JP5109731B2 - 弾性境界波デバイス - Google Patents
弾性境界波デバイス Download PDFInfo
- Publication number
- JP5109731B2 JP5109731B2 JP2008058941A JP2008058941A JP5109731B2 JP 5109731 B2 JP5109731 B2 JP 5109731B2 JP 2008058941 A JP2008058941 A JP 2008058941A JP 2008058941 A JP2008058941 A JP 2008058941A JP 5109731 B2 JP5109731 B2 JP 5109731B2
- Authority
- JP
- Japan
- Prior art keywords
- acoustic wave
- boundary acoustic
- wave device
- insulating layer
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000758 substrate Substances 0.000 claims description 26
- 230000008878 coupling Effects 0.000 description 16
- 238000010168 coupling process Methods 0.000 description 16
- 238000005859 coupling reaction Methods 0.000 description 16
- 239000003990 capacitor Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
Images
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Description
5、6 櫛形電極
7 第1の絶縁層
8 第2の絶縁層
11 対向電極
11a 線状電極
Claims (3)
- 圧電基板と、この圧電基板上に設けられた第1の絶縁層と、この第1の絶縁層上に設けられた第2の絶縁層と、前記圧電基板と前記第1の絶縁層の境界面に設けられた複数の櫛形電極を備え、前記第1の絶縁層と前記第2の絶縁層との間に前記複数の櫛形電極の内で所定の櫛形電極と対峙する部分に対向電極を設けたことを特徴とする弾性境界波デバイス。
- 弾性境界波の伝播方向に延出した複数の線状電極を並設により対向電極を形成したことを特徴とする請求項1に記載の弾性境界波デバイス。
- 線状電極のピッチを弾性境界波の波長の半分より小さくしたことを特徴とする請求項2に記載の弾性境界波デバイス。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008058941A JP5109731B2 (ja) | 2008-03-10 | 2008-03-10 | 弾性境界波デバイス |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008058941A JP5109731B2 (ja) | 2008-03-10 | 2008-03-10 | 弾性境界波デバイス |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009218761A JP2009218761A (ja) | 2009-09-24 |
JP5109731B2 true JP5109731B2 (ja) | 2012-12-26 |
Family
ID=41190222
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008058941A Active JP5109731B2 (ja) | 2008-03-10 | 2008-03-10 | 弾性境界波デバイス |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5109731B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011086997A (ja) * | 2009-10-13 | 2011-04-28 | Panasonic Corp | 弾性波装置 |
WO2016111315A1 (ja) * | 2015-01-07 | 2016-07-14 | 株式会社村田製作所 | 弾性波装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0435515A (ja) * | 1990-05-31 | 1992-02-06 | Toko Inc | 表面弾性波装置 |
JP3064679B2 (ja) * | 1992-07-08 | 2000-07-12 | 松下電器産業株式会社 | 表面弾性波素子とその製造方法 |
JP2002151996A (ja) * | 2000-11-10 | 2002-05-24 | Alps Electric Co Ltd | 表面弾性波素子 |
JP2005260833A (ja) * | 2004-03-15 | 2005-09-22 | Murata Mfg Co Ltd | 弾性表面波共振子及び弾性表面波フィルタ |
CN101714858B (zh) * | 2004-03-29 | 2013-05-01 | 株式会社村田制作所 | 声界面波装置的制造方法 |
JP2008109413A (ja) * | 2006-10-25 | 2008-05-08 | Fujitsu Media Device Kk | 弾性波デバイスおよびフィルタ |
KR101035173B1 (ko) * | 2007-11-19 | 2011-05-17 | 다이요 유덴 가부시키가이샤 | 탄성 경계파 디바이스, 및 그것을 이용한 통신기 |
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2008
- 2008-03-10 JP JP2008058941A patent/JP5109731B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2009218761A (ja) | 2009-09-24 |
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