JP5123489B2 - 電気的接続装置 - Google Patents

電気的接続装置 Download PDF

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Publication number
JP5123489B2
JP5123489B2 JP2006105933A JP2006105933A JP5123489B2 JP 5123489 B2 JP5123489 B2 JP 5123489B2 JP 2006105933 A JP2006105933 A JP 2006105933A JP 2006105933 A JP2006105933 A JP 2006105933A JP 5123489 B2 JP5123489 B2 JP 5123489B2
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JP
Japan
Prior art keywords
region
plate
ring
leaf spring
support substrate
Prior art date
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Expired - Fee Related
Application number
JP2006105933A
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English (en)
Japanese (ja)
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JP2007278861A5 (enExample
JP2007278861A (ja
Inventor
和人 濱田
孝志 秋庭
聡 成田
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Micronics Japan Co Ltd
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Micronics Japan Co Ltd
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Application filed by Micronics Japan Co Ltd filed Critical Micronics Japan Co Ltd
Priority to JP2006105933A priority Critical patent/JP5123489B2/ja
Publication of JP2007278861A publication Critical patent/JP2007278861A/ja
Publication of JP2007278861A5 publication Critical patent/JP2007278861A5/ja
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Publication of JP5123489B2 publication Critical patent/JP5123489B2/ja
Expired - Fee Related legal-status Critical Current
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  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2006105933A 2006-04-07 2006-04-07 電気的接続装置 Expired - Fee Related JP5123489B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006105933A JP5123489B2 (ja) 2006-04-07 2006-04-07 電気的接続装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006105933A JP5123489B2 (ja) 2006-04-07 2006-04-07 電気的接続装置

Publications (3)

Publication Number Publication Date
JP2007278861A JP2007278861A (ja) 2007-10-25
JP2007278861A5 JP2007278861A5 (enExample) 2009-04-30
JP5123489B2 true JP5123489B2 (ja) 2013-01-23

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ID=38680449

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006105933A Expired - Fee Related JP5123489B2 (ja) 2006-04-07 2006-04-07 電気的接続装置

Country Status (1)

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JP (1) JP5123489B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5548339B2 (ja) * 2008-02-07 2014-07-16 株式会社日本マイクロニクス 電気的接続装置
KR102447833B1 (ko) * 2018-02-09 2022-09-27 주성엔지니어링(주) 전력 인터페이스
JP7301582B2 (ja) * 2019-04-04 2023-07-03 株式会社日本マイクロニクス 電気的接触子及び電気的接続装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0547864A (ja) * 1991-08-12 1993-02-26 Advantest Corp プローブ
JP3487190B2 (ja) * 1998-08-20 2004-01-13 三菱マテリアル株式会社 プローブ装置の微調整機構
JP4004241B2 (ja) * 2001-04-16 2007-11-07 株式会社日本マイクロニクス 電気的接続装置
JP2005083863A (ja) * 2003-09-08 2005-03-31 Kobe Steel Ltd 電気的接続検査装置
JP4455940B2 (ja) * 2004-06-17 2010-04-21 株式会社日本マイクロニクス 電気的接続装置

Also Published As

Publication number Publication date
JP2007278861A (ja) 2007-10-25

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