JP5110766B2 - 薄膜集積回路装置の作製方法及び非接触型薄膜集積回路装置の作製方法 - Google Patents

薄膜集積回路装置の作製方法及び非接触型薄膜集積回路装置の作製方法 Download PDF

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Publication number
JP5110766B2
JP5110766B2 JP2004362339A JP2004362339A JP5110766B2 JP 5110766 B2 JP5110766 B2 JP 5110766B2 JP 2004362339 A JP2004362339 A JP 2004362339A JP 2004362339 A JP2004362339 A JP 2004362339A JP 5110766 B2 JP5110766 B2 JP 5110766B2
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thin film
integrated circuit
film integrated
circuit device
substrate
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Expired - Fee Related
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JP2004362339A
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Japanese (ja)
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JP2005203762A (ja
JP2005203762A5 (enExample
Inventor
舜平 山崎
美帆 小森
由里香 佐藤
和江 細木
香 荻田
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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  • Electroluminescent Light Sources (AREA)
  • Drying Of Semiconductors (AREA)
  • Thin Film Transistor (AREA)
  • Recrystallisation Techniques (AREA)
JP2004362339A 2003-12-15 2004-12-15 薄膜集積回路装置の作製方法及び非接触型薄膜集積回路装置の作製方法 Expired - Fee Related JP5110766B2 (ja)

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JP2004362339A JP5110766B2 (ja) 2003-12-15 2004-12-15 薄膜集積回路装置の作製方法及び非接触型薄膜集積回路装置の作製方法

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JP2003417317 2003-12-15
JP2003417317 2003-12-15
JP2004362339A JP5110766B2 (ja) 2003-12-15 2004-12-15 薄膜集積回路装置の作製方法及び非接触型薄膜集積回路装置の作製方法

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JP2005203762A JP2005203762A (ja) 2005-07-28
JP2005203762A5 JP2005203762A5 (enExample) 2008-01-24
JP5110766B2 true JP5110766B2 (ja) 2012-12-26

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Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101120433B (zh) 2004-06-04 2010-12-08 伊利诺伊大学评议会 用于制造并组装可印刷半导体元件的方法
TWI427802B (zh) * 2005-06-02 2014-02-21 美國伊利諾大學理事會 可印刷半導體結構及製造和組合之相關方法
US7176053B1 (en) * 2005-08-16 2007-02-13 Organicid, Inc. Laser ablation method for fabricating high performance organic devices
JP5196212B2 (ja) * 2006-03-02 2013-05-15 セイコーエプソン株式会社 薄膜デバイスの製造方法
JP2008047776A (ja) * 2006-08-18 2008-02-28 Semiconductor Energy Lab Co Ltd 半導体装置及びその作製方法
US8463116B2 (en) 2008-07-01 2013-06-11 Tap Development Limited Liability Company Systems for curing deposited material using feedback control
KR101046064B1 (ko) * 2008-12-11 2011-07-01 삼성전기주식회사 박막소자 제조방법

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2970411B2 (ja) * 1993-08-04 1999-11-02 株式会社日立製作所 半導体装置
JP3809733B2 (ja) * 1998-02-25 2006-08-16 セイコーエプソン株式会社 薄膜トランジスタの剥離方法
JP2000020665A (ja) * 1998-06-30 2000-01-21 Toshiba Corp 半導体装置
FR2796491B1 (fr) * 1999-07-12 2001-08-31 Commissariat Energie Atomique Procede de decollement de deux elements et dispositif pour sa mise en oeuvre
JP4748859B2 (ja) * 2000-01-17 2011-08-17 株式会社半導体エネルギー研究所 発光装置の作製方法
JP2003142666A (ja) * 2001-07-24 2003-05-16 Seiko Epson Corp 素子の転写方法、素子の製造方法、集積回路、回路基板、電気光学装置、ｉｃカード、及び電子機器
JP4467215B2 (ja) * 2001-09-04 2010-05-26 富士通株式会社 多孔質絶縁膜の形成方法及び半導体装置の製造方法
JP3956697B2 (ja) * 2001-12-28 2007-08-08 セイコーエプソン株式会社 半導体集積回路の製造方法

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