JP5107531B2 - Laser welding equipment - Google Patents

Description

  The present invention relates to a laser welding apparatus that performs welding by irradiating a workpiece with a laser beam.

  2. Description of the Related Art Conventionally, in package sealing of optical device elements and crystal resonators, the lid and the package are welded (laser welding) by irradiating the lid (lid) with a laser beam. For example, in Patent Document 1, a laser transmissive film is disposed between a transmission window and a workpiece, and metal debris or the like generated from the workpiece during welding (hereinafter also referred to as “welded residue”) is used as the film. A technique for welding by adhering to is described. In addition, Patent Documents 2 and 3 describe laser welding apparatuses that perform welding using a laser beam.

Japanese Patent Laid-Open No. 2004-90060 JP 2004-172206 A JP 2000-164095 A

  However, in the technique described in Patent Document 1, it is necessary to take up the film to which the welding residue is attached, and it is necessary to replace the film. Further, even with the techniques described in Patent Documents 2 and 3, it has been difficult to process the welding residue by a simple method.

  Examples of the problem to be solved by the present invention are as described above. An object of the present invention is to provide a laser welding apparatus capable of simply processing a welding residue generated during laser welding.

In invention of Claim 1 , the laser welding apparatus which welds the said workpiece | work by irradiating the workpiece | work with the laser beam which passed the permeation | transmission window is arrange | positioned between the said permeation | transmission window and the said workpiece | work, An electrode extending in a substantially traveling direction of the laser beam, and a voltage applying means for applying a voltage to the electrode, the electrode being constituted by at least two electrode plates, the voltage applying means, A voltage is applied so as to generate a potential difference between the electrode plates, and a voltage is applied to the workpiece so as to have the same potential as one of the two electrode plates.

  In a preferred embodiment of the present invention, a laser welding apparatus that welds the workpiece by irradiating the workpiece with a laser beam that has passed through the transmission window is disposed between the transmission window and the workpiece, An electrode extending in a substantially traveling direction of the laser beam; and a voltage applying means for applying a voltage to the electrode.

  Said laser welding apparatus is an apparatus which welds a workpiece | work by irradiating the workpiece | work with the laser beam which passed the permeation | transmission window. In addition, the laser welding apparatus includes an electrode that is disposed between the transmission window and the workpiece and extends in a substantially traveling direction of the laser beam, and a voltage applying unit that applies a voltage to the electrode. Thereby, welding debris such as metal scraps scattered from the workpiece during welding can be attracted and attracted to the charged electrode. Therefore, according to the laser welding apparatus described above, it is possible to easily prevent the welding residue from adhering to the transmission window without performing an exchange operation or a waste disposal.

  In one aspect of the laser welding apparatus, the electrode is formed so as to cover a side surface of a space between the transmission window and the workpiece. Thereby, the welding residue scattered from the workpiece can be reliably adsorbed to the electrode.

  In another aspect of the laser welding apparatus, the voltage applying unit can apply a voltage to the electrode so as to generate a potential difference between the electrode and the workpiece.

  In another aspect of the laser welding apparatus, the voltage application unit applies a voltage to the workpiece so as to generate a potential difference between the electrode and the workpiece. In this case, when the workpiece is charged, the welding residue is also charged. Therefore, the welding residue can be effectively adsorbed to the electrode.

  In another aspect of the laser welding apparatus, the electrode is constituted by at least two electrode plates, and the voltage applying unit applies a voltage so that a potential difference is generated between the electrode plates, and applies to the workpiece. On the other hand, a voltage is applied so as to have the same potential as one of the two electrode plates. Also by this, the welding residue can be adsorbed to the electrode plate.

  In the above laser welding apparatus, preferably, the voltage applying means can apply a voltage to the tray on which the workpiece is placed. Thereby, a welding residue can be charged by applying a voltage with respect to a workpiece | work via a tray.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

[Configuration of laser welding equipment]
FIG. 1 is a diagram showing a schematic configuration of a laser welding apparatus 100 according to an embodiment of the present invention. Specifically, FIG. 1 shows a cross-sectional view along the traveling direction of the laser beam LB2.

  The laser welding apparatus 100 mainly includes a laser beam emitting device 1, a galvano head 2, an XY table 6, an insulating plate 7, a tray 8, a vacuum chamber 9, a cylindrical portion 10, a transmission window 11, The electrode 12, the electrode mounting portion 13, the high voltage power supply 15, and the wiring 16 are provided. The laser welding apparatus 100 is an apparatus that performs welding on a plurality of workpieces 30 placed on the tray 8.

  The laser beam emitting device 1 emits a laser beam LB1 and irradiates the galvano head 2 with the laser beam LB1. The galvano head 2 receives the laser beam LB1, and changes the position where the laser beam LB1 is irradiated by a mirror or the like. The laser beam LB2 emitted from the galvano head 2 enters the vacuum chamber 9 through the transmission window 11 made of glass or the like. Then, the workpiece 30 is irradiated with the laser beam LB2 that has passed through the transmission window 11.

  The workpiece 30 is welded in a vacuum chamber 9 whose interior is maintained in a vacuum. In this case, the work 30 is placed on the tray 8. The tray 8 is disposed on the XY table 6 via an insulating plate 7 made of an insulating material.

  Here, the details of the workpiece 30 and the XY table 6 will be described with reference to FIG. FIG. 2A shows a view of the work 30 and the like observed from the direction of arrow A in FIG. FIG. 2B shows a perspective view of the work 30.

  As shown in FIG. 2A, a plurality of works 30 are arranged on the tray 8. As shown in FIG. 2B, the work 30 has a plate-shaped lid 30a and a box-shaped package 30b, and an electronic component (not shown) is accommodated therein. The laser beam LB2 described above is applied to the lid 30a, and the lid 30a is welded to the package 30b, whereby the work 30 is sealed.

  As described above, the tray 8 on which the work 30 is arranged is placed on the XY table 6 via the insulating plate 7. The XY table 6 is configured to be movable in the arrow B1 direction and the arrow B2 direction in FIG. For example, welding is performed on all workpieces 30 existing in an area where the galvano head 2 can irradiate the laser beam LB2 at the current position of the tray 8 (hereinafter, this area is referred to as an “irradiable area”). When finished, the XY table 6 moves the tray 8. In this case, the XY table 6 can move the tray 8 to such a position that the work 30 that is not welded enters the irradiable area of the galvano head 2.

  Returning to FIG. 1, the description will be resumed. A cylindrical portion 10 is provided on the upper portion of the vacuum chamber 9. The cylinder part 10 is comprised by the substantially cylindrical shape which has the hollow part 10x, and hold | maintains the permeation | transmission window 11 in the upper part. The laser beam LB2 that has passed through the transmission window 11 passes through the hollow portion 10x formed in the cylindrical portion 10. In addition, when welding the workpiece | work 30, the space inside the vacuum chamber 9 and the cylinder part 10 is maintained in a vacuum.

  Further, the electrode 12 is provided on the inner wall surface of the cylindrical portion 10 via the electrode mounting portion 13. The electrode mounting portion 13 is configured by an O-ring made of an insulating material, screwing, or the like, and fixes the electrode 12 to the inner wall surface of the cylindrical portion 10. The electrode 12 is made of copper or the like, and is arranged so as to extend in a substantially traveling direction of the laser beam LB2. The electrode 12 is connected to a high voltage power supply 15 via a wiring 16. Thereby, a voltage is applied to the electrode 12 by the high voltage power supply 15. In this case, since the electrode 12 is fixed by the electrode mounting portion 13 made of an insulating material, no voltage is applied to the tube portion 10 or the like.

  Further, the high voltage power supply 15 applies a voltage to the tray 8 via the wiring 16. As a result of the voltage being applied to the tray 8 in this manner, the voltage is also applied to the work 30. In this case, since the tray 8 is placed on the insulating plate 7, no voltage is applied to the XY table 6 or the like. The high voltage power supply 15 is configured to be able to apply a voltage of about 1000 (V), for example.

  Here, with reference to FIG. 3, a state in which a voltage is applied to the electrode 12 and the like will be described.

  FIG. 3A shows a diagram in which the electrode 12 is observed from the direction of arrow A in FIG. As shown in the figure, the electrode 12 has a substantially cylindrical shape having a hollow portion 12x. The laser beam LB2 that has passed through the transmission window 11 passes through the hollow portion 12x formed in the electrode 12.

  FIG. 3B is a diagram showing the tray 8, the electrode 12, the work 30, the high-voltage power supply 15, and the wiring 16 extracted from FIG. 1 and simplified. In this example, the electrode 12 is connected to the positive electrode (plus electrode) side of the high voltage power supply 15, and the tray 8 is connected to the negative electrode (minus electrode) side of the high voltage power supply 15. Thus, when the high voltage power supply 15 applies a voltage, the electrode 12 is charged with a positive charge, and the tray 8 and the work 30 are charged with a negative charge.

[Welding residue adsorption method]
Next, the welding residue adsorption method according to the present embodiment will be described.

  When the workpiece 30 is irradiated with the laser beam LB2, metal scrap or the like (welding residue) may be scattered from the workpiece 30. When the scattered welding residue adheres to the transmission window 11, if the laser beam LB2 passes through the portion of the transmission window 11 where the welding residue adheres, the irradiation power of the laser beam LB2 may be attenuated. . Moreover, if the laser beam LB <b> 2 is irradiated to the welding residue attached to the transmission window 11, the welding residue may be burned onto the transmission window 11. Therefore, in this embodiment, in order to eliminate the above-described problems, the welding residue generated from the work 30 is adsorbed (attached) to the electrode 12 to prevent the welding residue from adhering to the transmission window 11.

  Here, with reference to FIG. 4, the welding residue adsorption | suction method based on a present Example is demonstrated. 4 (a) and 4 (b) are diagrams showing the tray 8, the transmission window 11, the electrode 12, the work 30, the high-voltage power supply 15 and the like in a simplified manner as in FIG. 3 (b).

  FIG. 4A is a diagram illustrating a state where the welding residue 40 is scattered from the workpiece 30. Here, the electrode 12 is connected to the positive side of the high-voltage power source 15, and the tray 8 is connected to the negative side of the high-voltage power source 15. Therefore, the electrode 12 is charged with a positive charge, and the tray 8 and the work 30 are charged with a negative charge. In this case, since the work 30 is charged with a negative charge, the welding residue 40 scattered from the work 30 during welding is also charged with a negative charge.

  FIG. 4 (b) is a diagram showing how the welding residue 40 is adsorbed to the electrode 12. As described above, the electrode 12 is charged with a positive charge, and the welding residue 40 is charged with a negative charge. Therefore, the welding residue 40 scattered from the workpiece 30 is drawn toward the electrode 12 as it advances from the workpiece 30 toward the transmission window 11. As a result, the welding residue 40 adheres to the electrode 12 without reaching the transmission window 11. That is, the welding residue 40 is adsorbed by the electrode 12.

  Thus, according to the welding residue adsorption method according to the present embodiment, it is possible to appropriately prevent the welding residue 40 from adhering to the transmission window 11. Here, according to the method according to the present embodiment, when comparing the method for adsorbing the welding residue according to the present example and the method according to the comparative example in which the welding residue is adhered by the film provided between the transmission window and the workpiece, There is no need to replace the film regularly, and no waste is generated. Therefore, according to the method according to the present embodiment, it can be said that the welding residue 40 can be appropriately processed without labor.

[Modification]
Although the example which comprises the electrode 12 by cylindrical shape was shown above, it is not limited to this. FIG. 5 shows the shape of the electrode according to the modification. 5A to 5F show views in which the electrodes 12a to 12f are observed from the direction corresponding to the arrow A in FIG.

  FIG. 5A shows the electrode 12a. The electrode 12a has a shape in which a gap 12aa is formed in a part of a substantially cylindrical shape. FIG. 5B shows the electrode 12b. The electrode 12b is configured by two electrodes 12ba and 12bb whose bottom surface portion has a substantially arc shape. The two electrodes 12ba and 12bb are connected by a wiring 18b. Thereby, the potential when the voltage is applied by the high voltage electrode 15 becomes the same.

  FIG. 5C shows the electrode 12c. The electrode 12c has a cylindrical shape having a hollow portion 12ca formed therein. FIG. 5D shows the electrode 12d. The electrode 12d has a shape in which a gap 12da is formed in the electrode 12c shown in FIG.

  FIG. 5E shows the electrode 12e. The electrode 12e is configured by two electrodes 12ea and 12eb having a U-shaped bottom surface. The two electrodes 12ea and 12eb are connected by a wiring 18e. Therefore, when a voltage is applied to the electrode 12e, the potentials of the electrodes 12ea and 12eb are the same. FIG. 5F shows the electrode 12f. The electrode 12f includes two electrodes 12fa and 12fb having a flat plate shape. The two electrodes 12fa and 12fb are connected by a wiring 18f. Therefore, when a voltage is applied to the electrode 12f, the potentials of the electrodes 12fa and 12fb are the same.

  Note that it is desirable that the electrode shape be configured such that the area of the hollow portion is minimized within a range that does not hinder the progress of the laser when the laser is scanned and irradiated, and the electrode shape is not limited.

  Next, a modification of the method for applying a voltage to the electrode 12 and the tray 8 will be described. In the above description, the electrode 12 is connected to the positive side of the high-voltage power source 15 and the tray 8 is connected to the negative side of the high-voltage power source 15. However, the method of applying a voltage to the electrode 12 and the tray 8 is limited to this. Not done.

  FIG. 6 shows a voltage application method according to the modification. FIG. 6 shows a simplified view of the tray 8, the electrode 12, the work 30, etc., as in FIG. 3 (b).

  FIG. 6A shows an example in which the electrode 12 is connected to the negative electrode side of the high-voltage power supply 15a, and the tray 8 is connected to the positive electrode side of the high-voltage power supply 15a. In this case, the electrode 12 is charged with a negative charge, and the tray 8 and the work 30 are charged with a positive charge. Therefore, since the welding residue scattered from the workpiece 30 is charged with a positive charge, the welding residue is adsorbed by the electrode 12 charged with a negative charge.

  FIG. 6B shows an example in which the electrode 12 is connected to the positive side of the high-voltage power source 15b, the tray 8 is connected to the negative side of the high-voltage power source 15b, and one end of the negative-side wiring 16b is connected to the ground G. ing. In this case, since the tray 8 is connected to the ground G, the welding residue scattered from the work 30 placed on the tray 8 is not charged, but there is a potential difference between the welding residue and the electrode 12. Therefore, the welding residue is adsorbed by the charged electrode when passing through the hollow portion 12x of the electrode 12.

  Further, in another example, instead of applying a voltage to both the electrode 12 and the tray 8, the electrode is constituted by two electrode plates, and the voltage is applied so that a potential difference is generated between the two electrode plates. At the same time, a voltage can be applied to the work 30 so as to have the same potential as one of the two electrode plates.

  FIG. 7 is a diagram illustrating an example in which a voltage is applied so that a potential difference is generated between the electrode plates. 7A and 7B are perspective views of the electrodes and workpieces in FIG. 1 observed. Here, for convenience of explanation, only a tray, a workpiece, an electrode, a high-voltage power supply, and wiring are shown.

  FIG. 7A shows an example in which an electrode 12g composed of two electrode plates 12ga and 12gb whose bottom surface portion has a substantially arc shape is used. In this case, the positive electrode side of the high voltage power supply 15g is connected to the electrode plate 12ga, and the negative electrode side of the high voltage power supply 15g is connected to the electrode plate 12gb and the work 30. As a result, the electrode plate 12ga is charged with a positive charge, and the electrode plate 12gb and the workpiece 30 are charged with a negative charge. On the other hand, FIG.7 (b) has shown the example at the time of using the electrode 12h comprised by two electrode plates 12fa and 12fb which have flat plate shape. In this case, when the voltage is applied by the high-voltage power supply 15h, the electrode plate 12ha is charged with a positive charge, and the electrode plate 12hb and the work 30 are charged with a negative charge.

  As shown in FIG. 7, when the electrodes 12g and 12h are configured and a voltage is applied, the welding residue scattered from the workpiece 30 can be adsorbed by the following procedure. As described above, by applying a voltage to the workpiece 30 through the tray 8 to charge the welding residue, the welding residue scattered from the workpiece 30 travels from the workpiece 30 toward the transmission window 11. A force is applied in a direction away from the electrode plate 12gb charged with a negative charge, and a force is applied in a direction attracted to the electrode from the electrode plate 12ga charged with a positive charge. Thereby, the welding residue is adsorbed by the electrode plate 12ga.

  As described above, the laser welding apparatus according to the present embodiment welds a workpiece by irradiating the workpiece with the laser beam that has passed through the transmission window, and is disposed between the transmission window and the workpiece. An electrode extending in a substantially traveling direction of the beam; and a high-voltage power source for applying a voltage to the electrode. Thereby, it is possible to prevent welding debris generated from the workpiece during welding from adhering to the transmission window without requiring labor.

It is a figure which shows schematic structure of the laser welding apparatus which concerns on the Example of this invention. It is a figure for demonstrating details, such as a workpiece | work and an XY table. It is a figure for demonstrating a mode that a voltage is applied to an electrode and a workpiece | work. It is a figure for demonstrating the welding residue adsorption | suction method based on a present Example. It is a figure which shows the shape of the electrode which concerns on a modification. It is a figure for demonstrating the other example of the application method of a voltage. It is a figure for demonstrating the further another example of the application method of a voltage.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Laser beam emission apparatus 2 Galvano head 6 XY table 7 Insulating plate 8 Tray 9 Vacuum chamber 10 Tube part 11 Transmission window 12 Electrode 15 High voltage power supply 40 Welding waste 100 Laser welding apparatus

Claims (2)

A laser welding apparatus that welds the workpiece by irradiating the workpiece with a laser beam that has passed through a transmission window,
An electrode disposed between the transmission window and the workpiece and extending in a substantially traveling direction of the laser beam;
Voltage application means for applying a voltage to the electrode,
The electrode is constituted by at least two electrode plates,
The voltage applying means applies a voltage so as to generate a potential difference between the electrode plates, and applies a voltage to the workpiece so as to have the same potential as one of the two electrode plates. A laser welding apparatus characterized by that. The laser welding apparatus according to claim 1 , wherein the voltage applying unit applies a voltage to a tray on which the workpiece is placed.

Images