JPH03254382A - Decomposing and eliminating device - Google Patents

Abstract

PURPOSE:To execute the minute working without generating a sediment by exciting the surface of an object to be worked consisting of a carbon contained material by radiating a light beam such as a laser light, etc., allowing it to cause a decomposition reaction, and providing an electrode for leading in a decomposed product. CONSTITUTION:An object 1 to be worked, placed on a susceptor 3 is formed to a desired shape by a mask 6, and decomposed by light energy of an ultraviolet laser light 5 of an excimer laser, etc., formed by correct energy density by a condensing lens 7. This decomposed product is electrified partially and by providing an electrode for leading in electrically this decomposed product, a carbon component can be trapped. The carbon component is generally electrified to positive, therefore, it is desirable that the susceptor side and the electrode are set to the positive electrode and the negative electrode, respectively. In such a way, material working such as hollow formation, hole formation, etc., is executed to a desired shape in low damage and at a high speed without generating a sediment, and minute working is executed.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a decomposition and removal device, and more particularly to a decomposition and removal device that utilizes a laser or other light source.

[Prior art] Surface modification of an organic polymer material, which is a type of carbon-containing material,
Conventionally, processing methods using laser light have been used to form depressions and holes because they enable high-speed and fine processing.

Figure 3 shows, for example, publications (J, Appl, Phys, Vo
l,! S8゜No-5, I September 19
85. 2036-P, 2043) is a configuration diagram showing a conventional decomposition and removal device using a laser.

In the figure, (1) is a workpiece made of a carbon-containing material such as polyimide or polymethyl methacrylate, and (4)
is a light source, for example, an ultraviolet laser oscillator, (5) is an ultraviolet laser beam, and (6) is a mask that blocks the ultraviolet laser beam (5) in order to process the workpiece (1) into a desired size and shape.

The ultraviolet laser beam emitted from the ultraviolet laser oscillator (4)
5) is shaped and focused by a condensing lens (7) to an appropriate energy density for decomposition and removal of the workpiece (1). After this, the ultraviolet laser beam (5) is irradiated with the desired size and shape through the mask (6), and this light energy causes a decomposition reaction of the workpiece (1) and local volatilization, thereby achieving removal. be done.

[Problem M to be solved by the invention] The conventional decomposition and removal device is configured as described above, and the reaction products generated by the decomposition reaction by light energy are partially recombined into stable carbon compounds, amorphous carbon,
A stable structure such as graphite is taken, and the workpiece (1) is processed again.
There was a problem with deposits on top. This deposit significantly impairs the appearance, and when used as an electronic component, for example, there is a problem in that it impairs electrical properties. As described above, since the conventional decomposition and removal apparatus does not have a mechanism for controlling the reaction products, it has been difficult to remove them as expected.

This invention was made to solve the above problems, and by providing an electrode, it is possible to trap decomposition products generated from the workpiece and prevent soot from accumulating on the surface of the workpiece. The purpose is to provide a decomposition and removal device.

[Means for Solving the Problems] The decomposition removal device according to the present invention is capable of drawing in a light source that excites the surface of a workpiece made of a carbon-containing material to cause a decomposition reaction, and decomposition products from the decomposition reaction. It is equipped with electrodes.

[Function] In the present invention, the surface of the workpiece is excited by irradiating it with light such as a laser beam, causing a decomposition reaction. Decomposition products produced by this decomposition reaction may be positively charged. This charged decomposition product is drawn to the negative electrode when there is a potential difference between the susceptor and the electrode. Therefore, stable carbon compounds and the like can be prevented from being deposited on the workpiece and can be removed as expected.

[Example 7] Examples of the present invention will be described below with reference to the drawings, focusing on the formation of depressions in an organic polymer material.

FIG. 1 is a block diagram showing a decomposition and removal device according to an embodiment of the present invention. In the figure, (1) is a workpiece made of a carbon-containing material such as polyimide or polymethyl methacrylate, (2) is an electric current (3) is a susceptor that serves as an electrode, and (4) is a light source, such as an ultraviolet ray. A laser oscillator, (5) an ultraviolet laser beam, (6) a mask, and (7) a condensing lens.

A workpiece (1) placed on a susceptor (3) is shaped into a desired shape by a mask (6), and an ultraviolet laser beam such as an excimer laser is shaped with an appropriate energy density by a condenser lens (7). (5) It is decomposed by the light energy. When an organic polymer material is decomposed, the main chain carbon-
The carbon bond is broken, the carbon component detaches from the solid surface while retaining the bond, and recombines with another bond,
It becomes a relatively low molecule and evaporates. However, at this time,
Some of it takes a stable structure such as amorphous carbon or graphite on the solid surface, or takes a stable structure again in the gas phase and tries to deposit it.

However, these decomposition products are excited and partially charged by light energy. Therefore, by providing an electrode that electrically draws in the charged decomposition products, it is possible to trap the carbon component before stable carbon compounds are formed and deposited.

Since the carbon component is generally positively charged, it is preferable that the susceptor side be the positive electrode and the above electrode be the negative electrode.

FIG. 2 is a block diagram showing a decomposition and removal device according to another embodiment of the present invention. In the figure, (1) is the workpiece, (2
) is an electrode, (3) is a susceptor that serves as an electrode, (4
) is a light source such as an ultraviolet laser oscillator, (5) is an ultraviolet laser beam, (6) is a mask, (7) is a condenser lens, (8) is an ionization unit such as a deuterium lamp, and (9) is a vacuum chamber Le.

Similar to the above embodiment, the workpiece (1) placed on the susceptor (3) is decomposed by the optical energy of the ultraviolet laser beam (5). The decomposed workpiece (1) is volatilized, but at this time, a part of it assumes a stable structure and attempts to deposit again.

However, these decomposition products are excited by light energy and become partially charged, and the charged carbon components can be trapped by the above embodiment.

Furthermore, for uncharged carbon components, the ionization part (
By ionizing by 8) and electrically drawing in by electrode (2), it is possible to trap carbon components before stable carbon compounds are formed and deposited. Further, by using a vacuum chamber (9) to reduce the pressure, the trap can be more effectively trapped.

Furthermore, the ultraviolet laser (4) is not particularly limited;
For example, a YAG laser or an excimer laser is used.

Alternatively, a mercury lamp, a halogen lamp, or the like may be used.

The ionization section (8) is not particularly limited, and for example, a deuterium lamp or the like may be used. A short wavelength laser such as a nitrogen laser may also be used. In addition, it is possible to perform fine material processing such as hole formation in addition to the formation of depressions in the workpiece (1), and prevent the formation of undesirable deposits on the surface.
It can be done quickly and with little damage.

[Effects of the Invention] As described above, according to the present invention, by providing a light source that excites the surface of a workpiece made of a carbon-containing material to cause a decomposition reaction, and an electrode that draws in charged decomposition products, A decomposition and removal device capable of micro-machining is obtained, which can perform material processing such as forming depressions and holes in a desired shape at high speed and with little damage, without producing undesirable deposits on the workpiece. It has the effect of

[Brief explanation of drawings]

FIG. 1 is a block diagram showing a decomposition and removal device according to an embodiment of the present invention, FIG. 2 is a configuration diagram showing a decomposition and removal device according to another embodiment of the invention, and FIG. 3 is a configuration diagram showing a conventional decomposition and removal device. FIG. In the figure, (1) is the workpiece, (2) is the electrode, and (3) is the workpiece.
is a susceptor, (4) is a light source, (6) is a mask, (7) is a condenser lens, (8) is an ionization section, and (9) is a vacuum chamber. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.

Claims (1)

[Claims] A decomposition and removal device comprising: a light source that excites the surface of a workpiece made of a carbon-containing material to cause a decomposition reaction; and an electrode that draws in decomposition products from the decomposition reaction.