JP5120106B2 - Method and apparatus for treating organic alkaline wastewater - Google Patents

Method and apparatus for treating organic alkaline wastewater Download PDF

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JP5120106B2
JP5120106B2 JP2008169028A JP2008169028A JP5120106B2 JP 5120106 B2 JP5120106 B2 JP 5120106B2 JP 2008169028 A JP2008169028 A JP 2008169028A JP 2008169028 A JP2008169028 A JP 2008169028A JP 5120106 B2 JP5120106 B2 JP 5120106B2
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JP2010005560A (en
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和也 小松
哲朗 深瀬
勝彦 百崎
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Kurita Water Industries Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Description

本発明は、有機アルカリを含む排水を原水として生物処理し、生物処理液を分離膜を用いて固液分離する膜分離生物処理方法及び処理装置に係り、特に、生物処理液の固液分離に用いた分離膜を、原水を用いて洗浄することにより、膜フラックス(透過水量)を安定に維持する有機アルカリ排水の処理方法及び処理装置に関する。   The present invention relates to a membrane separation biological treatment method and treatment apparatus for biologically treating wastewater containing organic alkali as raw water and separating the biological treatment liquid using a separation membrane, and in particular, for solid-liquid separation of biological treatment liquid. The present invention relates to a method and apparatus for treating organic alkali waste water that stably maintains membrane flux (permeated water amount) by washing the used separation membrane with raw water.

従来、有機性排水の処理方法として、生物処理法が広く採用されており、生物処理で得られる処理液中の懸濁物質(SS)を主体とする汚染物質を除去するために、また、排水からの水回収のために、固液分離性能が汚泥の沈降性に左右されず、SSを高度に除去し得る膜分離処理により、生物処理液を固液分離する膜分離生物処理方法が利用されている(特許文献1)。例えば、半導体製造、液晶製造等の電子産業工場のように、純水を使用し、その排水を排出する設備では、有機物を含む排水を生物処理し、処理液を純水製造の原料として用いる水回収が進んでいるが、このような水回収を行う有機性排水の生物処理において、良好な処理水質を得ることができる膜分離生物処理方法は広く用いられている。   Conventionally, a biological treatment method has been widely adopted as a method for treating organic wastewater, and in order to remove contaminants mainly composed of suspended solids (SS) in a treatment liquid obtained by biological treatment, In order to recover water from sewage, a membrane separation biological treatment method is used in which the biological treatment liquid is separated into solid and liquid by a membrane separation process in which the solid-liquid separation performance is not affected by sludge sedimentation and SS can be removed to a high degree. (Patent Document 1). For example, in equipment that uses pure water and discharges the wastewater, such as semiconductor manufacturing, liquid crystal manufacturing and other electronic industrial factories, the wastewater containing organic matter is biologically treated, and the treatment liquid is used as a raw material for the production of pure water. Although the recovery is progressing, membrane separation biological treatment methods that can obtain good treated water quality are widely used in biological treatment of organic wastewater that performs such water recovery.

膜分離生物処理法では、膜の目詰まりを防ぎ、安定したフラックスを維持するため、定期的に分離膜を薬品洗浄する必要がある。この場合、生物的な膜汚染に対する薬品としてはアルカリが効果的であり、一般的には次亜塩素酸ナトリウム溶液などが用いられる。なお、超純水製造システムにおける系内のバイオフィルムの洗浄除去にテトラメチルアンモニウムヒドロキシドなどの有機アルカリを用いる提案もなされている(特許文献2)。   In the membrane separation biological treatment method, it is necessary to periodically clean the separation membrane with chemicals in order to prevent clogging of the membrane and maintain a stable flux. In this case, alkali is effective as a chemical against biological membrane contamination, and a sodium hypochlorite solution or the like is generally used. In addition, the proposal which uses organic alkalis, such as tetramethylammonium hydroxide, for the washing | cleaning removal of the biofilm in the system in an ultrapure water manufacturing system is also made | formed (patent document 2).

膜の薬品洗浄では、膜ユニットを槽外へ取り出して薬液タンク内へ移送して薬品洗浄する方法の他、膜分離装置の水槽内の汚泥を引き抜いた後薬液を満たして分離膜を薬液中に浸漬させる浸漬洗浄の方法もあるが、膜分離水の取り出し配管(膜の二次側)から、洗浄薬液を注入して膜を透過させる方法が、簡便に実施できるため、よく用いられる(例えば、特許文献3)。   In membrane chemical cleaning, the membrane unit is taken out of the tank and transferred into the chemical tank, where it is cleaned, and after the sludge in the water tank of the membrane separator is drawn out, the chemical is filled and the separation membrane is placed in the chemical. Although there is a method of immersion cleaning to be immersed, a method of injecting a cleaning chemical solution from the piping for taking out membrane separation water (secondary side of the membrane) and allowing the membrane to permeate can be easily performed, and is often used (for example, Patent Document 3).

しかし、薬品洗浄では、薬剤のコストがかかる上に、薬液が生物処理槽へ流入することで生物処理への悪影響があり、生物処理効率が低下するという問題がある。即ち、膜分離生物処理法では、分離膜による固液分離で得られた分離水を処理水として取り出す一方で、濃縮水は、生物処理槽内の汚泥量の維持のために生物処理槽へ返送することが行われている。この場合、膜の二次側から流入した洗浄薬液は、濃縮水返送配管を経て生物処理槽へ流入することとなる。また、生物処理槽に分離膜を浸漬した浸漬型膜分離装置にあっては、膜の二次側から注入した洗浄薬液は、そのまま生物処理槽内に流入することになる。流路切り替えによって、膜を透過した洗浄薬液を系外へ排出し、生物処理槽内に流入しないようにすることもできるが、この場合には、排出した薬液の処理が問題となる。   However, in chemical cleaning, there is a problem in that the cost of the chemical is high and the chemical solution flows into the biological treatment tank, which has an adverse effect on the biological treatment and the biological treatment efficiency is lowered. In other words, in the membrane separation biological treatment method, the separated water obtained by solid-liquid separation by the separation membrane is taken out as treated water, while the concentrated water is returned to the biological treatment tank to maintain the amount of sludge in the biological treatment tank. To be done. In this case, the cleaning chemical solution flowing from the secondary side of the membrane flows into the biological treatment tank through the concentrated water return pipe. Moreover, in the submerged membrane separation apparatus in which the separation membrane is immersed in the biological treatment tank, the cleaning chemical solution injected from the secondary side of the membrane flows into the biological treatment tank as it is. By switching the flow path, the cleaning chemical liquid that has permeated the membrane can be discharged out of the system so as not to flow into the biological treatment tank, but in this case, the processing of the discharged chemical liquid becomes a problem.

なお、上水や排水処理に用いる分離膜を原水で洗浄することも提案されているが(特許文献4)、この原水はアルカリを含むものではなく、また、この原水による洗浄は、分離膜の原水側(一次側)に原水を吹き付けて物理的に洗浄するものである。   Although it has been proposed to wash the separation membrane used for water treatment and wastewater treatment with raw water (Patent Document 4), this raw water does not contain alkali, and this washing with raw water Physical water is washed by spraying raw water on the raw water side (primary side).

また、テトラメチルアンモニウムヒドロキシドを含有する溶液で限外濾過膜を洗浄することも提案されているが、この方法は、膜の原水側(一次側)から供給して洗浄するものであり、洗浄効果が劣る(特許文献5および6)。
特開2007−38107号公報 特開2002−52324号公報 特開2007−209964号公報 特開2005−342609号公報 特開昭64−43306号公報 特開昭64−70187号公報
In addition, it has been proposed to wash the ultrafiltration membrane with a solution containing tetramethylammonium hydroxide, but this method is to supply and wash from the raw water side (primary side) of the membrane. The effect is inferior (Patent Documents 5 and 6).
JP 2007-38107 A JP 2002-52324 A JP 2007-209964 A JP 2005-342609 A JP-A 64-43306 JP-A 64-70187

本発明は、上記従来の問題点を解決し、有機アルカリを含む排水を原水として生物処理し、生物処理液を分離膜を用いて固液分離する膜分離生物処理において、分離膜を効率的に洗浄して膜フラックスを安定に維持する有機アルカリ排水の処理方法及び処理装置を提供することを目的とする。   The present invention solves the above-mentioned conventional problems, performs biological treatment using wastewater containing organic alkali as raw water, and efficiently separates the separation membrane in the membrane separation biological treatment in which the biological treatment liquid is separated into solid and liquid using the separation membrane. It aims at providing the processing method and processing apparatus of the organic alkali waste water which wash | cleans and maintains a film | membrane flux stably.

本発明(請求項1)の有機アルカリ排水の処理方法は、有機アルカリを含む排水を原水として生物処理する生物処理工程と、該生物処理工程の処理液を分離膜で固液分離する膜分離工程とを有し、該膜分離工程の分離水を処理水として得る有機アルカリ排水の処理方法において、前記原水を前記分離膜の二次側から供給して、該分離膜を洗浄する膜洗浄工程を有することを特徴とする。   The method for treating organic alkali waste water of the present invention (Claim 1) includes a biological treatment step for biologically treating wastewater containing organic alkali as raw water, and a membrane separation step for solid-liquid separation of the treatment liquid of the biological treatment step with a separation membrane. And a membrane washing step of washing the separation membrane by supplying the raw water from the secondary side of the separation membrane. It is characterized by having.

請求項2の有機アルカリ排水の処理方法は、請求項1おいて、前記原水が、モノエタノールアミン及び/又はテトラメチルアンモニウムヒドロキシドを含む半導体製造排水又は液晶製造排水を含むことを特徴とする。   The organic alkaline waste water treatment method according to claim 2 is characterized in that, in claim 1, the raw water contains semiconductor production waste water or liquid crystal production waste water containing monoethanolamine and / or tetramethylammonium hydroxide.

本発明(請求項3)の有機アルカリ排水の処理装置は、有機アルカリを含む排水を原水として生物処理する生物反応槽と、該生物反応槽の処理液を固液分離する膜分離装置とを有し、該膜分離装置の分離水を処理水として取り出す有機アルカリ排水の処理装置において、前記膜分離装置の分離膜の二次側から前記原水を供給して該膜分離装置の分離膜を洗浄する膜洗浄手段を有することを特徴とする。   The treatment apparatus for organic alkali waste water of the present invention (Claim 3) has a biological reaction tank for biological treatment using waste water containing organic alkali as raw water, and a membrane separation apparatus for solid-liquid separation of the treatment liquid in the biological reaction tank. Then, in the treatment apparatus for organic alkaline drainage that takes out the separation water of the membrane separation device as treated water, the raw water is supplied from the secondary side of the separation membrane of the membrane separation device to wash the separation membrane of the membrane separation device It has a film cleaning means.

請求項4の有機アルカリ排水の処理装置は、請求項3において、前記原水が、モノエタノールアミン及び/又はテトラメチルアンモニウムヒドロキシドを含む半導体製造排水又は液晶製造排水を含むことを特徴とする。   According to a fourth aspect of the present invention, there is provided an apparatus for treating organic alkali wastewater according to the third aspect, wherein the raw water includes semiconductor production wastewater or liquid crystal production wastewater containing monoethanolamine and / or tetramethylammonium hydroxide.

本発明によれば、有機アルカリ含む原水を分離膜の二次側から供給するので、原水に含まれる有機アルカリで分離膜を効果的に洗浄することができる。   According to the present invention, since raw water containing organic alkali is supplied from the secondary side of the separation membrane, the separation membrane can be effectively washed with the organic alkali contained in the raw water.

このため膜の薬品洗浄のための薬剤が不要となる上に、洗浄に用いた原水は、そのまま生物処理系内に導入しても生物処理に悪影響を及ぼすことはなく、従って、洗浄排液を系外へ排出するための流路切り換えも不要であり、また、洗浄排液の処理の問題もない。   This eliminates the need for chemicals for membrane chemical cleaning, and the raw water used for cleaning does not adversely affect biological treatment even if it is directly introduced into the biological treatment system. There is no need to switch the flow path for discharging out of the system, and there is no problem with the treatment of the cleaning waste liquid.

このため、洗浄頻度を高くすることができ、その結果として、高い膜フラックスを安定して維持することができるようになる。   Therefore, the cleaning frequency can be increased, and as a result, a high film flux can be stably maintained.

本発明において、原水による分離膜の洗浄は、分離膜の二次側から原水を供給して膜透過させ、膜を透過した水はそのまま生物処理系へ戻すことができる。   In the present invention, the separation membrane can be washed with raw water by supplying raw water from the secondary side of the separation membrane to permeate the membrane, and the water that has permeated the membrane can be directly returned to the biological treatment system.

本発明は、特に、モノエタノールアミン及び/又はテトラメチルアンモニウムヒドロキシドを含む半導体製造排水又は液晶製造排水を原水とする膜分離生物処理に有効である(請求項2,4)。即ち、半導体製造排水や、液晶製造排水に含まれるモノエタノールアミン、テトラメチルアンモニウムヒドロキシドなどのアルカリ性有機物や界面活性剤は、製造プロセスにおいて剥離剤、洗浄剤として用いられるものであり、膜の洗浄においても高い効果を持っている。従って、これらの成分を含んだ原水により、分離膜の洗浄を効率よく行うことができる。   The present invention is particularly effective for biological treatment of membrane separation using raw water for semiconductor production or liquid crystal production containing monoethanolamine and / or tetramethylammonium hydroxide (claims 2 and 4). That is, alkaline organic substances and surfactants such as monoethanolamine and tetramethylammonium hydroxide contained in semiconductor manufacturing wastewater and liquid crystal manufacturing wastewater are used as release agents and cleaning agents in the manufacturing process. Also has a high effect. Therefore, the separation membrane can be efficiently washed with the raw water containing these components.

以下に本発明の有機アルカリ排水の処理方法及び処理装置の実施の形態を詳細に説明する。   Embodiments of the method and apparatus for treating organic alkali waste water of the present invention will be described in detail below.

[原水]
本発明で処理対象とする原水は、有機アルカリを含む排水であって、特に限定されるものではないが、例えば、電子産業排水、化学工場排水、食品工場排水などが挙げられる。好ましくは、モノエタノールアミン及び/又はテトラメチルアンモニウムヒドロキシドを含む半導体製造排水又は液晶製造排水であり、これらの排水に含まれるモノエタノールアミン、テトラメチルアンモニウムヒドロキシドなどのアルカリ性有機物や界面活性剤により、効率的な膜洗浄を行える。
[Raw water]
The raw water to be treated in the present invention is wastewater containing organic alkali and is not particularly limited, and examples thereof include electronic industry wastewater, chemical factory wastewater, and food factory wastewater. Preferably, it is semiconductor manufacturing wastewater or liquid crystal manufacturing wastewater containing monoethanolamine and / or tetramethylammonium hydroxide, and it is based on alkaline organic substances such as monoethanolamine and tetramethylammonium hydroxide and surfactants contained in these wastewaters. Efficient membrane cleaning.

本発明では、このような原水の一部を分取して、膜洗浄を実施するが、原水中に、膜の目詰まりを引き起こすSS等が含まれている場合には、膜洗浄に際して、洗浄用原水流分について予め濾過器等で固液分離を行ってSS分を除去することが好ましい。   In the present invention, a portion of such raw water is separated and membrane cleaning is performed. However, when SS or the like that causes clogging of the membrane is contained in the raw water, cleaning is performed during membrane cleaning. It is preferable that the raw water stream is subjected to solid-liquid separation with a filter or the like in advance to remove SS.

また、洗浄に供される原水が、有機アルカリを含む排水と、他系統の排水とを混合した排水である場合には、これらが混合される前の有機アルカリを含む排水を分取して膜洗浄に用いることが好ましい。また、有機アルカリを含む排水についても、有機アルカリの高濃度排水と低濃度排水とが排出される系であれば、高濃度排水を分取して膜洗浄に用いることが好ましい。   In addition, when the raw water used for washing is wastewater mixed with wastewater containing organic alkali and wastewater from other systems, the wastewater containing organic alkali before being mixed is separated into a membrane. It is preferable to use for washing. In addition, regarding wastewater containing organic alkali, it is preferable to separate high-concentration wastewater and use it for membrane cleaning if it is a system that discharges high-concentration wastewater and low-concentration wastewater of organic alkali.

膜洗浄に用いる原水中の有機アルカリ濃度は、過度に低いと十分な膜洗浄効果が得られないため、原水に含まれる有機アルカリの種類によっても異なるが、100mg/L以上であることが好ましい。   If the concentration of the organic alkali in the raw water used for the membrane cleaning is excessively low, a sufficient membrane cleaning effect cannot be obtained. Therefore, although it varies depending on the type of organic alkali contained in the raw water, it is preferably 100 mg / L or more.

膜洗浄に用いる原水の有機アルカリ濃度の上限については特に規定されないが、通常、排水として排出される有機アルカリ含有水の有機アルカリ濃度は5,000mg/L以下程度である。   The upper limit of the organic alkali concentration of the raw water used for the membrane cleaning is not particularly defined, but the organic alkali concentration of the organic alkali-containing water discharged as wastewater is usually about 5,000 mg / L or less.

半導体製造工程や液晶製造工程からは、一般にモノエタノールアミン、テトラメチルアンモニウムヒドロキシド等の有機アルカリを合計で100〜2,000mg/L程度含む、TOC濃度50〜1,000mg/L程度の排水が排出されるため、膜洗浄水として好適である。   From a semiconductor manufacturing process or a liquid crystal manufacturing process, wastewater having a TOC concentration of about 50 to 1,000 mg / L, which generally contains about 100 to 2,000 mg / L of organic alkali such as monoethanolamine and tetramethylammonium hydroxide, in general. Since it is discharged, it is suitable as membrane cleaning water.

[生物処理]
本発明が適用される生物処理の種類は特に限定されるものではなく、好気性生物処理、嫌気性生物処理、硝化脱窒処理、これらの2種以上の組み合わせなどが挙げられる。
[Biological treatment]
The type of biological treatment to which the present invention is applied is not particularly limited, and examples include aerobic biological treatment, anaerobic biological treatment, nitrification denitrification treatment, and combinations of two or more thereof.

これらの生物処理条件についても特に制限はない。   There are no particular restrictions on these biological treatment conditions.

[膜分離装置]
生物処理液の固液分離に用いる膜分離装置についても特に制限はなく、一般的な膜分離装置を採用することができる。この膜分離装置は一次側(原水側)を曝気する手段を有するものであっても良く、分離膜を水槽内に浸漬した浸漬型膜分離装置であっても良い。浸漬型膜分離装置の場合、膜浸漬槽は生物反応槽を兼ねるものであっても良い。
[Membrane separator]
There is no particular limitation on the membrane separation apparatus used for the solid-liquid separation of the biological treatment liquid, and a general membrane separation apparatus can be adopted. This membrane separation device may have a means for aeration of the primary side (raw water side), or may be an immersion type membrane separation device in which the separation membrane is immersed in a water tank. In the case of a submerged membrane separator, the membrane immersion tank may also serve as a biological reaction tank.

分離膜の種類についても特に制限はなく、UF(限外濾過)膜、MF(精密濾過)膜、RO(逆浸透)膜などが用いられる。膜型式についても平膜型、中空糸膜型、管状膜型等のいずれであっても良い。   The type of separation membrane is not particularly limited, and UF (ultrafiltration) membrane, MF (microfiltration) membrane, RO (reverse osmosis) membrane or the like is used. The membrane type may be any of a flat membrane type, a hollow fiber membrane type, a tubular membrane type and the like.

この膜分離装置の分離水は処理水として取り出され、濃縮水は通常生物処理系へ返送される。   The separation water of this membrane separator is taken out as treated water, and the concentrated water is usually returned to the biological treatment system.

[膜洗浄]
本発明では、生物処理に供される前述の原水の一部を分取して上述のような分離膜の洗浄を行う。
[Membrane cleaning]
In the present invention, a part of the raw water used for biological treatment is separated to wash the separation membrane as described above.

この膜洗浄は、具体的には、原水を膜の二次側から供給し、膜を透過した原水をそのまま生物処理系に送給する。このようにすることにより、従来の薬品洗浄の場合の薬品を不要とすることができるだけでなく、洗浄薬液が生物処理系に導入されることによる生物処理効率の低下の問題も解決され、また、洗浄排液の処理も不要となる。   Specifically, in this membrane cleaning, raw water is supplied from the secondary side of the membrane, and the raw water that has permeated the membrane is supplied to the biological treatment system as it is. By doing so, not only the chemical in the case of conventional chemical cleaning can be made unnecessary, but also the problem of a decrease in biological treatment efficiency due to the introduction of the cleaning chemical into the biological treatment system is solved, It also eliminates the need for cleaning wastewater treatment.

なお、このような原水による膜洗浄は、定期的に行っても良く、膜フラックスが低下したときに不定期的に行っても良い。膜洗浄の頻度は、処理系の水質、膜フラックスの上昇度合等に応じて適宜決定されるが、例えば、半日〜10日に1回の頻度で30〜180分程度、原水を単位膜面積当たり3〜20L/m程度の流量で通液することが好ましい。 Note that such membrane cleaning with raw water may be performed periodically, or may be performed irregularly when the membrane flux decreases. The frequency of membrane cleaning is appropriately determined according to the water quality of the treatment system, the degree of increase in membrane flux, etc. For example, the raw water is used per unit membrane area for about 30 to 180 minutes once every half day to 10 days. It is preferable to pass the liquid at a flow rate of about 3 to 20 L / m 2 .

なお、このような原水による膜洗浄を行った後は、処理水(膜透過水)を膜の二次側から供給する仕上げ洗浄を行うことが好ましく、これにより、膜洗浄後の膜分離運転を再開したときの処理水側への原水の混入を防止することができる。   In addition, after performing membrane cleaning with such raw water, it is preferable to perform finish cleaning in which treated water (membrane permeated water) is supplied from the secondary side of the membrane, thereby performing membrane separation operation after membrane cleaning. It is possible to prevent the raw water from being mixed into the treated water side when resuming.

また、このような処理水側への原水の混入が好ましくない場合には、膜洗浄後の膜分離運転再開時において、運転再開初期の処理水(膜透過水)を生物反応系へ返送し、十分に清澄な処理水が得られるようになってから、処理水を採水するようにしても良い。   In addition, when mixing of raw water on the treated water side is not preferable, at the time of restarting the membrane separation operation after membrane cleaning, the treated water (membrane permeated water) at the initial stage of operation restart is returned to the biological reaction system, The treated water may be collected after sufficiently clear treated water is obtained.

[有機アルカリ排水の処理装置]
次に、図1を参照して本発明の有機アルカリ排水の処理装置の実施の形態を示す。図1は本発明の有機アルカリ排水の処理装置の実施の形態の一例を示すものであり、本発明は何ら図示のものに限定されるものではない。
[Organic alkaline wastewater treatment equipment]
Next, with reference to FIG. 1, embodiment of the processing apparatus of the organic alkaline waste water of this invention is shown. FIG. 1 shows an example of an embodiment of the apparatus for treating organic alkaline waste water of the present invention, and the present invention is not limited to the illustrated one.

図1の装置は、生物処理として循環式硝化脱窒法を採用したものであり、生物反応槽は、脱窒槽1と硝化槽2とで構成され、硝化槽2には散気管2Aが設けられている。   The apparatus of FIG. 1 employs a circulatory nitrification denitrification method as a biological treatment. The biological reaction tank is composed of a denitrification tank 1 and a nitrification tank 2, and the nitrification tank 2 is provided with an aeration pipe 2A. Yes.

3は膜分離装置であり、分離膜3Mを備える。この膜分離装置3にも一次側(原水側)を曝気する散気管3Aが設けられている。   3 is a membrane separation apparatus, and includes a separation membrane 3M. This membrane separation device 3 is also provided with an air diffuser 3A for aeration of the primary side (raw water side).

原水は、原水ポンプPにより、原水導入配管11を経て脱窒槽1に導入され、脱窒処理液は配管12より硝化槽2に導入される。 The raw water is introduced into the denitrification tank 1 through the raw water introduction pipe 11 by the raw water pump P 1 , and the denitrification treatment liquid is introduced into the nitrification tank 2 through the pipe 12.

硝化槽2からの硝化脱窒処理液は、一部が配管13より脱窒槽1に返送され、残部が配管14より膜分離装置3に導入されて膜分離処理され、分離水は吸引ポンプPで配管15より取り出される。一方、濃縮水は配管16を経て硝化槽2に返送される。 Nitrification denitrification treatment liquid from the nitrification tank 2, part of which is returned from the pipe 13 to the denitrification tank 1, the balance is being membrane separation process is introduced into the membrane separation device 3 from the pipe 14, separated water suction pump P 2 Is taken out from the pipe 15. On the other hand, the concentrated water is returned to the nitrification tank 2 through the pipe 16.

この有機アルカリ排水の処理装置において、膜分離装置3の分離膜3Mの洗浄を行う際には、散気管3Aからの曝気を停止すると共に、吸引ポンプPを停止して、原水ポンプPにより、原水導入配管11から分岐する洗浄用原水配管17を経て、原水を膜分離装置3の二次側配管(処理水取出配管)15より分離膜3Mの二次側に供給する。分離膜3Mを透過した洗浄排液は、配管16を経て硝化槽2に導入される。この際、硝化槽2に導入される洗浄排液は、生物処理に供される原水であり、これが硝化槽2に導入されても、槽内の汚泥活性を阻害することはなく、従って、生物処理効率を低下させることはない。 In the processing apparatus of this organic alkali waste water, when to clean the separation membrane 3M membrane separation device 3 stops the aeration from aeration tube 3A, stops the suction pump P 2, the raw water pump P 1 The raw water is supplied to the secondary side of the separation membrane 3M from the secondary side pipe (treated water extraction pipe) 15 of the membrane separation device 3 through the cleaning raw water pipe 17 branched from the raw water introduction pipe 11. The washing effluent that has passed through the separation membrane 3M is introduced into the nitrification tank 2 through the pipe 16. At this time, the washing waste liquid introduced into the nitrification tank 2 is raw water used for biological treatment, and even if this is introduced into the nitrification tank 2, the sludge activity in the tank is not hindered. Processing efficiency is not reduced.

このような原水による膜洗浄を所定時間行った後は、吸引ポンプPを作動させ、散気管3Aからの曝気を再開して、膜分離装置3の運転を再開する。 After such raw water by membrane cleaning predetermined time, it operates the suction pump P 2, and restart the aeration from aeration tube 3A, restarts the operation of the membrane separation device 3.

なお、この際、運転の再開に先立ち、前述の如く、処理水を二次側配管15から逆流させて膜分離装置3の二次側を洗浄しても良く、また、図1の波線で示す処理水戻り配管18を設けて、運転再開後所定の時間は、処理水を硝化槽2に返送し、その後処理水の採水を再開するようにしても良い。   At this time, prior to restarting the operation, the secondary side of the membrane separation device 3 may be washed by flowing back the treated water from the secondary side pipe 15 as described above, and is indicated by a wavy line in FIG. The treated water return pipe 18 may be provided, and the treated water may be returned to the nitrification tank 2 for a predetermined time after the operation is resumed, and then the treated water sampling may be resumed.

以下に実施例及び比較例を挙げて本発明をより具体的に説明する。   Hereinafter, the present invention will be described more specifically with reference to Examples and Comparative Examples.

[実施例1]
図1に示す本発明の有機アルカリ排水の処理装置により、原水の処理と分離膜の洗浄を行った。
[Example 1]
The raw water treatment and separation membrane cleaning were performed by the organic alkaline waste water treatment apparatus of the present invention shown in FIG.

用いた装置の各部の仕様は次の通りである。   The specification of each part of the used apparatus is as follows.

<生物反応槽(循環式硝化脱窒槽)>
水理学的滞留時間:6hr
槽内MLSS:12,000mg/L(このMLSSを維持するように汚泥を引き抜き抜いた)
循環比(循環水量/原水量):2
脱窒槽容量:0.5m
硝化槽容量:1m
硝化槽DO濃度:2mg/L(槽内のDO(溶存酸素)濃度が2mg/L以上となるように曝気を行った)
<Biological reaction tank (circulation nitrification denitrification tank)>
Hydrological residence time: 6 hr
MLSS in the tank: 12,000 mg / L (sludge was pulled out so as to maintain this MLSS)
Circulation ratio (circulation water volume / raw water volume): 2
Denitrification tank capacity: 0.5m 3
Nitrification tank capacity: 1m 3
Nitrification tank DO concentration: 2 mg / L (aeration was performed so that the DO (dissolved oxygen) concentration in the tank was 2 mg / L or more)

<膜分離装置>
直径0.52cmのチューブ状UF膜(PVDF製、孔径0.03μm)104本(膜面積5m)を配置し、硝化槽からの処理液を曝気空気とともに流入させ、濃縮水とガスは硝化槽に戻した。
<Membrane separator>
104 tubular UF membranes (made of PVDF, pore size 0.03 μm) with a diameter of 0.52 cm (membrane area 5 m 2 ) are arranged, and the treatment liquid from the nitrification tank flows in along with the aerated air, and the concentrated water and gas are in the nitrification tank Returned to.

また、原水水質は次の通りであり、0.25m/hrの原水流量で処理を行った。
<原水水質>
TOC:200mg/L
T−N:70mg/L
T−P:1.0mg/L
有機アルカリの組成:
テトラメチルアンモニウムヒドロキシド:100mg/L
モノエタノールアミン:250mg/L
ジエチレングリコールモノブチルエーテル:100mg/L
The raw water quality was as follows, and the treatment was performed at a raw water flow rate of 0.25 m 3 / hr.
<Raw water quality>
TOC: 200 mg / L
TN: 70 mg / L
TP: 1.0 mg / L
Organic alkali composition:
Tetramethylammonium hydroxide: 100 mg / L
Monoethanolamine: 250 mg / L
Diethylene glycol monobutyl ether: 100 mg / L

1日に1回の頻度で膜分離装置3の吸引ポンプP及び曝気を停止し、分離膜3Mの二次側配管15より、原水導入配管11から分岐した洗浄用原水配管17を経て、原水を、30分、単位膜面積当り10L/m通液する膜洗浄を行った後、運転を再開した。 A suction pump P 2 and aeration of the membrane separation apparatus 3 stops at a frequency of once a day, from the secondary pipe 15 of the separation membrane 3M, through the washing raw water pipe 17 branched from the raw water inlet pipe 11, the raw water For 30 minutes, the membrane was washed at a flow rate of 10 L / m 2 per unit membrane area, and the operation was resumed.

このような処理を30日間継続した後の膜分離装置3の膜フラックス、通水抵抗、処理水(膜濾過水)水質を表1に示した。   Table 1 shows the membrane flux, water flow resistance, and treated water (membrane filtered water) quality of the membrane separation device 3 after such treatment was continued for 30 days.

[比較例1]
図2に示す装置を用いて、実施例1で処理したものと同様の原水を同様に処理した。
[Comparative Example 1]
The raw water similar to that treated in Example 1 was treated in the same manner using the apparatus shown in FIG.

図2の装置は、原水を膜分離装置3の二次側に送給する洗浄用配管の代りに、洗浄薬液を分離膜の二次側配管15に注入する洗浄配管20を設けた点が図1に示す装置と異なり、その他の構成は図1に示す装置と同仕様である。   The apparatus of FIG. 2 is provided with a cleaning pipe 20 for injecting a cleaning chemical into the secondary pipe 15 of the separation membrane instead of the cleaning pipe for feeding raw water to the secondary side of the membrane separation apparatus 3. Unlike the apparatus shown in FIG. 1, other configurations have the same specifications as the apparatus shown in FIG.

この装置により、1日に1回の頻度で膜分離装置3の吸引ポンプP及び曝気を停止し、分離膜3Mの二次側配管15から洗浄配管20を経て図示しない薬液ポンプにて洗浄薬液を注入した。洗浄薬液としては3,000mg/Lの次亜塩素酸ナトリウム水溶液を用い、単位膜面積あたり2.0L/mを30分通液して膜洗浄を行った後、運転を再開した。 This device, wash liquor at once a suction pump P 2 and aeration of the membrane separation device 3 stops at a frequency, not shown through the cleaning pipe 20 from the secondary pipe 15 of the separation membrane 3M liquid chemical pump in one day Injected. A 3,000 mg / L sodium hypochlorite aqueous solution was used as the cleaning chemical, and 2.0 L / m 2 per unit membrane area was passed through for 30 minutes to perform membrane cleaning, and then the operation was resumed.

このような処理を30日間継続した後の膜分離装置3の膜フラックス、通水抵抗、処理水(膜濾過水)水質を表1に示した。   Table 1 shows the membrane flux, water flow resistance, and treated water (membrane filtered water) quality of the membrane separation device 3 after such treatment was continued for 30 days.

Figure 0005120106
Figure 0005120106

表1の結果より、実施例1も比較例1も膜の洗浄効果としては同等の結果が得られたが、次亜塩素酸ナトリウム水溶液を用いて薬液洗浄を行った比較例1では、薬品洗浄時に生物反応槽に流入した次亜塩素酸ナトリウムの影響で汚泥の活性が低下し、処理水質が低下した。これに対して、原水で洗浄を行った実施例1では、このような汚泥活性の低下の問題がなく、良好な水質の処理水が得られた。   From the results of Table 1, Example 1 and Comparative Example 1 obtained the same results as the membrane cleaning effect, but in Comparative Example 1 in which chemical cleaning was performed using a sodium hypochlorite aqueous solution, chemical cleaning was performed. Sometimes the activity of sludge decreased due to the influence of sodium hypochlorite that flowed into the biological reaction tank, and the quality of treated water decreased. On the other hand, in Example 1 which washed with raw | natural water, there was no problem of such sludge activity fall and the treated water of favorable water quality was obtained.

[比較例2]
比較例1において、膜の薬液洗浄頻度を10日に1回としたこと以外は同様に処理を行った。
[Comparative Example 2]
In Comparative Example 1, the treatment was performed in the same manner except that the frequency of the membrane chemical cleaning was set to once every 10 days.

その結果、処理水の平均TOCは5.1mg/L(除去率97%)、NO−Nは20.5mg/L(除去率71%)であり、実施例1と大差なかったが、薬品洗浄後、通水抵抗は徐々に増加する傾向があり、最大で70kPaに達するとともに膜フラックスが20%低下し、生物処理槽(循環式硝化脱窒槽)の水理学的滞留時間6hrを維持して原水を処理することができなくなることがあった。 As a result, the average TOC of the treated water was 5.1 mg / L (removal rate 97%) and NO 3 -N was 20.5 mg / L (removal rate 71%). After washing, the water resistance tends to increase gradually, reaches 70 kPa at the maximum, decreases the membrane flux by 20%, and maintains the hydraulic retention time of 6 hours in the biological treatment tank (circulating nitrification denitrification tank). In some cases, raw water could not be treated.

[比較例3]
図3に示す装置を用いて、実施例1で処理したものと同様の原水を同様に処理した。
[Comparative Example 3]
Using the apparatus shown in FIG. 3, the same raw water as that treated in Example 1 was treated in the same manner.

図3の装置は、原水を膜分離装置3の二次側に送給する洗浄用原水配管17の代りに、原水を膜分離装置3の一次側に送給する洗浄用原水配管19を設けた点が図1に示す装置と異なり、その他の構成は、図1に示す装置と同仕様である。   The apparatus of FIG. 3 is provided with a cleaning raw water pipe 19 for supplying raw water to the primary side of the membrane separation apparatus 3 instead of the cleaning raw water pipe 17 for feeding raw water to the secondary side of the membrane separation apparatus 3. The configuration is the same as that of the apparatus shown in FIG. 1 except for the configuration shown in FIG.

この装置により、装置の運転中に1日に1回の頻度で膜分離装置3の吸引ポンプP及び曝気を停止し、原水を洗浄用原水配管19を経て、分離膜3Mの一次側配管14より供給し、30分、単位膜面積当り10L/m通液する膜洗浄を行った後、運転を再開した。 This device, a frequency of once a membrane suction pump P 2 and aeration of the separating apparatus 3 a day during operation of the apparatus is stopped, the raw water through a washing raw water pipe 19, the primary side of the separation membrane 3M pipe 14 Then, the membrane was washed at a flow rate of 10 L / m 2 per unit membrane area for 30 minutes, and then restarted.

その結果、処理水の平均TOCは、4.9mg/L(除去率97%)、NO−Nは19.5mg/L(除去率72%)であり、実施例1と大差はなかったが、通水抵抗は徐々に増加し、運転開始から21日目に70kPaに達するとともにフラックスが20%低下し、生物処理槽(循環式硝化脱窒槽)の水理学的滞留時間である6hrを維持して原水の処理をすることができなくなった。 As a result, the average TOC of the treated water was 4.9 mg / L (removal rate 97%) and NO 3 -N was 19.5 mg / L (removal rate 72%), which was not significantly different from Example 1. The water flow resistance increases gradually, reaches 70 kPa on the 21st day from the start of operation, and the flux decreases by 20%, maintaining the hydraulic retention time of 6 hours in the biological treatment tank (circulation nitrification denitrification tank). The raw water can no longer be treated.

本発明の有機アルカリ排水の処理装置の実施の形態を示す系統図である。It is a systematic diagram which shows embodiment of the processing apparatus of the organic alkaline waste water of this invention. 比較例1,2で用いた装置を示す系統図である。It is a systematic diagram which shows the apparatus used by the comparative examples 1 and 2. FIG. 比較例3で用いた装置を示す系統図である。It is a systematic diagram which shows the apparatus used in the comparative example 3.

符号の説明Explanation of symbols

1 脱窒槽
2 硝化槽
3 膜分離装置
3M 分離膜
1 Denitrification tank 2 Nitrification tank 3 Membrane separation device 3M separation membrane

Claims (10)

有機アルカリを含む排水を原水として生物処理する生物処理工程と、該生物処理工程の処理液を分離膜で固液分離する膜分離工程とを有し、該膜分離工程の分離水を処理水として得る有機アルカリ排水の処理方法において、
前記原水を前記分離膜の二次側から供給して、該分離膜を洗浄する膜洗浄工程を有することを特徴とする有機アルカリ排水の処理方法。
It has a biological treatment process that biologically treats wastewater containing organic alkali as raw water, and a membrane separation process that separates the treatment liquid of the biological treatment process with a separation membrane, and uses the separated water of the membrane separation process as treated water. In the processing method of the obtained organic alkali waste water,
An organic alkaline wastewater treatment method comprising a membrane cleaning step of supplying the raw water from a secondary side of the separation membrane and cleaning the separation membrane.
請求項1において、前記原水が、モノエタノールアミン及び/又はテトラメチルアンモニウムヒドロキシドを含む半導体製造排水又は液晶製造排水を含むことを特徴とする有機アルカリ排水の処理方法。   2. The method for treating organic alkali wastewater according to claim 1, wherein the raw water includes semiconductor production wastewater or liquid crystal production wastewater containing monoethanolamine and / or tetramethylammonium hydroxide. 請求項1又は2において、前記原水が、有機アルカリを含む排水と、他系統の排水とを混合した排水であり、混合される前の有機アルカリを含む排水を分取して前記分離膜の洗浄に用いることを特徴とする有機アルカリ排水の処理方法。3. The separation membrane according to claim 1 or 2, wherein the raw water is waste water obtained by mixing waste water containing organic alkali and waste water of another system, and separating the waste water containing organic alkali before being mixed to wash the separation membrane. A method for treating organic alkali wastewater, characterized by being used in the above. 請求項1又は2において、前記原水として、有機アルカリの高濃度排水と低濃度排水とが排出される系において、該高濃度排水を分取して前記分離膜の洗浄に用いることを特徴とする有機アルカリ排水の処理方法。3. The system according to claim 1, wherein, as the raw water, in a system in which organic alkali high-concentration wastewater and low-concentration wastewater are discharged, the high-concentration wastewater is separated and used for cleaning the separation membrane. Organic alkali wastewater treatment method. 請求項1ないし4のいずれか1項において、前記膜洗浄後の膜分離運転再開時において、運転再開初期の前記分離水を前記生物反応工程へ返送し、その後、処理水の採水を再開することを特徴とする有機アルカリ排水の処理方法。5. The process according to any one of claims 1 to 4, wherein when the membrane separation operation is resumed after the membrane cleaning, the separated water at the initial stage of the operation restart is returned to the biological reaction step, and then sampling of treated water is resumed. A method for treating organic alkaline wastewater. 有機アルカリを含む排水を原水として生物処理する生物反応槽と、該生物反応槽の処理液を固液分離する膜分離装置とを有し、該膜分離装置の分離水を処理水として取り出す有機アルカリ排水の処理装置において、
前記膜分離装置の分離膜の二次側から前記原水を供給して、該膜分離装置の分離膜を洗浄する膜洗浄手段を有することを特徴とする有機アルカリ排水の処理装置。
An organic alkali having a biological reaction vessel for biologically treating wastewater containing organic alkali as raw water and a membrane separation device for solid-liquid separation of the treatment liquid of the biological reaction vessel, and taking out the separated water of the membrane separation device as treated water In wastewater treatment equipment,
An apparatus for treating organic alkaline wastewater, comprising a membrane cleaning means for supplying the raw water from the secondary side of the separation membrane of the membrane separation device and cleaning the separation membrane of the membrane separation device.
請求項において、前記原水が、モノエタノールアミン及び/又はテトラメチルアンモニウムヒドロキシドを含む半導体製造排水又は液晶製造排水を含むことを特徴とする有機アルカリ排水の処理装置。 7. The apparatus for treating organic alkali waste water according to claim 6 , wherein the raw water contains semiconductor production waste water or liquid crystal production waste water containing monoethanolamine and / or tetramethylammonium hydroxide. 請求項6又は7において、前記原水が、有機アルカリを含む排水と、他系統の排水とを混合した排水であり、混合される前の有機アルカリを含む排水が分取されて前記分離膜の洗浄に用いられることを特徴とする有機アルカリ排水の処理装置。8. The separation membrane according to claim 6 or 7, wherein the raw water is waste water obtained by mixing waste water containing organic alkali and waste water of another system, and waste water containing organic alkali before being mixed is separated to wash the separation membrane. An organic alkaline wastewater treatment apparatus characterized by being used in the above. 請求項6又は7において、前記原水として、有機アルカリの高濃度排水と低濃度排水とが排出される系において、該高濃度排水が分取されて前記分離膜の洗浄に用いられることを特徴とする有機アルカリ排水の処理装置。8. The system according to claim 6 or 7, wherein, as the raw water, in a system in which organic alkali high-concentration wastewater and low-concentration wastewater are discharged, the high-concentration wastewater is collected and used for cleaning the separation membrane. Organic alkaline wastewater treatment equipment. 請求項6ないし9のいずれか1項において、前記膜洗浄後の膜分離運転再開時において、運転再開初期の前記分離水を前記生物反応槽へ返送し、その後、処理水の採水を再開することを特徴とする有機アルカリ排水の処理装置。In any 1 paragraph of Claims 6 thru / or 9, when the membrane separation operation after the membrane washing restarts, the separation water at the initial stage of operation resumption is returned to the biological reaction tank, and the sampling of treated water is resumed after that. An organic alkaline wastewater treatment apparatus characterized by that.
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