composed of a personal computer and predetermined software.
- the PC system 909 constitutes a so-called “data port guard” in which the output signal of the FM demodulation circuit 908 is A / D converted and recorded for a predetermined time.
- software for configuring the data port garment for example, Lab VIEW (registered trademark) of Nasona Nano Instruments Corporation is known.
- FIG. 10 is a diagram for explaining the operation of the minute mass measurement system.
- Figures 10 (a) and (b) show the cantilever 902 soaked in water 1002.
- Fig. 10 (a) is a stage before the measurement object 1003 is poured into the water 1002, and Fig. 10 (b) is after the measurement object 1003 is poured into the water 1002.
- the surface of the cantilever 902 is previously coated with a substance that attracts the measurement object 1003.
- a measurement object 1003 such as an allergen
- the measurement object 1003 adheres to the surface of the cantilever 902.
- the mass force of the entire cantilever 902 increases with a very small amount.
- FIG. 10 (c) shows the result of measuring the change in vibration frequency of the cantilever 902.
- the vertical axis is the change in frequency (A f), not the frequency.
- the reason why the change in frequency is plotted on the vertical axis is that the oscillation frequency is about 100 to 500 kHz, and the change in frequency is a minute change of about several tens of Hz.
- the vibration frequency does not change at first (FIG. 10 (a)), but as the measurement object 1003 is inserted, the measurement object 1003 starts to adhere to the cantilever 902, and the mass increases. As the mass increases, the natural vibration frequency of the force inch 902 gradually decreases.
- FIG. 10 (d) is a diagram showing a change in the mass of the measurement object 1003 attached to the cantilever 902, which is derived from the measurement result of FIG. 10 (c).
- FIG. 11 (a) and (b) show the antigen-antibody reaction measured by the micromass measuring system 901.
- FIG. 11 (a) and (b) show the antigen-antibody reaction measured by the micromass measuring system 901.
- FIG. 11 (a) egg albumen is first supplied as an antigen 1102 by a micropipette 1004, and then an immunoglobulin (immunoglobulin) which is an antibody 1103 is supplied by the micropipette 1004.
- Fig. 11 (b) shows an example in which egg white and immunoglobulin are supplied in the reverse procedure.
- the antibody 1103 (immunoglobulin) in Fig. 11 (a) is likely to adhere to the antigen 1102 because it has an end on the side that adheres to the antigen 1102, but the reverse procedure is used as shown in Fig. 11 (b). It can be seen that the adhesion mechanism is also different.
- FIGS. 12 (a) and 12 (b) are diagrams showing the results of measuring the antigen-antibody reaction by the micromass measuring system 901 according to the procedure of FIG. 11 (a).
- Figure 12 (a) shows the change in frequency.
- the egg white of antigen 1102 When the egg white of antigen 1102 is first supplied, it will be settled at a frequency change of 144.5 Hz after about 6 to 10 minutes.
- the immunoglobulin of antibody 1103 is added, when 8 to 10 minutes have passed, it settles at a frequency change of 215.5 Hz.
- FIG. 12 (b) shows the result of calculating the mass change due to the substance adhering to the cantilever 902 based on the measurement result of FIG. 12 (a).
- Antigen 1102 is 27.7 pg
- antibody 1103 strength is 1. 3 pg.
- the minute mass measurement system 901 based on self-excited vibration can measure an extremely minute mass with high accuracy.
- measurement can be performed by immersing in a liquid.
- the measurement result does not depend on the direction of the cantilever. The above system having such excellent features is expected to be widely applied as a biosensor.
- Patent Document 1 JP 2006-214744
- Non-Patent Document 1 ⁇ ⁇ ⁇ ⁇ ang, et al., Analytica ZChimcaActa 393 (1999) 59-65
- Non-patent Document 1 discloses a plurality of cantilevers.
- the optical detection technique is very troublesome to adjust and cannot be used underwater.
- the self-excited vibration according to the above-described prior art cannot be used with a plurality of cantilevers. This is because the vibration generating means and the cantilever are not integrated, and self-excited vibration is not possible!
- the present invention has been made in view of power and a point, and an object of the present invention is to provide a minute mass detector and a minute mass measuring apparatus capable of simultaneously measuring a plurality of masses with a small number of devices. To do.
- the first and second cantilevers each having a vibration detector attached thereto, are vibrated in a variable frequency by an oscillator using an oscillator. And after recording the signal resulting from this vibration with a recording device, the recorded data is analyzed and the natural vibration frequency of each cantilever is measured. Then, the mass calculation unit calculates the mass of the substance to be measured attached to each cantilever from the natural vibration frequency.
- a mass measuring apparatus for measuring a minute mass which can handle a plurality of measuring objects at once with a simpler apparatus configuration than the conventional one, and a cantilever used therefor. You can provide a lever.
- FIG. 1 is a block diagram of a minute mass measurement system according to an embodiment of the present invention.
- FIG. 2 is a diagram showing a variation of multi lever.
- FIG. 3 is a circuit diagram of a minute mass measurement system including a frequency sweep circuit.
- FIG. 4 is a diagram showing a change in vibration of a multi-lever.
- FIG. 5 is a graph illustrating the control voltage generated by the sweep voltage generator and the vibration amplitude of the signal detected from each cantilever.
- FIG. 6 is a diagram showing a correspondence relationship between measurement results and frequency changes.
- FIG. 7 is a diagram illustrating a method for detecting the natural vibration frequency (oscillation frequency) of a cantilever.
- FIG. 8 is a diagram for explaining an error removal technique.
- FIG. 9 is a block diagram of a conventional minute mass measurement system.
- Fig. 10 is a diagram illustrating the operation of the conventional minute mass measurement system.
- FIG. 11 is a diagram showing a procedure for measuring an antigen-antibody reaction by a conventional minute mass measurement system.
- FIG. 12 is a diagram showing a result of measuring an antigen-antibody reaction by a conventional micro mass measurement system.
- FIG. 1 is a block diagram of a minute mass measurement system as an example of the present embodiment.
- the multi-lever 102 has the same shape as that disclosed in Non-Patent Document 1 in which a plurality of cantilevers are formed. Piezoresistors 103 are embedded in each cantilever 116 constituting the multi-lever 102.
- An excitation piezoelectric element 104 is attached to the base portion of the multi-lever 102.
- the vibrating piezoelectric element 104 is driven by an oscillation source 106 controlled by a frequency controller 105.
- Detectors 107, 108, and 109 are connected to each cantilever 116, and the detectors 107, 108, and 109 detect vibration caused by the vibration generating piezoelectric element 104. Thus, the resistance value of the piezoresistor 103 that changes is detected.
- the PC system 115 A / D converts and records the output signals of the detectors 107, 108 and 109 for a predetermined time.
- the PC system 115 constitutes a so-called “data mouth guard”.
- National Instruments Corporation's LabVIEW registered trademark
- software for configuring a data port guard is known as software for configuring a data port guard!
- Each cantilever 116 is coated with antigen A110, antigen Bil and antigen C112, which are different types of attracting targets.
- a liquid 113 such as water
- a measurement object 114 such as an antibody or serum
- the amount of the measurement object 114 that is input varies depending on the attraction target. The difference appears as a decrease in the self-excited frequency.
- an oscillator is configured using a conventional cantilever as shown in Fig. 9, the self-excited frequency cannot be measured.
- the frequency of the vibration generated by the exciting piezoelectric element 104 is swept by a predetermined range by the frequency controller 105.
- the predetermined range is a range that covers the self-excited frequency of the cantilever 116.
- the cantilevers 116 having the same length are shown.
- the length of each cantilever 116 need not necessarily be the same. This is because the measurement results are expected to be different if the attracted objects to be applied are different, and the detectors 107, 108 and 109 are different even if they are exactly the same.
- the length of the cantilever 216 may be varied.
- a plurality of single cantilevers 226 are arranged on the piezoelectric element 204 for vibration. This is suitable when the material of the cantilever 116 itself needs to be different due to the nature of the measurement object.
- each cantilever constituting the multi-lever does not necessarily have to be different and does not have to be exactly the same length. It is sufficient if the self-excited frequency before and after the measurement can be detected.
- the resonance frequency f of the cantilever 10 is expressed by the following equation (2) using the effective mass m of the cantilever, the spring constant k, and the viscosity coefficient a.
- Equation 3 [0031] From Equation (3), it can be seen that the mass change can be derived from the change in frequency by a very simple equation. By detecting the change in the frequency of the cantilever using Equation (3) above, the change in the mass of the cantilever, The mass of the substance attached to the cantilever can be detected. Measuring instruments currently on the market can measure frequency changes with an accuracy of 1 Hz or less. Therefore, if the measurement system is assembled with high accuracy, the change in the mass of the cantilever can be measured in picogram or femtogram units using the above equation (3).
- the mass of the substance attached to the cantilever can be detected with a sensitivity of about 200 fg / Hz. .
- the detection sensitivity can be further increased by reducing the mass of the cantilever and / or increasing the resonance frequency.
- FIG. 3 is a circuit diagram of the minute mass measurement system 101.
- Resistor R304 is piezoresistor 103.
- Resistor R303 is a piezoresistor 103 for temperature compensation.
- Resistors R301 and R302 together with R303 and R304 form a Wheatstone bridge.
- Capacitors C307 and C310, resistors R308 and R309, and an operational amplifier 311 constitute an amplifier 306.
- Capacitors C313 and C316, resistors R314 and R315, and operational amplifier 317 constitute a non-pass filter (BPF) 312.
- the voltage at the midpoint T1 of the resistors R301 and R302 and the midpoint T2 of the resistors R303 and R304 is amplified by the subsequent amplifier 306, and then the noise is removed by the BPF 312. Then, after being converted to the A / D converter 322, the data is recorded by the personal computer 318 in which the data port guard software is run.
- a sweep voltage generator 319 that is a frequency controller 105 generates a voltage that linearly changes a predetermined voltage range.
- the voltage corresponding to the low frequency is gradually changed to the voltage corresponding to the high frequency, and when the maximum frequency is reached, the frequency change is stopped for a certain period of time. Then, the frequency is changed again from a low frequency to a high frequency.
- the power of this sweep voltage generator 319 In response to the pressure, the VCO 320 as the oscillation source 106 oscillates. Needless to say, the oscillation frequency varies depending on the voltage of the sweep voltage generator 319.
- the excitation piezoelectric element 104 vibrates, causing the cantilever to vibrate.
- the vibration frequency of the excitation piezoelectric element 104 is swept within a predetermined frequency range by a sweep voltage generator 319.
- the captured data is analyzed in the personal computer 318 on which the data porter software operates.
- the AC waveform is measured every predetermined time width, and the number of waves is counted. In other words, it constitutes a frequency counter.
- the personal computer 318 integrates the AC waveform every predetermined time width, and obtains the peak value of the waveform. In other words, amplitude detection is performed.
- a separate frequency counter 321 may be provided as shown by the dotted line in FIG.
- FIGS. 4A, 4B, and 4C illustrate changes in vibration of the multi-lever 102.
- FIG. 4A, 4B, and 4C illustrate changes in vibration of the multi-lever 102.
- FIGS. 4 (a), (b), and (c) the left cantilever oscillated in resonance from the right side. This is due to the difference in length of the cantilever 116 and the adhesion of the measurement object 114. It changes depending on the degree.
- FIGS. 5A, 5B, 5C, and 5D are graphs illustrating the control voltage generated by the sweep voltage generator 319 and the vibration amplitude of the signal detected from each cantilever.
- the horizontal axis is time. It can be seen that the signal amplitude increases only at the point of resonance.
- FIGS. 6 (a), (b), (c), (d) and (e) are diagrams showing the correspondence between the measurement result and the frequency change. Each figure takes the form of a graph. Figures 6 (a) and (b) are the same as Figures 5 (a), (b), (c) and (d). In other words, Fig. 6 (a) is similar to Fig. 5 (a), and sweep voltage generation on the time axis is performed. FIG. 6 (b) shows the signal amplitudes of the detectors 107, 108, and 109 as in FIGS. 5 (b), (c), and (d).
- FIG. 6 (c) is a graph obtained by converting the horizontal axis of the range surrounded by the dotted line in FIG. 6 (a).
- Fig. 6 (d) is a graph obtained by converting the data in Fig. 6 (b) with the horizontal axis representing the frequency change for the range enclosed by the dotted line in Fig. 6 (a).
- frequency is counted in units of 1/100 seconds, the frequency is detected, and the peak value of the waveform is acquired in the same units of 1/100 seconds. That is, the data of frequency amplitude characteristics are obtained as discrete values.
- FIG. 6 (e) is an enlarged graph of a range surrounded by a dotted line in FIG. 6 (d).
- the peak of this graph is the natural vibration frequency of the cantilever 116.
- the natural vibration frequency of the cantilever 116 is detected from the recorded data.
- FIGS. 7A and 7B are diagrams illustrating a method for detecting the natural vibration frequency (oscillation frequency) of the cantilever 116.
- Fig. 7 (a) shows the same method as Fig. 6 (e) for detecting the frequency corresponding to the peak value.
- Figure 7 (b) shows a method of slicing the graph with a threshold and estimating the frequency at the midpoint as the oscillation frequency.
- FIG. 8 is a diagram for explaining an error removal technique.
- the recorded data looks macroscopically as shown in Fig. 8 (a), but microscopically, it may be accompanied by noise as shown in Fig. 8 (b). .
- a moving average is calculated for an arbitrary minute range, and the values are leveled.
- the oscillation frequency is detected by the method shown in Fig. 7 (a) or (b).
- a detection element embedded in the cantilever a capacitive element, a piezoelectric element, or an electromagnetic induction element can be used instead of the piezoresistive element.
- the generated voltage is amplified by an amplifier and directly detected.
- an electrostatic vibrator or an electromagnetic induction vibrator can be used instead of the piezoelectric element.
- the vibration element does not have to be single. As shown in Fig. 2 (c), even if the cantilever and the vibrating element pair are arranged on a common base 237 and are vibrated by a common oscillator, Fig. 1, Fig. 2 (a) and Fig. 2 Has the same effect as (b).
- a single cantilever may be used. That is, the circuit configuration shown in FIG. 3 is applied to the single cantilever 902 shown in FIG. 9, and the excitation actuator 904 can be driven by the frequency sweep shown in FIGS. 6 (a) and (c).
- a minute mass measurement system and a minute mass sensor used therefor have been disclosed. According to the present embodiment, it is possible to realize a highly convenient minute mass measurement system that can detect the attraction characteristics of extremely minute substances due to differences in attracting substances by mass change.
- micromass measuring system of this embodiment can be expected to make a significant contribution to the advancement of technological development, especially in the field of biotechnology! By reducing measurement time and labor.
- Sweep voltage generator 320 --- VCO, 321 ...
- Frequency counter 322—A / D converter, R303 to Piezoresistor for temperature compensation, R304 to Piezoresistor, R301, R302, R308, R309, R314, R315 ... resistance, C307, C310, C313, C316 ...
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Abstract
Description
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Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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JP2008548318A JP4953140B2 (ja) | 2006-12-05 | 2007-12-05 | 質量測定装置及びカンチレバ |
US12/517,805 US20100095774A1 (en) | 2006-12-05 | 2007-12-05 | Mass measuring device and cantilever |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2006328427 | 2006-12-05 | ||
JP2006-328427 | 2006-12-05 |
Publications (1)
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WO2008069247A1 true WO2008069247A1 (ja) | 2008-06-12 |
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PCT/JP2007/073518 WO2008069247A1 (ja) | 2006-12-05 | 2007-12-05 | 質量測定装置及びカンチレバ |
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US (1) | US20100095774A1 (ja) |
JP (1) | JP4953140B2 (ja) |
WO (1) | WO2008069247A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010052841A1 (ja) * | 2008-11-07 | 2010-05-14 | 独立行政法人産業技術総合研究所 | 検出センサ、検出センサの振動子 |
US8917078B2 (en) | 2010-06-16 | 2014-12-23 | Seiko Epson Corporation | Frequency measuring device and odor sensor and electronic equipment which are provided with the frequency measuring device |
KR101670914B1 (ko) * | 2015-05-13 | 2016-11-16 | 한국표준과학연구원 | 질량측정센서를 이용한 질량 측정 방법 |
JP2022513471A (ja) * | 2018-12-12 | 2022-02-08 | マイクロ モーション インコーポレイテッド | 平面的振動式粘度計、粘度計部材、及び関連する方法 |
Families Citing this family (4)
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FR2916271B1 (fr) * | 2007-05-14 | 2009-08-28 | St Microelectronics Sa | Circuit electronique permettant la mesure de masse de materiau biologique et procede de fabrication |
TWI420537B (zh) * | 2009-12-29 | 2013-12-21 | Univ Nat Taiwan | 熱效應自補償系統及用於熱效應補償的裝置與方法 |
US9032782B1 (en) * | 2010-06-16 | 2015-05-19 | Rapid Diagnostek, Inc. | Diagnostic testing sensors for resonant detectors |
CN109389205B (zh) * | 2018-12-06 | 2024-02-13 | 四川云智慧安科技有限公司 | 无源振动计数器及其应用方法 |
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- 2007-12-05 US US12/517,805 patent/US20100095774A1/en not_active Abandoned
- 2007-12-05 WO PCT/JP2007/073518 patent/WO2008069247A1/ja active Search and Examination
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Cited By (7)
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US8258675B2 (en) | 2008-07-11 | 2012-09-04 | National Institute Of Advanced Industrial Science And Technology | Detection sensor and resonator of detection sensor |
WO2010052841A1 (ja) * | 2008-11-07 | 2010-05-14 | 独立行政法人産業技術総合研究所 | 検出センサ、検出センサの振動子 |
JP2010112888A (ja) * | 2008-11-07 | 2010-05-20 | National Institute Of Advanced Industrial Science & Technology | 検出センサ |
US8917078B2 (en) | 2010-06-16 | 2014-12-23 | Seiko Epson Corporation | Frequency measuring device and odor sensor and electronic equipment which are provided with the frequency measuring device |
KR101670914B1 (ko) * | 2015-05-13 | 2016-11-16 | 한국표준과학연구원 | 질량측정센서를 이용한 질량 측정 방법 |
JP2022513471A (ja) * | 2018-12-12 | 2022-02-08 | マイクロ モーション インコーポレイテッド | 平面的振動式粘度計、粘度計部材、及び関連する方法 |
JP7238133B2 (ja) | 2018-12-12 | 2023-03-13 | マイクロ モーション インコーポレイテッド | 平面的振動部材、粘度計、及び振動式粘度計を動作させる方法 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2008069247A1 (ja) | 2010-03-25 |
JP4953140B2 (ja) | 2012-06-13 |
US20100095774A1 (en) | 2010-04-22 |
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