JP2010069530A - Laser drawing apparatus and control method thereof - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a highly reliable laser drawing apparatus and its control method, by which scattering incidental to machining with a laser beam is surely and efficiently removed without lowering manufacturing quality, without needing frequent cleaning, and without causing refraction of a laser beam. <P>SOLUTION: As a dust collecting means for taking in scattering from a base board 1, for example, a dust collecting electrode 40 is installed between an f-θ lens 27 and the base board 1. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a laser drawing apparatus used for manufacturing an inkjet head or the like and a control method thereof.

A laser drawing apparatus that draws characters and figures on a substrate using a YAG laser is known (for example, Patent Document 1).
The YAG laser is 1064 nm infrared light, which is converted into visible light of 532 nm by passing through the wavelength conversion crystal. This laser light is input to the galvanometer through a collimator lens and a reflecting mirror. The laser beam input to the galvanometer is deflected by the galvanometer and is irradiated to an arbitrary place on the substrate through the f-θ lens. Since the substrate is placed on the movable stage, it is possible to irradiate the laser beam to any position on the substrate by moving the movable stage without using the galvanometer. Both a galvanometer and a movable stage can be used together. The output of the laser light, the driving of the galvanometer, and the driving of the movable stage are controlled by a control program stored in the laser drawing apparatus (for example, Patent Document 1).

  By using this laser drawing apparatus, characters and figures can be drawn on the substrate. Further, by using a laser drawing apparatus, an electrode wiring board can be formed on an insulating substrate having a metal film mounted on the surface thereof.

  However, when drawing with a laser drawing device, the substrate and the metal film on the surface are dissolved in the part scanned with the laser beam, part of which is attached as burrs around the scanning part, and another part is foggy. Splattered into small droplets (dust and powder). Spattered substrates and metal film material droplets adhere to the substrate, resulting in a dirty product finish, or if scattered droplets adhere to the laser drawing lens, the laser output to the processing point decreases. Cause a malfunction.

Therefore, conventionally, a mechanism for blowing off dust by discharging air or a mechanism for sucking up dust by sucking air is mounted on the laser drawing apparatus so as to eliminate problems caused by scattered droplets.
JP-A-9-131866

  However, when air is discharged, small dust flies irregularly and adheres to the apparatus and the substrate to be processed. In addition, when air is sucked, dust that is far from the suction nozzle cannot be sucked. In fact, neither of them can achieve a sufficient effect. As a result, the manufacturing quality deteriorates or a treatment for frequently cleaning the lens of the laser drawing apparatus becomes necessary.

  When dust is blown away by discharging air, or when dust is sucked by sucking air, the flow rate of air is increased if an attempt is made to increase the dust removal effect.

  However, when the air discharge flow rate increases, the pressure partially increases as the air flows and the density of the air increases. In the case of suction, when the air suction flow rate increases, the pressure partially decreases as the air flows, and the density of the air decreases. In either case, the air density changes within the range of the optical axis of the laser beam. In this case, the laser beam is refracted and the processing position on the workpiece is slightly shifted. When performing microfabrication, this deviation becomes a big problem.

  The adhesion of dust to the workpiece and the lens and the displacement of the processing position are particularly problematic when performing fine drawing with a resolution of 100 μm or less.

  For example, if the purpose is the formation of an electrode wiring board, metal powder adheres to the processed inter-electrode insulating part, resulting in poor insulation, or substrate material powder adheres to the electrode terminal part, resulting in poor contact, etc. It causes a drop in function as a terminal. When dust adheres to the f-θ lens, the laser output decreases, and the processing becomes insufficient, resulting in an insulation failure between the electrodes.

  When manufacturing an inkjet head in which functional members such as actuators are mounted on the substrate at a fine pitch, if the processing position is misaligned, the wiring between the functional member and the electrode is misaligned, the signal is cut off, and the device does not operate normally. Produce.

  The present invention has been made in consideration of the above-mentioned circumstances, and its object is to cause refraction of laser light without causing frequent degradation of the scattered matter caused by processing with laser light without causing a reduction in manufacturing quality. It is another object of the present invention to provide a reliable laser drawing apparatus that can be removed reliably and efficiently and a control method thereof.

  The laser drawing apparatus of the invention according to claim 1 irradiates a substrate with a laser beam through a lens, draws characters and figures on the substrate, and collects dust scattered from the substrate. . The dust collecting means has a dust collecting electrode provided between the lens and the substrate, and a DC power source connected between the dust collecting electrode and the substrate.

  According to the laser drawing apparatus and the control method thereof of the present invention, the scattered matter accompanying the processing by the laser beam does not cause a decrease in manufacturing quality, does not require frequent cleaning, and does not cause refraction of the laser beam. Can be removed reliably and efficiently. Thereby, the reliability of processing by laser light is greatly improved.

[1] First embodiment
Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. First, the external appearance of the inkjet head according to the present invention is shown in FIG.
As shown in FIG. 1, a frame member 2 is bonded to the upper surface (plane) of a plate-like substrate 1 made of alumina, for example, a low dielectric constant member, and a nozzle plate (also referred to as an orifice plate) is formed on the frame member 2. ) 3 is bonded, and the actuator row A and the actuator row B are formed inside the frame member 2.

  The nozzle plate 3 is formed of a rectangular polyimide film and has a pair of nozzle rows 4. Each of these nozzle rows 4 is formed by an array of a plurality of nozzles 5.

  The actuator rows A and B are formed by, for example, attaching two piezoelectric members made of PZT (lead zirconate titanate) vertically in a trapezoidal shape so that their polarization directions face each other. Each has a plurality of pressure chambers 6 arranged along the surface and having a surface cut into a groove shape. These pressure chambers 6 correspond to the respective nozzles 5 of the nozzle plate 3, and ink is ejected from the respective nozzles 5 when the ink in the respective pressure chambers 6 receives pressure.

  In the substrate 1, a plurality of circular ink inlets 7 are arranged between the actuator rows A and B, and a plurality of ink outlets 8 are arranged at positions sandwiching the actuator rows A and B from both sides. Yes.

  The electrodes provided in the pressure chambers 6 of the actuator rows A and B and the conductive pattern for energizing the electrodes are formed by a nickel and gold conductive layer on the entire substrate 1 by electroless nickel plating and electrolytic gold plating. The conductive layer is formed in the remaining portion of the conductive layer by a process (so-called subtracting method) in which the conductive layer is burned out and removed by laser light.

  That is, each electrode is first formed with a conductive layer of nickel and gold on the entire substrate 1 by electroless nickel plating and electroplating, and the insulating portion between the electrodes is then removed by burning with laser light.

  In order to form each electrode and conductive pattern of such an ink jet head, the laser drawing apparatus of the present invention is used. The structure of this laser drawing apparatus is shown in FIG.

  First, the substrate 1 is placed on the movable stage 10. Reference numeral 20 denotes a YAG laser unit which emits infrared light of 1064 nm. This infrared light is converted into visible light of 532 nm by passing through the wavelength conversion crystal 21, and this laser light is input to the galvanometer 26 through the collimator lenses 22 and 23 and the reflection mirrors 24 and 25. The laser light input to the galvanometer 26 is deflected by the galvanometer 26 and irradiated to an arbitrary place on the substrate 1 on the movable stage 10 through the f-θ lens 27. Since the substrate 1 is placed on the movable stage 10, it is possible to move the movable stage 10 and irradiate laser light to any position on the substrate 1 without using the galvanometer 26. Both the galvanometer 26 and the movable stage 10 can be used together. The output of the laser light, driving of the galvanometer 26 and driving of the movable stage 10 are controlled by the control device 30.

  A metal dust collecting electrode 40 is provided between the f-θ lens 27 and the substrate 1 on the movable stage 10, and a positive terminal of a high-voltage DC power supply 50 is connected to the dust collecting electrode 40, so that the high-voltage DC The negative terminal of the power supply 50 is electrically connected to the conductive layer on the surface of the substrate 1. The high voltage DC power supply 50 outputs a high voltage DC voltage of 20 kV. The dust collecting electrode 40 and the high-voltage DC power source 50 constitute dust collecting means for taking in dust and powder that are mist-like droplets scattered from the substrate 1. Hereinafter, dust and powder that are mist-like droplets scattered from the substrate 1 are referred to as scattered matter.

  As shown in FIG. 3, the dust collection electrode 40 is a metallic cylinder having a space 40a through which laser light passes. Two opposing side plates of the dust collecting electrode 40 are held on the movable stage 10 by L-shaped support legs 11 each formed of an “insulator” of an insulating member.

  According to such a configuration, the dust collection electrode 40 is charged with a positive charge and the substrate 1 is charged with a negative charge due to the output voltage of the high-voltage DC power supply 50. Therefore, a negative charge is given to the scattered matter from the substrate 1 by the processing of the laser beam, and the scattered matter does not adhere to the substrate 1 by the Coulomb force and is adsorbed to the dust collecting electrode 40 having a positive charge. Is done.

  In this way, scattered matter from the substrate 1 can be removed reliably and efficiently. A sufficient removal effect can be obtained as compared with the conventional air discharge or suction, and the f-θ lens 27 needs to be frequently cleaned without deteriorating the manufacturing quality as described above. Absent. When trying to enhance the removal effect when exhaling or sucking air, as described above, the air flow rate is increased and the laser beam is refracted. High processing is possible.

  Conventional methods using air suction suck and collect dust in the environment. If dust adheres to the workpiece or blocks the laser beam, it will not be possible to draw correctly and will produce defective products. On the contrary, in the method of blowing the pride generated by the laser drawing by blowing air, the blown dust will pollute the environment. If a partition is provided around the main body of the apparatus in order to prevent the environment from becoming dirty, workability is deteriorated.

  According to the present embodiment, since no air enters and exits between the apparatus main body and the environment, such an adverse effect does not occur.

  As the charge radiating means for radiating negative charges toward the f-θ lens 27, for example, the two ionizers 51 and 52 are in a state of facing each other across the surface of the f-θ lens 27 facing the substrate 1. You may make it provide. When negative charges are emitted from the ionizers 51 and 52, the surface of the f-θ lens 27 on the side facing the substrate 1 is negatively charged. Since the scattered matter from the substrate 1 has a negative charge, it becomes difficult to approach the f-θ lens 27 having the same polarity, and is easily adsorbed to the dust collecting electrode 40 accordingly. It is also possible to prevent the f-θ lens 27 from being contaminated by scattered objects.

[2] Second embodiment
A second embodiment will be described.
A metal bottom plate 41 shown in FIG. 4 is provided in the opening of the dust collecting electrode 40 on the substrate 1 side. The bottom plate 41 has openings 41a and 41b at positions (scanning positions) through which laser light passes. That is, the dust collection electrode 40 is a metallic box composed of a side plate having a space 40a through which laser light passes and a bottom plate 41 having openings 41a, 41b at positions through which the laser light passes.

Due to the presence of the bottom plate 41a, scattered matter from the substrate 1 can be more effectively adsorbed.
Other configurations, operations, and effects are the same as those in the first embodiment. Therefore, the description is omitted.

[3] Third embodiment
A third embodiment will be described.
When the scanning of the laser beam on the substrate 1 is one-dimensional, instead of the dust collecting electrode 40, a metal plate-shaped dust collecting electrode 60 shown in FIGS. 5 and 6 may be provided close to the upper surface of the substrate 1. Good. The dust collection electrode 60 has an elongated slit 61a as an opening at a position (scanning position) through which laser light passes. The positive terminal of the high voltage DC power supply 50 is connected to the dust collecting electrode 60, and the negative terminal of the high voltage DC power supply 50 is connected to the substrate 1.
When the search range of the laser beam by the galvanometer 26 is narrow for drawing mainly by the movable stage 10, a dust collecting electrode 60 having a circular opening 62 may be employed as shown in FIG.
As in the first embodiment, it is of course possible to provide ionizers 51 and 52 to emit negative charges to the f-θ lens 27.
Other configurations, operations, and effects are the same as those in the first embodiment. Therefore, the description is omitted.

[4] Fourth embodiment
A fourth embodiment will be described.
When relying on the movable stage 10 for all pattern drawing, a reflecting mirror 28 and a condensing lens 29 are used instead of the galvanometer 26 and the f-θ lens 27 as shown in FIG. A configuration in which it is squeezed and applied to the substrate 1 is employed.

With the adoption of the reflection mirror 28 and the condensing lens 29, a dust collecting electrode 71 made of a metal mesh plate is provided below and in the vicinity of the condensing lens 29. The positive terminal of the high-voltage DC power supply 50 is connected to the dust collecting electrode 71, and the negative terminal of the high-voltage DC power supply 50 is connected to the substrate 1.
In addition to the adoption of the dust collection electrode 71, the dust collection electrode 60 of FIG. 7 shown in the third embodiment may be used in combination. That is, two dust collecting electrodes 71 and 60 are sequentially provided between the condenser lens 29 and the substrate 1. In this case, the dust collecting electrode 71 functions as a first dust collecting electrode that prevents the scattered matter from adhering to the condenser lens 29, and the dust collecting electrode 60 serves as a second dust collecting electrode that prevents the scattered matter from adhering to the substrate 1. Function.

As in the first embodiment, it is of course possible to provide ionizers 51 and 52 to emit negative charges to the f-θ lens 27.
Other configurations, operations, and effects are the same as those in the first embodiment. Therefore, the description is omitted.

[5] Fifth embodiment
In the fifth embodiment, at least the lens (f-θ lens or condenser lens), the dust collecting electrode, the substrate 1, the movable stage 10, and the ionizers 51 and 52 in each of the above embodiments are accommodated in a vacuum chamber. The Since the trajectory of the scattered matter is not disturbed by the air flow in the vacuum chamber, the scattered matter can be more reliably adsorbed to the dust collecting electrode.

[6] Sixth embodiment
A sixth embodiment will be described.
As shown in FIG. 9, an air outlet 81 a and an air inlet 82 a are provided in a state facing each other across a space near the upper surface of the substrate 1 in a direction orthogonal to the laser light from the f-θ lens 27. The air flowing into the air suction port 82 a is guided to the filter 83 through the duct 82 and is filtered by the filter 83. The filtered air is guided to the air outlet 81a by the pump 80 and the duct 81, and is blown out from the air outlet 81a toward the air inlet 82a.

  As shown in FIG. 10, the air outlet 81 a and the air inlet 82 a have a width that is substantially the same as or larger than the upper surface of the substrate 1.

  The air outlet 81a, the air inlet 82a, the ducts 81 and 82, the filter 83, and the pump 80 constitute an air flow forming unit that forms an air flow that flows from the air outlet 81a to the air inlet 82a. This air flow forming unit is used as a dust collecting means.

That is, a strong and smooth air flow is generated across the space immediately above the upper surface of the substrate 1, and scattered matter from the substrate 1 rides on the air flow and flows into the air suction port 82a. The inflowing scattered matter is taken into the filter 83 together with the air, and only the scattered matter is extracted by the filter 83, and the remaining clean air is sent to the air outlet 81a to become a strong and smooth air flow again.
In this way, the scattered matter from the substrate 1 can be reliably and efficiently removed.

  Moreover, drawing with laser light is performed in order from the side closer to the air outlet 81a (the left side in the figure) to the air inlet 82a side, and the drawing transition direction and the direction of the air flow coincide with each other. The risk of powder and powder adhering to the processed insulation is reduced. There is a possibility that dust and powder scattered from the processed part may adhere to the part to be processed from now on, but the attached scattered matter is excised by laser light when a new insulating part is formed. Therefore, it is possible to avoid a short circuit failure of the insulating portion caused by conductive scattered matter.

  In particular, since the air outlet 81a has a positive pressure above atmospheric pressure and the air suction port 82a has a negative pressure higher than atmospheric pressure, the space immediately above the upper surface of the substrate 1 can be maintained at substantially atmospheric pressure. Therefore, the density of air changes within the range of the optical axis of the laser beam so that the laser beam is refracted as in the conventional method using only the discharge nozzle using the discharge nozzle or the method using only the suction using the suction nozzle. Thus, fine and high-precision processing can be performed on the substrate 1 while reliably and efficiently removing scattered matter from the substrate 1 without causing any trouble.

In addition, although it was set as the structure which obtains both the blowing pressure and suction pressure of air with one pump 80, the exclusive pressure source for obtaining the exclusive pressure source for obtaining the blowing pressure of air and the suction pressure is provided, respectively. You may make it adjust the pressure of each pressure source so that the range of the optical axis of a laser beam may become substantially atmospheric pressure.
As in the first embodiment, it is of course possible to provide ionizers 51 and 52 to emit negative charges to the f-θ lens 27.
Other configurations, operations, and effects are the same as those in the first embodiment. Therefore, the description is omitted.

[7] Seventh embodiment
The seventh embodiment is related to the sixth embodiment.
As shown in FIG. 11, the first air outlet 81 a and the first air inlet 82 a are in a state facing each other across the space near the upper surface of the substrate 1 in the direction orthogonal to the laser light from the f-θ lens 27. Provided. The air flowing into the first air suction port 82 a is guided to the filter 83 through the duct 82 and is filtered by the filter 83. The filtered air is guided to the first air outlet 81a by the pump 80 and the duct 81, and is blown out from the first air outlet 81a toward the first air inlet 82a.

  The second air outlet 84a and the second air inlet 85a are provided so as to face each other across the space on the side facing the substrate 1 of the f-θ lens 27 or a space in the vicinity thereof. Part of the air guided from the duct 81 to the first air outlet 81a is diverted to the second air outlet 84a at the tip of the duct 84, and directed from the second air outlet 84a toward the f-θ lens 27. Be blown out. The blown air flows along the surface of the f-θ lens 27 and is sucked into the second air suction port 85a. The sucked air flows from the duct 85 into the duct 82 and is guided to the filter 83.

  The first air outlet 81a, the first air inlet 82a, the second air outlet 84a, the second air inlet 85a, the ducts 81 and 82, the filter 83, and the pump 80 are used for the first air outlet 81a. An air flow forming unit that forms an air flow that flows to the first air suction port 82a and an air flow that flows from the second air outlet 84a to the second air suction port 85a is configured. This air flow forming unit is used as a dust collecting means.

Therefore, the scattered matter from the substrate 1 can be removed reliably and efficiently as in the sixth embodiment, and the scattered matter can be more effectively prevented from adhering to the surface of the f-θ lens 27.
Other configurations, operations, and effects are the same as those in the sixth embodiment. Therefore, the description is omitted.

  In addition, as a means for blowing air on the surface of the f-θ lens 27 to create a flow of air on the lens surface, only conventional suction or discharge may be used. Even in this case, the effect of preventing contamination of the lens surface can be obtained to some extent.

[8] Eighth embodiment
The eighth embodiment is related to the sixth embodiment.
That is, as shown in FIG. 12, a dust collecting electrode 86 made of a metal mesh plate is provided in the air suction port 82a, and the positive terminal of the high voltage DC power source 50 is connected to the dust collecting electrode 86, and the high voltage DC power source 50 is connected. Is connected to the substrate 1.
The dust collection electrode 86 is the same as or slightly larger than the opening area of the air suction port 82a. When the scattered matter from the substrate 1 rides on the airflow and is sucked into the air suction port 82a, among the scattered matter in the airflow, a relatively small surface area is adsorbed to the dust collecting electrode 86 by the Coulomb force, Those having a relatively large surface area are led to the filter 83 through the duct 82. In addition, a part of the scattered material having a relatively large surface area is caught by the mesh structure of the dust collecting electrode 86 and captured when passing through the dust collecting electrode 86.

As described above, the combination of the air flow forming unit and the dust collecting electrode 86 can more reliably remove scattered matters. The load on the filter 83 can be reduced as much as a part of the scattered matter having a relatively large surface area is caught by the mesh structure of the dust collecting electrode 86 and the frequency of replacement of the filter 83 can be reduced.
Other configurations, operations, and effects are the same as those in the first and sixth embodiments. Therefore, the description is omitted.

[9] Ninth embodiment
The ninth embodiment relates to the eighth embodiment. As shown in FIG. 13, the movable stage 10 is inclined in the vertical direction, and the laser processing of the substrate 1 is performed in the vertical direction by the movable stage 10. It is held in an inclined state. Accordingly, the entire apparatus including the laser light optical system and the air flow forming unit is installed in an inclined state.

  However, it differs from the eighth embodiment in that the negative terminal of the high-voltage DC power supply 50 is connected to the dust collecting electrode 86 and the positive terminal of the high-voltage DC power supply 50 is connected to the substrate 1. The connection polarity of the high-voltage DC power supply 50 may be configured such that the positive terminal of the high-voltage DC power supply 50 is connected to the substrate 1 and the negative terminal is connected to the dust collecting electrode 86, as in the eighth embodiment. .

  According to the ninth embodiment, the heaviest particles out of the scattered matter from the substrate 1 fall by gravity and are removed from the apparatus, and the medium particles are carried by the air flow and sucked into the air suction port 82a. The lightest particles are removed by adsorption to the dust collecting electrode 86 by Coulomb force. That is, in addition to being able to deal with scattered objects having different surface areas according to the eighth embodiment, it is possible to deal with scattered objects having different weights.

  If medium particles can be sufficiently removed by gravity and / or coulomb, the air flow through the air flow forming unit may be omitted.

  Although not shown in the drawing, in this embodiment as well, if charges are emitted from the ionizers 51 and 52 toward the f-θ lens 27, the dust collection effect, particularly the effect of preventing the scattered matter from adhering to the f-θ lens 27, will be described. Can be improved. However, since the positive terminal of the high-voltage DC power supply 50 is connected to the substrate 1, when the ionizers 51 and 52 are employed, positive charges are emitted from the ionizers 51 and 52 toward the f-θ lens 27.

The movable stage 10 may be inclined further downward than the vertical direction, and the substrate 1 may be held on the movable stage 10 by vacuum suction.
As shown in FIG. 14, the dust collecting electrode 86 is not limited to a metal mesh plate structure, and has two metal side plates 86a and 86b erected so as to ensure a space through which laser light passes. It is good also as a structure. Since the scattered particles can be captured also by the side plates 86a and 86b, it is more effective. Further, the side plates 86a and 86b have an effect of not letting the air flow escape in an unnecessary direction.
Other configurations, operations, and effects are the same as those in the eighth embodiment. Therefore, the description is omitted.

[10] Modification
In the ninth embodiment, the positive terminal of the high-voltage DC power supply 50 is connected to the substrate 1 and the negative terminal is connected to the dust collecting electrode 86. However, this polarity may be the same as in the other embodiments. Conversely, the polarity of other embodiments may be reversed in the same manner as in the ninth embodiment. In short, it is only necessary that the polarity of charges emitted from the ionizers 51 and 52 matches the polarity of the substrate 1.

  Since the flow of minute scattered objects varies depending on the negative potential (ground potential) of the high-voltage DC power supply 50, it is desirable to adjust the negative-side potential of the high-voltage DC power supply 50 to a potential at which the scattered objects can be most effectively excluded. . However, from the standpoint of operating safety measures for the apparatus, the method of grounding the potential on the substrate 1 side is the easiest, so that may be used.

  The high-voltage DC power supply 50 has a sufficiently high impedance for safety measures for the person who operates the apparatus, and when a person approaches, the energization from the high-voltage DC power supply 50 is interrupted together with the laser beam by a proximity sensor or an area sensor. It is desirable.

  In addition, this invention is not limited to each said embodiment, A various deformation | transformation implementation is possible in the range which does not change a summary.

1 is a perspective view showing an appearance of an inkjet head according to the present invention. The figure which shows the structure of 1st Embodiment. The figure which shows the specific structure of the dust collection electrode in 1st Embodiment, and its peripheral part. The figure which shows the structure of the baseplate in 2nd Embodiment. The figure which shows the structure of 3rd Embodiment. The figure which shows the structure of the dust collection electrode in 3rd Embodiment. The figure which shows the structure of the modification of the dust collection electrode in 3rd Embodiment. The figure which shows the structure of 4th Embodiment. The figure which shows the structure of 6th Embodiment. The perspective view which shows the specific structure of the air blower outlet and air inlet in 6th Embodiment. The figure which shows the structure of 7th Embodiment. The figure which shows the structure of 8th Embodiment. The figure which shows the structure of 9th Embodiment. The figure which shows the structure of the modification of the dust collection electrode in 9th Embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Board | substrate, 2 ... Frame member, 3 ... Nozzle plate, 4 ... Nozzle row, 5 ... Nozzle, 6 ... Pressure chamber, 7 ... Ink inlet, 8 ... Ink outlet, 10 ... Movable stage, 20 ... YAG laser unit , 21 ... wavelength conversion crystal, 22, 23 ... collimator lens, 24, 25 ... reflection mirror, 26 ... galvanometer, 27 ... f-theta lens, 29 ... condensing lens, 30 ... control device, 40 ... dust collecting electrode, 50 ... high-voltage DC power supply, 51, 52 ... ionizer, 41 ... bottom plate, 60 ... dust collecting electrode, 71 ... dust collecting electrode, 80 ... pump, 81, 82 ... duct, 81a ... air outlet, 82a ... air inlet, 83 ... Filter, 84, 85 ... Duct, 84a ... Air outlet, 85a ... Air inlet, 86 ... Dust collecting electrode

Claims (14)

In a laser drawing device that irradiates a substrate with laser light through a lens and draws characters and figures on the substrate,
A dust collecting means for taking in scattered matter from the substrate;
The dust collecting means has a dust collecting electrode provided between the lens and the substrate, and a DC power source connected between the dust collecting electrode and the substrate.
A laser drawing apparatus characterized by that. The dust collection electrode is a metallic cylinder having a space through which laser light passes,
The laser drawing apparatus according to claim 1. Charge emitting means for emitting charge toward the lens;
The laser drawing apparatus according to claim 1, further comprising: The dust collecting electrode is a metallic box composed of a side plate having a space through which laser light passes inside and a bottom plate having an opening at a position through which laser light passes.
The laser drawing apparatus according to claim 1. The dust collection electrode is a metal plate having an opening at a position where laser light passes,
The laser drawing apparatus according to claim 1. The dust collecting electrode is a metal mesh plate.
The laser drawing apparatus according to claim 1. The dust collecting electrode is a first dust collecting electrode and a second dust collecting electrode sequentially provided between the lens and the substrate, and a metal mesh plate is used as the first dust collecting electrode, and laser light is used. A metal plate having an opening at a position through which the second dust collection electrode is used,
The laser drawing apparatus according to claim 1. A vacuum chamber containing at least the lens, the dust collecting electrode, and the substrate;
The laser drawing apparatus according to claim 1, further comprising: In a laser drawing device that irradiates a substrate with laser light through a lens and draws characters and figures on the substrate,
A dust collecting means for taking in scattered matter from the substrate;
The dust collecting means includes an air outlet and an air inlet facing each other across a space near the upper surface of the substrate, a filter for filtering the intake air of the air inlet, and a pump for sending the air passing through the filter to the air outlet. An air flow forming unit that forms an air flow that flows from the air outlet to the air inlet;
A laser drawing apparatus characterized by that. The air outlet and the air inlet have a width that is substantially the same as or larger than the upper surface of the substrate.
The laser drawing apparatus according to claim 9. The air flow forming unit faces a first air outlet and a first air inlet facing each other across a space near the upper surface of the substrate, a surface of the lens facing the substrate or a space near the surface. A second air outlet and a second air inlet, a filter that filters the intake air of the first and second air inlets, and a pump that sends the air that has passed through the filter to the first and second air outlets, Forming an air flow flowing from the first air outlet to the first air inlet and an air flow flowing from the second air outlet to the second air inlet, respectively;
The laser drawing apparatus according to claim 9. The dust collecting means includes
A mesh-shaped dust collecting electrode provided in the air suction port, and a DC power source connected between the dust collecting electrode and the substrate;
The laser drawing apparatus according to claim 9, further comprising: A stage for holding the substrate in a state where the laser processing surface of the substrate is inclined in the vertical direction or in a state where the substrate is inclined further downward than the vertical direction,
The laser drawing apparatus according to claim 1, further comprising: The dust collection electrode has a plurality of side plates erected in a state of ensuring a space through which laser light passes,
The laser drawing apparatus according to claim 12.

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