JP5100127B2 - レ−ザー光照射装置 - Google Patents

レ−ザー光照射装置 Download PDF

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Publication number
JP5100127B2
JP5100127B2 JP2007003072A JP2007003072A JP5100127B2 JP 5100127 B2 JP5100127 B2 JP 5100127B2 JP 2007003072 A JP2007003072 A JP 2007003072A JP 2007003072 A JP2007003072 A JP 2007003072A JP 5100127 B2 JP5100127 B2 JP 5100127B2
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Japan
Prior art keywords
laser
lens
optical system
correction lens
beam expander
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Expired - Fee Related
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JP2007003072A
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Japanese (ja)
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JP2007214554A (ja
JP2007214554A5 (enExample
Inventor
幸一郎 田中
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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Priority to JP2007003072A priority Critical patent/JP5100127B2/ja
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Publication of JP2007214554A5 publication Critical patent/JP2007214554A5/ja
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JP2007003072A 2006-01-12 2007-01-11 レ−ザー光照射装置 Expired - Fee Related JP5100127B2 (ja)

Priority Applications (1)

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JP2007003072A JP5100127B2 (ja) 2006-01-12 2007-01-11 レ−ザー光照射装置

Applications Claiming Priority (3)

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JP2006005210 2006-01-12
JP2006005210 2006-01-12
JP2007003072A JP5100127B2 (ja) 2006-01-12 2007-01-11 レ−ザー光照射装置

Publications (3)

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JP2007214554A JP2007214554A (ja) 2007-08-23
JP2007214554A5 JP2007214554A5 (enExample) 2010-02-18
JP5100127B2 true JP5100127B2 (ja) 2012-12-19

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JP2007003072A Expired - Fee Related JP5100127B2 (ja) 2006-01-12 2007-01-11 レ−ザー光照射装置

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008098621A (ja) * 2006-09-14 2008-04-24 Semiconductor Energy Lab Co Ltd レーザ光照射装置およびレーザ光照射方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6848337B2 (ja) * 2016-10-25 2021-03-24 株式会社リコー レーザ装置、点火装置、及び内燃機関
WO2024018785A1 (ja) * 2022-07-19 2024-01-25 住友重機械工業株式会社 ビーム調整装置、レーザアニール装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11162868A (ja) * 1997-12-02 1999-06-18 Toshiba Corp レ−ザ照射装置
JP2003053578A (ja) * 2001-08-15 2003-02-26 Sumitomo Heavy Ind Ltd レーザビームのプロファイル調整方法及び装置
DE10144244A1 (de) * 2001-09-05 2003-03-20 Zeiss Carl Zoom-System, insbesondere für eine Beleuchtungseinrichtung
JP4610201B2 (ja) * 2004-01-30 2011-01-12 住友重機械工業株式会社 レーザ照射装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008098621A (ja) * 2006-09-14 2008-04-24 Semiconductor Energy Lab Co Ltd レーザ光照射装置およびレーザ光照射方法

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JP2007214554A (ja) 2007-08-23

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