JP5107035B2 - 光導波路材料ならびにその製造方法および製造装置 - Google Patents
光導波路材料ならびにその製造方法および製造装置 Download PDFInfo
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C13/00—Fibre or filament compositions
- C03C13/04—Fibre optics, e.g. core and clad fibre compositions
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D11/00—Burners using a direct spraying action of liquid droplets or vaporised liquid into the combustion space
- F23D11/10—Burners using a direct spraying action of liquid droplets or vaporised liquid into the combustion space the spraying being induced by a gaseous medium, e.g. water vapour
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/34—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with rare earth metals, i.e. with Sc, Y or lanthanides, e.g. for laser-amplifiers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/34—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with rare earth metals, i.e. with Sc, Y or lanthanides, e.g. for laser-amplifiers
- C03B2201/36—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with rare earth metals, i.e. with Sc, Y or lanthanides, e.g. for laser-amplifiers doped with rare earth metals and aluminium, e.g. Er-Al co-doped
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/14—Tapered or flared nozzles or ports angled to central burner axis
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
- C03B2207/34—Liquid, e.g. mist or aerosol
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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- Mechanical Engineering (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
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- Combustion & Propulsion (AREA)
- General Engineering & Computer Science (AREA)
- Lasers (AREA)
- Optical Integrated Circuits (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Description
微小粒子の生成は、放射線の誘導放出によって光を増幅する光増幅光導波路の製造において重要な工程である。このような導波路の光増幅特性は、たとえば適切なドーパント、たとえばエルビウムをアモルファス石英ガラスにドーピングすることによって実現される。
本発明の目的は、均質な組成および微小サイズを有する光増幅光学材料を製造することである。本発明の他の目的は、該材料の製造に使用される工程の制御を改善することである。
光増幅光学材料を形成する装置は、エルビウムドープシリカガラスの粒子を製造するために使用されるバーナ・アセンブリを少なくとも備える。
音速VSは、以下の式で求められる。
速度Vに相当するレイノルズ数ReDは、以下のように定義される。
圧力比Rは、以下のように定義される。
・液体ノズル12を通過する液体の流量:3.6〜4.5g/min
・噴霧ガスノズル22を通過するガスの流量:35〜60SLPM
・ノズル32を通過するガスの流量:0〜15SLPM
・ノズル42を通過するガスの流量:10〜40SLPM
SLPMは、標準リットル/分を表す。
・波長1530nmで計測したピーク吸収:20dB/m
・コア直径:6マイクロメートル
クラッド直径:125マイクロメートル
・コア材のクラスタ中におけるエルビウムイオンの割合:ほぼ6.5%程度
Claims (16)
- 光増幅光学材料の製造方法であって、
噴霧ガス(20)を放出し、
該噴霧ガス(20)によって、少なくとも1種の液体反応剤(10)を霧化して液滴(15)を形成し、
該液滴(15)を火炎(100)に導入し、
少なくとも1種の反応剤(10,30)を前記火炎(100)内で酸化させて1種以上の酸化物を形成し、
該1種以上の酸化物を凝集して粒子(50)を生成し、
該粒子(50)の少なくとも一部を回収し、回収された一部の粒子(50)は、相互に溶融されて前記光増幅光学材料を形成する、光増幅光学材料の製造方法において、
前記噴霧ガス(20)は、音速の0.3〜1.5倍の速度で放出されることを特徴とする、光増幅光学材料の製造方法。 - 少なくともケイ素および/またはその化合物を含む少なくとも1種の反応剤を前記火炎に導入することをさらに含むことを特徴とする、請求項1に記載の方法。
- 前記ケイ素化合物は、四塩化ケイ素ガスであることを特徴とする、請求項2に記載の方法。
- 少なくとも1種の金属および/またはその化合物を含む少なくとも1種の反応剤を前記火炎に導入する工程をさらに含み、該少なくとも1種の金属は、元素周期表におけるIA族、IB族、IIA族、IIB族、IIIA族、IIIB族、IVA族、IVB族、VA族および希土類系から選択されることを特徴とする、請求項1〜3のいずれか1項に記載の方法。
- 前記少なくとも1種の金属は、エルビウム、イッテルビウム、ネオジム、またはツリウムであることを特徴とする、請求項4に記載の方法。
- 前記噴霧ガス(20)は、前記少なくとも1種の液状の反応剤(10)に関して同心円状または実質的に同心円状に、前記火炎(100)に導入されることを特徴とする、請求項1〜5のいずれか1項に記載の方法。
- 前記噴霧ガス(20)は、狭窄した断面を有する部分(24)を少なくとも一部に含む少なくとも1種の噴霧ガスノズル(22)に導入され、該噴霧ガス(20)の速度は、前記狭窄した断面によって上昇することを特徴とする、請求項1〜6のいずれか1項に記載の方法。
- 少なくとも前記噴霧ガス(20)は、発散する断面を有する部分を少なくとも一部に含むノズル(22)に導入され、該噴霧ガス(20)の速度は、発散する断面を有する前記部分を少なくとも一部に含む前記ノズル(22)によって上昇することを特徴とする、請求項1〜7のいずれか1項に記載の方法。
- 前記ノズル(22)は、ラバルノズルであることを特徴とする、請求項8に記載の方法。
- 前記噴霧ガス(20)は、少なくとも可燃性ガスと酸化ガスとの混合物であることを特徴とする、請求項1〜9のいずれか1項に記載の方法。
- 前記噴霧ガス(20)および/または別の気体物質(30,40)が、少なくとも1つの旋回誘引要素(26)を通過して、前記火炎に導入されることを特徴とする、請求項1〜10のいずれか1項に記載の方法。
- さらに、少なくとも前記光増幅光学材料を含む光導波路プリフォーム(720)を形成することを含むことを特徴とする、請求項1〜11のいずれか1項に記載の方法。
- さらに、少なくとも前記光増幅光学材料を含む光増幅体を形成することを含むことを特徴とする、請求項1〜11のいずれか1項に記載の方法。
- さらに、少なくとも前記光増幅光学材料を含む光増幅光導波路(750)を形成することを含むことを特徴とする、請求項1〜11のいずれか1項に記載の方法。
- さらに、少なくとも前記光増幅光学材料を含む平面光導波路を形成することを含むことを特徴とする、請求項1〜11のいずれか1項に記載の方法。
- さらに、少なくとも前記光増幅光学材料を含むフォトニック構造を形成することを含むことを特徴とする、請求項1〜11のいずれか1項に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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FI20045264A FI116619B (fi) | 2004-07-02 | 2004-07-02 | Menetelmä ja laite optisen materiaalin tuottamiseksi sekä optinen aaltojohde |
FI20045264 | 2004-07-02 | ||
PCT/FI2005/050239 WO2006003253A1 (en) | 2004-07-02 | 2005-06-23 | Optical waveguide material as well as method and device for producing it |
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JP2008504207A JP2008504207A (ja) | 2008-02-14 |
JP5107035B2 true JP5107035B2 (ja) | 2012-12-26 |
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US (1) | US20060001952A1 (ja) |
EP (1) | EP1778597B1 (ja) |
JP (1) | JP5107035B2 (ja) |
KR (1) | KR101224509B1 (ja) |
CN (1) | CN1984851A (ja) |
CA (1) | CA2613576C (ja) |
DK (1) | DK1778597T3 (ja) |
FI (1) | FI116619B (ja) |
IL (1) | IL180372A (ja) |
WO (1) | WO2006003253A1 (ja) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8069690B2 (en) | 2005-12-16 | 2011-12-06 | Ofs Fitel, Llc | Apparatus and method for fabricating glass bodies using an aerosol delivery system |
DE102007045097B4 (de) | 2007-09-20 | 2012-11-29 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren zur Herstellung von co-dotiertem Quarzglas |
JP5362382B2 (ja) * | 2008-02-27 | 2013-12-11 | 信越化学工業株式会社 | 光ファイバ用母材の製造方法及び光ファイバ用母材製造用バーナ |
EP2233836B1 (de) | 2009-03-23 | 2015-07-29 | Siemens Aktiengesellschaft | Drallerzeuger, Verfahren zum Vermeiden von Flammenrückschlag in einem Brenner mit wenigstens einem Drallerzeuger und Brenner |
GB2478307A (en) | 2010-03-02 | 2011-09-07 | Heraeus Quartz Uk Ltd | Manufacture of silica glass |
US9066412B2 (en) | 2010-04-15 | 2015-06-23 | Asml Netherlands B.V. | Systems and methods for cooling an optic |
US8840858B2 (en) * | 2011-07-06 | 2014-09-23 | Corning Incorporated | Apparatus for mixing vaporized precursor and gas and method therefor |
JP5748633B2 (ja) * | 2011-10-18 | 2015-07-15 | 信越化学工業株式会社 | 多孔質ガラス母材製造用バーナ及び多孔質ガラス母材の製造方法 |
DE102012012524B3 (de) * | 2012-06-26 | 2013-07-18 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren zur Herstellung eines dotierten SiO2-Schlickers sowie Verwendung des SiO2-Schlickers |
US9695080B2 (en) | 2012-12-28 | 2017-07-04 | Sumitomo Electric Industries, Ltd. | Glass particle deposit producing method and glass preform producing method |
US20160195268A1 (en) * | 2013-07-25 | 2016-07-07 | Liang Yu | Burner nozzle |
DE102015109264A1 (de) * | 2015-06-11 | 2016-12-15 | Maicom Quarz Gmbh | Partikelförmiges Material, Verfahren zu dessen Herstellung und Verwendung des Materials |
US10882777B2 (en) | 2017-03-16 | 2021-01-05 | Corning Incorporated | Adjustable fume tube burner |
US11625625B2 (en) | 2018-12-13 | 2023-04-11 | Diveplane Corporation | Synthetic data generation in computer-based reasoning systems |
US11676069B2 (en) | 2018-12-13 | 2023-06-13 | Diveplane Corporation | Synthetic data generation using anonymity preservation in computer-based reasoning systems |
US11669769B2 (en) | 2018-12-13 | 2023-06-06 | Diveplane Corporation | Conditioned synthetic data generation in computer-based reasoning systems |
CN108648758B (zh) * | 2018-03-12 | 2020-09-01 | 北京云知声信息技术有限公司 | 医疗场景中分离无效语音的方法及系统 |
US11361231B2 (en) | 2018-11-13 | 2022-06-14 | Diveplane Corporation | Explainable and automated decisions in computer-based reasoning systems |
US11763176B1 (en) | 2019-05-16 | 2023-09-19 | Diveplane Corporation | Search and query in computer-based reasoning systems |
US20220098084A1 (en) * | 2020-05-20 | 2022-03-31 | Corning Incorporated | Methods for increasing deposition in a flame hydrolysis deposition process |
CN112503524A (zh) * | 2020-12-17 | 2021-03-16 | 华中科技大学 | 一种火焰合成纳米颗粒的燃烧器 |
Family Cites Families (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3773483A (en) * | 1970-05-06 | 1973-11-20 | Fiberglas Canada Ltd | Process for fibre drawing by fluid means |
US4060355A (en) * | 1972-08-02 | 1977-11-29 | Firma Vki-Rheinhold & Mahla Ag | Device for the manufacture of fibers from fusible materials |
US3812854A (en) * | 1972-10-20 | 1974-05-28 | A Michaels | Ultrasonic nebulizer |
US3811850A (en) * | 1972-12-29 | 1974-05-21 | Monsanto Co | High speed production of filaments from low viscosity melts |
US3808056A (en) * | 1973-02-22 | 1974-04-30 | Minnesota Mining & Mfg | Burner means for thermoelectric generator |
US3861852A (en) * | 1974-01-25 | 1975-01-21 | Berger Harvey | Fuel burner with improved ultrasonic atomizer |
US4003692A (en) * | 1975-08-06 | 1977-01-18 | Eclipse, Inc. | High velocity burner |
US4200670A (en) * | 1977-09-21 | 1980-04-29 | Libbey-Owens-Ford Company | Stacking glass sheets |
JPS54142317A (en) * | 1978-04-24 | 1979-11-06 | Hitachi Ltd | Production of optical fibers |
CA1166527A (en) * | 1979-09-26 | 1984-05-01 | Shiro Takahashi | Method and apparatus for producing multi-component glass fiber preform |
US4468241A (en) * | 1982-09-29 | 1984-08-28 | Breidenthal Jr Robert E | Method and apparatus for fiberizing meltable materials |
US4601814A (en) * | 1983-05-27 | 1986-07-22 | Total Engineering And Research Company | Method and apparatus for cracking residual oils |
FR2550185B1 (fr) * | 1983-08-05 | 1986-06-20 | Saint Gobain Vitrage | Trempe de volumes de verre par jet diphasique |
US4778516A (en) * | 1986-11-03 | 1988-10-18 | Gte Laboratories Incorporated | Process to increase yield of fines in gas atomized metal powder |
US5124091A (en) * | 1989-04-10 | 1992-06-23 | Gte Products Corporation | Process for producing fine powders by hot substrate microatomization |
CN1128111C (zh) * | 1995-12-19 | 2003-11-19 | 康宁股份有限公司 | 在制造二氧化硅时抑制硅氧烷原料凝胶化的方法 |
US6312656B1 (en) * | 1995-12-19 | 2001-11-06 | Corning Incorporated | Method for forming silica by combustion of liquid reactants using oxygen |
WO1998001228A2 (en) * | 1996-07-08 | 1998-01-15 | Corning Incorporated | Rayleigh-breakup atomizing devices and methods of making rayleigh-breakup atomizing devices |
DE19725955C1 (de) * | 1997-06-19 | 1999-01-21 | Heraeus Quarzglas | Verfahren zur Herstellung eines Quarzglasrohlings und dafür geeignete Vorrichtung |
US5979185A (en) * | 1997-07-16 | 1999-11-09 | Corning Incorporated | Method and apparatus for forming silica by combustion of liquid reactants using a heater |
AU751971B2 (en) * | 1997-12-19 | 2002-09-05 | Corning Incorporated | Method for producing metal oxide soot |
US6360562B1 (en) * | 1998-02-24 | 2002-03-26 | Superior Micropowders Llc | Methods for producing glass powders |
US6546757B1 (en) * | 1998-07-28 | 2003-04-15 | Brown University Research Foundation | Liquid spray pyrolysis method for the fabrication of optical fiber preforms, with reactant mixing |
US6260385B1 (en) * | 1998-08-07 | 2001-07-17 | Corning Incorporated | Method and burner for forming silica-containing soot |
US6672106B1 (en) * | 1998-08-07 | 2004-01-06 | Corning Incorporated | Method and apparatus for forming soot for the manufacture of glass |
FI116469B (fi) * | 1998-10-05 | 2005-11-30 | Liekki Oy | Liekkiruiskutusmenetelmä ja -laitteisto monikomponenttilasin valmistamiseksi |
US6363746B1 (en) * | 2000-03-15 | 2002-04-02 | Corning Incorporated | Method and apparatus for making multi-component glass soot |
EP1306354B1 (en) * | 2000-07-31 | 2011-03-16 | Shin-Etsu Quartz Products Co., Ltd. | Mandrel for producing quartz glass and optical fiber matrix using the mandrel, optical fiber, production method for quartz glass element |
FI111939B (fi) * | 2000-12-05 | 2003-10-15 | Liekki Oy | Menetelmä ja laitteisto lasipinnoitteen valmistamiseksi |
US7003984B2 (en) * | 2001-04-30 | 2006-02-28 | Verrillon, Inc. | Hybrid manufacturing process for optical fibers |
FI115134B (fi) * | 2002-06-28 | 2005-03-15 | Liekki Oy | Menetelmä seostetun lasimateriaalin valmistamiseksi |
KR100507622B1 (ko) * | 2002-10-17 | 2005-08-10 | 엘에스전선 주식회사 | 외부기상증착법을 이용한 광섬유 프리폼의 제조방법 및 장치 |
US7963458B2 (en) * | 2006-01-23 | 2011-06-21 | Kimberly-Clark Worldwide, Inc. | Ultrasonic liquid delivery device |
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2004
- 2004-07-02 FI FI20045264A patent/FI116619B/fi active IP Right Grant
- 2004-07-07 US US10/885,410 patent/US20060001952A1/en not_active Abandoned
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2005
- 2005-06-23 WO PCT/FI2005/050239 patent/WO2006003253A1/en active Application Filing
- 2005-06-23 DK DK05757928.6T patent/DK1778597T3/da active
- 2005-06-23 JP JP2007518629A patent/JP5107035B2/ja active Active
- 2005-06-23 KR KR1020077002314A patent/KR101224509B1/ko active IP Right Grant
- 2005-06-23 CN CNA2005800225979A patent/CN1984851A/zh active Pending
- 2005-06-23 CA CA2613576A patent/CA2613576C/en active Active
- 2005-06-23 EP EP05757928.6A patent/EP1778597B1/en active Active
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Also Published As
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US20060001952A1 (en) | 2006-01-05 |
FI20045264A0 (fi) | 2004-07-02 |
EP1778597A1 (en) | 2007-05-02 |
CA2613576A1 (en) | 2006-01-12 |
DK1778597T3 (da) | 2014-01-13 |
IL180372A0 (en) | 2007-06-03 |
KR101224509B1 (ko) | 2013-01-22 |
EP1778597B1 (en) | 2013-10-09 |
CN1984851A (zh) | 2007-06-20 |
CA2613576C (en) | 2014-03-18 |
KR20070057138A (ko) | 2007-06-04 |
JP2008504207A (ja) | 2008-02-14 |
FI116619B (fi) | 2006-01-13 |
IL180372A (en) | 2014-02-27 |
WO2006003253A1 (en) | 2006-01-12 |
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