JP5115092B2 - 圧電振動片、圧電デバイス、及び発振器 - Google Patents

圧電振動片、圧電デバイス、及び発振器 Download PDF

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Publication number
JP5115092B2
JP5115092B2 JP2007212634A JP2007212634A JP5115092B2 JP 5115092 B2 JP5115092 B2 JP 5115092B2 JP 2007212634 A JP2007212634 A JP 2007212634A JP 2007212634 A JP2007212634 A JP 2007212634A JP 5115092 B2 JP5115092 B2 JP 5115092B2
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Japan
Prior art keywords
piezoelectric
arm
vibrating piece
base
width
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Expired - Fee Related
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JP2007212634A
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English (en)
Japanese (ja)
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JP2008072705A5 (enExample
JP2008072705A (ja
Inventor
英雄 棚谷
祥之 山田
幸弘 利根川
勝巳 黒田
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Seiko Epson Corp
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Seiko Epson Corp
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Publication date
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Priority to US11/840,339 priority Critical patent/US20080211350A1/en
Priority to JP2007212634A priority patent/JP5115092B2/ja
Publication of JP2008072705A publication Critical patent/JP2008072705A/ja
Publication of JP2008072705A5 publication Critical patent/JP2008072705A5/ja
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Publication of JP5115092B2 publication Critical patent/JP5115092B2/ja
Expired - Fee Related legal-status Critical Current
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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2007212634A 2006-08-18 2007-08-17 圧電振動片、圧電デバイス、及び発振器 Expired - Fee Related JP5115092B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US11/840,339 US20080211350A1 (en) 2006-08-18 2007-08-17 Piezoelectric resonator element and piezoelectric device
JP2007212634A JP5115092B2 (ja) 2006-08-18 2007-08-17 圧電振動片、圧電デバイス、及び発振器

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006223319 2006-08-18
JP2006223319 2006-08-18
JP2007212634A JP5115092B2 (ja) 2006-08-18 2007-08-17 圧電振動片、圧電デバイス、及び発振器

Related Child Applications (1)

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JP2012184911A Division JP5500220B2 (ja) 2006-08-18 2012-08-24 振動片、振動子、発振器、及びセンサー

Publications (3)

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JP2008072705A JP2008072705A (ja) 2008-03-27
JP2008072705A5 JP2008072705A5 (enExample) 2010-09-16
JP5115092B2 true JP5115092B2 (ja) 2013-01-09

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JP2007212634A Expired - Fee Related JP5115092B2 (ja) 2006-08-18 2007-08-17 圧電振動片、圧電デバイス、及び発振器

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JP (1) JP5115092B2 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5432582B2 (ja) * 2009-04-28 2014-03-05 京セラクリスタルデバイス株式会社 水晶振動素子
JP5353486B2 (ja) * 2009-06-30 2013-11-27 セイコーエプソン株式会社 振動片および振動子
JP5593979B2 (ja) * 2009-11-11 2014-09-24 セイコーエプソン株式会社 振動片、振動子、発振器、センサー及び電子機器
JP2012129904A (ja) * 2010-12-17 2012-07-05 Seiko Epson Corp 電子機器
JP5796280B2 (ja) * 2010-07-21 2015-10-21 セイコーエプソン株式会社 振動片、振動子及び発振器
JP2012253500A (ja) * 2011-06-01 2012-12-20 Seiko Epson Corp 振動片、振動子、発振器、電子機器
JP6155897B2 (ja) * 2013-06-24 2017-07-05 セイコーエプソン株式会社 振動片、振動子、電子デバイス、電子機器及び移動体
JP5696751B2 (ja) * 2013-08-29 2015-04-08 セイコーエプソン株式会社 振動片および振動子
TWI634742B (zh) * 2013-11-16 2018-09-01 精工愛普生股份有限公司 振動片、振動子、振盪器、電子機器及移動體
JP6375611B2 (ja) * 2013-11-16 2018-08-22 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器および移動体
JP2015097361A (ja) * 2013-11-16 2015-05-21 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器および移動体
JP6375622B2 (ja) * 2013-12-27 2018-08-22 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器、センサーおよび移動体
JP6636683B2 (ja) 2014-03-07 2020-01-29 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片及び圧電振動子
WO2016043205A1 (ja) 2014-09-19 2016-03-24 株式会社村田製作所 共振子及び共振装置
JP6465152B2 (ja) * 2017-05-23 2019-02-06 セイコーエプソン株式会社 振動片、振動子、電子デバイス、電子機器及び移動体
JP7677849B2 (ja) * 2021-08-02 2025-05-15 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子および発振器

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4301200B2 (ja) * 2004-10-20 2009-07-22 セイコーエプソン株式会社 圧電振動片および圧電デバイス
JP2006203458A (ja) * 2005-01-19 2006-08-03 Seiko Epson Corp 圧電振動片、及びこれを利用した圧電デバイス

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